激光分子束外延法制备AlN/Si异质结的电学性质

采用激光分子束外延法在Si(111)衬底上制备出沿c轴取向的AlN薄膜,在此基础上制备了Au/AlN/Si金属-绝缘体-半导体(MIS)结构。研究了结构的电流传输机制、AlN/Si界面处的界面态密度值及分布情况。结果表明:AlN/Si异质结具有很好的整流特性,电流传输符合空间电荷限制传输机制,理想因子为2.88;结构的界面态密度约为1.1×10~(12) eV~(-1)·cm~(-2),主要分布在距离Si衬底价带顶0.26eV附近,由生长过程中引入的O杂质、N空位/N替代和Si原子代替N原子形成的Al-Si键组成。     

Ni-Au/AlN/Si器件的深能级瞬态谱研究

对GaN器件制备过程中AlN缓冲层相关的电活性缺陷进行了C-V和深能级瞬态谱(DLTS)研究。C-V研究结果表明,制备态Ni-Au/AlN/Si MIS器件中,靠近AlN/Si界面处的掺杂浓度为4.4×10¹⁷cm-3,明显高于Si衬底的1.4×10¹⁶cm-3,意味着制备态样品中Al原子已经向衬底硅中扩散。采用退火工艺研究了GaN器件制备过程中的热影响以及热处理前后电活性缺陷在硅衬底中的演变情况,发现退火处理后,Al原子进一步向衬底硅中更深处扩散,扩散深度由制备态的500nm左右深入到1μm附近。DLTS研究结果发现,在Si衬底中与Al原子扩散相关的缺陷为Al-O配合物点缺陷。DLTS脉冲时间扫描表明,相比于制备态样品,退火态样品中出现了部分空穴俘获时间常数更大的缺陷,退火处理造成了点缺陷聚集,缺陷类型由点缺陷逐渐向扩展态缺陷发展。     

硅基AlN薄膜制备技术与测试分析

采用直流磁控反应溅射法,在Si(100),Al/Si(100)和Pt/Ti/Si(100)等多种衬底上制备了用于MEMS器件的AlN薄膜．用XRD和AES对薄膜的结构和组分进行了分析,通过优化工艺参数,得到了提高薄膜择优取向的方法,并分析了不同衬底上AlN晶粒生长的有关机理．制备的AlN薄膜显示出良好的〈002〉择优取向性,摇摆曲线的半高宽达到5.6°．     

CeO2高K栅介质薄膜的制备工艺及其电学性质

研究了CeO2作为高K(高介电常数)栅介质薄膜的制备工艺,深入分析了衬底温度、淀积速率、氧分压等工艺条件和利用N离子轰击氮化Si衬底表面工艺对CeO2薄膜的生长及其与Si界面结构特征的影响,利用脉冲激光淀积方法在Si(100)衬底生长了具有(100)和(111)取向的CeO2外延薄膜;研究了N离子轰击氮化Si衬底表面处理工艺对Pt/CeO2/Si结构电学性质的影响.研究结果显示,利用N离子轰击氮化Si表面/界面工艺不仅影响CeO2薄膜的生长结构,还可以改善CeO2与Si界面的电学性质.     

不同温度退火的HfTiON栅介质MOS电容电特性研究

在N2/O2气氛中,使用Ti、Hf靶共反应溅射在衬底Si上淀积一种新型栅介质材料HfTiON,随后分别在N2气氛中600°C和800°C退火2min。电容电压(C-V)特性和栅极漏电流特性测试结果表明,800°C快速热退火(RTA)样品表现出更低的界面态密度、更低的氧化物电荷密度和更好的器件可靠性,这是由于在800°C下的RTA能有效地消除溅射生长过程中导致的损伤,形成高质量、高可靠性的介质/Si界面。     

CeO_2高K栅介质薄膜的制备工艺及其电学性质

研究了 Ce O2 作为高 K (高介电常数 )栅介质薄膜的制备工艺 ,深入分析了衬底温度、淀积速率、氧分压等工艺条件和利用 N离子轰击氮化 Si衬底表面工艺对 Ce O2 薄膜的生长及其与 Si界面结构特征的影响 ,利用脉冲激光淀积方法在 Si(10 0 )衬底生长了具有 (10 0 )和 (111)取向的 Ce O2 外延薄膜 ;研究了 N离子轰击氮化 Si衬底表面处理工艺对 Pt/ Ce O2 / Si结构电学性质的影响 .研究结果显示 ,利用 N离子轰击氮化 Si表面 /界面工艺不仅影响 Ce O2 薄膜的生长结构 ,还可以改善 Ce O2 与 Si界面的电学性质     

HfO_2高k栅介质漏电流机制和SILC效应

利用室温下反应磁控溅射的方法在 p- Si(1 0 0 )衬底上制备了 Hf O2 栅介质层 ,研究了 Hf O2 高 k栅介质的电流传输机制和应力引起泄漏电流 (SIL C)效应 .对 Hf O2 栅介质泄漏电流输运机制的分析表明 ,在电子由衬底注入的情况下 ,泄漏电流主要由 Schottky发射机制引起 ,而在电子由栅注入的情况下 ,泄漏电流由 Schottky发射和 Frenkel-Poole发射两种机制共同引起 .通过对 SIL C的分析 ,在没有加应力前 Hf O2 / Si界面层存在较少的界面陷阱 ,而加上负的栅压应力后在界面处会产生新的界面陷阱 ,随着新产生界面陷阱的增多 ,这时在衬底注入的情况下 ,电流传     

Si(111)和Si(100)衬底上磁控反应溅射制备AlN薄膜

采用射频磁控反应溅射法在Si(111)和Si(100)两种衬底上制备了AlN薄膜,用X射线衍射(XRD)对AlN薄膜进行了表征,研究了衬底Si(111)、Si(100)取向以及N2百分比对AlN(002)薄膜c-轴择优取向的影响。实验结果表明,Si(100)较适合生长c-轴择优取向AlN薄膜,而且N2百分比为40%时,AlN薄膜的c-轴取向最好,具有尖锐的XRD峰,此时对应于AlN(002)晶向。计算了(002)取向AlN和两种Si衬底的失配度,Si(111)面与AlN(002)面可归结为正三角形晶系之间的匹配,失配度为23.5%;而Si(100)面与AlN(002)面可归结为正方形晶系与正三角形晶系之间的匹配,失配度为0.8%,可以认为完全共格。理论分析和实验结果相符。     

HfO2高k栅介质漏电流机制和SILC效应

利用室温下反应磁控溅射的方法在p-Si(100)衬底上制备了HfO2栅介质层,研究了HfO2高k栅介质的电流传输机制和应力引起泄漏电流(SILC)效应.对HfO2栅介质泄漏电流输运机制的分析表明,在电子由衬底注入的情况下,泄漏电流主要由Schottky发射机制引起,而在电子由栅注入的情况下,泄漏电流由Schottky发射和Frenkel-Poole发射两种机制共同引起.通过对SILC的分析,在没有加应力前HfO2/Si界面层存在较少的界面陷阱,而加上负的栅压应力后在界面处会产生新的界面陷阱,随着新产生界面陷阱的增多,这时在衬底注入的情况下,电流传输机制就不仅仅是由Schottky发射机制引起,而存在Frenkel-Poole发射机制起作用.同时研究表明面积对SILC效应的影响很小.     

硅基AlN薄膜制备技术与测试分析

采用直流磁控反应溅射法,在Si(100),Al/Si(100)和Pt/Ti/Si(100)等多种衬底上制备了用于MEMS器件的AlN薄膜.用XRD和AES对薄膜的结构和组分进行了分析,通过优化工艺参数,得到了提高薄膜择优取向的方法,并分析了不同衬底上AlN晶粒生长的有关机理.制备的AlN薄膜显示出良好的〈002〉择优取向性,摇摆曲线的半高宽达到5.6°.     

聚对苯撑苯并双(口恶)唑发光及其器件制备

采用光谱技术,研究了聚对苯撑苯并双(口恶)唑(PBO)溶液的光敏发光特性,并用相对法估算出溶液发光效率在50%范围.结合光谱技术、半导体电学和电化学等研究手段,具体研究了以PBO为发光层的单层电致发光器件,研究结果显示,电致发光与薄膜的光致发光有具有相同的发光中心,峰值位于510 nm左右.同时发现,由于存制备过程中不同处理条件使得不同厚度薄膜残留的掺杂物质浓度不同,从而引起薄膜的导电性的不同.使得器件的阈值场强随PBO厚度的减小而逐渐增加.     

系统级封装新型埋入式电源滤波结构的研究

在高密度小尺寸的系统级封装(SiP)中,对供电系统的完整性要求越来越高,多芯片共用一个电源网路所产生的电压抖动除了会影响到芯片的正常工作,还会通过供电网路干扰到临近电路和其他敏感电路,导致芯片误动作,以及信号完整性和其他电磁干扰问题.这种电压抖动所占频带相当宽,几百MHz到几个GHz的中频电源噪声普通方法很难去除.结合埋入式电容和电源分割方法的特点,提出一种新型高性能埋入式电源低通滤波结构直接替代电源/地平面.研究表明,在0.65～4GHz的频带内隔离深度可达-40～75 dB,电源阻抗均在0.25ohm以下,实现了宽频高隔离度的高性能滤波作用.分别用电磁场和广义传输线两种仿真器模拟,高频等效电路模型分析这种低通滤波器的工作原理以及结构对隔离性能的影响,并进行了实验验证.     

Emerging interconnects: a state-of-the-art review and emerging solutions

Aluminium was a primary material for interconnection in integrated circuits (ICs) since their inception. Later, copper was introduced as interconnect material which has better metallic conductivity and resistance to electromigration. As the aggressive technology scaling continues, the copper resistivity increased because of size effects, which causes increase in delay, power dissipation and electromigration. The need to reduce the resistor-capacitor??????? delay, dynamic power utilisation and the crosstalk commotion is as of now the fundamental main impetus behind the presentation of new materials. The purpose of this paper is to do a survey of interconnect material used in IC from introduction of ICs to till date. This paper studies and reviews new materials available for interconnect application which are optical interconnects, carbon nanotube (CNT), graphene nanoribbons (GNRs) and silicon nanowires which are alternatives to copper. While doing a survey of interconnect material, it is found that multiwalled CNTs, multilayer GNR and mixed CNT bundles are promising candidates and are ultimate choice that can strongly address the problems faced by copper but on integration basis copper would last for coming years.     

Arsenic deposition as a precursor layer on silicon (211) and (311) surfaces

We investigate the properties of arsenic (As) covered Si(211) and Si(311) surfaces by analyzing data from x-ray photoelectron spectroscopy (XPS) and low-energy electron diffraction (LEED) images. We then create a model using total surface energy calculations. It was found that both Si(211) and Si(311) had 0.68±0.08 surface As coverage. Si(211) had 0.28±0.04 Te coverage and Si(311) had 0.24±0.04 Te coverage. The Si(211) surface replaces the terrace and trench Si atoms with As for a lower surface energy, while the Si edge atoms form dimers. The Si(311) surface replaces all terrace atoms and adsorbs an As dimer every other edge site. These configurations imply an improvement in the mean migration path from the bare silicon surface by allowing the impinging atoms for the next epitaxial layer, tellurium (Te), to bind at every other pair of edge atoms, and not the step terrace sites. This would ensure a nonpolar, B-face growth.     

光子晶体微腔发光二极管

光子晶体微腔因其具有增强自发辐射、定向输出和单模工作的能力而受到广泛关注。介绍了光子晶体微腔发光二极管的基本原理、设计、特性、制作及其典型器件。     

Comparative study of maximum power point tracking techniques for hybrid renewable energy system

The power generation demand is increasing day-by-day throughout the world, therefore, the use of hybrid systems becomes a significant solution. The hybrid renewable energy system (HRES) is used for delivering power in various regions in order to overcome intermittence of wind and solar resources. Because of increasing environmental problems, for example, greenhouse gas emission and energy cost have interested novel research into substitute methods in favour of electrical power generation. Maximum Power Point Tracking (MPPT) control method is a vast deal of novel research used for enhancing the efficiency of HRES. The authors have revealed that the hybrid techniques i.e. Global MPPT, fuzzy-neuro systems, Adaptive Neuro-Fuzzy Inference System (ANFIS), Perturbed and Observe (P&O) + Adaptive Neural Network (ANN) etc. can provide best results as compared to other MPPT control methods. This paper offering a state of art review of MPPT control techniques for HRES.     

用于单光子TOF测量的时间-幅度变换器

基于新型共源共栅电流源的积分方法,设计了一种用于单光子飞行时间(TOF)测量的时间-幅度变换器(TAC).该方法有效简化了 TAC电路结构,减小了 TAC占用面积,显著提高了TOF的满量程范围(FSR).采用0.18 μm标准CMOS工艺设计.集成TAC的单光子探测器像素单元的填充因子可达到26.8％.后仿真结果表明,...     

超宽带脉冲信号的光学生成方法研究

近年来超宽带(UWB)通信技术迅猛发展,在测量、雷达技术、民用和军事无线通信中有着重要的应用,UWB-over-fiber技术已经成为目前研究的热点,其中就包括UWB脉冲信号的产生方法。区别于传统的电子学方法,光子学产生方法不受电子瓶颈制约,可以实现很高的带宽,并且具有抗电磁干扰、重量轻、结构紧凑的优点。通过对比国内外本领域研究成果,讨论及总结了以下三种原理的UWB脉冲信号的光学生成方法:1)相位调制-强度调制转换(PM-IM);2)半导体光放大器(SOA)的非线性效应;3)频谱塑形和色散所致频域-时域映射,然后对各种方案进行了对比分析。     

Joint estimation of TOA and DOA in IR-UWB system using a successive propagator method

Impulse radio ultra-wideband (IR-UWB) ranging and positioning require accurate estimation of time-of-arrival (TOA) and direction-of-arrival (DOA). With receiver of two antennas, both of the TOA and DOA parameters can be estimated via two-dimensional (2D) propagator method (PM), in which the 2D spectral peak searching, however, renders much higher computational complexity. This paper proposes a successive PM algorithm for joint TOA and DOA estimation in IR-UWB system to avoid 2D spectral peak searching. The proposed algorithm firstly gets the initial TOA estimates in the two antennas from the propagation matrix, then utilises successively one-dimensional (1D) local searches to achieve the estimation of TOAs in the two antennas, and finally obtains the DOA estimates via the difference in the TOAs between the two antennas. The proposed algorithm, which only requires 1D local searches, can avoid the high computational cost in 2D-PM algorithm. Furthermore, the proposed algorithm can obtain automatically paired parameters and has better joint TOA and DOA estimation performance than conventional PM algorithm, estimation of signal parameters via rotational invariance techniques algorithm and matrix pencil algorithm. Meanwhile, it has very close parameter estimation to that of 2D-PM algorithm. We have also derived the mean square error of TOA and DOA estimation of the proposed algorithm and the Cramer-Rao bound of TOA and DOA estimation in this paper. The simulation results verify the usefulness of the proposed algorithm.     

多孔硅发光机制的分析

从量子力学的基本理论出发讨论了量子限制效应，推导出多孔硅有效禁带宽度增量并用量子限制效应和表面态及其物质在发光中作用的理论解释了ＰＳ光致发光的实验现象。