多质量块宽频压电能量收集器

为了提高压电能量收集器的工作频带宽度、降低其固有频率并提高收集效率,设计了一种多质量块宽频压电能量收集器。建立多质量块压电悬臂梁的理论模型,分析质量块位置对输出功率的影响;有限元分析质量块数量对输出电压和固有频率的影响;搭建试验台,对多质量块宽频压电能量收集器进行测试。实验测得:随着悬臂梁自由端质量块数量的增加其一阶固有频率由62 Hz降至28 Hz,工作频带宽度增加39.3%,输出功率由17mW增加至31mW,且整流后得到的功率是桥式整流电路的1.31倍。实验结果表明,随着质量块数量的增加,压电悬臂梁的一阶固有频率降低,频宽增大,输出功率增加,且新的能量收集电路的转换效率比桥式整流电路高。     

自适应宽频振动压电电磁复合发电系统分析

为提高微型环境振动能量收集微电源能量转换效率,采用一对磁极产生的磁力自动调节拾振系统刚度,实现系统固有频率与环境振动频率相匹配的自适应压电电磁复合宽频发电系统,同时增强电磁发电系统磁力线密度。该文研究了系统磁力对压电悬臂梁刚度的影响因素,确立自适应宽频系统的理论模型。压电电磁宽频发电数值计算结果表明,未施加磁力调节时,环境振动频率偏离系统固有频率47Hz时输出功率急剧降低;施加自适应磁力调节后,发电系统可调固有频率范围为42~51Hz,最大输出功率范围6~10mW,拓宽拾振频带。     

面向负载功率的压电悬臂梁研究

基于电路负载阻抗匹配原理,为最大程度利用压电悬臂梁发电装置收集环境振动能量,保证压电悬臂梁外接负载能够正常工作,需要研究压电悬臂梁结构参数对其最佳输出功率以及相对应外接负载匹配阻值的影响。该文通过压电电路分析,研究了基板和压电陶瓷片的长度、厚度、宽度和质量块质量对压电悬臂梁最佳输出功率以及相对应负载匹配阻值的影响。结果表明,一定范围内,增加基板长度、压电陶瓷片厚度、质量块质量可以增加压电悬臂梁外接负载匹配阻值,增加基板厚度、压电陶瓷片长和宽可降低压电悬臂梁外接负载匹配阻值;随着基板长度、压电陶瓷片宽和长、质量块质量的增加,压电悬臂梁最佳输出功率得到显著提高,基板宽度对压电悬臂梁最佳输出功率基本无影响,增加压电陶瓷片的厚度,压电悬臂梁最佳输出功率先增加后降低,存在一个最佳输出功率。     

一种“回”字形多方向压电能量收集方法

该文介绍了一种“回”字形的多方向微型压电振动能量收集装置,其由尺寸为34 mm×2 mm×1 mm的正方形边框包围,内部结构包含4个非对称的组合悬臂梁,主悬臂梁固定于边框内壁,并与z 方向垂直,次悬臂梁连接在主悬臂梁的末端质量块上。首先建立基础激励条件下组合悬臂梁振动系统的动力学模型。然后,通过有限元仿真分析对比了不同刚度和质量对位移幅值的影响,验证了组合悬臂梁系统的振动特性,并确定了最佳结构参数值:当主、次悬臂梁厚度均为0.3 mm,主、次质量块的最佳惯性质量分别为619.32 g、342.3 g。经仿真计算得到z 方向可输出电能功率为3.138 5 mW,x、y 方向可输出功率均为0.720 5 mW。最后搭建微型能量收集器实验平台,在实际测试中z 方向的输出功率为2.85 mW,x、y 方向的输出功率均为0.57 mW。     

一种直角螺旋悬臂梁结构的压电能量收集器

提出了一种2π弧度的直角螺旋悬臂梁结构的压电能量收集器。该设计一方面可以降低谐振频率,另一方面可以提高单位体积的能量收集效率。悬臂梁整体结构厚度为2 mm,宽度为6 mm,整体尺寸大小为22 mm×26 mm。当施加的激励为0.1g加速度时,仿真输出电压为1.95 V,测量输出电压为1.8 V,相对电压误差为7.7%;仿真谐振频率为269 Hz,测量谐振频率为265 Hz,相对频率误差为1.5%;理论输出功率为7.04μW,测试输出功率最大为5.79μW,相对功率误差为17.8%。该压电能量收集器适用于便携式微电子系统。     

质量块位置对压电悬臂梁发电性能影响分析

利用ANSYS有限元仿真软件,建立压电悬臂梁发电振子的ANSYS模型,并进行了模态分析和谐响应分析。当加速度为0.015 m/s2,质量块在不同位置时,仿真分析了压电悬臂梁发电振子输出的开路电压随频率的变化。由仿真结果可知,当质量块距离夹持端75 mm时,压电悬臂梁发电振子输出的开路电压有效值最大可达19.3 V。搭建试验台,研究了质量块在不同位置时压电悬臂梁发电振子的输出特性。实验结果表明,当质量块距离夹持端77 mm时,在加速度一阶谐振频率下,压电悬臂梁发电振子输出的开路电压有效值最大可达17.8 V。在经全桥整流电路接阻容电路,电阻为1.3 MΩ时,电阻上获得最大瞬时功率为55 μW。研究结果表明,带质量块的压电悬臂梁发电振子振动能量发电梁中的质量块存在一个最佳位置,使装置开路电压和输出功率最大。     

一种螺旋悬臂梁结构压电能量收集器

提出了一种螺旋悬臂梁结构的可植入式压电能量收集器,这种结构的能量收集器可为植入式医疗器件供电。螺旋结构的设计一方面可以使悬臂梁从多个方向的振动中吸收能量,另一方面还可以降低谐振频率。提出的悬臂梁整体结构厚度为40 μm,宽度为1 mm,整体外部大小为 9 mm×9 mm。该结构中,悬臂梁的末端附上质量块,进一步降低悬臂梁的谐振频率。该收集器的谐振频率为66 Hz,当施加的激励为1g加速度时,输出开路电压为2.2 V,输出功率为4.8 μW。     

基于模态分离技术的3×n阵列式低频宽带压电振动发电机的设计研究

针对传统压电发电机固有频率单一,频率采集范围窄和能量采集效率低等缺陷,且无法满足当前无线传感器在特殊工作环境中所需的宽频带和大功率输出.本文基于模态分离技术提出了一种3×n阵列式压电发电结构,并利用COMSOL有限元仿真软件对其进行仿真分析,优化参数后3×5阵列式采集系统在低于50Hz的频率范围内带宽为15.6Hz.实验测试结果发现3×5阵列式发电机的带宽拓宽至13.8Hz;同时在11Hz的共振频率下,最优负载电阻值为350kΩ时,可获得的最大输出功率为2.12mW;最后测试其半功率（1.05mW）带宽达15.3Hz.本文所提出的模态分离技术使阵列采集系统的带宽明显提高且输出功率增大,这个优异的输出性能使得其在多源、宽频振动环境中具有明显的优势.     

拨动式上变频压电俘能器的设计与研究

该文提出了一种基于弹簧振动平台的上变频压电俘能器,解决了低频振动能量收集效率低的问题。分析了压电悬臂梁输出功率与激励频率的三次方正相关,解释了采用上变频收集低频振动能量的原因。应用赫兹接触理论分析了拨片与压电悬臂梁的接触力,建立了拨动式激励的压电俘能器机电耦合模型。在综合考虑重叠长度和拨片厚度等影响因素后,选取厚度0.1 mm矩形不锈钢拨片。实验表明,在1g(g=9.8 m/s²)、5.67 Hz的激励信号下,单拨动式上变频V25W型压电悬臂梁输出功率可达9.6 mW,具有很强的低频能量收集性能。     

一种冲击式悬臂梁压电俘能器的设计与实验

为提高悬臂梁压电俘能器的俘能效率,提出了一种冲击式悬臂梁压电俘能器。该俘能器包括多个悬臂梁压电振子,可在风力、人体动力能及环境振动能等多种外载荷作用下产生电能。俘能器的核心部件是悬臂梁压电振子,通过冲击实验发现悬臂梁压电振子在周期性冲击载荷作用下拓宽了共振频率,同时提高了输出功率。测试结果显示在频率约为21Hz的方波冲击信号下,外接电阻为50kΩ时,单个悬臂压电俘能器最大输出功率可达0.28mW;当频率分别为5Hz、8.5Hz时,还可分别输出0.07mW和0.17mW的功率,俘能器出现多个峰值电功率。研究表明所设计的冲击式压电俘能器可有效提高俘能效率。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.