用于近场光刻的表面等离子体透镜的优化设计和加工

表面等离子体透镜(PL)具有优异的光聚束效应,能够形成突破衍射极限的近场光斑,具有广泛的应用前景.为了获得较小的近场光斑,需要选用较短波长的激光入射.选用355 nm径向偏振光作为入射条件,使用COMSOL多物理场耦合仿真软件优化了同心圆环沟槽型PL的结构参数.结果显示,当圆环沟槽半径与槽间距都与表面等离子激元(SPPs)波的波长相等,且增加同心圆环槽数时,SPPs波在PL中心能形成相长干涉,可以获得较大的光增强效应;随着金属膜厚和槽宽的增加,中心处光强先增大后减小,存在最优值.使用聚焦离子束(FIB)加工制备了所设计的PL结构,加工结果具有较好的尺寸精度,但沟槽截面存在一定的锥度.进一步的仿真结果表明,沟槽横截面的小锥度对PL的聚束效应和光增强效应影响较小.     

Microstructural characterization of a carbonitrided heat resisting alloy using focused ion beam-based techniques

Abstract

An austenitic Fe–25Cr–20Ni (wt.%) alloy was first nitrided in N₂–H₂ then carburised at 1000°C. The nitridation produced lamellar internal precipitates of Cr₂N which grew by discontinuous precipitation at a recrystallised austenite boundary formed at the precipitation front. Subsequent carburisation converted the Cr₂N to a mixture of chromium-rich M₇C₃+CrN, and released nitrogen into the austenite matrix. The submicron CrN precipitates were stabilized by a matrix supersaturated with nitrogen and exhibited a strong orientation relationship with the surrounding austenite. The rejected nitrogen diffused deeper into the alloy to form new, more finely spaced Cr₂N lamellae. Carbon diffusion overtook the nitride structure and precipitated finely spaced, lamellar M₂₃C₆ by a discontinuous precipitation process. This process is available to the carbides only when a prior boundary is present. This phenomenon, and the ability of nitridation to form a boundary and the inability of carburisation to do so, are interpreted using the energetics of nucleation.     

聚焦离子束加工单晶体金刚石刀具实验研究

作为超精密切削加工刀具的理想材料,单晶体金刚石材料的加工制造方法直接决定了刀具切削加工表面的精度和质量.由于金刚石材料具有明显的各向异性,在传统的金刚石刀具机械刃磨法中需要综合考虑制备工艺和刀具性能的协同关系,主要包括不同晶面表现出显著的物理机械性能差异、不同晶向存在显著的难磨和易磨方向等.本文针对聚焦离子束(FIB)技术加工金刚石刀具的过程中,金刚石材料性质对聚焦离子束加工质量、加工效率的影响规律等关键工艺开展了研究.研究发现,与传统的机械刃磨法相比,聚焦离子束加工是基于高能离子束的轰击溅射实现材料的去除,聚焦离子束加工中存在的级联碰撞现象显著弱化了金刚石材料各向异性的影响.     

Focused ion beam assisted analysis of the oxidation of a NiAl coating on pure Ni

Abstract

Discs of (pure nickel 15mm diameter and 4mm thickness) have been polished to a 1 μm finish, aluminised using a standard pack CVD process to give a β-NiAl coating and then the surface of this coating polished to a 1 μm finish again. Samples have then been isothermally oxidised in a muffle furnace for 1, 2, 4, 8, 16, 32, 64, 128, 256, 512 and 1024 hours at 950°C, and subjected to surface and cross-sectional microscopy and analysis. Scales were also cross-sectioned and imaged using Focused Ion Beam Milling. The oxidation rate was determined to be 2:6×10^?13 g² cm^?4 s^?1 and for times less than 512 hours the predominant alumina phase was θ alumina. Al depletion effects were observed due to both oxidation and interdiffusion between the Ni substrate and the NiAl coating. Using these effects, it has been shown that tensile strains of up to 9% can arise and these strains readily explain the formation of intrefacial elliptical pores observed by FIB cross sectioning. FIB sectioning also indicated that different coating grains exhibit different oxide-coating interfaces which arise due to different grain orientations. The faceting of the coating-oxide interface and the development of cuboidal faceted coating structures beneath spalled oxide is thought to be due to substructure development (sub-grain development or recrystallisation) arising from the plastic strains generated by Al depletion effects.     

聚焦离子束技术制造金刚石切削刀具的研究

概述了基于聚焦离子束（Focused Ion Beam,FIB）加工技术制备金刚石切削刀具的相关研究进展,并介绍了金刚石刀具在超精密加工领域的研究背景及其制造现状。作为一种先进的微纳制造技术,聚焦离子束已在微尺度金刚石刀具制造研究中发挥了重要作用。针对金刚石刀具的刃口半径、刃形精度等核心参数,国内外相关研究者开展了聚焦离子束制造方法与工艺优化研究,实现了高质量刀具的制造,聚焦离子束加工可获得刃口半径为15～22nm的金刚石刀具制造。从微观切削基础和微纳光学元件制造两个角度,论述了聚焦离子束制造金刚石刀具的应用研究进展,介绍了其在纳米切削机理、微纳尺度光学元件制造中的应用。最后从提高FIB制造效率、应用研究拓展等角度,对该领域未来的发展进行了展望。