1.54μm APD光电探测器组件的研制及应用

主要从长波长人眼安全测距方面讨论和研究了InGaAs雪崩光电二极管的前置放大器的电路原理和参数的设计以及光电探测器组件混合集成.着重从激光测距方面的应用探讨了由InGaAs雪崩光电二极管组成的激光接收器的应用电路的选择和设计.从测距使用的角度对InGaAs雪崩光电二极管的光电特性与偏置电压的关系进行了测试,从而了解该器件与硅雪崩二极管的光电性能的差异,从而为更好的应用InGaAs雪崩光电二极管提供参考和依据.研制的InGaAs雪崩光电二极管探测器组件及接收器在激光测距机中进行了测距应用,在激光能量为7毫焦耳测距集中进行测距,初步达到了要求.     

雪崩光电二极管在激光测距机中的应用

本文根据雪崩光电二极管的噪声特性．提出了按照噪声分配原则来确定雪崩光电二极管最佳工作点的方法。对放大器，接收光路设计和雪崩管的偏压电源等问题均进行了讨论。实验表明应用APD-1型雪崩光电二扳管，使激光测距系统的测程比用pin硅光电二极管时增加一倍以上，接收灵敏度提高27～15倍。     

一种硅基雪崩光电探测器的研究

硅基雪崩光电探测器（Si-APD）性能参数的研究可以优化改进器件结构的设计,而结构设计直接影响雪崩光电探测器的光电特性。本文针对Si基雪崩光电探测器的性能参数和器件结构进行研究,提出了改善器件性能参数的工艺方法,最终设计了一种硅基雪崩光电探测器结构。     

氮化镓基雪崩光电二极管的研制

文章简单回顾了氮化镓基雪崩光电二极管的发展现状，从制作高响应率、低漏电流的雪崩器件出发，详细阐明了制作氮化镓基雪崩光电二极管的工艺过程，特别考虑了干法刻蚀带来的物理损伤以及后续的消除损伤处理。由于雪崩器件对于材料的质量具有较苛刻的要求，因此特别对材料进行了必要的筛选。通过一系列工艺上的改进，成功地制作出国内第一只氮化镓基雪崩光电二极管，器件的光敏面直径是40μm；并对其进行了光电性能测试。测试结果表明，当反向偏压是58V时，漏电流大约是1．18×10^-7A，雪崩增益是3。     

氮化镓基雪崩光电二极管的研制

文章简单回顾了氮化镓基雪崩光电二极管的发展现状，从制作高响应率、低漏电流的雪崩器件出发，详细阐明了制作氮化镓基雪崩光电二极管的工艺过程，特别考虑了干法刻蚀带来的物理损伤以及后续的消除损伤处理。由于雪崩器件对于材料的质量具有较苛刻的要求，因此特别对材料进行了必要的筛选。通过一系列工艺上的改进，成功地制作出国内第一只氮化镓基雪崩光电二极管，器件的光敏面直径是40μm；并对其进行了光电性能测试。测试结果表明，当反向偏压是58V时，漏电流大约是1．18×10-7A，雪崩增益是3。     

氮化镓基雪崩光电二极管的研制

文章简单回顾了氮化镓基雪崩光电二极管的发展现状,从制作高响应率、低漏电流的雪崩器件出发,详细阐明了制作氮化镓基雪崩光电二极管的工艺过程,特别考虑了干法刻蚀带来的物理损伤以及后续的消除损伤处理.由于雪崩器件对于材料的质量具有较苛刻的要求,因此特别对材料进行了必要的筛选.通过一系列工艺上的改进,成功地制作出国内第一只氮化镓基雪崩光电二极管,器件的光敏面直径是40μm;并对其进行了光电性能测试.测试结果表明,当反向偏压是58V时,漏电流大约是1.18×10-7 A,雪崩增益是3.     

可作光子计数的雪崩光电二极管

对于光电倍增管不适用的高灵敏度弱光探测应用，存在一种固体替代器件，即雪崩光电二极管。这种器件在半导体内产生光电倍增，而光电倍增管在真空中产生电子倍增。雪崩光电二极管具有与半导体技术有关的微型化优点。由于这种器件能对单光子计数和探测很短时间间隔，它们已在光雷达、测距仪探测器和超灵敏光谱学方面找到日益增长的应用。另外，雪崩光电二极管在光纤通讯方面正与PIN光电二极管相竞争。雪崩光电二极管如何工作与任何光电二极管，样，雪崩光电二极管中由两类半导体组成的p-n结只允许电流在一个方向流动。光电二极管由一个掺有…     

GaN基雪崩光电二极管及其研究进展

越来越多的民用与军事对高灵敏度紫外探测的需求促进了GaN基雪崩光电二极管（APD）的快速发展。雪崩光电二极管工作在高反偏电压状态,器件内部载流子在高场下发生碰撞离化,从而使探测信号产生增益。首先对GaN基雪崩光电二极管的研究进展进行了回顾,然后重点报道了器件的增益最大可达3105,介绍了本征层厚度与器件暗电流的关系,简单介绍了正在组建的基于相敏探测的交流增益测试系统,并研究了过剩噪声与调制频率之间的关系,发现在低频波段（30~2kHz）,过剩噪声呈现1/f噪声特性。最后,对盖革模式的雪崩光电二极管的研究进展及应用前景进行了简单介绍。     

雪崩光电二极管温漂特性的实验研究

对雪崩光电二极管的温漂特性即增益随温度的变化特性进行了研究,给出了其相应的漂移方程,并对温漂的补偿方法进行了探讨。实验结果对正确使用雪崩光电二极管,确保雪崩光电二极管能够稳定地工作具有重要的参考价值。     

激光对光电探测器的损伤阈值研究

本文研究了1.06μm和0.53μm激光对硅pin光电二极管以及硅雪崩光电管的永久性损伤效应,测出了损伤阈值。实验发现,光电探测器的PN结受到激光热烧伤是造成其永久性损伤的重要因素,损伤阈值的大小与激光波长、脉冲宽度以及光电探测器结构有关。     

High-frequency properties of avalanche multiplication of photocarriers in structures with negative feedback

The high-frequency characteristics of photosensitive avalanche Si-SiC structures were studied. It is shown that their high-speed operation is substantially superior to that of silicon avalanche photodiodes. A theoretical analysis of the high-frequency properties of avalanche photodiodes is carried out and analytical expressions for the gain-bandwidth product are obtained. It is shown that this product is not a universal parameter for a metal-insulator-semiconductor structure with a negative feedback, since, for high amplification factors, the effective value of the relation of the impact-ionization coefficients for different types of charge carriers in such structures turns out to be significantly different from that in avalanche photodiodes.     

Avalanche photodiodes on silicon photonics

Silicon photonics technology has drawn significant interest due to its potential for compact and high-performance photonic integrated circuits.The Ge-or Ⅲ-Ⅴ material-based avalanche photodiodes integrated on silicon photonics provide ideal high sensitivity optical receivers for telecommunication wavelengths.Herein,the last advances of monolithic and hetero-geneous avalanche photodiodes on silicon are reviewed,including different device structures and semiconductor systems.     

III-V compound semiconductor devices: Optical detectors

This article presents a review of the historical developments in optical detectors and discusses the motivations for interest in III-V semiconductors for optical-detector applications. Early device work in both depletion-mode photodiodes and avalanche photodiodes in III-V semiconductors is covered as well as the improvements that have been made in avalanche photodiode structures through work in silicon. Also, the results of ionization coefficient measurements on III-V compounds are summarized. Finally, several examples of recent avalanche photodiodes that utlilize the unique properties of heterostructures are presented.     

Dynamics of local micro-breakdown in the Geiger mode of avalanche photodiodes

Semiconductors - Mathematical modeling methods were used to study the dynamics of micro-breakdown development in structures of silicon avalanche photodiodes. The constructed model considers the...     

Silicon Geiger mode avalanche photodiodes

In this letter we present the results regarding the electrical and optical characterization of Geiger mode silicon avalanche photodiodes(GMAP) fabricated by silicon standard planar technology. Low dark count rates,negligible afterpulsing effects,good timing resolution and high quantum detection efficiency in all the visible range have been measured. The very good electro-optical performances of our photodiodes make them attractive for the fabrication of arrays with a large number of GMAP to be used both in the commercial and the scientific fields,as telecommunications and nuclear medical imaging.     

Silicon avalanche photodiodes with low multiplication noise and high-speed response

Low-noise and high-speed silicon avalanche photodiodes with low breakdown voltage are reported. The diode structure with a low-high-low impurity density profile is proposed to have low-noise characteristics. Multiplication noise and depletion layer width of several structures are compared theoretically, and effects of impurity density profile of the avalanche region are discussed. Built-in field is also provided to realize high-speed response without increasing operating voltage. Silicon avalanche photodiodes with the above mentioned structure have been fabricated with long time substrate annealing, ion implantation, and epitaxial growth. Attained performances are as follows: noise parameter k = 0.027 - 0.040, output pulse half width τ = 260 ps for a mode-locked Nd:YAG laser pulse, gain-bandwidth product up to 300 GHz at M = 400, quantum efficiency 0.55 - 0.66 at the 0.81- to 0.83-µm wavelength, and breakdown voltage about 100 V.     

A discrete model of the development and relaxation of a local microbreakdown in silicon avalanche photodiodes operating in the Geiger mode

A new discrete theoretical model of the development and relaxation of a local microbreakdown in silicon avalanche photodiodes operating in the Geiger mode is developed. It is shown that the spreading resistance in the substrate profoundly affects both the amplitude of a single-photon electrical pulse and the possibility of attaining the steady-state form of the avalanche breakdown excluding the Geiger mode of the photodiode’s operation. The model is employed to interpret the experimental data obtained using test single-photon cells of avalanche photodiodes fabricated on the basis of the 0.25-μm silicon technology with the use of deep implantation to form the region of avalanche multiplication for the charge carriers. Excellent functional properties of the studied type of the single-photon (Geiger) cell are noted. A typical amplitude characteristic of the cell for optical radiation with the wavelength λ = 0.56 μm in the irradiance range of 10^?3–10² lx is presented; this characteristic indicates that the quantum efficiency of photoconversion is extremely high.     

基于APD的气体拉曼单光子探测器设计

根据拉曼散射光的特点,选用一种由硅雪崩光电二极管（APD）组成的多像素倍增器件作为光电转换器,设计了一套单光子探测器。为降低探测过程的噪声,探测器部分设计有低纹波偏压、恒温控制和快速雪崩抑制模块,并配有用于雪崩特性研究的测试模块,并通过调整电路参数优化探测性能。测试结果表明：探测器具有响应灵敏度高、分析速度快、体积小巧、功耗低等特点,适合在气体拉曼分析系统中使用。     

InGaAs/InP盖革模式雪崩焦平面阵列的研制

设计制作了一种由InGaAs/InP雪崩光电二极管阵列与时间计数型CMOS读出电路组成的8×8阵列规格盖革模式雪崩焦平面阵列(GM APD FPA).雪崩光电二极管采用SAGCM结构,在盖革模式下工作具有单光子探测灵敏度;时间计数型CMOS读出电路在每个单元获取光子飞行时间,实现纳秒级的时间分辨率,并完成雪崩淬灭功能.测试结果表明,倒装混合集成的GM APD FPA器件暗计数率(DCR)均值为32.5 kHz,单光子探测效率(PDE)均值为19.5％,单元时间抖动为465 ps,实现了光脉冲时间信息的探测,验证了盖革模式雪崩焦平面阵列技术及其在三维成像中应用的可行性.