Calculation and evaluation of narcissus for diffractive surfaces in infrared systems

In infrared optical systems, the narcissus effect for diffractive surfaces should be calculated with specific diffraction orders based on the diffraction efficiency. It is shown in this work that the diffraction order of maximum diffraction efficiency varies with the change of the incident angle and wavelength of the backward-traced narcissus flux. Meanwhile, yni, which is the paraxial evaluation criterion of narcissus intensity for a refractive surface, is modified considering diffraction when a ray passes through diffractive surfaces, and a practical example has been given. The analysis can be used to calculate and control the narcissus intensity in infrared optical systems with diffractive surfaces.     

Effects of manufacturing errors on diffraction efficiency for multilayer diffractive optical elements

The effect of manufacturing errors on diffraction efficiency for multilayer diffractive optical elements (MLDOEs) used in imaging optical systems is discussed in this paper. The relationship of diffraction efficiency and depth-scaling errors are analyzed for two different cases: the two relative depth-scaling errors change in the same sign and in the opposite sign. For the first condition, the corresponding diffraction efficiency decreases more slowly. The effect of periodic width errors on diffraction efficiency is also evaluated. When the two major manufacturing errors coexist, the magnitude of the decrease of diffraction efficiency is analyzed for MLDOEs. The result can be used for analyzing the effects of the manufacturing errors on diffraction efficiency for MLDOEs.     

Optimal design method for multi-layer diffractive optical elements with consideration of antireflection coatings

An optimal design method for multi-layer diffractive optical elements (MLDOEs) is put forward with consideration of antireflection coatings in actual applications of hybrid optical systems. Taking this method into account for optimal design, it can ensure 100% diffraction efficiency at the designed wavelengths and maximum polychromatic integral diffraction efficiency over the whole waveband. In addition, it can be obtained not only for mechanical durability of soft polymers improvements but increase antireflection coatings functions for hybrid optical systems. Finally, an example for optimal design algorithm process and simulation of MLDOEs used in visible waveband is presented. The results show that this optimal method perfects the MLDOEs design on the basic theory with great practicability for MLDOEs design.     

Spectral properties of multiorder diffractive lenses

Diffractive lenses have been traditionally designed with the first diffracted order. The spectral characteristics of diffractive lenses operating in higher diffracted orders differ significantly from the first-order case. Multiorder diffractive lenses offer a new degree of freedom in the design of broadband and multispectral optical systems that include diffractive optical elements. It is shown that blazing the surface-relief diffractive lens for higher diffraction orders enables the design of achromatic and apochromatic singlets. The wavelength-dependent optical transfer function and the associated Strehl ratio are derived for multiorder diffractive lenses. Experiments that illustrate lens performance in two spectral bands are described, and the results show excellent agreement with the theoretical predictions.     

遗传算法用于衍射光学元件的优化设计

提出了一种基于遗传算法的衍射光学元件优化设计方法;在衍射光学元件设计中遗传算法运行参数对遗传算法性能有一定的影响:采用较大的群体规模,遗传算法越容易获得最优解;交叉算子越大,遗传算法全局搜索能力越强;选择算子对遗传算法的影响不是太大;如果要进一步提高解的精度,可选取较大的终止代数。数值计算结果表明,用遗传算法优化设计的衍射光学元件,其误差小于 5.2%,衍射效率达到 91.2%。遗传算法很适合衍射光学元件的优化设计。     

对衍射光学元件温度特性的研究

大多数空间光学仪器的工作环境温度变化范围都较大。对折射元件和衍射元件的温度特性进行了分析,建立了透镜焦距和衍射效率随环境温度的变化关系,并论述了利用衍射光学元件的温度特性实现光学系统消热差的原理和设计方法。     

High-diffractive-efficiency defocus grating for wavefront curvature sensing

The optimum phase defocus grating for wavefront curvature sensing is proposed. It features an equidistantly quantized, binary-phase-step defocus grating with a phase-step height of pi. The diffractive efficiency of the phase defocus grating is theoretically computed. The optical transfer function is obtained. The optimum phase defocus grating is fabricated. The high diffractive efficiencies of the +/-1 diffraction orders are verified experimentally, the average values of which are 38.08% and 40.36%, respectively.     

Stray-light effects of diffractive beam-shaping elements in optical microsystems

The use of diffractive beam-shaping elements in hybrid or monolithic microsystems is investigated. Compact optical systems require diffractive structures with small grating periods for creating large deflection angles. Such elements are difficult to fabricate while a low stray-light level is maintained. In addition, because of the small geometrical dimensions and the short propagation lengths in an optomechanical microsystem, any stray light generated by the diffractive structure critically affects the overall optical performance. A model for the estimation of the interference effects between the designed and the unwanted diffraction orders is developed and applied to an example of a collimating diffractive optical element. On the basis of theoretical and experimental results, design rules for the application of diffractive beam-shaping elements in microsystems are derived.     

Analysis of blazed diffractive optical elements formed with artificial dielectrics

A new hybrid method for the analysis of diffractive optical elements, which combines fully vectorial and scalar theories, is presented. It is suitable for use with elements of arbitrary large zone, even when the local feature size is of the order of the wavelength. To assess its applicability, we have performed cross-checking tests. The model is shown to accurately predict many optical properties of diffractive optical elements based on two-dimensional artificial dielectrics, like the useful energy diffracted into the order of interest or the deterministic loss into high diffraction orders for an illumination with a wavelength different from the design wavelength or for highly oblique incidence.     

High-efficiency diffractive micromachined chopper for infrared wavelength and its application to a pyroelectric infrared sensor

We have developed a diffractive micromachined chopper (DMC) for an IR wavelength of ~10 mum. This device operates mechanically by movable reflection grating beams. It modulates the diffraction efficiency by controlling the displacement of grating beams by an electrostatic force. For a CO(2) laser beam, a high modulation efficiency of 84% with an -0.8-dB small insertion loss was obtained by detecting 0th-order diffracted light. A novel pyroelectric IR microsensor with a DMC and a diffractive multilevel Si microlens was proposed and it demonstrated the detection of human existence.     

Single-point diamond turning and replication of visible and near-infrared diffractive optical elements

High-fidelity diffractive surfaces have been generated with single-point diamond-turning techniques. A key to the success of this technique is the ability to shape the diamond tool tip to provide the optimum phase-relief profile, given manufacturing constraints. Replication technology is used to transfer the phase-relief surface into a thin epoxy or photopolymer layer on a glass substrate. Diffraction efficiency results for a wide range of zone widths are presented to provide the reader with a baseline of expected performance for replicated visible and near-infrared diffractive optical elements. In addition, a new method for analyzing diffractive surface structures is presented. The ray-trace algorithm quickly provides accurate results of predicted diffraction efficiency for arbitrary zone profiles, which is extremely valuable in predicting manufacturing errors.     

Diffractive light attenuators with variable transmission

Abstract

A new application of diffractive optical elements (DOEs) for continuous or multistage adjustment of optical radiation intensity is described. The diffractive attenuators are linear or circular gratings (amplitude or phase) with constant period and diffraction efficiency that varies across the grating. The zero order of diffraction is used as the output and transmitted through the grating without angular deviation. The diffractive attenuators, in distinction to conventional analogues, allow one to change the intensity of the light beam according to predetermined function and have no limitations for power of the regulated light beam. These elements can be used in optical systems as a beam splitter with adjusted splitting coefficient. The experimental results on a circular diffractive attenuator fabricated by direct laser writing on a chromium film are presented. The range of transmission variation was 20 times within a 340° angle of attenuator turn. The possibility to use a phase diffractive attenuator as a light radiation modulator for a powerful technological laser is discussed.     

Mosaic imaging with spatial light modulator technology

Diffractive wavefront control with spatial light modulator technology has been successfully demonstrated both as a means of steering optical wavefronts and for compensating large optical aberrations. We describe the use of a spatial light modulator operating as a programmable diffractive optic to record extended-field-of-view mosaic images centered about a large off-axis field angle. A gimbaled primary mirror allows the nominal viewing angle to be varied, and diffractive wavefront steering allows images to be acquired at discrete increments in the field angle about the nominal angle. Diffractive wavefront compensation corrects aberrations associated with the primary mirror orientation and changes in field angle introduced by diffractive wavefront steering. A time sequence of images recorded at discrete increments in the field angle is then digitally combined to create a high-pixel-count mosaic image. The effects of diffraction efficiency and wavelength-dependent wavefront errors on image quality are analyzed.     

Iterative Fourier transform algorithm with regularization for the optimal design of diffractive optical elements

There is a trade-off between uniformity and diffraction efficiency in the design of diffractive optical elements. It is caused by the inherent ill-posedness of the design problem itself. For the optimal design, the optimum trade-off needs to be obtained. The trade-off between uniformity and diffraction efficiency in the design of diffractive optical elements is theoretically investigated based on the Tikhonov regularization theory. A novel scheme of an iterative Fourier transform algorithm with regularization to obtain the optimum trade-off is proposed.     

Analysis and optimization of fabrication of continuous-relief diffractive optical elements

The fabrication of continuous-relief diffractive optical elements by direct laser beam writing in photoresist is analyzed. The main limitation and tolerances are identified, and their influence on optical performance is quantified. Fabricated structures show rounded profile steps resulting from the convolution of the desired profile with the writing beam. This leads to a reduction in diffraction efficiency. Optimization techniques are presented to minimize this effect. Scaling the profile depth by a factor of mu > 1 increases the first-order diffraction efficiency for blazed elements. This method is also applied to suppress the zeroth diffraction order in computer-generated holograms. A nonlinear compensation of the exposure data for the Gaussian beam convolution results in an 18% increase of the diffraction efficiency for a blazed grating with a 10-mum period to a value of 79%.     

Design and fabrication of a high-efficiency extreme-ultraviolet binary phase-only computer-generated hologram

As the development of extreme-ultraviolet (EUV) lithography progresses, interest grows in the extension of traditional optical components to the EUV regime. The strong absorption of EUV by most materials and its extremely short wavelength, however, make it very difficult to implement many components that are commonplace in the longer wavelength regimes. One such component is the diffractive optical element used, for example, in illumination systems to efficiently generate modified pupil fills. The fabrication and characterization of an EUV binary phase-only computer-generated hologram is demonstrated, allowing arbitrary far-field diffraction patterns to be generated. Based on reflective architecture, the fabricated device is extremely efficient. Based on an identically fabricated null hologram, the absolute efficiency into one diffracted order of 22% has been demonstrated. In the case where axially symmetric diffraction patterns are desired (both positive and negative diffraction orders can be used), the efficiency can be twice as high.     

Zone-boundary optimization for direct laser writing of continuous-relief diffractive optical elements

Enhancing the diffraction efficiency of continuous-relief diffractive optical elements fabricated by direct laser writing is discussed. A new method of zone-boundary optimization is proposed to correct exposure data only in narrow areas along the boundaries of diffractive zones. The optimization decreases the loss of diffraction efficiency related to convolution of a desired phase profile with a writing-beam intensity distribution. A simplified stepped transition function that describes optimized exposure data near zone boundaries can be made universal for a wide range of zone periods. The approach permits a similar increase in the diffraction efficiency as an individual-pixel optimization but with fewer computation efforts. Computer simulations demonstrated that the zone-boundary optimization for a 6 microm period grating increases the efficiency by 7% and 14.5% for 0.6 microm and 1.65 microm writing-spot diameters, respectively. The diffraction efficiency of as much as 65%-90% for 4-10 microm zone periods was obtained experimentally with this method.     

Comprehensive focusing analysis of various Fresnel zone plates

A series-form expression for the individual diffracted field of a general annular ring is derived from the Rayleigh-Sommerfeld diffraction integral. It can be used for the accurate and fast simulation of any diffractive focusing element composed of concentric transparent rings. We present a comprehensive analysis, based on the leading term and the linear superposition principle, of the focusing performances of various Fresnel zone plates. Many problems, such as the equivalent aperture function, the diffraction efficiency, the focal spot pattern, the suppression of higher orders and the appearance of "fractional orders," and the explanation for the appearance of Fraunhofer diffraction patterns, are analytically investigated in detail. Because of the great similarity between Fresnel zone plates and multilevel diffractive lenses, most of the obtained results are also applicable to multilevel diffractive lenses.     

Binary beam splitter

We propose a method for designing a diffractive beam splitter that enables the diffraction orders to be uniformly distributed within a required elliptic region. The performance of the designed optical element is demonstrated experimentally.     

Polarization-selective diffractive optical elements with an index-matching gap material

Highly polarization-selective diffractive optical elements for use in optical interconnection and routing systems have been fabricated by the wet etching of pairs of calcite substrates and characterized experimentally. We show that when an index-matching polymer is used to fill the gap between the two substrates, substrate alignment problems are eliminated and efficiency is greatly increased. This has resulted in first-order diffraction efficiencies of 40.5% and polarization contrast ratios of 450:1 for several off-axis binary-phase elements, allowing these components to be used for practical applications.