基于扫描电镜的电子束曝光机对准系统的研制

介绍了基于扫描电镜的电子束曝光机对准系统的原理,详细分析了此系统的硬件设计、软件设计以及扫描场的校正过程。利用硬件获取扫描图像,并进行实时标记校正,利用软件进行标记位置识别和校正参数计算,满足了曝光机对准系统在性能和精度上的要求。在100μm扫描场下进行拼接曝光实验,达到了77.3 nm(2σ)的拼接精度。     

电子束重复增量扫描曝光方式的反应机理研究

从高分子辐射化学的角度分析了电子束曝光的实际反应机理,推导得出曝光辐射剂量与辐射降解程度间的关系,提出了重复增量扫描方式的电子束微三维加工方法。通过在SDS-3型电子束曝光机上对正性抗蚀剂PMMA进行曝光实验,显影后得到轮廓清晰的三维结构,验证了该方法的可行性。     

电子束重复曝光加工PCR微通道的工艺研究

对PCR微流控芯片通道中流体的流动特性进行了分析,发现流体在横截面为圆形的通道中流动时由摩擦引起的等效水头损失及表面张力均小于微矩形通道。以此为依据,将PCR芯片微通道优化设计成圆形通道。在JSM-5CF电子束曝光机上采用束斑尺寸80nm、能量20keV的电子束对1μm厚的聚甲基丙烯酸甲酯进行了单次曝光剂量40μC/cm2的8次重复增量扫描曝光实验,显影后得到的PCR芯片微圆通道轮廓清晰,边缘连续光滑。证明了电子束重复增量扫描曝光方式制作PCR微流控芯片微圆通道的可行性。     

Micro‐Nanostructured Interfaces Fabricated by the Use of Inorganic Block Copolymer Micellar Monolayers as Negative Resist for Electron‐Beam Lithography

This paper introduces an approach where the match of two different length scales, i.e., pattern from self‐assembly of block copolymer micelles (< 100 nm) and electron‐beam (e‐beam) writing (> 50 nm), allow the grouping of nanometer‐sized gold clusters in very small numbers in even aperiodic pattern and separation of these groups at length scales that are not accessible by pure self‐assembly. Thus, we could demonstrate the grouping of Au nanoclusters in different geometries such as squares, rings, or spheres.     

Patterning Si at the 1 nm Length Scale with Aberration‐Corrected Electron‐Beam Lithography: Tuning of Plasmonic Properties by Design

Patterning of materials at single nanometer resolution allows engineering of quantum confinement effects, as these effects are significant at these length scales, and yields direct control over electro‐optical properties. Silicon is by far the most important material in electronics, and the ability to fabricate Si‐based devices of the smallest dimensions for novel device engineering is highly desirable. The work presented here uses aberration‐corrected electron‐beam lithography combined with dry reactive ion etching to achieve both: patterning of 1 nm features and surface and volume plasmon engineering in Si. The nanofabrication technique employed here produces nanowires with a line edge roughness (LER) of 1 nm (3σ). In addition, this work demonstrates tuning of the Si volume plasmon energy by 1.2 eV from the bulk value, which is one order of magnitude higher than previous attempts of volume plasmon engineering using lithographic methods.     

Self‐Organization and/or Nanocrystallinity of Co Nanocrystals Effects on the Oxidation Process Using High‐Energy Electron Beam

The enhanced stability of Co nanocrystals (NCs) when they are highly ordered at both nanometer and micrometer scales is reported. For the first time, it is shown that both the crystalline structure of Co nanoparticles (NPs) and their 2D hexagonal organization have a significant impact on the oxidation process rate enabling to produce various types of nanostructures including core‐shell NPs. The Co core can be either polycrystalline or hexagonal close‐packed (hcp) single‐crystalline, whereas the oxide shell is composed either of CoO or of the spinel structrure Co₃O₄. The present results are evidenced through a careful high‐resolution transmission electron microscopy (HRTEM) study and are highly reproducible.     

Electrical Behavior and Electron Transfer Modulation of Nickel–Copper Nanoalloys Confined in Nickel–Copper Nitrides Nanowires Array Encapsulated in Nitrogen‐Doped Carbon Framework as Robust Bifunctional Electrocatalyst for Overall Water Splitting

Probing robust electrocatalysts for overall water splitting is vital in energy conversion. However, the catalytic efficiency of reported catalysts is still limited by few active sites, low conductivity, and/or discrete electron transport. Herein, bimetallic nickel–copper (NiCu) nanoalloys confined in mesoporous nickel–copper nitride (NiCuN) nanowires array encapsulated in nitrogen‐doped carbon (NC) framework (NC–NiCu–NiCuN) is constructed by carbonization‐/nitridation‐induced in situ growth strategies. The in situ coupling of NiCu nanoalloys, NiCuN, and carbon layers through dual modulation of electrical behavior and electron transfer is not only beneficial to continuous electron transfer throughout the whole system, but also promotes the enhancement of electrical conductivity and the accessibility of active sites. Owing to strong synergetic coupling effect, such NC–NiCu–NiCuN electrocatalyst exhibits the best hydrogen evolution reaction (HER) and oxygen evolution reaction (OER) performance with a current density of 10 mA cm^?2 at low overpotentials of 93 mV for HER and 232 mV for OER, respectively. As expected, a two‐electrode cell using NC–NiCu–NiCuN is constructed to deliver 10 mA cm^?2 water‐splitting current at low cell voltage of 1.56 V with remarkable durability over 50 h. This work serves as a promising platform to explore the design and synthesis of robust bifunctional electrocatalyst for overall water splitting.