IBAD和磁控溅射对银膜性能的影响

本文主要研究用离子束辅助沉积(IBAD)和磁控溅射不同沉积技术在9Cr18钢材上沉积软金属银固体润滑膜。用百格刀划格法、SEM和MS-T3000多功能摩擦磨损仪等测试方法测试沉积银膜与基材间的结合力、银膜的显微结构和摩擦磨损性能等。结果表明,与磁控溅射沉积技术相比,IBAD技术制备的银膜形成一层化学冶金结合与机械啮合结合的过渡层,可提高膜层与基材的结合力,增加膜层的耐磨性。     

低能Ar离子束辅助沉积Cu、Ag、Pt薄膜

采用低能Ar离子束辅助沉积方法,在Mo/Si(100)衬底上分别沉积Cu、Ag、Pt薄膜.实验发现,若辅助轰击的Ar离子束沿衬底法线方向入射,当离子/原子到达比为0.2时,沉积的Cu膜呈(111)晶向,而Ag、Pt膜均呈(111)和(100)混合晶向.当辅助轰击的Ar离子束偏离衬底法线方向45°入射时,沉积的Cu、Ag、Pt膜均呈(111)择优取向.采用Monte Carlo方法模拟能量为500 eV的Ar离子入射单晶Ag所引起的原子级联碰撞过程,分别算得Ar离子入射单晶Ag(100)面、(111)面时,Ar离子的溅射率与入射角和方位角的关系.对离子注入的沟道效应和薄膜表面的自由能对薄膜择优取向的影响作了初步的探讨和分析.     

Irradiation effect on PET surface using low energy argon ion beam

A study of various physical properties of a PET film irradiated with an Ar beam is reported. SEM images and UV–VIS and FTIR spectra were obtained for a number of ionic fluxes and three irradiation times. Small changes in the energy gap of degradated samples were found, and the SEM images indicate that the optimum homogeneity and roughness are reached after 30 min of irradiation. These results may well be of practical interest. A modified saddle field ion source was used as a preparation tool of the surface of polyethylene terephthalate PET polymer substrate to be ready for coating or thin film deposition. Argon ion beam was used for this purpose, where the scanning electron microscope (SEM) shows that, the best sample is the one which was irradiated to 30 min, where this sample is more homogenous and roughness than other irradiated samples. Also the (UV–VIS) spectrum tells us that, there is small change on energy gap and this is meaning that, the change on electric properties is small also. In this case the sample is more homogenous and of higher roughness than other irradiated samples.     

ZnO thin films deposited by capillaritron ion beam sputtering deposition

ZnO thin films were deposited by capillaritron ion beam sputtering deposition. The crystalline quality, stoichiometry and photoluminescence properties of as-deposited and annealed ZnO thin films were studied. The as-deposited ZnO films show no preferred crystallographic orientations while annealed films exhibit a strong single ZnO (0 0 2) diffraction peak at 34.50°. The stoichiometry of ZnO films were found to be dependent on both beam energy and annealing conditions that the atomic percent ratio of Zn/O can be controlled between 0.95 and 1.10. ZnO films deposited with 4 keV ion beam and annealed at 800 °C in oxygen shows the lowest defect related deep level visible emission, while 80% of oxygen atoms are still located in fully oxidized stoichiometric ZnO matrixes.     

离子束辅助沉积立方氮化硼的试验研究

运用离子束辅助沉积(IBAD)法在硅片上制备了立方氮化硼(c—BN)薄膜，研究了辅助能量、辅助束流及辅助束中氮气含量等参数对膜中c—BN含量的影响。用红外光谱(FTIR)及X射线光电子能谱(XPS)分析技术对得到的c—BN膜进行了分析。结果表明：合适的离子辅助能量能够获得c—BN含量高的薄膜；膜中c—BN的含量随辅助气体中N2含量的提高而增加；辅助束流对薄膜的形成影响不明显。     

Synthesis of nanodimensional TiO2 thin films using energetic ion beam

Nanophases of TiO₂ are achieved by irradiating polycrystalline thin films of TiO₂ by 100 MeV Au ion beam at varying fluence. The surface morphology of pristine and irradiated films is studied by atomic force microscopy (AFM). Phase of the film before and after irradiation is identified by glancing angle X-ray diffraction (GAXRD). The blue shift observed in UV-vis absorption edge of the irradiated films indicates nanostructure formation. Electron spin resonance (ESR) studies are carried out to identify defects created by the irradiation. The nanocrystallisation induced by SHI irradiation in polycrystalline thin films is studied.     

Structural characteristics of rutile films prepared by direct deposition and neon ion beam assisted deposition

In this article, titanium dioxide films prepared by neon ion beam assisted deposition (IBAD) in an oxygen environment were investigated. The deposition rate was varied from 0.2 to 0.4 nm/s while the current density and ion energy were kept at 20 μA/cm² and 40 keV. The structural characteristics of all films were studied by X-ray diffraction and Raman spectroscopy. Results show that all the films exhibit a rutile phase. The location of (2 0 0) diffraction peaks deviated from the standard value. Simultaneously, the relative intensity of (2 0 0)/(1 1 0) peaks decreases with increasing evaporation rate. All results are discussed in terms of surface free energy and ion channeling effects.     

An ion beam chopping method for low energy time-of-flight measurements

Chopping an ion beam by electrically sweeping it over an aperture produces a degradation of the beam quality. After a short review of the problem, a simple alternative method is presented and experimental results are shown.     

A simple model for quantifying the degree of layer-by-layer growth in low energy ion deposition of thin films

Layer-by-layer growth of thin films can be promoted by using low energy ion deposition (LEID) techniques. The basic process affecting the growth are often quite diverse, but often the ion impact induced inter layer mass transfer processes due to adatom insertion to lower step edges or pile-ups to step edges above dominate. In this paper we propose a simple phenomenological model which describes the growth of thin films in LEID under these conditions. The model makes possible to distinguish the dominant growth, the detection of the transition from the 3D growth to 2D growth, and it can be used to quantify the degree of layer-by-layer growth. The model contains only two parameters, which can be phenomenologically related to the properties of the bombarding ion beam.     

Characterization of silicon oxynitride films using ion beam analysis techniques

Heavy-ion elastic recoil detection analysis (HIERDA) is the ideal technique for quantitative analysis of silicon oxynitride films on silicon because of its unique ability to measure simultaneously all elements of interest (i.e., H, C, N, O and Si), thereby permitting key parameters such as the O/N-ratio to be determined in a single measurement. However, high-energy accelerators suitable for such HIERDA measurements are becoming much less readily available. Hence, the present paper investigates and calibrates an alternative IBA technique for simultaneous O, N and C analysis – namely, the use of (d,p) and (d,) nuclear reactions. Under optimum analysis conditions (850 keV deuterons and 150° detector angle), the Si background level sets a lower detection limit of 1×10¹⁶ nitrogen atoms/cm² and 3×10¹⁵ oxygen atoms/cm². H analysis is carried out separately, using low-energy ERDA and a 2 MeV ⁴He beam. Absolute cross-sections have been obtained for each of the (d,p) and (d,) groups. Comparison with data in the recent Handbook of Modern Ion Beam Materials Analysis shows reasonable agreement (10–15%) for the (d,p) reactions on oxygen and carbon. However, in the case of nitrogen, the measured cross-section values are 70% larger than the Handbook data. Several silicon oxynitride samples have been analyzed, first at UWO using 850 keV deuterons, and subsequently at ANU using HIERDA and a 200 MeV Au beam. The resulting O/N-ratios agree to within 10%. The relative importance of radiation damage effects is briefly discussed.     

Effect of different ion beam energy on properties of amorphous carbon film fabricated by ion beam sputtering deposition (IBSD)

Amorphous carbon (a-C) films were fabricated by ion beam sputtering technique. The influence of sputtering ion beam energy on bonding structure, morphologic, mechanical properties, tribological properties and corrosion resistance of a-C films are investigated systematically. Morphology study shows that lowest surface roughness exists for mid-ion beam energy. Improved adhesion is observed for the films that are prepared under high ion beam energy, attributed to film graphitization, low residual stress and mixed interface. Relatively, a-C films prepared with ion beam energy of 2 keV exhibits optimum sp³ bond content, mechanical properties and corrosion resistance. It is found that the wear rate of DLC films decrease with increased ion beam energy in general, consistent with the varied trend of the H/E value which has been regarded as a suitable parameter for predicting wear resistance of the coatings. The correlation of the sp³ bond fraction in the films estimated from Raman spectroscopy with residual stress, nanohardness and corrosion resistance has been established.     

低能Ar离子束辅助沉积Ag(111)薄膜

采用低能Ar离子束辅助沉积方法,在Mo/Si(100)基底上制备Ag膜。实验发现,用Ar离子束溅射沉积的Ag膜呈(111)择优取向。若在溅射沉积Ag膜的同时,用能量为500eV的Ar离子束沿衬底法线方向对Ag膜进行辅助轰击,当离子/原子到达比为0.06时,Ag膜呈(111)择优取向;当离子/原子到达比增大到0.18时,Ag膜呈(111)和(100)混合晶向。若Ar离子的入射角为35.26°,离子/原子到达比为0.06时,Ag膜呈(111)择优取向;当离子/原子比增大到0.18时,Ag膜呈(111)和微弱的(100)混合晶向。若Ar离子的入射角为54.7°,离子/原子到达比为0.06时,沉积的Ag膜呈很强的(111)择优取向。     

Design of a low energy positron beam

A low energy positron beam apparatus has been designed and constructed. Experimental details are presented and the performance characteristics are described.     

3D visualization of heavy ion beam energy deposition in two different target shapes

Heavy ion beams have favorable energy deposition behavior because they can penetrate and deposit their energy well inside the target. Ion beams have potential uses in fields including heavy ion beam fusion, high-energy density physics and material processing. Intense heavy ion beams can generate high-energy density matter in the laboratory under extreme density and pressure conditions. Additionally, in heavy ion fusion, a stringent requirement for successful fuel ignition and sufficient fusion energy release is that the ion energy deposition profiles are calculated precisely in the energy absorber layer. In this work, the OK2 code was used to simulate the heavy ion beam energy deposition in various target materials, and a computer program was written to provide 3D visualization of the results. The heavy ion beams used in this work were composed of lead, uranium, and cesium ions with energies of 8 GeV and carbon ions with energies of 5 MeV. The targets included two shapes: a monolayer sphere that can be used in direct-driven fusion and a cylindrical shape that is common in indirectly driven heavy ion fusion.     

9Cr18钢上离子束辅助沉积TiCxNy膜的研究

用离子束辅助沉积技术９Ｃｒ１８钢基体上形成了ＴｉＣｘＮｙ膜,ＴＥＭ观察膜呈多晶结构,具有（１１１）,（２００）和（２２０）择优取向。ＡＥＳ和ＸＰＳ分析进一步证实,ＴｉＣｘＮｙ膜呈含氧配置。膜的硬度与Ｎ含量有关,Ｎ的含量过高时硬度下降。在本实验条件下以离子注量为３×１０＾１７／ｃｍ６２时硬度最高,干摩擦表明膜的抗氧化性能优良,它的存在能有效抑制基体在摩擦过程中氧化皮的形成,显改善基体的磨损特性,并     

Simulation of a low energy beam transport line

A 2.45 GHz electron cyclotron resonance intense proton source and a low energy beam transport line with dual-Glaser lens were designed and fabricated by Institute of Modern Physics for a compact pulsed hadron source at Tsinghua. The intense proton beams extracted from the ion source are transported through the transport line to match the downstream radio frequency quadrupole accelerator. Particle-in-cell code BEAMPATH was used to carry out the beam transport simulations and optimize the magnetic field structures of the transport line. Emittance growth due to space charge and spherical aberrations of the Glaser lens were studied in both theory and simulation. The results show that narrow beam has smaller aberrations and better beam quality through the transport line. To better match the radio frequency quadrupole accelerator, a shorter transport line is desired with sufficient space charge neutralization.     

离子束增强沉积法制备Mo2N和Mo2-xTixN薄膜及其结构与性能研究

分别采用氮离子束增强沉积和Ｎ－Ｔｉ离子束同步增强沉积工艺制备了Ｍｏ２Ｎ和Ｍｏ２－ｘＴｉｘＮ薄膜,用ＸＲＤ,ＴＥＭ、划痕和阳极极化方法研究了两者的结构与性能。     

离子束增强沉积碳膜及其在抑制电子发射中的应用

栅电子发射是影响行波管工作性能和制约其使用寿命的主要因素。国内研制的导弹雷达制导用行波管因存在严重的栅电子发射现象,寿命只有70h,不能付诸军事应用。采用离子束增强沉积的方法在栅网表面沉积一层碳膜后,可有效地抑制栅电子发射,使行波管寿命超过了1000h,在军事和航天领域获得了成功应用。报导了低能离子束增强沉积类金刚石薄膜和高能离子束增强沉积类石墨碳膜的制备技术、结构性能及其在抑制栅电子发射中的应用和机理研究的结果。     

Calculation of the energy deposition in a water beam dump

The energy deposition per interacting proton in GeV/cm³ and the star density in star/cm³ have been calculated in a water cylinder with a Monte Carlo computer program. These calculations permit the estimation of the temperature rise, induced radioactivity, etc., in beam dumps of high energy accelerators and storage rings. We assumed a cylinder of different diameters and lengths and an incident proton beam energy of 20, 200, 300 and 400 GeV.     

Charged particle spectra of palladium thin films during low energy deuterium ion implantation

An effort was made to create cold fusion in thin films of palladium under low energy bombardment with high currents of deuterium ions in a vacuum chamber. Samples were monitored with a silicon surface barrier detector in order to detect any massive energetic reaction products. The films were deposited by sputtering onto smooth silicon substrates, and consisted of approximately 130 Å of palladium sandwiched by thin layers of high chrome stainless steel. These films were bombarded with deuterium ions at an energy of 1.5 keV with a current density of about 0.5 mA/cm². The sample temperature was monitored during implantation, and was subject to some measure of control using a combination of beam heating and cooling with flowing liquid nitrogen. Several counts were observed to appear in the high energy region of the spectra which did not appear during an extended background spectrum, however, the source of these counts is unclear at this time.