对象模型在集成电路掩膜光学临近矫正中的应用

随着超大规模集成电路的发展，其特征尺寸已经接近或小于掩膜光刻工艺中所使用的光波长。由于光的衍射和干涉现象，实际得到的光刻图形与掩膜图形之间存在一定的误差。为尽量消除这种误差，常用的两种方法是OPC和PSM。提出一种基于对象模型的OPC方法以及由此而开发的可实际应用的工具软件OPCM。该方法也为基于规则的OPC提供了产生基本规则的引擎，并由此而提高了软件的实用性。     

SVM based layout retargeting for fast and regularized inverse lithography

Inverse lithography technology （ILT）, also known as pixel-based optical proximity correction （PB-OPC）, has shown promising capability in pushing the current 193 nm lithography to its limit. By treating the mask optimization process as an inverse problem in lithography, ILT provides a more complete exploration of the solution space and better pattern fidelity than the tradi-tional edge-based OPC. However, the existing methods of ILT are extremely time-consuming due to the slow convergence of the optimization process. To address this issue, in this paper we propose a support vector machine （SVM） based layout retargeting method for ILT, which is designed to generate a good initial input mask for the optimization process and promote the convergence speed. Supervised by optimized masks of training layouts generated by conventional ILT, SVM models are learned and used to predict the initial pixel values in the‘undefined areas’ of the new layout. By this process, an initial input mask close to the final optimized mask of the new layout is generated, which reduces iterations needed in the following optimization process. Manu-facturability is another critical issue in ILT;however, the mask generated by our layout retargeting method is quite irregular due to the prediction inaccuracy of the SVM models. To compensate for this drawback, a spatial filter is employed to regularize the retargeted mask for complexity reduction. We implemented our layout retargeting method with a regularized level-set based ILT （LSB-ILT） algorithm under partially coherent illumination conditions. Experimental results show that with an initial input mask generated by our layout retargeting method, the number of iterations needed in the optimization process and runtime of the whole process in ILT are reduced by 70.8%and 69.0%, respectively.     

Regularized level-set-based inverse lithography algorithm for IC mask synthesis

Inverse lithography technology(ILT)is one of the promising resolution enhancement techniques,as the advanced IC technology nodes still use the 193 nm light source.In ILT,optical proximity correction(OPC)is treated as an inverse imaging problem to find the optimal solution using a set of mathematical approaches.Among all the algorithms for ILT,the level-set-based ILT(LSB-ILT)is a feasible choice with good production in practice.However,the manufacturability of the optimized mask is one of the critical issues in ILT;that is,the topology of its result is usually too complicated to manufacture.We put forward a new algorithm with high pattern fidelity called regularized LSB-ILT implemented in partially coherent illumination(PCI),which has the advantage of reducing mask complexity by suppressing the isolated irregular holes and protrusions in the edges generated in the optimization process.A new regularization term named the Laplacian term is also proposed in the regularized LSB-ILT optimization process to further reduce mask complexity in contrast with the total variation(TV)term.Experimental results show that the new algorithm with the Laplacian term can reduce the complexity of mask by over 40%compared with the ordinary LSB-ILT.     

A computational paradigm that integrates rule-based and model-based reasoning in expert systems

This article presents a new computational paradigm that integrates rule-based and model-based reasoning in expert systems. Our experience in expert systems research and development indicates that the rule-based technique is simple, elegant, and efficient; whereas the model-based approach is complex but powerful, CPU-consuming but robust. Combining both the rule-based and the model-based methods into one paradigm means having the best of both worlds. to achieve this goal, we have extended the Prolog unification algorithm to accommodate semantic unification. the resulting computational procedure is named R.M. This new inference procedure uses rule-based reasoning by default, and it automatically invokes model-based reasoning when all the rules become inapplicable, but it returns to rule-based reasoning whenever the rules become usable again. the idea behind this problem-solving strategy is to achieve maximum efficiency as well as robustness in expert systems. Examples are used throughout the article to illustrate our notions. the article also sketches an application in the domain of telecommunication networks maintenance and describes our experimental results.     

飞机航电设备综合智能故障诊断专家系统研究

目前,智能诊断方法主要有基于规则推理、模糊模型和案例等诊断方法.在分析了上述方法的特征和局限性的基础上,取长补短,提出了综合智能故障诊断方法,通过综合推理策略及统一协调机制,提高诊断系统的故障诊断能力和诊断效率.说明了专家系统综合知识库的建立、综合推理机及软件设计的实现等技术.     

High precision, low cost mask for deep x-ray lithography

 The precision of transferred patterns are highly dependent on the quality of the mask in deep x-ray lithography. Many parameters, such as the critical energy of the synchrotron light, beamline optics and even the microstructure to be exposed should be considered in mask design. In this paper, the design rules and the boundary conditions for deep x-ray mask are discussed in general. The method of making a precision, multilayer mask using UV lithography technique is also described. Received: 25 August 1997/Accepted: 3 September 1997     

OPC技术应用于工业测试系统的研究

管理人员通过网络远程监控整个工业测试过程是技术发展的必然趋势。基于丁业标准OPC技术及其应用于工业测试系统的优势，给出了远程测试系统的总体方案，具体分析了OPC服务器、OPC客户程序的实现方法，介绍了基于OPC技术实现远程监控与测试的方法。在基于OPC技术的换档器远程测试系统中得到了验证，这种测试方法弥补了当前测试系统的不足。     

统计和规则相结合的汉语组块分析

从广西中获得的组块对机器翻译，信息检索等很多领域都非常有用，介绍了规则和统计进行组块分析的处理策略，提出了规则与统计相结合的处理方法，并且结合组块分析的实际情况改进了一般评价系统性能的指标，通过封闭测试和开放测度验证，与单纯规则组块划分相比较，组块识别的精确率和召回率都得到了提高，组块划分错误率降低了7％。     

OPC技术在通用汽油发动机尾气排放检测系统中的应用

针对目前我国尾气排放检测设备落后现状,应用OPC技术开发了一套新型的通用汽油发动机尾气排放检测系统.该系统改变了以往采用WinCC或MCGS等组态软件来完成上下位机通讯的技术,而将OPC技术应用到了该系统当中.实验表明,应用OPC技术后的系统通讯实时性更优,具有一定的推广和利用价值.     

复合系统智能诊断方法研究

随着电子设备系统的日益复杂化,依靠单一的推理技术的故障系统已难以满足复杂系统的诊断要求.将多种不同的推理技术结合起来的集成诊断系统,能够充分利用各自的优点,从而提高系统诊断的正确性和效率,是目前智能诊断研究的一个发展趋势.本文将研究复合系统的智能诊断问题,提出在一个复合系统的诊断过程中,运用基于规则的诊断和基于模型的诊断,两种诊断技术相结合将在诊断的不同阶段发挥出各自的作用,从而建立一个融合了RBD和MBD技术优点的、具有一定学习能力的智能诊断系统.     

电子束光刻中的相互邻近效应校正技术研究

本文研究了基于形状修正的电子束光刻分级邻近效应校正技术,在内部邻近效应校正的基础上,在计算图形之间产生的相互邻近效应过程中,采用了局部曝光窗口和全局曝光窗口机制。局部曝光窗口的区域小,对计算精度影响大,采用累积求和的方法进行精确计算;全局曝光窗口区域大,对计算精度影响小,采用大像点近似的方法进行计算,从而更快速地实现邻近效应校正。该技术的应用,满足了校正精度和运算速度两方面的要求。实验结果与模拟结果一致,表明通过采用局部曝光窗口和全局曝光窗口机制,能够快速地实现相互邻近效应校正,在校正精度相同的情况下,有效提高了运算速度。     

OPC数据访问服务器的研究与实现

首先介绍了OPC(OLE for processcontrol)及其相关技术,提出了OPC数据访问服务器的组成模型。在分析OPC数据访问服务器两种开发模式的基础上,给出了以WTOPCSvr.DLL工具包为平台,使用工具开发模式实现其开发的主要步骤。重点阐述了基于PA150通信协议,OPC数据访问服务器中硬件驱动通信模块采用串口编程方式实现的方法,并给出了通信两端的主要配置过程,基于该方法和过程的OPC数据访问服务器已成功应用在某煤矿的计算机监控系统中,取得了良好的效果。     

故障诊断专家系统及其发展

文章对主要的故障诊断专家系统进行了系统的归纳和分类,主要关注故障诊断专家系统在军事领域的应用;重点讨论了基于规则的诊断专家系统、基于模型的诊断专家系统、基于人工神经网络的诊断专家系统、基于模糊推理的诊断专家系统和基于事例的诊断专家系统的技术要点、发展现状、优缺点及其在军事方面的应用;最后,对该学科的发展做出了预测,指出基于多种模型结合的诊断专家系统、分布式诊断专家系统、实时诊断专家系统是今后的发展方向。     

具有学习能力的智能诊断系统研究

随着电子设备系统的日益复杂化,依靠单一的推理技术的故障系统已难以满足复杂系统的诊断要求,将多种不同的推理技术结合起来的集成诊断系统,能够充分利用各自的优点,从而提高系统诊断的正确性和效率,是目前智能诊断研究的一个发展趋势。将研究复合系统的智能诊断问题,提出在一个复合系统的诊断过程中,通过机器学习,使基于规则的诊断和基于模型的诊断两种诊断技术相互结合,在诊断的不同阶段发挥出各自的作用,从而建立一个融合了RBD和MBD技术优点的、具有一定学习能力的智能诊断系统。     

New fabrication techniques of SU-8 fiber holder with cantilever-type elastic microclips by inclined UV lithography in water using single Mylar mask

In contact UV lithography, a pair of cantilever beams fabricated by two inclined exposures at ±45° in SU-8 using a single mask will form a connected end on the top of SU-8 layer. These beams made of SU-8 with fixed-end have been used as optical fiber holders (Ling and Lian in Microsyst Technol 13(3–4):245–251, 2007). Recently, a two-mask, two-step process to fabricate free-end cantilever beams from SU-8 using inclined UV lithography has been developed (Ling et al. in Microsyst Technol 15(3):429–435, 2009), which has been successfully applied to fabricate SU-8 optical fiber holders with long free-end cantilever beams. In this process, two masks are needed in order to obtain free-end beams and the alignment between two exposures is always time consuming with limited accuracy. Two new techniques, inclined UV shadow mask lithography and inclined UV proximity lithography, have been illustrated here for fabricating free-end SU-8 cantilever beams, which eliminate the precise alignment step required in our previous work (Ling et al. in Microsyst Technol 15(3):429–435, 2009). In the inclined UV shadow mask lithography approach, the SU-8 cantilever beams without connected ends are formed by using one main mask and two shadow masks. Each shadow mask is used to selectively transfer one of the two separated patterns on main mask into SU-8 layer at +45° and −45°, respectively. In the inclined UV proximity lithography approach, a proper proximity gap between mask and SU-8 surface is obtained by using a 50 μm thick Mylar sheet, so that the exposing light paths that formed connected beam ends will fall inside the proximity layer instead of the SU-8. In this way, the desired open-end cantilever structures can be achieved. In this paper, the principles and the fabrication procedures of the proposed techniques are demonstrated and the preliminary results are discussed.     

计算机安全监控系统的关键技术研究

信息技术的发展给信息安全带来了新的挑战,计算机安全监控系统是一种保障信息安全的有效机制。它通过数据采集、分析处理、规则判别、违规阻止和全程记录等过程,实现对本地或远程计算机中各类信息和用户操作的保护与监控。该文主要研究了以文件、文本和用户操作为对象的监控关键技术,通过实验对比分析了这些关键技术的实现机制与应用环境,对强化系统功能、提高监控效率和稳定性具有重要意义。     

OPC规范及其在交换式工业以太网中的应用

重点介绍了最新的基于Version2．05A OPC数据访问标准，叙述了OPC技术在交换式工业以太网中的实时数据采集方面的应用，同时介绍了交换式以太网的硬件组成。OPC应用很好地实现了系统的高效性和实时性。     

OPC技术及其集成方案设计分析

当今工业生产中,为了保证控制系统中各种设备充分挥作用以实现控制系统整体的协调有效运行,系统集成越来越受到人们的视。OPC技术把对象链接和嵌入技术应用于工业过程控制领域,为工业控制网络的集成创造了条件。OPC规范主要基于COM心COM的分布式组件技术。通过深入研究O规范和COM技术,对几种网络集成技术的比较研究,论文实现了控制网络的横向和纵向集成,解决了网络传输确定性问题。通过采用交换式以太网技术,提高了系统的实性、网络平台的开放性和可扩展性。模块化设计的方法为其它类型的OPC服务器的开发提供了一种通用性依据。     

An automatic geometric precision correction system based on hierarchical registration for HJ-1 A/B CCD images

On 6 September 2008, two optical satellites, HJ-1 A and B (HJ-1 A/B), were successfully launched from China. However, the system geometric correction products of the HJ-1 A/B charge-coupled device (HJ-1 images) have low geometric precision and need to be corrected. The HJ-1 images have a large aspect angle, a wide swath width, and a large image size. Furthermore, the local geometric distortions are too complex in one scene. Given these characteristics of HJ-1 images, geometric correction is still a challenging work. This article proposes an automatic geometric precision correction system (GPCS) based on the automatic registration between HJ-1 images and Landsat Thematic Mapper images. First, the coarse image matching method based on geometric-restricted scale-invariant feature transform (SIFT) is used to determine the coarse global transformation between the HJ-1 image and the reference image. Second, inspired by the hierarchical method of non-rigid registration for medical images, a hierarchical image matching approach is proposed based on the combination of SIFT feature points and template matching. This approach decomposes a matching problem of a whole image into numerous matching problems of image blocks and can overcome the impact of local distortions in HJ-1 images. Hierarchical random sample consensus (RANSAC) based on digital elevation model (H-RANSAC) is used to remove incorrect control points. Third, an HJ-1 image is rectified using a triangulated irregular network. Finally, the automatic evaluation method based on automatic image matching between the corrected HJ-1 image and the reference image is adopted to evaluate the geometric precision. On the one hand, experiments on eight HJ-1 images demonstrate the efficiency and accuracy of the different steps of GPCS. On the other hand, experiments on 1000 HJ-1 images also demonstrated the robustness, accuracy, and suitability for batch processing.     

Fuzzy model-based fault detection and diagnosis for a pilot heat exchanger

This article addresses the design and real-time implementation of a fuzzy model-based fault detection and diagnosis (FDD) system for a pilot co-current heat exchanger. The design method is based on a three-step procedure which involves the identification of data-driven fuzzy rule-based models, the design of a fuzzy residual generator and the evaluation of the residuals for fault diagnosis using statistical tests. The fuzzy FDD mechanism has been implemented and validated on the real co-current heat exchanger, and has been proven to be efficient in detecting and isolating process, sensor and actuator faults.