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提高太阳能集热管磁控溅射镀膜沉积速率的研究 总被引:1,自引:1,他引:0
工业上用磁控溅射技术为太阳能集热管制备Al-N/Al选择性吸收涂层,这种吸收涂层最外层为AlN介质减反层.在开环N2流量控制模式下,存在溅射制备AlN介质减反层沉积速率低的缺点.本文依据气相化学反应动力学理论,薄膜的沉积率正比于反应气体的浓度,提出了一种提高制备AlN陶瓷减反层沉积速率的方法.该方法将直流溅射靶电压反馈至模糊控制器,控制N2流量大小,让磁控溅射镀膜机稳定工作在拐点电压附近,实现反应溅射恒电压控制.并且采用单片机技术制作了样机,在SCS-700A型太阳能集热管镀膜机中使用,实验结果表明,镀膜沉积速率提高了4倍以上,整个系统工作稳定. 相似文献
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太阳能选择性吸收涂层是将太阳辐射选择性吸收转化成热能的材料.为更大限度地利用太阳能,高温太阳能选择性吸收涂层成为提高光热转化效率的关键部件.碳化物超高温陶瓷因具有良好的光学性能和高温稳定性而成为优选材料.目前,很多研究者已通过磁控溅射法、热喷涂法、溶胶凝胶法和激光涂覆法等方法制备了多种碳化物陶瓷基太阳能选择性吸收涂层,并且做了大量的工作来优化其性能.本文综述了碳化物陶瓷基太阳能选择性吸收涂层的研究进展,介绍了太阳能光谱选择性的要求及其选择性吸收的基本原理,总结了碳化物陶瓷基太阳能选择性吸收涂层的制备方法、材料、性能及其重要影响因素,最后展望了碳化物超高温陶瓷太阳能选择性吸收涂层的发展前景. 相似文献
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采用真空磁控溅射沉积SS-AlN金属陶瓷太阳选择性吸收涂层.涂层光学功能层的制备,先采用铜靶溅射Cu红外反射层;再采用不锈钢(SS)和铝两金属靶在Ar和N2的混合气体中同时溅射沉积SS-AlN金属陶瓷吸收层;最后采用Al靶在Ar和N2中反应溅射沉积AlN减反射层.金属陶瓷吸收层由高、低SS体积份额的两吸收子层组成.优化溅射镀膜工艺参数获得高性能吸收涂层,太阳吸收比α(AM1.5)高达0.956±0.003(国标GB:α≥0.86),比GB高10%;红外发射比ε仅为0.043±0.003(GB:ε≤0.08).制备成φ58×2100 mm全玻璃真空太阳集热管,80℃平均热损系数ULT仅为0.47±0.01 W/m2℃ (GB:ULT≤0.85 W/m2℃),比GB低0.38W/m2℃,性能提高45%.制备的真空集热管具有良好的真空品质,集热管内管加热350℃恒温480 h后,吸气镜面轴向长度平均消失率仅为2~3%,集热管真空品质优于GB高达100倍以上(GB:350℃恒温48 h,镜面消失率≤50%). 相似文献
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T. Eisenhammer 《Thin solid films》1995,270(1-2):1-5
Selective absorbers for solar thermal energy applications have to show high solar absorptance s and low thermal emittance εh. Stability against oxidation and diffusion is indispensable, especially at high absorber temperatures. The new class of quasicrystalline materials seems to have favourable properties regarding stability. With a genetic algorithm a thin film stack based on dielectric and quasicrystal films was optimized as a selective absorber. A sandwich system dielectric/quasicrystal/dielectric on copper has highly selective properties: s = 0.86 and εh (400 °C) = 0.051. Even better results can be achieved, at least in theory, by the use of a cermet. The optical constants of cermets with the quasicrystalline material as the metal were calculated with the Bruggeman theory. A system of a cermet film and an additional antireflective coating on copper shows s = 0.92 and εh (400 °C) = 0.048. 相似文献
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Preparation of solar selective absorbing coatings by magnetron sputtering from a single stainless steel target 总被引:2,自引:0,他引:2
This paper presents a method to prepare solar selective absorbing coatings by radio frequency magnetron reactive sputtering using a single stainless steel target. Stainless steel/stainless steel nitride (SS/SS-N) ceramic-metal composite (cermet) thin films were produced under varied nitrogen gas flow ratios. The solar selective absorbing films have good solar absorptance of 0.91 and thermal emittance of 0.06 at 82 °C. The refractive index (n) and extinction coefficient (k) of the cermet composite layers prepared in nitrogen and argon atmospheres were determined by spectroscopic ellipsometry. The films were also analyzed by different oscillator models. The results showed a significant transformation from metal to cermet as the nitrogen gas flow ratio was increased to 10%. As the nitrogen gas flow ratio was increased to 17.5%, the film became a dielectric layer that could be used as an anti-reflection layer, suitable as the outermost layer of the solar selective absorbing coatings. A theoretical solar absorptance of 0.92 was achieved by selecting an appropriate combination of three solar absorbing layers. The experimental results agreed well with the theoretical calculations. This study proved the possibility of preparing solar selective absorbing coatings with high solar absorptance by using a single stainless steel target. 相似文献
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Davorin Pavić 《真空研究与实践》2012,24(3):34-39
High‐selective absorber coatings for solar thermal collectors Highly selective absorber coatings are necessary for the effective operation of state‐of‐the‐art solar thermal collectors. The thin film gradient optical coating with its spectrally selective characteristics achieves high solar absorptance combined with low thermal emittance. Such complex multi‐layer systems are produced in modular vacuum coating processes. Industrial air‐to‐air coating lines allow the continuous coating of metal bands in a pass‐through process and provide absorber coatings which meet highest demands for efficiency, durability and esthetics. 相似文献
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Selectively absorbing surfaces are important for the efficient use of solarenergy. The main characteristics aimed at for this type of coatings are the highest possible absorptivity for solar radiation and the lowest possible emissivity for thermal radiation. (Temperatures up to 100–200°C). There are several ways to create surfaces with these properties. In the present work evaporated semiconductor films with suitable anti-reflection coatings were used on different metals. For the laboratory tests, the metals were vacuum evaporated on glass substrates. The evaporations were performed with an electron beam gun in a diffusion pumped system. The evaporated thicknesses and the rate of evaporation were controlled by a quartz crystal monitoring system. The selective coatings were studied on flat and rough metal surfaces. Sinusoidal, metal covered gratings with different periods were used as the rough absorber surfaces. This simplified the measurements of absorptivity and emissivity and gave a more thorough understanding of the basic thin film phenomena. It is possible to use gratings because the general rough surface can be looked upon as a superposition of different sinusoidal gratings. A comparison is made between the properties of the layers on flat and rough surfaces. The coatings were subjected to high humidity and high temperature tests. They were also cycled between the intended working temperature and ambient temperature to check possible degradation. Results concerning film adherence and stability during these environmental tests are given. 相似文献
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设计了一种基于微带方形开口环结构的太赫兹波吸收器,它由顶层方形开口环、中间电介质层基体和底层金属板组成.提出一种等效电路模型,利用该模型完成了对太赫兹波吸收器的设计、加工与测试.研究结果表明,吸收器在0.575THz处吸收率高达0.993.通过对器件的物理尺寸及材料参数的灵活调节,经优化设计即可实现对不同频率入射电磁波的高吸收.该吸收器具有结构简单、体积小、吸收率高等优点,有望在频谱成像、热辐射探测等应用中发挥重要作用. 相似文献
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In terms of both high photo-thermal efficiency and high stability, multi-layer structures based on metal-dielectric composites (cermet) can be considered the most attractive selective solar absorbers for receiver tubes operating at medium-high temperatures in the field of solar thermodynamic plants. The double cermet layer approach represents a very simple fabrication method and can give high performances in terms of high solar absorptance and low hemispherical emittance. Optimised solar coatings based on cermet layers were fabricated in our laboratories by sputtering technique following the double layer approach. The joined employment of ellipsometric measurements and optical simulation is proposed as an effective method to optimise and fabricate coatings showing the best performances at a fixed operating temperature of the receiver tube. Interesting results concerning an optimised spectrally selective coating are shown. Solar absorptance higher than 0.94 and hemispherical emittance at 580 °C lower than 0.13 were obtained. 相似文献
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在沉积不锈钢-氮化铝(SS-AlN)金属陶瓷太阳吸收集热管的磁控溅射三靶镀膜机上,安装了UPS03反应溅射闭环控制单元,实现反应溅射Al2O3稳定反馈控制。采用国产直流电源在Al靶表面处于过渡态下,成功制备了吸收几乎为零的Al2O3薄膜。溅射功率在14kW时,反应溅射沉积Al2O3的靶电压波动可长时间稳定控制在±3 V范围内,沉积速率为5.4 nm/(min·kW),约为Al靶在无反应气体溅射下沉积Al薄膜速率的74%。采用Al2O3代替AlN作为减反射层,应用到SS-AlN太阳选择性吸收涂层中,进一步提高了复合膜的太阳光学性能,太阳吸收比由AlN作为减反射层的0.956提高到0.965,红外发射比不变,仍为0.044。 相似文献
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A cermet/lubricating glass-combination for friction pairs at working temperatures 650–1100°C The function and the efficency of technical plants are limited by the used materials and their behaviour under working conditions. At elevated temperatures, the corrosion and wear resistance and the thermal shock behaviour are as necessary as mechanical stability at high operating temperatures. Metals and ceramics often cannot meet the conditions. Dynamic applications may require lubricatings, metals surfaces may be too soft and not very oxidation-resistant. Metal-ceramic materials, -cerments-, use a combination of the properties of their microstructural parts. This paper shows a combination of a cermet and a lubricating glass with interesting aspects for high temperature operation. 相似文献