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Mg-doped InGaN/GaN p-type short-period superlattices (SPSLs) are developed for hole injection and contact layers of green light-emitting diodes (LEDs). V-defect-related pits, which are commonly found in an InGaN bulk layer, can be eliminated in an InGaN/GaN superlattice with thickness and average composition comparable to those of the bulk InGaN layer. Mg-doped InGaN/GaN SPSLs show significantly improved electrical properties with resistivity as low as ∼0.35 ohm-cm, which is lower than that of GaN:Mg and InGaN:Mg bulk layers grown under optimized growth conditions. Green LEDs employing Mg-doped InGaN/GaN SPSLs for hole injection and contact layers have significantly lower reverse leakage current, which is considered to be attributed to improved surface morphology. The peak electroluminescence intensity of LEDs with a SPSL is compared to that with InGaN:Mg bulk hole injection and contact layers.  相似文献   

3.
The barrier thickness effect on the energy and microstructure properties of InGaN/GaN multiple quantum wells is investigated with Stillinger-Weber potential. The calculation indicates that the energy of a quantum well increases as the GaN barrier thickness rises, and that Ga-N and In-N bonds are shrunk with respect to those of random InGaN alloy. Moreover, a critical value of the barrier thickness exits. If the barrier thickness exceeds the critical value, the bond length of Ga-N in quantum wells reduces as a function of indium concentration. This singular behavior of Ga-N bond is analyzed with a force balance model.  相似文献   

4.
利用应力释放模型计算了 Zn Cd Se/Ga As间的临界厚度 ,并以该临界厚度为基础 ,用 MOVCD设备在Stranski-Krastanow (S-K)生长模式下 ,外延生长了 Zn Cd Se量子点。用原子力显微镜和光谱测量的方法研究了量子点的演化过程。随着时间的推移 ,量子点发生了两种变化 ,即 Ostwald熟化过程和量子点的生成过程。另外 ,量子点由尖塔状逐渐演化为圆顶状。这种形状的变化可以用晶体生长模型进行解释。通过分析量子点样品的发光光谱 ,发现了两种发光机制 ,一种是零维量子点激子的发光 ,另一种是二维激子的发光。随着量子点生长完毕与加盖层之间间隔时间的增加 ,零维激子对二维激子发光的比值增加 ,且发光峰位明显红移。这从另一方面验证了由原子力显微镜直接观测到的量子点的演化过程  相似文献   

5.
曹文彧  王文义 《半导体光电》2019,40(2):211-214, 251
为了减弱InGaN/GaN量子阱内的压电极化场,在蓝紫光InGaN/GaN多量子阱激光器结构中采用了预应变InGaN插入层,通过变温电致发光和高分辨X射线衍射测量研究了预应变插入层对量子阱晶体质量和发光特性的影响。实验结果显示,常温下有预应变层的量子阱电致发光谱积分强度显著提高。模拟计算进一步表明,预应变层对量子阱内压电极化场有调制效果,有利于量子阱中的应力弛豫,可以有效减弱量子限制斯塔克效应,有助于提高量子阱的发光效率。  相似文献   

6.
Progress in wide bandgap, III–V material systems based on gallium nitride (GaN) has enabled the realization of high‐power and high‐frequency electronics. Since the highly conductive, 2D electron gas (2DEG) at the aluminum gallium nitride (AlGaN)/GaN interface is based on built‐in polarization fields and is confined to nanoscale thicknesses, its charge carriers exhibit much higher mobilities compared to their doped counterparts. This study shows that such 2DEGs also offer the unique ability to manipulate electrical transport separately from thermal transport, through the examination of fully suspended AlGaN/GaN diaphragms of varied GaN buffer layer thickness. Notably, ≈100 nm thin GaN layers can considerably impede heat flow without electrical transport degradation. These achieve 4× improvement in the thermoelectric figure of merit (zT) over externally doped GaN, with state‐of‐the‐art power factors of 4–7 mW m‐1 K‐2. The remarkable tuning behavior and thermoelectric enhancement, elucidated here for the first time in a polarization‐based heterostructure, are achieved because electrons are at the heterostructured interface, while phonons are within the material system. These results highlight the potential for using 2DEGs in III–V materials for on‐chip thermal sensing and energy harvesting.  相似文献   

7.
We demonstrate the ability of a combined scanning electron microscope and cathodoluminescence(CL) spectral mapping system to provide important spatially resolved information.The degree of inhomogeneity in spectral output across a multi-quantum well sample is measured using the SEM-CL system as well as measuring the efficiency roll-off with increasing carrier concentration.The effects of low energy electron beam modification on the InGaN/GaN multi quantum wells have also been characterized.  相似文献   

8.
Composite InGaN/GaN/InAlN quantum dots (QDs) have been formed and studied. The structural properties of thin InAlN layers overgrown with GaN have been analyzed, and it is shown that 3D islands with lateral sizes of ∼(20–30) nm are formed in structures of this kind. It is demonstrated that deposition of a thin InGaN layer onto the surface of InAlN islands overgrown with a thin GaN layer leads to transformation of the continuous InGaN layer to an array of isolated QDs with lateral sizes of 20–30 nm and heights of 2–3 nm. The position of these QDs in the growth direction correlates with that of InAlN islands.  相似文献   

9.
MOCVD-grown heterostructures with one or several InxGa1?x N layers in a GaN matrix have been studied by transmission electron microscopy. In heterostructures with thick InGaN layers, a noncoherent system of domains with lateral dimensions (~50 nm) on the order of the layer thickness (~40 nm) is formed. In the case of ultrathin InGaN inclusions, nanodomains coherent with the GaN matrix are formed. The content of indium in nanodomains, determined by the DALI method, is as high as x≈0.6 or more, substantially exceeding the average In concentration. The density of the nanodomains formed in the structures studied is n≈(2–5)×1011 cm?2. In the structures with ultrathin InGaN inclusions, two characteristic nanodomain sizes are observed (3–6 and 8–15 nm).  相似文献   

10.
We demonstrate the ability of a combined scanning electron microscope and cathodoluminescence (CL) spectral mapping system to provide important spatially resolved information. The degree of inhomogeneity in spectral output across a multi-quantum well sample is measured using the SEM-CL system as well as measuring the efficiency roll-off with increasing carrier concentration. The effects of low energy electron beam modification on the InGaN/GaN multi quantum wells have also been characterized.  相似文献   

11.
Complementary nondestructive electron probe methods were used for characterization of semiconductor multilayer structures. We used cathodoluminescence and electron probe microanalysis for studying laser heterostructures based on GaAs/AlGaAs/InGaAs/GaAs and InGaN/GaN. Our latest investigation showed the possibility of measuring the composition of buried layers and determining the composition of thin nanoscale layers by electron probe microanalysis. Simultaneous use of local cathodoluminescence is very useful for defect study in bulk semiconductors, epilayers, and multilayer heterostructures. This method allows characterization of charge-carrier transport properties and diffusion length in multilayer structures, using the variation of the electron beam energy and calculation of the electron penetration depth.  相似文献   

12.
Double-crystal and triple-axis x-ray diffractometry and transmission electron microscopy are used to characterize the microstructure, strain, and composition of InGaN layers grown on GaN by metalorganic chemical vapor deposition (MOCVD). Three different samples with increasing In concentration have been studied, all grown on GaN deposited on sapphire either with GaN or AlN buffer layers. It was found that InGaN layers with nominal 28% and 40% InN content consist of two sub-layers; the first sub-layer is pseudomorphic with the underlying GaN with lower In content than nominal. The top sub-layer is fully relaxed with a high density of planar defects and In content close to the nominal value. This is in contrast to a common assumption applied to InGaN quantum wells that ‘quantum-dot like areas’ are formed with different In content. The sample with the nominal indium concentration of 45% does not exhibit any intermediate strained layer, is fully relaxed and the In concentration (43.8%) agrees well with the nominal value.  相似文献   

13.
InGaN/(Al,Ga)N heterostructures containing ultrathin InGaN layers, grown by submonolayer deposition are studied. It is shown that significant phase separation with the formation of local In-enriched regions ??3?C4 nm in height and ??5?C8 nm in lateral size is observed in InGaN layers in the case of InGaN and GaN growth by cyclic deposition to effective thicknesses of less than one monolayer. The effect of growth interruption in a hydrogen-containing atmosphere during submonolayer growth on the structural and optical properties of InGaN/(Al,Ga)N heterostructures is studied. It is shown that these interruptions stimulate phase separation. It is also shown that the formation of In-enriched regions can be controlled by varying the effective InGaN and GaN thicknesses in the submonolayer deposition cycles.  相似文献   

14.
A combination of nanoscale imaging techniques such as atomic force microscopy and scanning electron microscopy are used to investigate the relationship between surface morphology and height statistics of GaN cap layers in InGaN/GaN light emitting diode heterostructures. The investigated samples were grown in two very different growth regimes which lead to distinct characteristic superficial landscapes. We also report here on the introduction of a new methodological approach that adapt the concept of height-height correlation function, a well known statistical tool in the field of studies on rough surfaces. We evaluate to which extent the geometrical properties of the constitutive ‘bricks’ (hillocks for ammonia assisted molecular beam epitaxial film) and structural defects (dislocation pits for metal organic vapor phase epitaxial film) affects the statistical properties of heights of these GaN surfaces. Finally, we have studied the spatial distribution of dislocation pits in both the samples to assess the quantitative differences between these heterostructures of very distinct surface morphology.  相似文献   

15.
Tsatsulnikov  A. F.  Lundin  W. V.  Zavarin  E. E.  Nikolaev  A. E.  Sakharov  A. V.  Sizov  V. S.  Usov  S. O.  Musikhin  Yu. G.  Gerthsen  D. 《Semiconductors》2011,45(2):271-276
Results of studies of hydrogen addition during the growth of thin (∼2–3 nm) InGaN layers on their structural properties and properties of light-emitting structures that contain InGaN/GaN heterostructures in the active region are reported. It is shown that, with the known effect of a decrease in the average content of In, hydrogen addition leads to varying the local phase separation in the InGaN layers. Hydrogen addition during the growth of the InGaN layers initially causes suppression of the local phase separation, while hydrogen addition during interruptions of the growth after deposition of the InGaN films leads to a decrease in the size of the formed local In-enriched regions and to a certain increase in the local content of the In atoms.  相似文献   

16.
Based on the effective-mass approximation, exciton states in wurtzite (WZ) and zinc-blende (ZB) InGaN/GaN coupled quantum dots (QDs) are studied by means of a variational method. Numerical results show clearly that both the sizes and In content of QDs have a significant influence on exciton states in WZ and ZB InGaN/GaN coupled QDs. Moreover, the ground-state exciton binding energy decreases when the interdot barrier layer thickness increases in the WZ InGaN/GaN coupled QDs. However, the ground-state exciton binding energy has a minimum if the interdot barrier layer thickness increases in the ZB InGaN/GaN coupled QDs.  相似文献   

17.
Spatial analysis techniques were used to investigate defects and nanostructures in the III-nitride system. Dislocations in GaN films were distributed nonrandomly, forming both short-scale and large-scale linear arrays aligned along \( \langle 11\bar{2}0\rangle . \) Both low-density InGaN/GaN quantum dots (QDs) and In droplets on the surface of InAlN films were in spatially random positions and showed no spatial autocorrelation, but high-density InGaN/GaN QDs showed a tendency toward short-range ordering and all features showed a nonrandom size distribution. The spatial arrangements of defects and nanostructures relate to their generation processes and may also affect device properties.  相似文献   

18.
We have studied the influence of indium (In) composition on the structural and optical properties of Inx Ga1−xN/GaN multiple quantum wells (MQWs) with In compositions of more than 25% by means of high-resolution x-ray diffraction (HRXRD), photoluminescence (PL), and transmission electron microscopy (TEM). With increasing the In composition, structural quality deterioration is observed from the broadening of the full width athalf maximum of the HRXRD superlattice peak, the broad multiple emission peaks oflow temperature PL, and the increase of defect density in GaN capping layers and InGaN/GaN MQWs. V-defects, dislocations, and two types of tetragonal shape defects are observed within the MQW with 33% In composition by high resolution TEM. In addition, we found that V-defects result in different growth rates of the GaN barriers according to the degree of the bending of InGaN well layers, which changes the period thickness of the superlattice and might be the source of the multiple emission peaks observed in the InxGa1−xN/GaN MQWs with high in compositions.  相似文献   

19.
Effect of pressure in the reactor in the case of growth of active regions in the InGaN/GaN light-emitting diodes by the method of vapor-phase epitaxy from metalorganic compounds on their electroluminescent and structural properties has been studied. It is shown that, as pressure is increased, the InGaN layers become transformed from being continuous in the lateral direction to the layers of separate InGaN islands. This transformation affects both the emission efficiency and the dependence of efficiency on current.  相似文献   

20.
The ability of a material to conduct heat influences many physical phenomena, ranging from thermal management in nanoscale devices to thermoelectrics. Van der Waals 2D materials offer a versatile platform to tailor heat transfer due to their high surface-to-volume ratio and mechanical flexibility. Here, the nanoscale thermal properties of 2D indium selenide (InSe) are studied by scanning thermal microscopy. The high electrical conductivity, broad-band optical absorption, and mechanical flexibility of 2D InSe are accompanied by an anomalous low thermal conductivity (κ). This can be smaller than that of low-κ dielectrics, such as silicon oxide, and it decreases with reducing the lateral size and/or thickness of InSe. The thermal response is probed in free-standing InSe layers as well as layers supported by a substrate, revealing the role of interfacial thermal resistance, phonon scattering, and strain. These thermal properties are critical for future emerging technologies, such as field-effect transistors that require efficient heat dissipation or thermoelectric energy conversion with low-κ, high electron mobility 2D materials, such as InSe.  相似文献   

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