滚珠丝杠传动机构的微动特性及轨迹跟踪控制

滚珠丝杠传动的机床进给机构在微观运动条件下的各种非线性因素和进给系统较高的机械增益是影响机床运动的控制精度进一步提高的主要因素.本文研究了滚珠丝杠进给机构的微动特性,结果表明库仑摩擦和微弹性现象是滚珠丝杠在微动条件下的主要运动特性.针对这一特性,提出了一种基于误差的增益自适应控制器,该控制器能够有效地提高系统的稳定性,并能保证足够的控制精度.对幅值为1μm的正弦输入,其跟踪控制误差小于0.04μm.对幅值为1mm的正弦输入,其跟踪控制误差为0.5μm.     

滚珠丝杠进给系统结构模态特性对位置环增益的影响性分析

为充分考虑滚珠丝杠结构模态特性对伺服控制器及进给驱动系统整体统态性能的影响,建立了基于特征模态的滚珠丝杠进给系统状态空间缩聚模型,以实现在模态特性影响下求解进给系统动力学响应的同时与伺服控制系统集成;在此基础上,建立了基于滚珠丝杠进给系统状态空间缩聚模型的伺服系统位置调节回路模型,推导了系统模态频率、开环幅值响应激增值与位置环增益之间的约束关系式,进行了滚珠丝杠进给系统模态特性对位置环增益的影响性分析,实现了特征模态影响下位置环增益参数的最优值估计。通过实例验证了基于状态空间的滚珠丝杠进给系统模态特性提取、滚珠丝杠进给系统模态特性对位置环增益的影响性分析结果、结构特征模态影响下的位置环增益参数最优值估计的正确性。     

一种宏微双重驱动精密定位机构的建模与控制

提出一种宏微双重驱动精密定位机构,采用高性能直线电机直接驱动宏动平台,实现系统大行程微米级精度定位;安装在宏动平台上的压电陶瓷驱动微动平台,实现纳米级的分辨率和定位精度,以高频响动态补偿系统的定位误差;采用精密光栅尺反馈微动平台输出端的位置信号,实现定位机构的全闭环反馈控制。在分别建立宏动、微动、宏微机构模型的基础上,提出复合型宏动控制和模糊自校正PID微动控制的宏微控制策略。实验研究表明:系统的动态和稳态性能良好,该定位机构的最大工作行程100 mm,稳定时间小于40 ms,重复定位精度10 nm。     

压电式双驱微进给系统设计及定位精度研究

针对压电陶瓷存在的迟滞特性,为提高微动台定位精度,提出一种基于双驱控制技术的双压电驱动的微进给系统。系统采用运动控制器作为控制部分,双压电陶瓷以推拉形式同时驱动微动台,配置多个位移传感器构成闭环控制系统。为验证系统定位精度,针对压电陶瓷的迟滞特性,采用Preisach-Mayergoyz模型分别进行系统开/闭环控制定位误差对比实验。实验结果表明,相比于单个压电陶瓷驱动,双压电陶瓷同时驱动的情况下系统最大定位误差更小,闭环状态下双压电驱动微动台系统定位精度更高,最大定位误差明显减小,系统稳定性更高。     

基于dSPACE平台梯形速度的PID控制模型建立及实验

为研究伺服电机直接驱动滚珠丝杠机构的速度动态特性,基于dSPACE平台建立了一套实时控制系统,进行了梯形速度曲线的规划、求解和Simulink模型的建立.在此基础上,建立了一种梯形速度PID控制的Simulink模型.通过不同PID参数的实验,表明梯形曲线的起点和拐点是实时控制的难点,且随运动速度的增大误差也同时增大.本文经大量实验得到了一组较高精度的速度控制参数,并在曲线的起点和拐点也实现了平稳控制.     

一种新型双轴差速式微量进给系统的建模与分析

常规驱动进给系统(Conventional drive feed system,CDFS)的低速运行动态性能对机床的跟踪及定位精度、零件表面加工质量等有着非常重要的影响。非线性摩擦使CDFS在低速运行时出现爬行现象,从而严重影响其低速性能。为了克服CDFS的精度极限,提出一种新型的双轴差速式微量驱动进给系统(Dual-axis differential micro-feed system,DDMS)。在DDMS中,将常规"丝杠旋转型"滚珠丝杠副替换为"螺母旋转主驱动型"滚珠丝杠副,丝杠和螺母均由伺服电动机驱动。两个驱动轴(电动机驱动丝杠和电动机驱动螺母)的运动方向一致,速度几乎一样,通过"螺母和丝杠复合驱动"的差速式传动结构进行合成,可以使被驱动件在极低速下获得均匀、稳定的微量进给。和CDFS相比,丝杠和螺母都在高速下旋转,所以滚珠丝杠副的非线性摩擦干扰会显著降低。系统的摩擦特性用Lu Gre模型来描述,而且对滚珠丝杠传动副和直线运动导轨处的摩擦分别进行建模。通过仿真和试验研究发现,和CDFS相比,DDMS可以使工作台在极低速下获得稳定的速度响应和极高的分辨率。并且,DDMS在低速下的位置跟踪精度也比CDFS高。因此,提出的DDMS可以有效降低摩擦对系统的不利影响,为低速下驱动进给系统动态性能提高建立了基础。     

滚珠丝杠螺母副热态特性建模方法

以某外循环滚珠丝杠螺母副为研究对象,对其热态特性及其建模方法进行研究。在分析滚珠丝杠进给系统的热源和边界条件的基础上,建立了丝杠稳态温度分布的数学模型,并通过软件编程求解得到丝杠温度场和滚道的存在对丝杠稳态温度的影响;建立了考虑滚道影响的滚珠丝杠进给系统有限元分析模型,获得了滚珠丝杠进给系统稳态和瞬态热特性分析结果;最后通过滚珠丝杠螺母副热特性试验,获得了滚珠丝杠进给系统关键点的温度及其变化情况。研究结果表明：所建立的滚珠丝杠螺母副热特性分析数学模型可以较准确地获得滚珠丝杠的温度场,忽略滚道会使滚珠丝杠螺母副的温度场仿真结果产生15%～20%的误差。     

考虑运行条件的Elman网络丝杠驱动系统热误差建模

研究了建立滚珠丝杠副热误差模型的方法,以进一步提高半闭环丝杠驱动系统的定位精度。分析了滚珠丝杠副的热源和温度场的动态特性并考虑丝杠驱动系统运行条件提出了基于Elman神经网络的热误差建模方法。首先,根据滚珠丝杠副的结构特点,确定其内部热源及温度场分布特性。然后,基于丝杠温度分布函数,研究丝杠热变形与其内部热源之间的动态非线性函数关系。最后,综合考虑丝杠驱动系统运行条件对其热误差的影响,建立了基于Elman神经网络的热误差预测模型。实验结果表明,当丝杠驱动系统的运行条件较为复杂时,采用文中提出的预测模型得到的热变形估计残差为-3.1μm~2.4μm。结果显示:考虑运行条件的Elman神经网络比BP和Elman网络(仅考虑温升数据)具有更好的预测精度和鲁棒性,有较强的工程应用前景。     

变宽度圆盘剪切机控制方案的实验研究

以变宽度圆盘剪切机的滚珠丝杠副带动的平动机构以及蜗轮蜗杆副带动的转动机构为研究对象,在Lab VIEW软件平台上构建了驱动两类执行机构伺服电机的开环、半闭环及全闭环位置控制系统。根据大量实验数据,分析了3种不同控制方式下系统的定位精度和过渡过程特性,得出当高精度电机配合高精度的传动机构时,采用半闭环控制加传动精度补偿的方式,可以实现高精度控制的结论,为剪切机实现复杂轨迹运动时控制方案的选择提供依据。     

精密微切削加工系统的研制及结构动态特性分析

为了满足高精度微小零件的加工需要,设计并搭建一台三轴联动的精密微切削加工系统,机床的本体尺寸为400 mm×400 mm×500 mm,机床的运动空间尺寸为150 mm×150 mm×150 mm,采用伺服电机+滚珠丝杠+光栅尺的驱动方式,实现全闭环控制系统。利用CTAIA软件对精密微切削加工系统进行三维建模,利用有限元ANSYS Workbench软件对该系统进行动力学分析,获得模态与谐响应特性。研究了精密微切削加工系统的固有频率与振型,对其进行优化和改建。     

Precision positioning of a DC-motor-driven aerostatic slide system

This paper deals with precision positioning in the presence of friction. The object studied is an aerostatic slide system driven by a DC motor with brushes that introduce friction to the system. For such systems, models that do not account for friction can only be used to describe the macrodynamic behavior. The microdynamic behavior is significantly different. Instead of designing two controllers for the different dynamics, a single-step precision positioning using a high-gain controller designed according to the macrodynamics alone is proposed. A proportional-integral-derivative (PID) controller with finite-gain derivative and a modified anti-windup integral reset is designed. Controller parameters are obtained by pole placement rather than manual tuning or other rules of thumb. Identification of the microdynamics is avoided. Single-step precision positioning and uniform response to different sizes of step input are achieved. This method is particularly effective when the friction has uncertainty. Experimental and simulated results indicate that the PID controller can provide a sufficiently high loop gain. In point-to-point positioning for step inputs from millimeter size down to submicrometer size, the positioning error is within ±2 nm and the response dynamics is satisfactory.     

Submicrometer overshoot control of rapid and precise positioning

Precise-positioning technique is relatively well developed. However, it is still difficult to avoid an overshoot or to limit the overshoot within a submicrometer in a rapid and precise positioning. Inspired by recent studies on microdynamics, a control algorithm based on the variable structure control (VSC) method is proposed to achieve an overshoot smaller than 0.2 μm and rapid, precise positioning (a 0.5 mm 1 cm positioning with a steady-state error smaller than 30 nanometer in 0.5 s) with a linear motor drive stage. The stage is guided by a rolling ball guide and with a 10 nm resolution laser interferometer as its position sensor. Some characteristic values in the friction model of microdynamics are included to design the controller. Therefore, we found a way to achieve rapid, precise, and Small overshoot positioning by combining mechanism design system identification, lubrication, and controller design techniques.     

大行程纳米级定位工作台的结构设计

考虑采用静态三步拼接曝光法的扫描干涉场曝光系统的性能与工作台的定位精度及稳定性相关,设计了一种大行程、高精度二维工作台以提高其定位精度。采用摩擦驱动和压电陶瓷微位移机构组合的方式构成宏、微进给机构,由闭式气体静压导轨带动工作台实现沿X、Y两个方向的光栅分度与扫描运动。优化设计了摩擦驱动机构和气体静压导轨结构,并对工作台整体结构固有频率进行了有限元分析。使用自准直仪检测了导轨在X、Y方向的直线性,结果显示其两方向偏航和俯仰精度均在±0.04μm以内。使用激光干涉仪检测了导轨在X方向的定位精度和定位噪声,结果表明,对X向行程为220mm、Y向行程为300mm的工作台,其X方向的定位精度优于±5nm,定位稳定性可达±25nm。得到的结果满足扫描干涉场曝光系统工作台纳米级定位精度的要求。     

超磁致伸缩致动器的广义预测-多模PID控制

为了克服超磁致伸缩致动器的磁滞现象对精密驱动定位精度的影响,在进行磁滞补偿的前提下,研究了自校正PID控制方法,提出了基于广义预测控制的广义预测-多模PID控制方法。介绍了广义预测控制的主要思想,并由此导出PID参数与被控对象待估参数的关系,实现了广义预测PID控制;针对起动阶段控制效果不平稳的问题,提出了多模PID控制模式转换条件;最后,根据PID参数变化情况,建立致动器的多模PID控制方法,实现广义预测PID与常规PID的在线控制模式转换与控制。实验结果表明,采用广义预测-多模PID控制器,虽然单次平均运算时间比广义最小方差-模糊PID控制器长7ms,但跟踪误差均方差减少了0.066μm;同时改善了起动平稳性。提出的控制方法能有效消除由扰动带来的影响,提高跟踪精度,改善起动平稳性,适用于对实时性、控制精度要求较高的精密定位领域。     

Robust friction compensation for submicrometer positioning and tracking for a ball-screw-driven slide system

Ball-screw-driven slide systems are largely used in industry for motion control applications. Their performance using standard proportional-integral-derivative (PID) control algorithm is unsatisfactory in submicrometer motion control because of nonlinear friction effects. In this article, controllers based on a bristle-type nonlinear contact model are developed and implemented for submicrometer motion. For submicrometer positioning, a proportional-derivative (PD) control scheme with a nonlinear friction estimate algorithm is developed, and its performance is compared with that of a PID controller. For tracking, a disturbance observer was added to reject external disturbances and to improve robustness. The experimental results indicate that the proposed controller has consistent performance in positioning with under 1.5% of steady-state error in the submicrometer range. For tracking performance, the proposed controller shows good and robust tracking with respect to parameter variation.     

Practical control of precision positioning mechanism with friction

This paper describes the practical control of precision positioning mechanisms with friction. In a controller design, the microdynamic characteristic of these mechanisms is taken into account. First, the behavior of an experimental mechanism immediately before stopping is examined experimentally and its characteristics, namely, the micro- and macrodynamic ones are modeled. Next, a practical control method is proposed for the mechanism. The controller is designed based on the nominal characteristic trajectory following (NCTF) controller design procedure. It consists of a nominal characteristic trajectory (NCT) and a PI compensator. The NCT is determined using an open-loop time response of the mechanism and is represented on a phase plane. The compensator is used to make the mechanism motion follow the NCT and to stop the motion at the origin of the phase plane. Although the compensator is designed based on the microdynamic characteristic, it is useful in a wide working range. The positioning performance of the system with the proposed controller is examined in comparison with those of the system with conventional PID controllers. These results prove that the system with the proposed controller has a better positioning performance than those with conventional PID controllers and its positioning resolution is higher than 50 nm.     

Thermal error modeling and compensation of long-travel nanopositioning stage

Thermally induced error of nanopositioning systems is rarely studied specifically because most researchers strictly limit the ambient temperature in order to ignore the influences of thermal deformation. However, the control cost of a narrow temperature range is too high for widely application. This paper is addressed at modeling and compensation of thermal error with the purpose of ensuring the positioning accuracy with an extended temperature range. The finite element analysis and contrast experiments with different temperature ranges reveal the significant impact of temperature variation on positioning precision. A polynomial model based on the genetic algorithm is implemented to describe the relationship between deviations and temperatures. By utilizing the parametric study, the optimal parameters of the genetic algorithm are determined. Based on the thermal model, a compensation system has been developed. A constant proportional–integral–derivative (PID) controller and a single-neuron PID controller are employed for compensation, respectively. The results demonstrate that the single-neuron PID controller can effectively restrain thermal error and guarantee the location accuracy with extended temperature range. The positioning precision of the positioning stage with compensation system and temperature range of 20?+?0.3°C is improved to 12 nm, while the one of the original system with temperature range of 20?±?0.01°C is 31 nm.     

压电陶瓷微动台的复合控制

压电陶瓷微动台的迟滞非线性严重影响其动态定位精度,为了解决这一问题,采用一种改进的PI模型对微动台的迟滞非线性进行了建模.为了提高传统PID算法对压电陶瓷微动台的动态定位性能,将改进的PI模型与传统PID算法组合构成前馈复合控制算法,并进行了微动台的慢速与快速动态定位实验.结果表明,对同频曲线定位时,前馈PID复合算法的最大误差为传统PID算法的40％左右,平均误差为传统算法的20％～30％左右;对多频曲线定位时,前馈PID复合算法的最大误差和平均误差为传统PID算法的33％左右.数据表明前馈PID复合算法的动态定位性能明显优于传统PID算法.     

Characteristics of practical control for point-to-point (PTP) positioning systems: Effect of design parameters and actuator saturation on positioning performance

In this study, a nominal characteristic trajectory following (NCTF) controller for point-to-point (PTP) positioning systems is introduced and its performance is evaluated. The NCTF controller consists of a nominal characteristic trajectory (NCT) and a compensator. The objective of the NCTF controller is to make the object motion follow the NCT and end at its origin. Therefore, the NCT is used as an intended object motion and the compensator is used to make the motion of the controlled object follow the NCT. The NCTF controller is designed based on a simple open-loop experiment of the object and no information except the NCT is necessary for controller design. The effectiveness of the NCTF controller is evaluated and discussed through simulations and experiments using an experimental rotary positioning system. The effect of the design parameters on the robustness of the NCTF controller to inertia and friction variations is evaluated and the influence of saturation on the positioning performance is examined. Moreover, the effects of the saturation on the positioning performance and robustness are compared with those of conventional PID ones. It is proved that the NCTF controller is much more accurate and robust to inertia and friction variations than the PID controllers, even if the saturation occurs.     

Nano positioning control for dual stage using minimum order observer

A nano positioning control is developed using the ultra-precision positioning apparatus such as actuator, sensor, guide, power transmission element with an appropriate control method. Using established procedures, a single plane X-Y stage with ultra-precision positioning is manufactured. A global stage for materialization with robust system is combined by using an AC servo motor with a ball screw and rolling guide. An ultra-precision positioning system is developed using a micro stage with an elastic hinge and piezo element. Global and micro servos for positioning with nanometer accuracy are controlled simultaneously using an incremental encoder and a laser interferometer to measure displacement. Using established procedures, an ultra-precision positioning system (100 mm stroke and ±10 nm positioning accuracy) with a single plane X-Y stage is fabricated. Its performance is evaluated through simulation using Matlab. After analyzing previous control algorithms and adapting modern control theory, a dual servo algorithm is developed for a minimum order observer to secure the stability and priority on the controller. The simulations and experiments on the ultra precision positioning and the stability of the ultra-precision positioning system with single plane X-Y stage and the priority of the control algorithm are secured by using Matlab with Simulink and ControlDesk made in dSPACE.