一种基于SOI的集成光波导耦合系统的设计与制备

根据锥形光纤与平面环型微腔耦合原理,使用L-Edit版图设计软件设计并优化了锥形光波导与微腔耦合系统。利用MEMS工艺对SOI圆晶片进行加工,从而实现了锥形光波导与跑道型以及环型光波导微腔的集成。其中,光波导以及微腔通过ICP刻蚀顶层硅而成,矩形槽通过RIE刻蚀衬底硅而成。光波导两侧的矩形凹槽可方便光纤接人以及对出射光...     

1×16微机电系统光纤连接器阵列的研制

一种基于MEMS工艺的硅基阵列化光纤连接器,具有微型化、可集成制造和重复性好等特点。每个单元利用硅V型槽与其上集成制造的电沉积流线型曲面金属镍盖板的组合形成了方便光纤插拔的喇叭口形导引通道和可实现光纤定位及精确自对准的双悬臂梁形夹持通道。采用Ansys软件对双悬臂梁结构在不同的厚度与翘曲位移条件下对光纤产生的压制力进行建模与仿真,并将其与理论分析结果进行比较。成功地将单元扩展成1×16阵列,体积仅为6.8mm×15.2mm×0.5mm,各单元插入损耗约为0.3 dB。     

一种面向光收发器的ps级光脉冲产生器

由于高速光开关在光互连通信中越来越广泛的应用,光开关的开关速度直接影响了整个光链路的传输速率,因此对驱动光开关产生长周期窄脉冲光信号的驱动电路的性能及集成度有了更高要求。基于光电集成工艺和高速光脉冲队列技术的发展,提出了一种应用于光SerDes收发器的集成ps级窄脉冲光信号产生器。该产生器为CMOS电路产生脉宽精确可调的长周期窄脉冲,在SMIC 0.13μm CMOS工艺下可获得窄至25ps的脉冲输出,其电源电压范围宽达1.4V~2.5V,时钟频率也可由数kHz到4GHz,同时可移植到不同的CMOS工艺平台。     

A two-dimensional optical cross-connect with integrated waveguides and surface micromachined crossbar switches

The design, fabrication and test results of an all-optical cross-connect, which uses electrostatically actuated micromechanical digital mirrors to steer optical signals in a network of planar waveguides, are presented. The substrate consists of a network of spliced planar waveguides on silica substrates. The switches, located at the waveguide intersections, are formed with an electroplated T-structure consisting of a horizontal perforated square plate suspended by four elastic beams. When operated, the horizontal plate is pulled up making the mirror move out of the optical path thus steering the beam. An 8×8 switch array has been fabricated and tested. Actuation and relaxation switching times near 3 ms have been demonstrated with an actuation voltage of 120 V. The optical insertion loss for the array typically varied from 2.3 dB for a single trench in the optical path (shortest optical path) to 8 dB for 15 trenches in the optical path (longest optical path).     

Organic light‐emitting devices integrated with internal scattering layers for enhancing optical out‐coupling

Abstract— In this work, studies on organic light‐emitting devices (OLEDs) incorporating nanoparticle‐based nanocomposite scattering layers as the internal extraction structures (i.e., between the substrate and the OLED structure) were concluded. By adjusting the nanoparticle sizes and concentrations, the optical properties (optical scattering and integrated transmittance) of the nanocomposite scattering layers can be widely tuned. With appropriate compositions, nanoparticle‐based nanocomposite scattering layers with strong optical scattering, high integrated transmittance, and yet enough flatness for device integration can be obtained. The use of such nanocomposite internal scattering layers provides a convenient and effective approach for simultaneously achieving large efficiency enhancement (1.96× for quantum efficiency and 2.04× for cd/A efficiency) and improving viewing characteristics (more stable colors and emission patterns over angles). The fabrication of nanoparticle‐based nanocomposite scattering films is based on solution‐processing, which is relatively simple and convenient. These features may make it highly attractive for various OLED applications and mass production.     

Wideband bandpass filter based on U‐slotted SW‐HMSIW cavities

A wideband bandpass filter (BPF) is designed based on U‐slotted slow wave half mode substrate integrated waveguide (SW‐HMSIW) cavities. Similar to the substrate integrated waveguide (SIW), the SW‐HMSIW can also achieve a highpass characteristic while the lateral dimensions can be reduced by about 50%. By etching a U‐shape slot on the SW‐HMSIW cavity, a multiple‐mode resonator (MMR) can be realized, which can achieve a wide passband response and make the overall dimension of the filter much more compact. A wide passband, covering from 6.0 GHz to 10.65 GHz with a FBW about 58.13% is achieved. The measured minimum insertion losses including the losses from SMA connectors are 1.1 dB and return losses are better than 10 dB. Besides, the group delay varies between 0.2 and 0.5 ns within the passband. To validate its practicability, a wideband SW‐HMSIW BPF fabricated on a double‐layer printed circuit board (PCB) is designed and examined. The proposed filter has a more than 54% size reduction compared to the other designs reported in open literatures. The measured results have a good agreement with the simulated results. The effective size of the fabricated filter is about 27 mm × 8.55 mm.     

Integrated optical planar waveguide components

 Planar optical waveguides for applications in communication networks can be fabricated using conventional chip-manufacturing techniques. We present a planar optical waveguide technology that is based on a silicon-oxynitride (SiON) core and silicon-oxide cladding layers. In addition to more compact, conventional optical devices, it also enables enhanced optical functions such as dynamically reconfigurable planar integrated optical devices. Examples of adaptive devices realized in this technology include finite and infinite impulse response (FIR and IIR) filters. Received: 13 February 2002/Accepted: 28 February 2002 In realizing the SiON waveguide technology and the adaptive optical filter functions with the subsystem control, the dedicated work of the waveguide process technology, the photonic device technology, and the engineering services teams at IBM's Zurich Research Laboratory were instrumental and are gratefully acknowledged. For the concept-level optical-packaging work we thank Optospeed SA. This paper was presented at the Workshop “Optical MEMS and Integrated Optics” in June 2001.     

A micromachined 2 /spl times/ 2 optical switch aligned with bevel-ended fibers for low return loss

This paper presents the design and optical performance characteristics of a micromachined 2 /spl times/ 2 optical switch with low return loss for an optical add-drop application. The switch is equipped with four optical fibers beveled at 8/spl deg/. An intentional lateral offset was introduced to align the refracted light at the input fiber-air interface with output fibers. A micromirror was actuated into the optical path by an electrostatic comb actuator to change the direction of the input optical signal. The optical switch was fabricated using silicon deep reactive ion etching (DRIE) of silicon-on-insulator (SOI) wafers. Optical performance measurements of the fabricated optical switch revealed that the time dependent loss (TDL), polarization dependent loss (PDL), and wavelength dependent loss (WDL) were -0.04 dB, -0.05 dB and -0.71 dB, respectively. The switching time was within 5 ms for a 24-V electrical step signal. Because the beveled ends of the optical fibers kept the propagated light from reflecting backward into the input fiber, the return losses were just -43 dB. This return loss was used to theoretically analyze a model of the beveled end by considering backscattering due to the surface roughness, which thereby was determined to be about 41 nm.     

测量轧制力的光纤传感系统的研制

研制了一种用于轧制力测量的光纤传感器,其传感头采用法布里-珀罗腔的结构。分析了该传感器的原理,导出了法布里 珀罗干涉腔反射光强与轧制力的关系表达式。实验结果表明,该方案测量准确度为0.18%,线应变灵敏度为1.2×104V,分辨力达到2.5×10-8。用该传感器测量轧制力是正确、可行的。     

基于微流控光开关的波导结构分析与优化

光开关是全光网的关键器件,提出一种全新基于微流控技术的波导型光开关设计。通过电控方法改变光波导结构,实现光路变化。基于有限元方法,重点研究了光开关插入损耗、串扰、透过率等参数,对波导层光传输性能进行评价。优化结果表明,当波导层以一定角度斜交叉时,透过率提高,插入损耗降低,最低降到0.18dB,实现了光开关的结构优化。由于采用微流控技术和有机光学材料,这类开关体积小、结构简单、成本低,易于集成大规模光开关阵列。     

基于光纤法布里-珀罗干涉仪的温度传感器

提出了一种基于光纤法布里-珀罗(F-P)干涉仪的温度传感器,传感器的敏感部分是一段两端研磨为平面的单模光纤,它的一端与一根单模传光光纤相接以形成一个反射面,另一端与空气接触形成另一个反射面,这两个反射面与敏感部分光纤形成本征光纤F-P干涉仪(IFPI).分析了该光纤温度传感器的温度响应特性,制作了传感器原理样机,搭建了测试平台,并对原理样机进行了测试.在25 ～30℃的范围内对传感器进行了标定,测得温度响应灵敏度为21.504·2πrad/℃,温度分辨率为0.046℃.实验结果表明:该传感器对温度有较好的线性响应和较高的灵敏度,且制作工艺简单,成本低,具有良好的应用前景.     

On-chip optical interconnect using visible light

We propose and fabricate a monolithic optical interconnect on a GaN-on-silicon platform using a wafer-level technique. Because the InGaN/GaN multiple-quantum-well diodes (MQWDs) can achieve light emission and detection simultaneously, the emitter and collector sharing identical MQW structure are produced using the same process. Suspended waveguides interconnect the emitter with the collector to form in-plane light coupling. Monolithic optical interconnect chip integrates the emitter, waveguide, base, and collector into a multi-component system with a common base. Output states superposition and 1×2 in-plane light communication are experimentally demonstrated. The proposed monolithic optical interconnect opens a promising way toward the diverse applications from in-plane visible light communication to light-induced artificial synaptic devices, intelligent display, on-chip imaging, and optical sensing.     

A self-aligned fabrication method of dual comb drive using multilayers SOI process for optical MEMS applications

A novel method for fabricating a self-aligned electrostatic dual comb drive using a multi-layer SOI process is developed. The present method utilizes four aligned masks, greatly simplify the existing SOI-MEMS fabrication methods in manufacturing optical MEMS devices. Here, the actuating structure consists of fixed combs and moving combs that are composed of single crystal silicon, nitride and polysilicon. One mask is used to provide a deep etching to etch polysilicon, nitride and single crystal silicon respectively. The nitride separates polysilicon and single crystal silicon and provides an additional dielectric for the purpose of producing bi- directional motion upon applying electrostatic forces. A dual comb drive actuator with optical structures was fabricated with the developed process. The actuator is capable of motion 250 nm downward and 480 nm upward with 30 V applied voltage at 4 kHz frequency. The dynamic characteristics of the first and the second resonant frequency of the dual comb-drive actuator are 10.5 kHz and 23 kHz respectively. Experimental results indicated that the measured data agreed well with simulation results using the ANSOFT Maxwell^® 2D field simulator, ANSYS^® and Coventor Ware^®.     

抗共振反射集成光学传感器的研究进展

抗共振反射光波导(ARROW)具有与传统光波导所不同的传播特性。利用覆盖层的抗共振反射性质,ARROW传播单模、高阶模被泄漏到基体。基于折射率的变化,抗共振反射传感器对物理量、化学量和生物分子间的相互作用有很高的敏感性。介绍了ARROW的结构、传感器的工作原理以及最新研究进展。由于可采用CMOS工艺制作波导,且能与光探测器在一块集成,抗共振反射传感器将具有广阔的应用前景。     

Integration of optical waveguide on pneumatic balloon actuator for flexible scanner in endoscopic imaging diagnosis applications

This paper reports a flexible scanner consisting of a scanning actuator and optical waveguides for medical imaging applications such as endoscopic fluorescence imaging diagnosis. The 0.3-mm-thick and 5-mm-wide functional scanner was designed to be smaller enough than the 10 mm-diameter of channel of endoscope. The proposed device can be used to introduce an excitation light into the abdominal cavity or digestive tract. A pneumatic balloon actuator (PBA) consisting of polydimethylsiloxane (PDMS) is used as the scanning actuator for the scanner in consideration of its small, soft, and safe features. The SU-8 optical waveguides with high refractive index (n_SU-8 = 1.575) are integrated onto the PBA structure made of PDMS with a lower refractive index (n_PDMS = 1.405). Excitation light at a wavelength of 405 nm is transmitted through an optical fiber to the SU-8 waveguides. The outgoing light from the waveguide can be scanned by the bending motion of the PBA. The waveguide functions as a detector as well. Our developed device has successfully scanned, excited, and detected light from fluorescence beads at a wavelength of 540 nm distributed in a pseudo-tissue.     

测量电场的铌酸锂光传感器综述

铌酸锂(LiNbO3)光传感器具有灵敏度高,不受外部电磁场干扰的特性,吸引了越来越多科研工作者的注意。对基于不同类型传感器的制作工艺、传感原理和适用范围,介绍了3种用于测量电场的铌酸锂光传感器,它们分别是:基于Mach-Zehnder波导调制器与微多环天线的集成方位角铌酸锂光传感器;铌酸锂介质波导光传感器;室温直接粘接的铌酸锂晶体层高电压光传感器。     

垂直纳米光栅耦合器耦合效率分析与测试

介绍了基于Sol纳米光栅耦合器的理论研究及测试方法,系统研究了光栅参数对光栅耦合效率的影响,在占空比为1:1的基础上,对不同光栅槽深作了相应的理论分析,同时,还对不同角度的入射光作了相应的研究,经过仿真在入射角为10°时,对于波长为l 550 nm的入射光其耦合效率最高.除此之外,通过在光栅表面添加增透膜使其耦合效率在...     

双光路激光视觉传感器的设计

设计了一种基于激光三角几何关系的双光路新型激光视觉传感器。建立了双光路视觉传感器的数学模型,理论分析计算得出空间测量点的二维坐标,对影响整个光学系统的结构参数与测量分辨率之间的关系给出了模拟与仿真。结果表明：所选择优化的光学参数符合设计指标的要求,并验证了双光路位移传感器具有较高的分辨率。     

基于嵌入式的空间光通信系统前馈补偿系统设计

为满足光通信系统对于目标数据的快速捕获需求,缩小各级通信设备间的动态跟踪误差,设计基于嵌入式技术的空间光通信系统的前馈补偿系统;以并串转换电路作为唯一的电能输出装置,在光通信信号发射模块、波分复用器件、嵌入式光放大器三个通信设备元件的共同调节作用下,确定PWM功率放大器的实时执行能力,达到对前馈型角编码器的调度与应用,实现空间光通信系统前馈补偿结构的搭建;配置Linux嵌入内核的移植协议,多次创建空间光环境下的通信数据根文件,以此为存储标准,计算补偿调制的基础传信率,实现对前馈脉冲波的调制与处理,完成嵌入式通信系统的前馈补偿原理研究;实验结果表明,应用前馈补偿系统后,在光通信参量等于5.0×1011 T、7.0×1011 T、9.0×1011 T的情况下,目标数据的捕获速率均超过7.0 T/mm,满足缩小通信设备间动态跟踪误差的实际应用需求。     

Single mask fabrication process for movable MEMS devices

The current work reports on the realization of movable micromachining devices using self-aligned single-mask fabrication process. Only dry etching process utilizing inductively coupled plasma reactive ion etching was used to release 3D micro structures from single crystal silicon substrate. No wet etching process is required to release the structures as is the case with silicon on insulator (SOI) wafers. Also the developed process does not require an SOI substrate and accordingly dispensing with the application of a wet etching step, thus yielding uniform structures without stiction. The optimized process was applied to realize thermally actuated microgrippers. The article presents the development of the fabrication process and demonstrates the operation of the fabricated device. The optimized process provides an avenue for low cost fabrication of movable micromachining devices without the use of complicated wet etching steps typically associated with SOI substrates.