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一种基于MEMS工艺的硅基阵列化光纤连接器,具有微型化、可集成制造和重复性好等特点。每个单元利用硅V型槽与其上集成制造的电沉积流线型曲面金属镍盖板的组合形成了方便光纤插拔的喇叭口形导引通道和可实现光纤定位及精确自对准的双悬臂梁形夹持通道。采用Ansys软件对双悬臂梁结构在不同的厚度与翘曲位移条件下对光纤产生的压制力进行建模与仿真,并将其与理论分析结果进行比较。成功地将单元扩展成1×16阵列,体积仅为6.8mm×15.2mm×0.5mm,各单元插入损耗约为0.3 dB。 相似文献
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由于高速光开关在光互连通信中越来越广泛的应用,光开关的开关速度直接影响了整个光链路的传输速率,因此对驱动光开关产生长周期窄脉冲光信号的驱动电路的性能及集成度有了更高要求。基于光电集成工艺和高速光脉冲队列技术的发展,提出了一种应用于光SerDes收发器的集成ps级窄脉冲光信号产生器。该产生器为CMOS电路产生脉宽精确可调的长周期窄脉冲,在SMIC 0.13μm CMOS工艺下可获得窄至25ps的脉冲输出,其电源电压范围宽达1.4V~2.5V,时钟频率也可由数kHz到4GHz,同时可移植到不同的CMOS工艺平台。 相似文献
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《Sensors and actuators. A, Physical》2004,109(3):231-241
The design, fabrication and test results of an all-optical cross-connect, which uses electrostatically actuated micromechanical digital mirrors to steer optical signals in a network of planar waveguides, are presented. The substrate consists of a network of spliced planar waveguides on silica substrates. The switches, located at the waveguide intersections, are formed with an electroplated T-structure consisting of a horizontal perforated square plate suspended by four elastic beams. When operated, the horizontal plate is pulled up making the mirror move out of the optical path thus steering the beam. An 8×8 switch array has been fabricated and tested. Actuation and relaxation switching times near 3 ms have been demonstrated with an actuation voltage of 120 V. The optical insertion loss for the array typically varied from 2.3 dB for a single trench in the optical path (shortest optical path) to 8 dB for 15 trenches in the optical path (longest optical path). 相似文献
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Hong‐Wei Chang Kun‐Cheng Tien Min‐Hung Hsu Yi‐Hsiang Huang Ming‐Shiang Lin Chih‐Hung Tsai Yu‐Tang Tsai Chung‐Chih Wu 《Journal of the Society for Information Display》2011,19(2):196-204
Abstract— In this work, studies on organic light‐emitting devices (OLEDs) incorporating nanoparticle‐based nanocomposite scattering layers as the internal extraction structures (i.e., between the substrate and the OLED structure) were concluded. By adjusting the nanoparticle sizes and concentrations, the optical properties (optical scattering and integrated transmittance) of the nanocomposite scattering layers can be widely tuned. With appropriate compositions, nanoparticle‐based nanocomposite scattering layers with strong optical scattering, high integrated transmittance, and yet enough flatness for device integration can be obtained. The use of such nanocomposite internal scattering layers provides a convenient and effective approach for simultaneously achieving large efficiency enhancement (1.96× for quantum efficiency and 2.04× for cd/A efficiency) and improving viewing characteristics (more stable colors and emission patterns over angles). The fabrication of nanoparticle‐based nanocomposite scattering films is based on solution‐processing, which is relatively simple and convenient. These features may make it highly attractive for various OLED applications and mass production. 相似文献
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A wideband bandpass filter (BPF) is designed based on U‐slotted slow wave half mode substrate integrated waveguide (SW‐HMSIW) cavities. Similar to the substrate integrated waveguide (SIW), the SW‐HMSIW can also achieve a highpass characteristic while the lateral dimensions can be reduced by about 50%. By etching a U‐shape slot on the SW‐HMSIW cavity, a multiple‐mode resonator (MMR) can be realized, which can achieve a wide passband response and make the overall dimension of the filter much more compact. A wide passband, covering from 6.0 GHz to 10.65 GHz with a FBW about 58.13% is achieved. The measured minimum insertion losses including the losses from SMA connectors are 1.1 dB and return losses are better than 10 dB. Besides, the group delay varies between 0.2 and 0.5 ns within the passband. To validate its practicability, a wideband SW‐HMSIW BPF fabricated on a double‐layer printed circuit board (PCB) is designed and examined. The proposed filter has a more than 54% size reduction compared to the other designs reported in open literatures. The measured results have a good agreement with the simulated results. The effective size of the fabricated filter is about 27 mm × 8.55 mm. 相似文献
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G. L. Bona 《Microsystem Technologies》2003,9(5):291-294
Planar optical waveguides for applications in communication networks can be fabricated using conventional chip-manufacturing
techniques. We present a planar optical waveguide technology that is based on a silicon-oxynitride (SiON) core and silicon-oxide
cladding layers. In addition to more compact, conventional optical devices, it also enables enhanced optical functions such
as dynamically reconfigurable planar integrated optical devices. Examples of adaptive devices realized in this technology
include finite and infinite impulse response (FIR and IIR) filters.
Received: 13 February 2002/Accepted: 28 February 2002
In realizing the SiON waveguide technology and the adaptive optical filter functions with the subsystem control, the dedicated
work of the waveguide process technology, the photonic device technology, and the engineering services teams at IBM's Zurich
Research Laboratory were instrumental and are gratefully acknowledged. For the concept-level optical-packaging work we thank
Optospeed SA.
This paper was presented at the Workshop “Optical MEMS and Integrated Optics” in June 2001. 相似文献
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Ho Nam Kwon Jong-Hyun Lee 《Journal of microelectromechanical systems》2004,13(2):258-263
This paper presents the design and optical performance characteristics of a micromachined 2 /spl times/ 2 optical switch with low return loss for an optical add-drop application. The switch is equipped with four optical fibers beveled at 8/spl deg/. An intentional lateral offset was introduced to align the refracted light at the input fiber-air interface with output fibers. A micromirror was actuated into the optical path by an electrostatic comb actuator to change the direction of the input optical signal. The optical switch was fabricated using silicon deep reactive ion etching (DRIE) of silicon-on-insulator (SOI) wafers. Optical performance measurements of the fabricated optical switch revealed that the time dependent loss (TDL), polarization dependent loss (PDL), and wavelength dependent loss (WDL) were -0.04 dB, -0.05 dB and -0.71 dB, respectively. The switching time was within 5 ms for a 24-V electrical step signal. Because the beveled ends of the optical fibers kept the propagated light from reflecting backward into the input fiber, the return losses were just -43 dB. This return loss was used to theoretically analyze a model of the beveled end by considering backscattering due to the surface roughness, which thereby was determined to be about 41 nm. 相似文献
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研制了一种用于轧制力测量的光纤传感器,其传感头采用法布里-珀罗腔的结构。分析了该传感器的原理,导出了法布里 珀罗干涉腔反射光强与轧制力的关系表达式。实验结果表明,该方案测量准确度为0.18%,线应变灵敏度为1.2×104V,分辨力达到2.5×10-8。用该传感器测量轧制力是正确、可行的。 相似文献
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提出了一种基于光纤法布里-珀罗(F-P)干涉仪的温度传感器,传感器的敏感部分是一段两端研磨为平面的单模光纤,它的一端与一根单模传光光纤相接以形成一个反射面,另一端与空气接触形成另一个反射面,这两个反射面与敏感部分光纤形成本征光纤F-P干涉仪(IFPI).分析了该光纤温度传感器的温度响应特性,制作了传感器原理样机,搭建了测试平台,并对原理样机进行了测试.在25 ~30℃的范围内对传感器进行了标定,测得温度响应灵敏度为21.504·2πrad/℃,温度分辨率为0.046℃.实验结果表明:该传感器对温度有较好的线性响应和较高的灵敏度,且制作工艺简单,成本低,具有良好的应用前景. 相似文献
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Wei Cai Bing-cheng Zhu Xu-min Gao Yong-chao Yang Jia-lei Yuan Gui-xia Zhu Yong-jin Wang Peter Grünberg 《浙江大学学报:C卷英文版》2017,18(9):1288-1294
We propose and fabricate a monolithic optical interconnect on a GaN-on-silicon platform using a wafer-level technique. Because the InGaN/GaN multiple-quantum-well diodes (MQWDs) can achieve light emission and detection simultaneously, the emitter and collector sharing identical MQW structure are produced using the same process. Suspended waveguides interconnect the emitter with the collector to form in-plane light coupling. Monolithic optical interconnect chip integrates the emitter, waveguide, base, and collector into a multi-component system with a common base. Output states superposition and 1×2 in-plane light communication are experimentally demonstrated. The proposed monolithic optical interconnect opens a promising way toward the diverse applications from in-plane visible light communication to light-induced artificial synaptic devices, intelligent display, on-chip imaging, and optical sensing. 相似文献
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A novel method for fabricating a self-aligned electrostatic dual comb drive using a multi-layer SOI process is developed. The present method utilizes four aligned masks, greatly simplify the existing SOI-MEMS fabrication methods in manufacturing optical MEMS devices. Here, the actuating structure consists of fixed combs and moving combs that are composed of single crystal silicon, nitride and polysilicon. One mask is used to provide a deep etching to etch polysilicon, nitride and single crystal silicon respectively. The nitride separates polysilicon and single crystal silicon and provides an additional dielectric for the purpose of producing bi- directional motion upon applying electrostatic forces. A dual comb drive actuator with optical structures was fabricated with the developed process. The actuator is capable of motion 250 nm downward and 480 nm upward with 30 V applied voltage at 4 kHz frequency. The dynamic characteristics of the first and the second resonant frequency of the dual comb-drive actuator are 10.5 kHz and 23 kHz respectively. Experimental results indicated that the measured data agreed well with simulation results using the ANSOFT Maxwell® 2D field simulator, ANSYS® and Coventor Ware®. 相似文献
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抗共振反射光波导(ARROW)具有与传统光波导所不同的传播特性。利用覆盖层的抗共振反射性质,ARROW传播单模、高阶模被泄漏到基体。基于折射率的变化,抗共振反射传感器对物理量、化学量和生物分子间的相互作用有很高的敏感性。介绍了ARROW的结构、传感器的工作原理以及最新研究进展。由于可采用CMOS工艺制作波导,且能与光探测器在一块集成,抗共振反射传感器将具有广阔的应用前景。 相似文献
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This paper reports a flexible scanner consisting of a scanning actuator and optical waveguides for medical imaging applications such as endoscopic fluorescence imaging diagnosis. The 0.3-mm-thick and 5-mm-wide functional scanner was designed to be smaller enough than the 10 mm-diameter of channel of endoscope. The proposed device can be used to introduce an excitation light into the abdominal cavity or digestive tract. A pneumatic balloon actuator (PBA) consisting of polydimethylsiloxane (PDMS) is used as the scanning actuator for the scanner in consideration of its small, soft, and safe features. The SU-8 optical waveguides with high refractive index (nSU-8 = 1.575) are integrated onto the PBA structure made of PDMS with a lower refractive index (nPDMS = 1.405). Excitation light at a wavelength of 405 nm is transmitted through an optical fiber to the SU-8 waveguides. The outgoing light from the waveguide can be scanned by the bending motion of the PBA. The waveguide functions as a detector as well. Our developed device has successfully scanned, excited, and detected light from fluorescence beads at a wavelength of 540 nm distributed in a pseudo-tissue. 相似文献
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双光路激光视觉传感器的设计 总被引:1,自引:0,他引:1
设计了一种基于激光三角几何关系的双光路新型激光视觉传感器。建立了双光路视觉传感器的数学模型,理论分析计算得出空间测量点的二维坐标,对影响整个光学系统的结构参数与测量分辨率之间的关系给出了模拟与仿真。结果表明:所选择优化的光学参数符合设计指标的要求,并验证了双光路位移传感器具有较高的分辨率。 相似文献
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刘晓兴 《计算机测量与控制》2021,29(1):215-219
为满足光通信系统对于目标数据的快速捕获需求,缩小各级通信设备间的动态跟踪误差,设计基于嵌入式技术的空间光通信系统的前馈补偿系统;以并串转换电路作为唯一的电能输出装置,在光通信信号发射模块、波分复用器件、嵌入式光放大器三个通信设备元件的共同调节作用下,确定PWM功率放大器的实时执行能力,达到对前馈型角编码器的调度与应用,实现空间光通信系统前馈补偿结构的搭建;配置Linux嵌入内核的移植协议,多次创建空间光环境下的通信数据根文件,以此为存储标准,计算补偿调制的基础传信率,实现对前馈脉冲波的调制与处理,完成嵌入式通信系统的前馈补偿原理研究;实验结果表明,应用前馈补偿系统后,在光通信参量等于5.0×1011 T、7.0×1011 T、9.0×1011 T的情况下,目标数据的捕获速率均超过7.0 T/mm,满足缩小通信设备间动态跟踪误差的实际应用需求。 相似文献
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Ali B. Alamin Dow Adel Gougam Nazir P. Kherani I. W. Rangelow 《Microsystem Technologies》2014,20(4-5):955-961
The current work reports on the realization of movable micromachining devices using self-aligned single-mask fabrication process. Only dry etching process utilizing inductively coupled plasma reactive ion etching was used to release 3D micro structures from single crystal silicon substrate. No wet etching process is required to release the structures as is the case with silicon on insulator (SOI) wafers. Also the developed process does not require an SOI substrate and accordingly dispensing with the application of a wet etching step, thus yielding uniform structures without stiction. The optimized process was applied to realize thermally actuated microgrippers. The article presents the development of the fabrication process and demonstrates the operation of the fabricated device. The optimized process provides an avenue for low cost fabrication of movable micromachining devices without the use of complicated wet etching steps typically associated with SOI substrates. 相似文献