ESP工艺制备SnO_2－MnO薄膜的氢敏特性

研究了用静电喷雾高温分解（ＥＳＰ）工艺制备的ＳｎＯ２－ＭｎＯ薄膜在氢气氛下电阻的变化结果表明它的电阻较高，对此亦有较高的灵敏度；这种特性与ＭｎＯ添加剂有密切关系     

MSnO_3和MSn_（0．5）Zr_（0．5）O_3（M＝Sr，Ba）的水热合

本文利用水热合成方法对ＭＳｎＯ３和ＭＳｎ（０．５）Ｚｒ（０．５）Ｏ３（Ｍ＝Ｓｒ，Ｂａ）的合成进行了研究，并采用ＸＲＤ、ＳＥＭ和ＩＣＰ等方法对产物进行了表征，结果表明：在Ｍ（ＯＨ）２－ＳｎＯ２（或ＳｎＯ２＋ＺｒＯ２）－ＫＯＨ体系中，当ＫＯＨ／Ｓｎ和ＫＯＨ／（Ｓｎ＋Ｚｒ）≥３０时，２６０℃下晶化５～７天，可获得ＭＳｎＯ３和ＭＳｎ（０．５）Ｚｒ（０．５）Ｏ３纯相，在Ｍ（ＯＨ）２－（ＳｎＯ２＋ＺｒＯ２）－ＫＯＨ－Ｈ２Ｏ体系中，可通过控制介质碱度来获得ＭＳｎＯ３＋ＭＺｒＯ３混合物和ＭＳｎ（０．５）Ｚｒ（０．５）Ｏ３，并根据合成规律初步探讨了反应过程．     

MSnO3和MSn0.5Zr0.5O3（M=Sr,Ba）的水热合成

本文利用水热合成方法对ＭＳｎＯ３和ＭＳｎ０．５Ｚｒ０．５（Ｍ＝Ｓｒ，Ｂａ）的合成进行了研究，并采用ＸＲＤ、ＳＥ几ＩＣＰ等进行产物进行了表征，结果表明：在Ｍ（ＯＨ）２．ＳｎＯ２（呈ＳｎＯ２＋ＺｒＯ２）－ＫＯＨ体系中，当ＫＯＨ／Ｓｎ和ＫＯＨ（Ｓｎ＋Ｚｒ）≥３０时，２６０℃下晶化５－７天，可获得ＭＳｎＯ３和ＭＳｎ０．５Ｏ３纯相，在Ｍ（ＯＨ）３－（ＳｎＯ２＋ＺｒＯ３）－ＫＯＨ－Ｈ２Ｏ体系中，可通过控制介质     

制备SnO2薄膜时原料中水对其成膜和光电性质的影响

用无水ＳｎＣｌ４和ＳｎＣｌ４．５Ｈ２Ｏ为原料，用热喷涂法制备ＳｎＯ２薄膜，在基片温度为５３０℃时，对所制得ＳｎＯ２薄膜进行了Ｘ－射线，ＳＥＭ分析，并对其发电性质进行测定，总结出含Ｈ２Ｏ的ＳｎＣｌ４制得的ＳｎＯ２薄膜生长速度快，电阻率低。     

Co2O3掺杂对SnO2 - MgO- Nb2 O5压敏材料性能的影响

研究了Ｃｏ２Ｏ３含量对ＳｎＯ２－ＭｇＯ－Ｎｂ２Ｏ５压敏材料的密度、非线性特性的影响。实验结果表明,Ｃｏ２Ｏ３不仅能够增大ＳｎＯ２－ＭｇＯ－Ｎｂ２Ｏ５材料的质量密度,而且能提高非线性系数,减小漏电流,在较大程度上提高了ＳｎＯ２－ＭｇＯ－Ｎｂ２Ｏ５压敏材料的性能。     

SnO2：Sb电热膜的性能及应用

用化学纯原料制备了大功率密度的ＳｎＯ２：Ｓｂ电热膜，并分析其结构，研究了掺杂量、溶液浓度和退火处理对电阻及电阻温度特性的影响。用喷涂法制备大面积、性能稳定的ＳｎＯ２：Ｓｂ电热膜，功率密度高达４０Ｗ．ｃｍ＾－２。     

PECVD方法制备SnO2气敏薄膜的电子显微镜研究

通过ＳＥＭ、ＴＥＭ研究了ＰＥＣＶＤ方法制备的ＳｎＯ＿２薄膜的显微结构，讨论了沉积速率与颗粒大小的关系；在Ｓｉ、陶瓷和ＫＢｒ３种不同衬底上沉积的ＳｎＯ＿２薄膜的差异以及退火对ＳｎＯ＿２膜结晶状态的影响。结果表明，ＰＥＣＶＤ方法制备的ＳｎＯ＿２薄膜是非晶态，具有柱状结构。退火使非晶ＳｎＯ＿２膜向着多晶方向转化，演化过程为：非晶大颗粒→超微粒多晶→晶粒长大。     

SnO2气敏薄膜在SnO2／Fe2O3双层结构中成核及生长过程的模拟

用ＳＥＭ对ＳｎＯ２／Ｆｅ２Ｏ３样品的断面结构进行了观察研究，发现ＳｎＯ２是在Ｆｅ２Ｏ３柱状结构的间隙中开始生长的，据此提出了双层膜结构生长热力学模型，由模型推出的结论与实验结果吻合。计算结果表明，ＳｎＯ２在Ｆｅ２Ｏ３薄膜的间隙中生长速度很快，而后逐渐变慢，达到稳定沉积速率，在这种沉积速率下形成ＳｎＯ２的柱状结构。ＳｎＯ２膜的这种沉积方式使得Ｆｅ２Ｏ３与其接触面积很大，两者结合十分牢固。     

非晶Fe2O3—MO2（M=Sn,Ti）的水热制备及反射谱研究

研究了用水热法制备的非晶Ｆｅ２Ｏ３－ＭＯ２（Ｍ＝Ｓｎ，Ｔｉ）光学选择性吸收材料的光学性能发现具有红外透明组份（ＳｎＯ２，ＴｉＯ２）可显著改进Ｆｅ２Ｏ３的光学性质，并从固体中光吸收与反射的微观机制的角度对实验结果进行分析和讨论。     

ZnO／SnO2,SnO2／ZnOUPF复合膜的制备及气敏特性研究

用直流气体放电活化反应蒸发沉积技术在普通玻璃基片上制备了ＺｎＯ／ＳｎＯ２及ＳｎＯ２／ＺｎＯ超微粒子（ＵＰＦ）双层复合薄膜。样品经扫描电子显微镜（ＳＥＭ）和Ｘ射线衍仪分析，结论为超微凿子的复合薄。同时提出了最佳制备工艺。气敏测试结果表明：ＺｎＯ／ＳｎＯ２及ＳｎＯ２／ＺｎＯ ＵＰＦ复合膜较单层ＺｎＯ及ＳｎＯ２ＵＰＦ表现出优良的选择性，其灵敏度和最佳工作温度也得到相应的改善。     

Study of the environment effect on the properties of BDN-SA Langmuir–Blodgett films

The chemical and electrical properties of BDN-SA Langmuir–Blodgett films in air and N₂H₄ gas respectively, were studied using X-ray Photoelectron Spectroscopy (XPS) and the electrical resistance measurement. The results indicate that the oxidation effect caused by air leads to the lost of N and partial oxidation of Ni and S in the LB films; while the reduction effect induced by N₂H₄ gas decreases the amount of O in the LB films. The electrical resistance of LB film decreases dramatically after the film being exposed to N₂H₄ gas while increases with the exposure time in air.     

TiNx/SiO2/Ag/SiO2低辐射膜耐H2S气体的腐蚀性能

为了提高玻璃片上SiO2/Ag/SiO2复合膜的耐腐蚀性能,用磁控溅射法在其上制备了TiNx薄膜.采用X射线衍射(XRD)、扫描隧道显微镜(STM)研究了TiNx薄膜的结构及表面形貌;参照GB/T 5137.3-2002电子产品硫化氢腐蚀的检验方法研究了TiNx/SiO2/Ag/SiO2低辐射膜耐H2S气体的腐蚀性能....     

Sol-Gel法制备低阻SnO2薄膜

采用sol-gel法制备了SnO2薄膜。研究了不同的实验条件对薄膜阻值的影响。利用XRD、XPS分析了薄膜的晶体结构和晶粒尺寸。利用这种低阻SnO2薄膜制作的热线型气敏元件对H2S具有较好的气敏特性。     

磁控溅射镀银膜抗变色性研究

银膜在大气中容易失光变色,严重影响其应用.研究其经过防变色处理后的抗变色能力有着重要的意义.利用RSFM-4直流磁控溅射机在纯铜片上制备了银膜,用几种不同的防变色工艺进行处理,然后分别在SO2气体、H2S气体和Na2S溶液中进行银膜变色加速试验,并进行综合评级.试验结果表明:浸涂BTA保护剂的银膜能取得很好的抗SO2效果,浸涂DJB-823的银膜在H2S气氛里的保护能力非常突出;化学和电化学钝化方法均能提高银膜抗Na2S溶液的能力.     

Gas sensitivity of metal oxide mixed tin oxide films prepared by spray pyrolysis

Various kinds of SnO₂ films, modified with the addition of iron, antimony, copper, titanium, manganese, nickel, cobalt or calcium oxides, were fabricated by using the spray pyrolysis technique and their gas-sensing characteristics were studied. From electrical measurements in air, the relative sensitivity towards inflammable gas of these SnO₂-based film sensors was compared. It was observed that SnO₂-based films of higher electrical resistance had a tendency to have higher sensitivity towards ethanol than the SnO₂-based films of lower resistance. The addition of p-type metal oxides, such as NiO and MnO, to the SnO₂ matrix was found to be effective in increasing the sensitivity towards inflammable gas.     

Sol-Gel法制备低阻In2 O3薄膜

采用sol-gel法制备In2O3薄膜材料，研究了不同制备条件对薄膜电阻的影响；分别用XPS、XRD方法对材料进行了分析，确定了其结构和组成，并用此薄膜材料制作了直热式气敏元件，发现它对乙醇、丁烷气体具有较高的灵敏度。     

氧化钨厚膜气敏传感器的气氛改性研究

采用丝网印刷法将钨酸分解得到的氧化钨粉末制备成氧化钨厚膜气敏传感器,并先后在氢气和空气气氛中进行还原和氧化处理,系统研究了氢气浓度和氧化时的升温速率对敏感膜的形貌、结构和CO气敏性能的影响.结果表明,经氢气还原-空气氧化后,敏感膜表面形貌由近似球形的颗粒转化为表面光滑两端开口的集束棒状或规则的四方柱状,而晶体结构则没有发生改变.敏感膜对CO的灵敏度(Rair/RCO)随CO浓度的增加和测试温度的升高而增大.与没有进行气氛改性的敏感膜相比,经10%H2气氛还原并在600℃空气中以5℃/min氧化处理后的敏感膜对CO具有最大的灵敏度,其对3.8×10-5CO的灵敏度提高了13.3倍.即通过对敏感膜进行气氛改性可显著提高对CO的敏感性能.     

The comparative effect of two different annealing temperatures and times on the sensitivity and long-term stability of WO/sub 3/ thin films for detecting NO/sub 2/

We have deposited 150-nm-thick WO/sub 3/ films on Si/sub 3/N/sub 4//Si substrates provided with platinum interdigital electrodes and annealed in static air at 300/spl deg/C and 500/spl deg/C temperatures for 24 h and 200 h. The morphology, crystalline phase, and chemical composition of the films have been characterized using AFM, grazing incidence XRD and high resolution XPS techniques. The sensor resistance response curve has been obtained in the 0.2 -4 ppm NO/sub 2/ gas concentration range in humid air (50% relative humidity), varying the operating temperature between 25 and 250/spl deg/C. By plotting both sensor resistance and gas concentration logarithmically, the response is linear over the investigated dynamic range. Sensor sensitivities, here defined as the ratio of sensor resistance in gas to that in air (i.e., S=R/sub Gas//R/sub Air/), have been compared at a given NO/sub 2/ gas concentration (0.2 ppm). The long-term stability properties have been evaluated by recording film sensitivity for 1 yr under standardized test conditions. Increasing the annealing temperature from 300 to 500/spl deg/C causes the sensitivities to decrease. The 300/24h film is shown to be the most sensitive at S=233, but with poor long-term stability properties. The 300/200h film with S=32 is stable over the examined period. The 500/24 and the 500/200 films are shown to be less sensitive with S=16 and S=14, respectively. The longer the annealing time and the higher the temperature, the poorer the sensitivity, but with positive effects upon the long-term stability of the electrical response. The influence of the annealing conditions on sensitivity and long-term stability has been correlated with the concentration of surface defects, like reduced WO/sub 3/ phase (i.e., W/sup 4+/), which resulted in a strong effect on the sensors' response.     

乙烯对CVD法制备硅薄膜性能的影响

以硅烷和乙烯的混合气体的原料气,通过常压化学气相沉积方法在玻璃衬底上生长出了硅薄膜。结合光电子能谱、高分辨电镜以及薄膜抗腐蚀性研究,证实乙烯的引入使硅薄膜中形成一定数量的ＳｉＣ微晶粒。ＳｉＣ较高的化学稳定性使薄膜具有较强的耐碱性,而其较小的折射率使薄膜的镜面反射率较高低。含有ＳｉＣ的硅薄膜经碱液适当腐蚀后能降低镜面反射,进而有可能减少光污染现象。