硅基PZT 热释电厚膜红外探测器的研制

在(100)单晶Si 衬底上,采用MEMS 工艺和丝网印刷方法制作了锆钛酸铅(PZT)厚膜热释电红外探测器,深入研究了PZT 厚膜材料的制备方法与器件加工工艺。采用四甲基氢氧化铵(TMAH)溶液腐蚀Si 衬底制备硅杯结构。为防止Pb 和Si 相互扩散,在Pt 底电极与SiO2/ Si 衬底之间通过射频反应溅射制备了Al2O3 薄膜阻挡层。采用丝网印刷在硅杯中制备了30 m 厚的PZT 材料,并用冷等静压技术提高厚膜的致密度,实现了PZT 厚膜在850℃的低温烧结。PZT 厚膜在1 kHz、25℃下的相对介电常数与损耗角正切分别为210 和0.017,动态法测得热释电系数为1.510-8Ccm-2K-1。最后制备了敏感元为3 mm3 mm 的单元红外探测器,使用由斩波器调制的黑体辐射,在调制频率为112.9 Hz 时测得器件的探测率达到最大值7.4107 cmHz1/2W-1。     

行波管夹持杆微波等离子体化学气相沉积金刚石厚膜改善散热性能研究

采用微波等离子体化学气相沉积法在行波管Al₂O₃夹持杆上沉积金刚石厚膜,取代传统有毒的氧化铍陶瓷杆,用于宽带大功率行波管改善其散热性能.经材料性能测试,慢波组件装配及性能测试,获得了较好的实验结果:导热率大于12W/cm.℃,介电常数为5.0~5.5,介质损耗为1×10^-3,体积电阻率大于10¹³Ω/cm; 慢波组件导热性能与同结构的BeO组件相比提高3.0倍.整管冷测参数全部合格;整管热测在C波段测得Po=95W,G=35db.     

PZT厚膜与Si衬底互扩散阻挡层研究

在Pt/Ti/SiO2/Si基片上,利用电泳沉积制备PZT热释电厚膜材料.为防止Pb和Si互扩散,在Pt底电极与SiO2/Si衬底间通过直流磁控溅射制备了TiOx薄膜阻挡层.对具有0、300 nm和500 nm TiOx阻挡层的PZT厚膜材料用SEM和能量色散谱仪(EDS)表征了Pb和Si互扩散情况,用动态热释电系数测量仪测试了热释电系数.结果表明,当TiOx阻挡层为500 nm时,可阻挡Pb和Si互扩散,热释电性能最好.热释电系数p=1.5×10-8 C·cm-2·K-1,相对介电常数εr=170,损耗角正切tanδ=0.02,探测度优值因子Fd=1.05×10-5pa-0.5.     

PbO和Bi_2O_3-Li_2CO_3助烧剂对Pb(Zr_(0.9)Ti_(0.1))O_3厚膜热释电性能的影响

采用丝网印刷工艺制备了Pb(Zr0.9T0.1)O3(PZT)厚膜,研究了过量PbO和Bi2O3-Li2CO3共同助烧对PZT厚膜低温烧结特性、微观结构、相构成以及介电和热释电性能的影响。结果表明:随着过量PbO及Bi2O3-Li2CO3添加量的增加,PZT厚膜的烧结温度和晶粒尺寸均逐渐降低。当PbO过量6.4%(质量分数)、Bi2O3-Li2CO3添加量为5.4%(质量分数)时,PZT厚膜可在900℃低温下致密成瓷,且其热释电系数和探测率优值均得到大幅提高;所得样品在30℃时的热释电系数为10.6×10–8C.cm–2.K–1,探测率优值为8.2×10–5Pa–1/2。     

PZT叠层厚膜陶瓷材料性能的研究

使用凝胶流延成型工艺制备了PZT85/15、PZT95/5单组分厚膜及叠层厚膜.通过和单组分厚膜的性能进行对比,分析了叠层厚膜的形貌特征及介电、铁电和热释电性能.结果表明,由PZT85/15和PZT95/5组成的叠层厚膜内部均匀致密,具有良好的介电、铁电和热释电性能,极化后的相对介电常数εr=191.5,介电损耗tan δ=0.7%(温度T=20℃,频率f=1 kHz),热释电系数在41℃时达到峰值8×10-8 C/cm2·K,此后下降不明显,从而改善了单组分厚膜相变温区过窄的缺点,达到拓宽相变温区的目的,有望在红外探测和相变换能方面得到更广泛的应用.     

陶瓷厚膜和薄膜混合电致发光器件

使用PbMg1/ 3Nb2 / 3O3 PbTiO3 PbCd1/ 2 W1/ 2 O3三元系电容器瓷料 ,采用流延工艺成膜 ,丝网印刷内电极 ,在 930～ 950℃下低温烧结的方法制备了陶瓷衬底。陶瓷厚膜在室温下的相对介电常数εr>1.4× 10 4 ,损耗tanδ≈ 1% ,具有极高的品质因素 (大于等于 80 μC/cm2 )。理论分析了电致发光器件的阈值电压与绝缘介质特性的关系。直接在陶瓷厚膜上制备了MIS结构和MISIM结构的以陶瓷厚膜为绝缘层的ZnS :Mn低压驱动电致发光器件     

碱金属氧化物对硼硅酸盐系玻璃/Al_2O_3材料性能的影响

以硼硅酸盐系玻璃和Al2O3粉料为原料,采用低温烧结法制备了玻璃/Al2O3系LTCC材料。设计玻璃中碱金属氧化物的质量分数为0~6%,研究了碱金属氧化物添加量和烧成温度对玻璃/Al2O3材料的烧结性能、热性能、介电性能和力学性能的影响。随着碱金属氧化物含量增加,玻璃/Al2O3材料的体积密度、相对介电常数、抗弯强度增加,而介电损耗恶化。当碱金属氧化物添加的质量分数为2%,材料于875℃烧结良好,显示出优异的性能:体积密度为2.84 g/cm3,相对介电常数7.71,介电损耗1.15×10–3(于10 MHz下测试),抗弯强度为158 MPa,热导率为2.65 W/(m·℃),线膨胀系数为7.77×10–6/℃。     

掺杂Y2O3对Ba0．92Sr0．08Ti0．9Sn0．1O3介质瓷性能的影响

以BaCO3、SrCO3、SnO2和TiO2等为原料,Y2O3为掺杂剂,在不同温度下烧结,制得了Ba0.92Sr0.08Ti0.9Sn0.1O3系介质瓷,通过SEM分析了Y2O3对试样的微观形貌的影响,测试了试样在1 kHz频率条件下试样的电容量C、介质损耗因数D和-25~ 95℃试样的C和D,得到了试样在1 kHz频率下的居里温度TC及介电常数rε和介电损耗tanδ随温度的变化曲线。结果表明,在室温下,试样的rεt、anδ及介电常数变化率Δε/ε随着Y2O3加入量的增加,都是呈现先减小后增加的趋势;随着烧结温度的升高,rε呈上升趋势而tanδ呈下降趋势。最终得到了烧结温度为1 340℃,加入Y2O3摩尔分数为0.5%时,rε达最大值(3 774),tanδ达最小值(28×10-4),介电常数变化率为22.91%(25~85℃)的Ba0.92Sr0.08Ti0.9Sn0.1O3介质瓷。     

Sb2O3对钛酸锶钡基陶瓷介电性能及结构的影响

采用传统固相法制备Sb2O3掺杂(Ba0 612Sr0.38Y0.008)TiO3系电容器介质陶瓷,研究了不同质量分数的Sb2O3在各烧结温度下对体系介电性能及微观结构的影响.当Sb2O3的掺杂量为0.4%时,试样在1 320℃下保温2 h,体系的室温相对介电常数可达3 000,介电损耗仅为2×103,居里温度向负温方向移动至-24℃.研究表明:两性氧化物Sb2O3通过占据钙钛矿晶格A位,显著降低了体系相对介电常数及介质损耗,起到了良好的移峰及展宽效应;与此同时,Sb2O3改善了体系微观形貌,有效降低晶粒尺寸.     

sol-gel法制备锆钛酸钡薄膜的研究

采用sol-gel法在Pt/Ti/SiO2/Si衬底上制备了Ba(Zr0.3Ti0.7)O3(BZT)薄膜。对其先体溶液进行了差热与热失重曲线(DSC-TG)分析,并以此来确定了薄膜的热处理工艺。X射线衍射分析表明,550℃时开始有钙钛矿相生成,到600℃时,已经完全形成了钙钛矿结构。采用er、tgd的频率和偏压特性曲线研究了不同工艺条件下薄膜的介电性能。经过700℃热处理,薄膜在10 kHz频率,300 K温度测试条件下,相对介电常数为385,介质损耗为0.022;200103 V/cm电场条件下薄膜介电可调率为25.6%。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.