透镜阵列光刻法消差原理分析

透镜阵列光刻法用一个柱面阵列透镜代替常规光刻法中的柱面透镜形成光程差,将由衍射所引起的瞬变图形错开,消除由于光刻模板与被刻光栅之间因间隙引起的衍射误差。用光学传递函数方法说明了透镜阵列消除光刻中衍射误差的原理。实验表明透镜阵列光刻法,可以较好的消除衍射误差,研制出高质量的光栅。     

反射型阶梯光栅的特性分析

衍射效率是评价二元光学器件质量性能的重要指标之一.针对反射性阶梯光栅,利用几何方法计算出斜入射情况下光束在台阶边缘的光程差的分布情况,根据多缝夫琅和费衍射推导出反射型阶梯光栅的衍射光强表达式.并在此基础上,讨论了台阶数N取2和N趋向于无穷两种极限情况下阶梯光栅光强公式的变化情况,得到区别于一般文献所表达的衍射效率公式.初步试验表明,反射型阶梯光栅的衍射效率与台阶数、蚀刻深度与入射波长的比值均有密切相关.     

应用光栅自成像的编码器莫尔条纹信号提取

为解决高密度圆光栅的工程应用难题,应用光栅自成像原理,用较大的光栅副间隙获得了高质量的莫尔条纹信号.文中用傅里叶光学理论分析了单色平面波照明下的双光栅菲涅耳衍射场,建立了双光栅菲涅耳衍射场光强分布的数学模型,并用MATLAB软件对光栅菲涅耳衍射像光强分布和莫尔条纹信号进行了数值仿真,分析了各种参数对莫尔条纹信号的影响,最后通过信号提取实验对理论分析进行了验证.     

亚波长位相光栅矢量衍射理论的数值计算

从麦克斯韦方程组和电磁场的边界条件出发，用矢量衍射理论的模式匹配法对亚波长位相光栅的衍射进行了数值计算，在正入射的情况下，计算了反射波和透射波的场分布，并研究了光栅的结构参数（光栅深度、基底厚度、占空比等）对反射波和透射波各级衍射效率的影响。     

用计算机模拟光栅光谱次级明纹相对强度的分布

根据惠更斯-菲涅耳原理,应用MATLAB软件编程,模拟光栅光谱次级明纹光强的分布图形,通过改变光栅缝数、光栅常数和缝宽等参数,观察到光栅衍射次级明纹强度的相应变化,得出缝数越多,次级明纹的相对强度越小,而光栅常数和缝宽的变化只能改变次级明纹的分布。用计算机模拟光栅衍射,尤其对于课堂教学具有很直观效果。     

塔尔波特效应在光栅计量中的应用

本文根据塔尔波特成像公式，计算当单色球面波照射光栅时，离光栅不同距离处的光强分布和调制度，讨论光栅付间隙对莫尔条纹信号的不灵敏性和光学倍频，并介绍几种新颖光栅光学系统。     

光栅分振幅光偏振测量系统的研制

使用一个既能产生反射光衍射又能产生透射光衍射的特殊金属光栅作为分光器,研制一种新颖的高速光波偏振态测量系统。它没有使用转动光学部件或调制器,而是将金属光栅产生的四条1级衍射光的光强线性地转换为电信号,通过定标方法得到系统的非奇异的仪器矩阵,然后通过线性运算得到入射光的待测Stokes矢量。该系统结构紧凑、安装方便,可用作实时偏振测量术和椭偏测量术中的偏振态探测器。     

相位光栅衍射法测量高灰阶LC-SLM相位调制特性

为测量高灰阶液晶空间光调制器(LC-SLM)整体相位调制特性,引入二维棋盘形相位光栅衍射测量方法.根据傅里叶光学原理,经过理论推导和仿真分析得到零级衍射光强与相位调制量之间的关系.搭建含有参考光束的衍射实验系统,通过适当的光斑图像处理计算出零级衍射相对光强,从而获得相位调制特性曲线,并与干涉测量法实验结果进行对比.实验...     

光纤光栅视觉系统

利用光学衍射原理，研制成了光纤光栅衍射屏，并与计算机神经网络相结合，开发了了一种识别立体形状的视觉系统。本文介绍了光纤光栅的设计原理及计算方法，给出了系统的总体结构及工作原理，完成了三棱 柱，三棱锥、四棱柱，四棱锥和球等立体形状学习与识别，并讨论了实验结果。     

集成光栅干涉微位移测量方法

介绍了一种新型集成光栅干涉微位移测量方法,设计加工了微位移敏感芯片,并进行了初步的性能测试．敏感芯片利用硅-玻璃键合体硅工艺制作而成,在玻璃上制有金属光栅,光栅上方有由铝梁支撑的可动结构．实验系统由敏感芯片、半导体激光器、光电二极管以及相应的驱动、检测电路组成入射激光照射到光栅上产生衍射光斑,衍射光的光强随可动结构与光栅之间的距离变化,通过测量衍射光强的变化可以得到位移．测试实验结果表明,所制作的集成光栅干涉微位移敏感芯片可实现位移检测,最小可检测的位移约0．2nm．     

Diffractive light attenuators with variable transmission

Abstract

A new application of diffractive optical elements (DOEs) for continuous or multistage adjustment of optical radiation intensity is described. The diffractive attenuators are linear or circular gratings (amplitude or phase) with constant period and diffraction efficiency that varies across the grating. The zero order of diffraction is used as the output and transmitted through the grating without angular deviation. The diffractive attenuators, in distinction to conventional analogues, allow one to change the intensity of the light beam according to predetermined function and have no limitations for power of the regulated light beam. These elements can be used in optical systems as a beam splitter with adjusted splitting coefficient. The experimental results on a circular diffractive attenuator fabricated by direct laser writing on a chromium film are presented. The range of transmission variation was 20 times within a 340° angle of attenuator turn. The possibility to use a phase diffractive attenuator as a light radiation modulator for a powerful technological laser is discussed.     

Design of a Binary Grating with Subwavelength Features that Acts as a Polarizing Beam Splitter

A binary diffractive optical element, acting as a polarizing beam splitter, is proposed and analyzed. It behaves like a transmissive blazed grating, working on the first or the second diffraction order, depending on the polarization state of the incident radiation. The grating-phase profile required for both polarization states is obtained by means of suitably sized subwavelength groups etched in an isotropic dielectric medium. A rigorous electromagnetic analysis of the grating is presented, and numerical results concerning its performances in terms of diffraction efficiency as well as frequency and angular bandwidths are provided.     

Cylindrical-type nanometer-resolution laser diffractive optical encoder

A new, to our knowledge, design for a cylindrical-type diffractive optical encoder is proposed. The wave-front aberrations induced by the power of the rotation disk in this encoder can be canceled out completely. Wave-front-aberration cancellation and desensitization to the grating misalignment are achieved by means of positioning the virtual point source, which was induced by the cylindrical grating with respect to two sets of modified telescopes with a magnification ratio of one: 1x telescopes. For evaluating the performance envelope of this newly designed optical system a code v-based optical-design software program was adopted to simulate the performance of the optical system. From tolerance-analysis results it was found that this newly developed cylindrical encoder system has the capability to compensate for most aberrations and, in addition, possesses a high tolerance for optical-component misalignment. For verifying the performance of the developed system the cylindrical diffractive encoder system was cross-referenced with a Hewlett-Packard Model HP-5529 laser interferometer positioning signal. The experimental results confirm the merits of this newly developed cylindrical encoder.     

衍射频谱法测光栅膜层厚度

根据傅立叶光学理论从光栅的衍射频谱中可以反推光栅本身的多种信息,包括其形貌特征。 利用矩形相位光栅的傅立叶变换,推导出零级和一级衍射光强和矩形相位光栅膜层厚度之间的函数关系,据此可在测得零级和一级次光强后,推算出光栅膜层厚度。以台阶仪作为标准,该方法的测量误差在4%以内。     

Radiation characteristics of waveguide diffractive doublets

The radiation characteristics of waveguide diffractive doublets consisting of double gratings located on two surfaces of waveguide cladding film are modeled based on a singular perturbation method. We determine the conditions under which the presence of the upper grating does not affect the radiation characteristics of the waveguide diffractive doublet as a whole. This allows independent performance of the upper grating, which may be replaced by a general diffractive optical element, and of the lower grating as a waveguide grating coupler. The results obtained provide an alternative method for determining the thickness of cladding film in the waveguide diffractive doublets for guided-wave manipulation.     

Planar-integrated talbot array illuminators

We demonstrate the planar integration of Talbot array illuminators designed to generate one-dimensional spot arrays. The array illuminator basically consists of a phase grating and a cylindrical diffractive lens integrated as a single diffractive optical element onto a transparent glass substrate. We discuss various design aspects, and we focus on problems typical for planar-integrated free-space optics like the tilted optical axis of the system. Experimental results and measurements, which were obtained from planar-integrated setups fabricated as surface-relief structures on a transparent glass substrate by use of standard photolithography, are included.     

Zeroth-order phase-contrast technique

What we believe to be a new phase-contrast technique is proposed to recover intensity distributions from phase distributions modulated by spatial light modulators (SLMs) and binary diffractive optical elements (DOEs). The phase distribution is directly transformed into intensity distributions using a 4f optical correlator and an iris centered in the frequency plane as a spatial filter. No phase-changing plates or phase dielectric dots are used as a filter. This method allows the use of twisted nematic liquid-crystal televisions (LCTVs) operating in the real-time phase-mostly regime mode between 0 and p to generate high-intensity multiple beams for optical trap applications. It is also possible to use these LCTVs as input SLMs for optical correlators to obtain high-intensity Fourier transform distributions of input amplitude objects.     

Stray-light effects of diffractive beam-shaping elements in optical microsystems

The use of diffractive beam-shaping elements in hybrid or monolithic microsystems is investigated. Compact optical systems require diffractive structures with small grating periods for creating large deflection angles. Such elements are difficult to fabricate while a low stray-light level is maintained. In addition, because of the small geometrical dimensions and the short propagation lengths in an optomechanical microsystem, any stray light generated by the diffractive structure critically affects the overall optical performance. A model for the estimation of the interference effects between the designed and the unwanted diffraction orders is developed and applied to an example of a collimating diffractive optical element. On the basis of theoretical and experimental results, design rules for the application of diffractive beam-shaping elements in microsystems are derived.     

Multiple annular linear diffractive axicons

We propose a chromatic analysis of multiple annular linear diffractive axicons. Large aperture axicons are optical devices providing achromatic nondiffracting beams, with an extended depth of focus, when illuminated by a white light source, due to chromatic foci superimposition. Annular apertures introduce chromatic foci separation, and because chromatic aberrations result in focal segment axial shifts, polychromatic imaging properties are partially lost. We investigate here various design parameters that can be used to achieve color splitting, filtering, and combining using these properties. In order to improve the low-power efficiency of a single annular axicon, we suggest a spatial multiplexing of concentric annular axicons with different sizes and periods we call multiple annular aperture diffractive axicons (MALDAs). These are chosen to maintain focal depths while enabling color imaging with sufficient diffraction efficiency. Illustrations are given for binary phase diffractive axicons, considering technical aspects such as grating design wavelength and phase dependence due to the grating thickness.