交替刻蚀制备有序锯齿形硅纳米线阵列及其光学性能研究

采用金属催化化学刻蚀法(MCCE),以金属Ag为催化剂,在HF与H2O2体系中通过交替刻蚀在P(111)硅衬底上制备出锯齿形硅纳米线阵列.利用扫描电子显微镜对硅纳米线的形貌进行了表征,研究了HF浓度与H2O2浓度对纳米线刹蚀方向的调控作用.选取不同的HF与H2O2浓度配比,分别对硅基底各向同性刻蚀与各向异性刻蚀进行调控,使得刻蚀方向对溶液浓度的变化能够快速响应.在溶液Ⅰ([HF]=2.3 mol/L,[H2O2]=0.4 mol/L)与溶液Ⅱ([HF]=9.2 mol/L,[H2O2]=0.04 mol/L)中交替刻蚀,制备出刻蚀方向高度可控的大规模锯齿形硅纳米线.利用紫外-可见分光光度计对锯齿形硅纳米线的减反射性能进行研究,结果表明,其表现出优异的减反特性,最低反射率为5.9％.纳米线形貌的高度可控性使其在微电子器件领域也具有巨大的应用前景.     

化学腐蚀工艺对激光选区熔化成形TC4钛合金表面粗糙度的影响

采用化学腐蚀技术解决激光选区熔化(Selective laser melting, SLM)成形钛合金表面黏附粉末导致表面粗糙的问题,系统研究了腐蚀溶液成分及工艺参数对SLM成形TC4钛合金表面粗糙度的影响。研究结果表明,腐蚀液的成分配比与腐蚀时间是主要的影响因素,随着HF/HNO3体积比的减小,样品表面粗糙度降低效果减弱。当HF/HNO3=1/4时,随着腐蚀时间的增加,样品表面粗糙度显著降低,但当腐蚀时间过长时会造成对基体的损伤。当HF∶HNO3体积比=1∶4,腐蚀时间为9 min时,样品表面粗糙度为2.52μm,同时腐蚀处理过程对样品的尺寸影响较小(降低0.12 mm),此时达到一个最佳状态。     

MEMS压印模板制作的刻蚀机理及尺寸控制方法

为了提高基于湿法刻蚀压印模板制作工艺中刻蚀图形尺寸的控制精度,研究了玻璃湿法刻蚀的反应动力学过程,得到刻蚀剂中（HF）2为决定反应速率的主要活性成分的结论;结合实验建立了合理的刻蚀速率模型．采用不同氢氟酸浓度的刻蚀液进行了实验,实测刻蚀速率与理论计算数值的对比结果表明模型预测精度达到96％以上．基于该模型刻蚀深度确定刻蚀时间进行了压印模板制作的实验,制作了图形特征尺寸为15μm、刻蚀深度为8μm的压印模板．对模板图形的测量结果表明,通过该模型预测的尺寸误差仅为0．05μm．     

Chemical etching of (100) GaAs in the (NH4)2Cr2O7-H2SO4-N H4Cl-H2O system

The etching solution containing ammonium dichromate, sulphuric acid and ammonium chloride in water solution allows for the investigation of the influence of individual active components and their concentration on the etching reaction with GaAs. The influence of these agents on etching as well as the temperature and stirring were examined. The etching rate increases with increasing Cl^– ion concentration, increases and subsequently decreases with the increasing of H⁺ ion concentration and remains constant in the wide range of oxidant anion concentration. The effect of stirring on etching rate allows us to estimate regions dominated by diffusion kinetics. The activation energy in the wide range of parameters is constant and equal to 60 kJ mol^–1. Microscopic observations reveal surfaces of various morphologies: smooth; covered with round hills; or with a network of veins. Various profiles of grooves arranged in various directions are revealed due to the preferential characteristic of etching; these profiles are also influenced by the mask material.     

Kinetics and mechanism of adsorption of methylene blue from aqueous solution by nitric-acid treated water-hyacinth

Kinetics adsorption experiments were conducted to evaluate the adsorption characteristics of a cationic dye (methylene blue, MB) onto nitric-acid treated water-hyacinth (N-WH). Results showed that N-WH can remove MB effectively from aqueous solution. The loading of MB onto N-WH was found to increase significantly with increasing the initial MB concentration, but the residual concentration of MB in solution also increased. A complete removal of MB from solution was only achieved at the lower range of initial MB concentration (less than 286 mg/L). Temperature had a slight effect on the amount adsorbed at equilibrium. The adsorption rate was fast and more than half of the adsorbed-MB was removed in the first 15 min at room temperature, which makes the process practical for industrial application. The adsorption kinetics at room temperature could be expressed by the pseudo second order model, while at higher temperatures (45-80 degrees C) and low MB concentration (97 mg/L) both Lagergren's model and the pseudo second order model can be used to predict the kinetics of adsorption. The overall rate of dye uptake was found to be controlled by external mass transfer at the beginning of adsorption, then gradually changed to intraparticle diffusion control at a later stage. The initial period where external mass transfer is the rate controlling step was found to increase with increasing initial MB concentration and decrease with increasing temperature. The increase in temperature was also found to increase the rate of adsorption and reduce the time required to reach equilibrium. The initial rate of adsorption, h(o), was calculated, it was found to increase with increasing temperature, while the increase in MB concentration decreased h(o) at the lower concentration range then increased h(o) again at high concentration. The value of the activation coefficient, E, was found to be 8.207 kJ/mol, which indicates a diffusion controlled process.     

A method for determination of the diffusion coefficient of hydrogen in titanium alloys by chemical etching

We propose a model of absorption of hydrogen by titanium alloys in the process of chemical etching. We obtained a solution that describes the amount of absorbed hydrogen and its distribution in the metal as a function of the rate and time of etching. On the basis of the equations obtained, we developed a method for determination of the diffusion coefficient of hydrogen in a metal. The essence of the method is a sequential etching of a specimen in hydrogenated and nonhydrogenated solutions and determination of the amount of hydrogen which remains in the metal. The effective diffusion coefficients of hydrogen in titanium alloys with various structures are found. Central Institute of Aircraft Motor Building, Moscow, Russia. Tupolev Aircraft Scientific and Technical Association, Moscow, Russia. Translated from Fizyko-Khimichna Mekhanika Materialiv, Vol. 34, No. 4, pp. 107–112, July–August, 1998.     

Morphology of porous silicon structures formed by anodization of heavily and lightly doped silicon

By computer simulation the growing process of porous silicon under p⁻-Si and p⁺-Si anodization in HF solution is studied. The model of electrochemical etching of p⁺-Si includes the relief selective mechanism, which allows one to establish the relationship between anodization conditions (current density, HF concentration, temperature and doping level) and the topological characteristics of porous silicon (PS). The simulation of p⁻-Si dissolution is based on the model of diffusion limited aggregation (DLA), taking into account the thermal generation of holes and the quantum confinement effect. The various morphology of simulated PS structures exhibits a close resemblance to that of experimental ones formed in p⁺-Si and p⁻-Si wafers. For simulated p⁻-Si-based PS layers the porosity profiles and fractal dimension are calculated. It is shown that PS in p⁻-Si is multifractal with fractal dimension varying monotonously from 0.1 to 3 with size increase.     

采用HF酸浸蚀沉降的方法从单晶硅切割废浆料中回收硅粉

采用HF酸浸蚀沉降的方法回收单晶硅切割废浆料中的硅粉。系统地研究了在回收硅粉过程中,HF酸的浓度,HF酸处理的时间,以及在HF酸浸蚀沉降处理前的超声震荡时间等实验条件对回收率和纯度等性能的影响因素。研究表明,在HF酸浓度为2%,HF酸处理时间24h,超声震荡时间60min的条件下,回收得到的粉体中硅的纯度可以达到82%(质量分数),且回收率可以达到62%的水平。通过此方法可以实现从切割废浆料中回收硅粉。     

Lipopolymer gradient diffusion in supported bilayer membranes

We measure the gradient diffusion coefficient of a model lipopolymer in supported lipid bilayer membranes from Fourier-transform post-electrophoresis relaxation. The experiments and accompanying quantitative interpretation furnish the concentration dependence of the gradient diffusion coefficient. In striking contrast to the recent measurements of the self-diffusion coefficient from fluorescence recovery after photobleaching, the lipopolymer gradient diffusion coefficient increases with concentration. We interpret the enhancement at small but finite concentrations using the Scalettar–Abney–Owicki (SAO) statistical mechanical theory (1988) and the Bussell–Koch–Hammer (BKH) hydrodynamic theory (1995), which are customarily adopted to model membrane protein dynamics. The SAO theory furnishes an effective disc radius and soft repulsive interaction radius that are comparable to the Flory radius of the unperturbed polyethylene glycol chains. On the other hand, the BKH theory predicts a gradient diffusion coefficient that decreases with disc/membrane protein concentration. Thus, in contrast to membrane proteins, we conclude that lipopolymer hydrodynamic interactions are weak because the principal disturbances are in the low-viscosity aqueous phase. Accordingly, lipopolymer interactions are dominated by thermodynamic interactions among polymer chains. Interestingly, our experiments suggest that increasing (decreasing) the polymer molecular weight should increase (decrease) the relaxation rate of lipopolymer concentration fluctuations.     

Kinetics and mechanism of removal of methylene blue by adsorption onto perlite

The kinetics and mechanism of methylene blue adsorption on perlite have been studied. The effects of various experimental parameters, such as initial dye concentration, temperature and pH on the adsorption rate were investigated. Adsorption measurements show that the process is very fast and physical in nature. The extent of the dye removal increased with increase in the initial concentration of the dye and the initial pH and temperature of solution. Adsorption data were modelled using the first and second-order kinetic equations, mass transfer and intra-particle diffusion models. It was shown that the second-order kinetic equation could best describe the sorption kinetics. The diffusion coefficient, D, was found to increase when the initial dye concentration, pH and temperature were raised. Thermodynamic activation parameters, such as DeltaG*, DeltaS* and DeltaH*, were calculated.     

影响多孔硅孔隙率的因素

研究了在制备多孔硅过程中影响其孔隙率的各种因素 ,给出了氢氟酸浓度、腐蚀时间、阳极腐蚀电流、温度及光照度与多孔硅孔隙率的关系 ,同时研究了多孔硅的晶格常数随其孔隙率变化的规律 ,并对以上各项结果作出了初步解释。     

Removal of basic dye from aqueous medium using a novel agricultural waste material: pumpkin seed hull

In this work, pumpkin seed hull (PSH), an agricultural solid waste, is proposed as a novel material for the removal of methylene blue (MB) from aqueous solutions. The effects of the initial concentration, agitation time and solution pH were studied in batch experiments at 30 degrees C. The equilibrium process was described well by the multilayer adsorption isotherm. The adsorption kinetics can be predicted by the pseudo-first-order and the modified pseudo-first-order models. The mechanism of adsorption was also studied. It was found that for a short time period the rate of adsorption is controlled by film diffusion. However, at longer adsorption times, pore-diffusion controls the rate of adsorption. Pore diffusion takes place in two distinct regimes, corresponding to diffusion in macro- and mesopores. The results demonstrate that the PSH is very effective in the removal of MB from aqueous solutions.     

Porosity control in metal-assisted chemical etching of degenerately doped silicon nanowires

We report the fabrication of degenerately doped silicon (Si) nanowires of different aspect ratios using a simple, low-cost and effective technique that involves metal-assisted chemical etching (MacEtch) combined with soft lithography or thermal dewetting metal patterning. We demonstrate sub-micron diameter Si nanowire arrays with aspect ratios as high as 180:1, and present the challenges in producing solid nanowires using MacEtch as the doping level increases in both p- and n-type Si. We report a systematic reduction in the porosity of these nanowires by adjusting the etching solution composition and temperature. We found that the porosity decreases from top to bottom along the axial direction and increases with etching time. With a MacEtch solution that has a high [HF]:[H(2)O(2)] ratio and low temperature, it is possible to form completely solid nanowires with aspect ratios of less than approximately 10:1. However, further etching to produce longer wires renders the top portion of the nanowires porous.     

Effect of a modified cover layer on the properties of hydrogen-sensitive Pd/GaAs/InGaAs diode heterostructures with quantum wells

The influence of a developed surface relief of an overgrowth (cover) layer modified by anodic oxidation and/or etching on the characteristics of hydrogen-sensitive Pd/GaAs/InGaAs diode heterostructures with quantum wells has been studied. The modified structures exhibit a significant increase in sensitivity and response speed, which is related for the most part to a decrease in the effective distance from the surface, on which atomic hydrogen is chemisorbed, to an elastically strained layer of the InGaAs quantum well. This layer retards the diffusion of hydrogen, which leads to an increase in the hydrogen concentration at the interface.     

Multi-spot porous silicon chip prepared from asymmetric electrochemical etching for human immunoglobin G sensor

Multi-spot porous silicon (MSPS)-based optical biosensor was developed to specify the biomolecules. MSPS chip was generated by an electrochemical etching of silicon wafer using an asymmetric electrode configuration in aqueous ethanolic HF solution and constituted with nine arrayed porous silicon. MSPS prepared from anisotropic etching conditions displayed the Fabry-Pérot fringe patterns which varied spatially across the porous silicon (PS). Each spot displayed different reflection resonances and different pore characteristics as a function of the lateral distance from the Pt counter electrode. The sensor system consists of the 3 x 3 spot array of porous silicon modified with Protein A. The system was probed with various fragments of an aqueous Human Immunoglobin G (Ig G) analyte. The sensor operated by measurement of the reflection patterns in the white light reflection spectrum of MSPS. Molecular binding and specificity was detected as a shift in wavelength of these Fabry-Pérot fringe patterns.     

Theory, experiment, and application of optical fiber etching

Based on fiber Bragg grating (FBG), an online monitoring system for the etching process of optical fiber in a hydrofluoric (HF) acid solution has been designed. The variation curves of the wavelength shifts of FBGs with etching time at three different temperatures have been obtained and analyzed theoretically. The results show that the etching process of optical fiber in HF acid solution can be understood by the variation of the wavelength shift of FBG with etching time. Finally, required tapered fiber tips can be made by controlling the etching velocity and the pulling velocity of optical fiber from the etching solution.     

产出和质检具有学习效应的EPQ决策

研究产出和质检过程同时具有学习效应的EPQ决策问题。由于生产过程的不完备,在生产过程中会生产质量缺陷的产品。在面临常数需求的基础上,建立了产出与质检过程均具有学习效应的成本函数模型,并采用牛顿法进行了求解。数值与敏感性分析表明,随着生产的推进,在早期的生产阶段,单位产品的平均生产时间快速减少,在后期趋于稳定;随着产出率学习系数的增大,最优生产时间缓慢递减;随着质检学习系数的增大,最优生产时间缓慢递增;随着缺陷率的增大,最优成本快速增加。所得结论为决策最优的生产量提供了依据。     

Microstructural evolution in semi-solid AA7034

The kinetics of semi-solid grain coarsening in a spray-formed AA7034 aluminium alloy were determined by the use of ex situ coarsening experiments. The coarsening rate constant of the alloy decreases with increasing solid fraction for solid fractions greater than 0.65. For solid fractions between 0.6 and 0.65, the coarsening rate constant increases as the solid fraction increases. For solid fractions below 0.6, the coarsening rate constant decreases again with increasing solid fraction. A model of flow-enhanced diffusion was developed to explain the grain-coarsening behaviour at low solid fractions, with flow caused by the macroscopic shape change of the uncontained semi-solid material during coarsening. Together with previous liquid film and modified liquid film migration models, the flow-enhanced diffusion model shows qualitative agreement with available experimental results.     

Micro-fabrication techniques applied to aluminosilicate glass surfaces: Micro-indentation and wet etching process

Micro-indentation and HF etching were explored as micro-fabrication techniques applied to glass surfaces. The effects of the aluminosilicate glass composition and of the etching conditions on the etching rate were investigated. It was found that the etching rate increased with increasing the ratio of Al₂O₃ to SiO₂ in the aluminosilicate glass. Etching parameters, such as pH, concentration and temperature of HF acid, had effects on etching rate. However, the effects of these parameters were much smaller at indented area than at non-indented area. The results indicated that the etching rate difference between the two areas, which is one of the key factors in the micro-fabrication technique, could be controlled with these parameters. And the phenomena can be well explained in terms of etching and leaching mechanism of aluminosilicate glass.     

Removal of Pb(II) from aqueous solution on chitosan/TiO(2) hybrid film

This paper presents the adsorption of Pb(II) from aqueous solution using chitosan/TiO(2) hybrid film (CTF) adsorbent. Batch experiments were carried out as a function of solution pH, adsorption time, Pb(II) concentration and temperature. The equilibrium data fitted well with the linear Freundlich model. The adsorption process was proved to be the second grade reaction and the theoretically maximum adsorption amount at equilibrium was 36.8 mg-Pb/g. The influence parameters were optimized by response surface method (RSM), such as initial metal concentration, pH and temperature. The extreme points were gained by the Statistical Analysis System software: initial metal concentration is 50-55 mg/l, pH is 3-4 and temperature is 60 degrees C. Very high regression coefficient (R(2)=0.9689) indicates excellent evaluation of experimental data by second-order polynomial regression model. Under this condition the theoretical adsorption efficiency is 90.6%. It illuminates that this model is reliable to optimize the adsorption process and CTF is suitable for adsorbing Pb(II) from aqueous solution.