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1.
The frequency (f) and bias voltage (V) dependence of electrical and dielectric properties of Au/SiO2/n-GaAs structures have been investigated in the frequency range of 10 kHz–3 MHz at room temperature by considering the presence of series resistance (Rs). The values of Rs, dielectric constant (ε′), dielectric loss (ε″) and dielectric loss tangent (tan δ) of these structures were obtained from capacitance–voltage (C–V) and conductance–voltage (G/ω–V) measurements and these parameters were found to be strong functions of frequency and bias voltage. In the forward bias region, C–V plots show a negative capacitance (NC) behavior, hence ε′–V plots for each frequency value take negative values as well. Such negative values of C correspond to the maximum of the conductance (G/ω). The crosssection of the C–V plots appears as an abnormality when compared to the conventional behavior of ideal Schottky barrier diode (SBD), metal–insulator–semiconductor (MIS) and metal–oxide–semiconductor (MOS) structures. Such behavior of C and ε′ has been explained with the minority-carrier injection and relaxation theory. Experimental results show that the dielectric properties of these structures are quite sensitive to frequency and applied bias voltage especially at low frequencies because of continuous density distribution of interface states and their relaxation time.  相似文献   

2.
The frequency and voltage dependence of capacitance–voltage (CV) and conductance-voltage (G/ωV) characteristics of the Cr/p-Si metal semiconductor (MS) Schottky barrier diodes (SBDs) were investigated in the frequency and applied bias voltage ranges of 10 kHz to 5 MHz and (−4 V)−(+4 V), respectively, at room temperature. The effects of series resistance (Rs) and density distribution of interface states (Nss), both on CV and G/ωV characteristics were examined in detail. It was found that capacitance and conductance, both, are strong functions of frequency and applied bias voltage. In addition, both a strong negative capacitance (NC) and an anomalous peak behavior were observed in the forward bias CV plots for each frequency. Contrary to the behavior of capacitance, conductance increased with the increasing applied bias voltage and there happened a rapid increase in conductance in the accumulation region for each frequency. The extra-large NC in SBD is a result of the existence of Rs, Nss and interfacial layer (native or deposited). In addition, to explain the NC behavior in the forward bias region, we drew the CI and G/ωI plots for various frequencies at the same bias voltage. The values of C decrease with increasing frequency at forward bias voltages and this decrease in the NC corresponds to an increase in conductance. The values of Nss were obtained using a Hill–Coleman method for each frequency and it exhibited a peak behavior at about 30 kHz. The voltage dependent profile of Rs was also obtained using a Nicollian and Brews methods.  相似文献   

3.
All RF sputtering-deposited Pt/SiO2/n-type indium gallium nitride (n-InGaN) metal–oxide–semiconductor (MOS) diodes were investigated before and after annealing at 400 °C. By scanning electron microscopy (SEM), the thickness of Pt, SiO2, n-InGaN layer was measured to be ~250, 70, and 800 nm, respectively. AFM results also show that the grains become a little bigger after annealing, the surface topography of the as-deposited film was smoother with the rms roughness of 1.67 nm and had the slight increase of 1.92 nm for annealed sample. Electrical properties of MOS diodes have been determined by using the current–voltage (IV) and capacitance–voltage (CV) measurements. The results showed that Schottky barrier height (SBH) increased slightly to 0.69 eV (IV) and 0.82 eV (CV) after annealing at 400 °C for 15 min in N2 ambient, compared to that of 0.67 eV (IV) and 0.79 eV (CV) for the as-deposited sample. There was the considerable improvement in the leakage current, dropped from 6.5×10−7 A for the as-deposited to 1.4×10−7 A for the 400 °C-annealed one. The annealed MOS Schottky diode had shown the higher SBH, lower leakage current, smaller ideality factor (n), and denser microstructure. In addition to the SBH, n, and series resistance (Rs) determined by Cheungs׳ and Norde methods, other parameters for MOS diodes tested at room temperature were also calculated by CV measurement.  相似文献   

4.
This work presents the effect of varied thickness of oxide layer and radiation dose on electrical characteristics of Ag/SiO2/Si MOS devices irradiated by 1.5 MeV γ–radiations of varied doses. SiO2 layers of 50, 100, 150 and 200 nm thickness were grown on Si substrates using dry oxidation and exposed to radiation doses of 1, 10 and 100 kGy. The exposure to radiation resulted in generation of fixed charge centers and interface traps in the SiO2 and at the Si/SiO2 interface. Capacitance-conductance-voltage (C-G-V) and capacitance-conductance-frequency (C-G-f) measurements were performed at room temperature for all MOS devices to quantify the active traps and their lifetimes. It is shown that accumulation and minimum capacitances decreased as the thickness of SiO2 layer increased. For the unexposed MOS devices, the flat band voltage VFB decreased at a rate of −0.12 V/nm, density of active traps increased by 4.5 times and depletion capacitance CDP, increased by 2.5 times with the increase of oxide layer thickness from 50 to 200 nm. The density of active traps showed strong dependence on the frequency of the applied signal and the thickness of the oxide layer. The MOS device with 200 nm thick oxide layer irradiated with 100 kGy showed density of active interface traps was high at 50 kHz and was 3.6×1010 eV−1 cm−2. The relaxation time of the interface traps also increased with the exposure of γ–radiation and reached to 9.8 µs at 32 kHz in 200 nm thick oxide MOS device exposed with a dose of 100 kGy. It was inferred that this was due to formation of continuum energy states within the band gap and activation of these defects depended on the thickness of oxide layer, applied reverse bias and the working frequency. The present study highlighted the role of thickness of oxide layer in radiation hard environments and that only at high frequency, radiation induced traps remain passivated due to long relaxation times.  相似文献   

5.
The purpose of this paper is to analyze electrical characteristics in Au/SiO2/n-Si (MOS) capacitors by using the high-low frequency (CHF-CLF) capacitance and conductance methods. The capacitance-voltage (C-V) and conductance-voltage (G/ω-V) measurements have been carried out in the frequency range of 1 kHz-10 MHz and bias voltage range of (−12 V) to (12 V) at room temperature. It was found that both C and G/ω of the MOS capacitor were quite sensitive to frequency at relatively low frequencies, and decrease with increasing frequency. The increase in capacitance especially at low frequencies is resulting from the presence of interface states at Si/SiO2 interface. Therefore, the interfacial states can more easily follow an ac signal at low frequencies, consequently, which contributes to the improvement of electrical properties of MOS capacitor. The interface states density (Nss) have been determined by taking into account the surface potential as a function of applied bias. The energy density distribution profile of Nss was obtained from CHF-CLF capacitance method and gives a peak at about the mid-gap of Si. In addition, the high frequency (1 MHz) capacitance and conductance values measured under both reverse and forward bias have been corrected for the effect of series resistance (Rs) to obtain the real capacitance of MOS capacitors. The frequency dependent C-V and G/ω-V characteristics confirm that the Nss and Rs of the MOS capacitors are important parameters that strongly influence the electrical properties of MOS capacitors.  相似文献   

6.
Radio frequency sputtering system is employed to fabricate metal oxide semiconductor (MOS) capacitors using an ultra-thin layer of HfAlOx dielectric deposited on n-GaAs substrates with and without a Si interface control layer incorporated in between the dielectric and the semiconductor. Measurements are performed to obtain capacitance voltage (CV) and current voltage (IV) characteristics for GaAs/Si/HfAlOx and GaAs/HfAlOx capacitors under different constant voltage and constant current stress conditions. The variation of different electrical parameters such as change in interface trap density, hysteresis voltage with various values of constant voltage stress and the dependence of flat band voltage, fractional change in gate leakage current density, etc. with stress time are extracted from the CV and IV data for capacitors with and without a Si interlayer. Further the trap charge density and the movement of trap centroid are investigated for various injected influences. The dielectric breakdown and reliability properties of the dielectric films are studied using constant voltage stressing. A high time-dependent dielectric breakdown (TDDB, tbd ? 1350 s) is observed for HfAlOx gate dielectric with a silicon inter-layer under the high constant voltage stress at 8 V. Compared to capacitors without a Si interlayer, MOS capacitors with a Si interlayer exhibit improved electrical and breakdown characteristics, and excellent interface and reliability properties.  相似文献   

7.
The dielectric properties of Ni/n-GaP Schottky diode were investigated in the temperature range 140–300 K by capacitance–voltage (CV) and conductance–voltage (G/ωV) measurements. The effect of temperature on series resistance (Rs) and interface state density (Nss) were investigated. The dependency of dielectric constant (ε′), dielectric loss (ε′′), loss tangent (tan δ), ac conductivity (σac), real (M′) and imaginary (M′′) parts of the electric modulus over temperature were evaluated and analyzed at 1 MHz frequency. The temperature dependent characteristics of ε′ and ε′′ reveal the contribution of various polarization effects, which increases with temperature. The Arrhenius plot of σac shows two activation energies revealing the presence of two distinct trap states in the chosen temperature range. Moreover, the capacitance–frequency (Cf) measurement over 1 kHz to 1 MHz was carried out to study the effect of localized interface states.  相似文献   

8.
Complete admittance expressions, adapted from the equations previously presented for Metal/Oxide/Semiconductor (MOS) structure, were derived and modified admittance approach was successfully applied on a-Si:H/c-Si heterojunction to deduce surface state density (Nss) by employing capacitance–voltage (CV) and conductance–voltage (G/ωV) measurements. Through the approach, Nss was determined as 6×1012 cm−2 eV−1 that was mutually checked by continuum model, used previously for evaluating Nss in MOS structure. Furthermore, locating such an amount at the interface of a-Si:H and c-Si, experimentally measured CV curve was reproduced through AFORS-HET simulation program. Presence of such a large amount of Nss was originated due to native oxide layer, confirmed through spectroscopic elipsometry measurement.  相似文献   

9.
The dielectric characteristics of gamma irradiated Au/SnO2/n-Si/Au (MOS) capacitor were studied. The MOS capacitor was irradiated by a 60Co gamma radiation source with a dose rate of 0.69 kGy/h. The dielectric parameters such as dielectric constant (ε′), dielectric loss (ε″), loss factor (tan δ) and ac electrical conductivity (σac) were calculated from the capacitance–voltage (CV) and conductance–voltage (G/ωV) measurements. It is found that the C and G/ω values decrease with the increasing total dose due to the irradiation-induced defects at the interface. Also, the calculated values of ε′, ε″ and σac are found to decrease with an increased radiation dose. This result indicates that the dielectric characteristics of the MOS capacitor are sensitive to gamma-ray dose.  相似文献   

10.
《Organic Electronics》2007,8(5):591-600
Hybrid metal–insulator–semiconductor structures based on ethyl-hexyl substituted polyfluorene (PF2/6) as the active polymer semiconductor were fabricated on a highly doped p-Si substrate with Al2O3 as the insulating oxide layer. We present detailed frequency-dependent capacitance–voltage (CV) and conductance–voltage characteristics of the semiconductor/insulator interface. PF2/6 undergoes a transition to an ordered crystalline phase upon thermal cycling from its nematic-liquid crystalline phase, confirmed by our atomic force microscope images. Thermal cycling of the PF2/6 films significantly improves the quality of the (PF2/6)/Al2O3 interface, which is identified as a reduced hysteresis in the CV curve and a decreased interface state density (Dit) from ∼3.9 × 1012 eV−1 cm−2 to ∼3.3 × 1011 eV−1 cm−2 at the flat-band voltage. Interface states give rise to energy levels that are confined to the polymer/insulator interface. A conductance loss peak, observed due to the capture and emission of carriers by the interface states, fits very well with a single time constant model from which the Dit values are inferred.  相似文献   

11.
In this paper, we present comprehensive results on Al-postmetallization annealing (Al-PMA) effect for the SiO2/GeO2 gate stack on a Ge substrate, which were fabricated by a physical vapor deposition method. The effective oxide thickness of metal-oxide-semiconductor (MOS) capacitor (CAP) was ~7 nm, and the Al-PMA was performed at a temperature in the range of 300–400 °C. The flat band voltage (VFB), the hysteresis (HT), the interfacial states density (Dit), and the border traps density (Dbt) for MOSCAPs were characterized by a capacitance–voltage method and a constant-temperature deep-level transient spectroscopy method. The MOSCAP without Al-PMA had an electrical dipole of ~−0.8 eV at a SiO2/GeO2 interface, which was disappeared after Al-PMA at 300 °C. The HT, Dit, and Dbt were decreased after Al-PMA at 300 °C and were maintained in the temperature range of 300–400 °C. On the other hand, the VFB was monotonically shifted in the positive direction with an increase in PMA temperature, suggesting the generation of negatively charged atoms. Structural analyses for MOSCAPs without and with Al-PMA were performed by a time-of-flight secondary ion mass spectroscopy method and an X-ray photoelectron spectroscopy method. It was confirmed that Al atoms diffused from an Al electrode to a SiO2 film and reacted with GeO2. The dipole disappearance after Al-PMA at 300 °C is likely to be associated with the structural change at the SiO2/GeO2 interface. We also present the device performances of Al-gated p-channel MOS field-effect transistors (FET) with PMA treatments, which were fabricated using PtGe/Ge contacts as source/drain. The peak field-effect mobility (μh) of the p-MOSFET was reached a value of 468 cm2/Vs after Al-PMA at 325 °C. The μh enhancement was explained by a decrease in the total charge densities at/near the GeO2/Ge interface.  相似文献   

12.
This paper describes the structural properties, electrical and dielectric characteristics of thin Dy2O3 layer deposited on the n-GaAs substrate by electron beam deposition under ultra vacuum. Structural and morphological characterizations are investigated by atomic force microscopy (AFM) and X-ray diffraction measurements (XRD). The XRD shows that the elaborated Dy2O3 oxide has a cubic structure. The electrical and dielectric properties of Co/Au/Dy2O3/n-GaAs structure were studied in the temperature range of 80–500 K. The conductance and capacitance measurements were performed as a function of bias voltage and frequency. The dielectric constant (ε′), dielectric loss (ε″) and dielectric loss tangent (tanδ) of the structure are obtained from capacitance–voltage (CV) and conductance–voltage (G/ωV) measurements. These parameters are found to be strong functions of temperature and bias voltage. A strong negative capacitance (NC) phenomenon has been observed in CV; hence ε′–V plots for each temperature value take negative values. The following behavior of the C and ε′ in the forward bias region has been explained with the minority-carrier injection and relaxation theory. From DC conductance study, electronic conduction is found to be dominated by thermally activated hopping at high temperature. Activation energy is deduced from the variation of conductance with temperature. The interface state density (Nss) of the structure is of the order 1.13×1013 eV−1 cm−2.  相似文献   

13.
The capacitance–voltage (CV) and conductance–voltage (G/ωV) characteristics of the Au/n-GaAs Schottky barrier diodes (SBDs) have been investigated for 10, 100 and 500 kHz at 80 and 280 K. To evaluate the reason of non-ideal behavior in CV and G/ωV plots, the measured C and G/ω values were corrected by taking into accounts series resistance effect. Experimental results show that the values of C and G/ω were found to be a strong function of interface states (Nss) at inverse and depletion regions especially at low frequencies, but Rs is effective only at the accumulation region especially at high frequencies. Such behavior of the C and G/ω values may be attributed to an increase in polarization especially at low frequencies and the existence of Nss or dislocations between metal and semiconductor. It can be concluded that the increase in C and G/ω at low frequencies especially at weak and depletion regions results from the existence of Nss. The values of doping concentration (Nd) and barrier height (BH) between metal and semiconductor were also obtained from the linear part of high frequency (500 kHz) C−2 vs. V plots at 80 and 280 K, respectively.  相似文献   

14.
The electrical analysis of Ni/n-GaP structure has been investigated by means of current–voltage (IV), capacitance–voltage (CV) and capacitance–frequency (Cf) measurements in the temperature range of 120–320 K in dark conditions. The forward bias IV characteristics have been analyzed on the basis of standard thermionic emission (TE) theory and the characteristic parameters of the Schottky contacts (SCs) such as Schottky barrier height (SBH), ideality factor (n) and series resistance (Rs) have been determined from the IV measurements. The experimental values of SBH and n for the device ranged from 1.01 eV and 1.27 (at 320 K) to 0.38 eV and 5.93 (at 120 K) for Ni/n-GaP diode, respectively. The interface states in the semiconductor bandgap and their relaxation time have been determined from the Cf characteristics. The interface state density Nss has ranged from 2.08 × 1015 (eV?1 m?2) at 120 K to 2.7 × 1015 (eV?1 m?2) at 320 K. Css has increased with increasing temperature. The relaxation time has ranged from 4.7 × 10?7 s at 120 K to 5.15 × 10?7 s at 320 K.  相似文献   

15.
This study aims to experimentally investigate whether Perylene-3,4,9,10-tetracarboxylic dianhydride (PTCDA) organic layer at p-GaAs/Ag interface affects electrical transport across this interface or not. The electronic properties of metal–organic semiconductor–inorganic semiconductor structure between p type GaAs and PTCDA organic film have been investigated via current–voltage (IV) and capacitance–voltage (CV) methods. The Ag/PTCDA/p-GaAs contact exhibits a rectification behavior with the barrier height of 0.74 eV and ideality factor value of 3.42. Modification of the potential barrier of Ag/p-GaAs diode was achieved by using thin interlayer of the PTCDA organic material. This was attributed to the fact that the PTCDA organic interlayer increased the effective barrier height by influencing the space charge region of GaAs. The low and high frequency capacitance–voltage plots were used to determine the interface state density of the diode.  相似文献   

16.
Frequency-dependent electrical characteristics of Ag/p-InP diodes have been determined using impedance spectroscopy at room temperature. Series resistance (Rs) and interface state(s) (Nss) values were extracted from capacitance (C) and conductance (G/w) data using the Nicollian and Goetzberger and Hill–Coleman methods, respectively. C and G/w data were also corrected in the whole measured bias voltage range to obtain real diode capacitance Cc and conductance Gc values in order to see the effects of Rs. Both the C–V and Rs–V plots showed anomalous peak in depletion region especially at low frequencies due to the existence of Nss. C–V and G/w–V plots crossed at a certain bias voltage and this point shifted toward negative bias voltages with increasing frequency and then disappeared at 3 MHz. Also, decrease in C values corresponds to an increase in G/w values in the same bias voltages.  相似文献   

17.
High-κ TiO2 thin films have been fabricated using cost effective sol–gel and spin-coating technique on p-Si (100) wafer. Plasma activation process was used for better adhesion between TiO2 films and Si. The influence of annealing temperature on the structure-electrical properties of titania films were investigated in detail. Both XRD and Raman studies indicate that the anatase phase crystallizes at 400 °C, retaining its structural integrity up to 1000 °C. The thickness of the deposited films did not vary significantly with the annealing temperature, although the refractive index and the RMS roughness enhanced considerably, accompanied by a decrease in porosity. For electrical measurements, the films were integrated in metal-oxide-semiconductor (MOS) structure. The electrical measurements evoke a temperature dependent dielectric constant with low leakage current density. The Capacitance–voltage (CV) characteristics of the films annealed at 400 °C exhibited a high value of dielectric constant (~34). Further, frequency dependent CV measurements showed a huge dispersion in accumulation capacitance due to the presence of TiO2/Si interface states and dielectric polarization, was found to follow power law dependence on frequency (with exponent ‘s’=0.85). A low leakage current density of 3.6×10−7 A/cm2 at 1 V was observed for the films annealed at 600 °C. The results of structure-electrical properties suggest that the deposition of titania by wet chemical method is more attractive and cost-effective for production of high-κ materials compared to other advanced deposition techniques such as sputtering, MBE, MOCVD and ALD. The results also suggest that the high value of dielectric constant ‘κ‘ obtained at low processing temperature expands its scope as a potential dielectric layer in MOS device technology.  相似文献   

18.
This work presents the effect of varied doses of X-rays radiation on the Ag/TiO2/p-Si MOS device. The device functionality was observed to depend strongly on the formation of an interfacial layer composed of SiOx and TiOy, which was confirmed by the spectroscopic ellipsometry. The XRD patterns showed that the as prepared TiO2 films had an anatase phase and its exposure to varied doses of 17 keV X-rays resulted in the formation of minute rutile phase. In the X-rays exposed films, reduced Ti3+ state was not observed; however a fraction of Ti–O bonds disassociated and little oxygen vacancies were created. It was observed that the device performance was mainly influenced by the nature and composition of the interfacial layer formed at the TiO2/Si interface. The spectroscopic ellipsometry was used to determine the refractive indices of the interfacial layer, which was 2.80 at λ=633 nm lying in between that of Si (3.87) and TiO2 (2.11). The dc and frequency dependent electrical measurements showed that the interface defects (traps) were for both types of charge carriers. The presence of SiOx was responsible for the creation of positive charge traps. The interface trap density and relaxation time (τ) were determined and analyzed by dc and frequency dependent (100 Hz–1 MHz) ac-electrical measurements. The appearance of peak in G/ω vs log (f) confirmed the presence of interface traps. The interface traps initially increased up to exposure of 10 kGy and then decreased at high dose due to compensation by the positive charge traps in SiOx part of the interface layer. It was observed that large number of interface defects was active at low frequencies and reduced to a limiting value at high frequency. The values of relaxation time, τ ranged from 4.3±0.02×10−4 s at 0 V and 7.6±0.2×10−5 s at −1.0 V.  相似文献   

19.
An Au/n–InP/In diode has been fabricated in the laboratory conditions and the current–voltage (IV) and capacitance–voltage (CV) characteristics of the diode have been measured in room temperature. In order to observe the effect of the thermal annealing, this diode has been annealed at temperatures 100 and 200 °C for 3 min in N2 atmosphere. The characteristic parameters such as leakage current, barrier height and ideality factor of this diode have been calculated from the forward bias IV and reverse bias CV characteristics as a function of annealing temperature. Also the rectifying ratio of the diode is evaluated for as-deposited and annealed diode.  相似文献   

20.
A Mo/n-type 6H-SiC/Ni Schottky barrier diode (SBD) was fabricated by sputtering Mo metal on n-type 6H-SiC semiconductor. Before the formation of Mo/n-type 6H-SiC SBD, an ohmic contact was formed by thermal evaporation of Ni on n-type 6H-SiC and annealing at 950 °C for 10 min. It was seen that the structure had excellent rectification. The electrical parameters were extracted using its current–voltage (IV) and capacitance–voltage (CV) measurements carried out at room temperature. Very high (1.10 eV) barrier height and 1.635 ideality factor values were reported for Mo/n-type 6H-SiC using ln IV plot. The barrier height and series resistance values of the diode were also calculated as 1.413 eV and 69 Ω from Norde׳s functions, respectively. Furthermore, 1.938 eV barrier height value of Mo/n-type 6H-SiC SBD calculated from CV measurements was larger than the one obtained from IV data.  相似文献   

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