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1.
We propose a novel pressure sensor based on the combination of the ring resonator with two straight waveguides and a two-end fixed beam. The principle of this device is acquiring the system static pressure by monitoring the changes in the transmission wavelength shift of the ring resonator with double waveguides. The numerical results show that the sensitivity of the system is up to 49.3 pm/kPa while the pressure range is 0--300 kPa. The thickness of the fixed beam is an important factor which impacts the sensitivity of the system. This device can provide support for fabricating high sensitivity and low cost micro pressure sensors.  相似文献   

2.
A high-sensitivity sensor for multiple gases based on microring array filter and fiber loop ring-down spectroscopy system is proposed and demonstrated. The parameters of the resonators are designed so that the filtered signal from a broadband light source can be tuned with an absorption spectral line of gas. Therefore, through adding microring resonators horizontally and vertically, the number of target gases and filter range are increased. In this research, in the broad spectral range of about 0.9 μm, only the absorption spectral lines of target gases are filtered. The simulation results show that three target gases, CH4, CO2 and HF, can be simultaneously detected by the sensing system. Owing to the fiber loop ring-down spectroscopy, the whole system is optimized in mini-size and sensitivity, and we can choose different sensing methods to enhance the measurement accuracy for high and low concentration conditions.  相似文献   

3.
The transfer function of the microring resonator is deduced,and the effects of the normalized loss,coupling coefficient and surrounding media on the resonance performance are investigated thoroughly.Utilizing the improved fused tapering tech-nique and ingenious self-coiling coupling method,a high-quality microring resonator(radius of about 500μm)with larger extinction ratio(>10 dB)and sharper resonance is designed and fabricated by a segment of continuous sub-micrometer fiber.The microring resonator constructed in this way demonstrates extremely small connection loss with communication fiber in contrast to the planar waveguide technology.  相似文献   

4.
采用电子束光刻和ICP刻蚀等工艺制作出绝缘体上Si(SoI)基纳米线波导微环谐振(MRR)滤波器,波导截面尺寸为300 nm×320 nm,微环半径为5 μm.测试结果表明,器件的自由频谱宽度(FSR)为16.8nm,1.55μm波长附近的消光比(ER)为18.1 dB.通过对MRR滤波器进行热光调制,在21.4~60...  相似文献   

5.
陈曜 《光电子.激光》2009,20(9):1133-1136
以SiN为材料,采用与CMOS工艺相兼容的技术,制备了波导宽度为1μm,半径为400μm的SiN光学微环。经测量,其品质因数(Q值)高达20 000,自由光谱范围(FSR)为0.5 nm。提出了采用光学微环传感器、单波长光源和光功率计对待测物进行测量的方案。实验证明,该方案与传统的采用光谱仪测量谐振峰值漂移的方法相比,可以取得更高的系统探测灵敏度。最后,利用微环传感器对葡萄糖溶液浓度进行测量,灵敏度高达10-4折射率单元(RIU),证明了该传感器可以应用于溶液检测领域。  相似文献   

6.
7.
张凡凡  周平  陈乔杉  杨林 《半导体学报》2014,35(10):104011-6
实现了一种基于两个级联微环谐振器的导向光学译码器,器件利用等离子色散效应调制微环谐振器。制作工艺误差引起的两个微环谐振器谐振波长不一致可以通过微环谐振器上热极进行补偿。码型发生器产生的两个电学信号驱动微环谐振器的PIN结,由四个输出端口的光学信号给出译码结果。通过对器件的静态光谱分析得到工作波长和驱动电压。最终实现了100Mbps的动态译码结果。  相似文献   

8.
本文对一种基于槽型微环谐振器的生物传感器进 行了研究,通过微环谐振器与槽型波导的结合,增强光与传感媒质的相互作用,减小传输损 耗的制约影响。采用时域有限差分法(FDTD) 研究了波导有效折射率随传感物质材料折射率的变化,结果显示它们呈线性关系,这为折射 率的 有效传感提供了可能。采用电子束光刻和等离子体刻蚀技术在SOI基片上制备了样品,SOI 基片 的顶层硅和埋入氧化层的厚度分别为220 nm和2μm,微环谐振器的 微环半径为30 μm。采用波 导光栅耦合器来实现光的输入和输出,频谱测量显示槽型微环谐振器的品质因数达到了2940, 通过测量传感器表面覆盖不 同浓度的氯化钠溶液时光谱谢振峰的变化,得到传感器的灵敏度 和检测极限分别为980.24 nm/RIU和5.4×10-4 RIU。  相似文献   

9.
高磊  王涛 《激光技术》2014,38(5):614-618
为了解决全光逻辑门结构所需抽运能量过大的问题,提出了一种基于Mach-Zehnder结构微环谐振腔的全光控制逻辑门结构。通过在微环波导上加入空气孔加强对光的限制,增强了带边附近的3阶非线性效应,从而减小达到所需相移的抽运能量。将微环谐振腔与Mach-Zehnder结构结合,采用光学Kerr效应控制不同微环内相移的改变,从而实现不同逻辑门功能。同时进行了理论分析与仿真验证,计算了不同尺寸空气孔对于结构的影响,并对于不同逻辑功能的控制方法,验证了结构的可行性。结果表明,这种逻辑门结构所需抽运能量不超过10dBm,延迟处于皮秒量级,速度快,器件的尺寸处于微米量级,该结构可以同时实现不同的逻辑门状态,对于全光网络的研究有指导意义。  相似文献   

10.
作为新兴的群组滤波技术,interleaver技术与传统的DWDM技术相结合,可以在不增加新光纤及器件技术难度的基础上使原有DWDM系统的复用波长数增加一倍.耦合一个谐振微环到光纤熔锥型非平衡马赫一曾德尔干涉仪型波长交错滤波器系统中,利用微环的相位引入改善交错滤波器的响应函数,选择适当的微环耦合角,使其带通平坦性和阻带...  相似文献   

11.
Analysis of a racetrack microring resonator with MMI coupler   总被引:3,自引:0,他引:3  
The static spectral characteristic response of a ring resonator in the form of racetrack with a multimode interference (MMI) coupler has been numerically simulated and investigated. The generalized multimode transmission matrix of the MMI has been evaluated with beam-propagation method simulation and furthermore, the effect of the excitation of higher order modes in the ring resonator on the device-transmission characteristic has been analyzed.  相似文献   

12.
设计了一种新型微环谐振器,其基本结构由圆角正方形波导与条形波导组成.根据波导光学的耦合模理论,推导出双环串联和双环并联的圆角正方形微环谐振器的光强传递函数,并通过数值模拟分别获得这两种模型的谐振器的输出特性.结果表明:与传统的圆环形谐振器相比,圆角正方形结构微环谐振器的输出光谱的通带宽、谐振峰平坦、自由光谱区范围大,更...  相似文献   

13.
简单介绍了利用F-P的可调谐性提出的一种新型的基于1550nm宽带光源的光纤气体检测系统的工作原理、实验装置软硬件设计以及利用该实验装置进行实验数据处理的思想--FFT一次谐波算法和计算光谱面积的算法.利用一次谐波的方法进行了实验,得出实验结果和结论.  相似文献   

14.
基于狭缝波导结构,设计了工作波长在890 nm的聚合物基微环。从折射率传感的角度详细分析了狭缝波导的模场特性。分析了波导高度、宽度及狭缝宽度对灵敏度的影响。传统的狭缝波导具有较高的弯曲损耗,这会影响微环谐振器的品质因子Q以及消光比。设计了非对称的狭缝结构,保证波导模式位于波导中央传输,降低弯曲损耗。为了条形波导与狭缝波导更好的耦合,设计了基于多模干涉结构的条形-狭缝波导模式转换器。仿真表明设计的微环谐振器的传感灵敏度达到109 nm/RIU。  相似文献   

15.
Ammonia (NH3) gas sensors based on pentacene organic field-effect transistors (OFETs) are fabricated using polymers as the dielectric. Compared with those incorporating poly(vinyl alcohol), poly(4-vinylphenol) or poly(methyl methacrylate) dielectric, a low detect limitation of 1 ppm and enhanced recovery property are obtained for OFETs with polystyrene (PS) as gate dielectric. By analyzing the morphologies of pentacene and electrical characteristics of the OFETs under various concentrations of NH3, the variations of the sensing properties of different dielectrics based OFET-sensors are proved to be mainly caused by the diversities of dielectric/pentacene interfacial properties. Furthermore, low surface trap density and the absence of polar groups in PS dielectric are ascribed to be responsible for the high performance of NH3 sensors.  相似文献   

16.
提出并制作了基于硅(Si)基双微环谐振腔的高灵敏 度电流传感器。所设计的Si基双微 环谐振腔的输出功率对波导内传输TE模的有效折射率变化非常敏感,探测由有效折射率变 化造成的输出功率改变可实现高灵敏度微弱电流传感。在设计的Si基微环上集成了具有较高 加热效率的TiN 电阻,当有电流通过该电阻时,电阻发热并改变波导内传输TE 模的有效 折射率,最终造成微环输出功率改变。通过光功率计检测不同输入电流下微环输出功率,即 可 实现对电流的测量。实验结果表明,制作的微环传感器在测试范围为0~6mA时,灵敏度 高达1575dBm/A,线性相关系数 R2大于0.999  相似文献   

17.
基于光学微谐振腔的自参考耗散克尔孤子(Dissipative Kerr Solitons, DKSs)有广泛的应用,如频率合成器、相干通信、天文光谱仪校准、精密测量、光学时钟、双梳光谱学等。倍频程DKS已在氮化硅和铌酸锂微谐振腔中实现,笔者提出了一种在氮化铝(AlN)微环谐振腔中通过单一泵浦直接产生倍频程DKS的简单方案。通过将两个谐振频率相近的模式TE00 和TE10分别作为泵浦谐振和辅助谐振模式,红失谐侧的辅助模式TE10可以有效地平衡孤子形成过程中的热拖曳效应。慢速扫描泵浦光波长可获得稳定的倍频程展宽的孤子梳,带宽为1100~2300 nm,孤子存在范围最大为10.4 GHz(83 pm)。这是首次在AlN平台上获得倍频程展宽的克尔光孤子。该方案在单一泵浦源下就可以获得稳定的倍频程光孤子以及宽的孤子访问窗口,不同于其他方案需要额外引入复杂的控制手段和设备。  相似文献   

18.
基于气体的近红外吸收机理,研究了一种双气室光纤气体传感系统。通过光纤光栅和压电陶瓷对宽带光源LED进行波长调制,获得与气体吸收峰对应的窄带反射出射光。利用谐波检测原理,检测测量气室和参考气室的二次谐波信号,以它们的比值作为系统输出,消除了吸收系数随环境的变化、光源光功率的波动和光路干扰对测量精度的影响。利用波分复用技术实现了多种气体的高精度测量,甲烷气体测量的实验结果表明该系统的测量灵敏度可以达到1×10-5。  相似文献   

19.
The performance of an erbium-doped fiber ring laser based intra-cavity absorption gas sensor was evaluated with performance enhanced techniques. A multi-line wavelength sweep technique and a weighted averaging technique were proposed for better gas detection. By selecting appropriate system parameters,6 strong absorption lines near 1 530 nm of C2H2 were obtained with good spectrum resolution in one scanning period. One group with higher absorption coefficients was used for relatively low gas concentration detection and the other with lower absorption coefficients was used for relatively high gas concentration. Both the groups can be used for medium gas concentration detection. For various concentration cases,by choosing proper absorption lines and performing weighted averaging, detection accuracy can be obtained over an extended detection range. The minimum detection limit could be very low after optimization.  相似文献   

20.
设计并制备了一种基于热光效应的集成可调谐氮化 硅(Si3N4)波导微环谐振腔滤波器,通过采用马赫-曾德干涉仪(MZI)构成的可调谐 耦合器控制耦合区耦合比,以实现滤波器消光比的调谐。设计并优化了微环谐振 腔的波导截面尺寸、弯曲半径和耦合区波导间隔等参数,并通过光刻、反应离子刻蚀(RIE )等工艺制备 了两种不同弯曲半径的Si3N4波导微环谐振腔。实验结果表明,本文器件在波长1550nm附近处的自由光谱 范围(FSR)为68pm,3dB带宽约为16pm,品质因子Q达到了9.68×10 4,消光比可调范围约为17dB。  相似文献   

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