星载高灵敏度平衡光电探测器研究

设计了一种由平衡光电二极管芯片和跨阻放大器混合集成的星载高灵敏度平衡光电探测器。平衡光电二极管芯片采用双InP-InGaAs光电二极管单元单片集成的内平衡结构,以降低芯片自身噪声,提高探测器灵敏度。通过Cadence仿真软件对集成了正负双向电流输入电路、自动增益控制电路和反相器型输入电路的闭环放大器结构进行了仿真,得到等效噪声功率、带宽和增益三者之间的关系,制作出适配平衡光电二极管芯片的跨阻放大器。搭建1.55μm激光测试系统对研制的探测器进行性能测试,结果显示,其3dB带宽为1.58GHz,等效噪声功率密度为5.96pW/Hz1/2,共模抑制比为42.04dB(@DC～1.58GHz),在相干激光通信系统中的接收灵敏度达到-61dBm。     

中心带雪崩光电二极管的InGaAs PIN四象限探测器

介绍了研制的中心带雪崩管的PIN四象限InGaAs光电探测器.这种光电探测器PD芯片具有一个平面结构的InGaAs PIN四象限光电二极管,其中心位置带有一个雪崩光电二极管,位于同一晶片上.探测器的5个PD芯片被安装在各自厚膜集成的前置放大器上,同时封装在一个带光窗的金属壳体中.中心雪崩探测器和四象限探测器的电压响应度、响应时间、等效噪声功率分别为:2.5×105 V/W(1 550 nm)和0.95×104 V/W(1 550 nm);7 ns和20 ns;0.15×10-12 W/Hz1/2和4×10-12W/Hz1/2,象限间串扰小于3%,象限内不均匀性小于5%.这种探测器可同时用于人眼安全激光测距、激光定位和跟踪.     

面向空间引力波探测的低噪声平衡零拍探测系统研究（特邀）

空间引力波探测频段位于0.1 mHz~1 Hz范围内,在该频段内包含了更大特征质量和尺度的引力波波源信息。目前,基于不同尺寸及空间轨道的大型激光干涉空间引力波探测计划已经逐步实施,其中在干涉仪的激光光源系统中,需要抑制激光强度噪声及频率噪声等,光电探测作为激光噪声表征及抑制的第一级器件,其性能将直接影响激光噪声抑制效果。通过选定低噪声芯片、高稳定偏压系统的基础上,采用自减电路及跨阻放大电路进行整体电路设计;在电磁屏蔽、低温漂系数元件、低噪声供电以及主动温控等技术手段实现了高增益低噪声平衡零拍探测系统的研制;结合快速傅里叶变换法以及对数轴功率谱密度算法对其增益、带宽等性能进行评估测试,并进一步对激光的强度噪声在0.05 mHz~1 Hz频段进行探测表征。实验结果表明:所研发平衡零拍探测电子学噪声谱密度在1 mHz~1 Hz的频率范围内在3.6×10?5 V/Hz1/2以下,小于空间引力波探测对激光光源噪声要求;进一步当入射光功率为400 μW时,测量得到平衡零拍探测系统在0.1 mHz~1 Hz的频率范围内增益在20 dB以上;激光强度噪声谱密度在1 mHz处为3.6×10?2 V/Hz1/2,实现低噪声光电探测及激光强度噪声表征,为空间引力波探测中激光强度噪声表征及抑制等方面提供关键器件支撑。     

一种混合集成1×4阵列平衡光电探测器的设计

针对合成孔径激光雷达中单个光斑观测视场受限的难题，设计了一种由阵列平衡探测器芯片和阵列跨组放大器芯片混合集成的1×4阵列平衡光电探测器。阵列平衡探测器芯片采用4对背照式InPInGaAs平衡光电二极管单片集成的内平衡结构，降低芯片寄生电容，提高器件的响应频率和一致性。通过倒装集成工艺将阵列平衡探测器芯片和阵列跨组放大器芯片进行集成，缩减像元间距，扩大成像视场。搭建测试系统对进行探测器性能评测，结果显示，其有效像元率达到100%，共模抑制比为33dB,3dB带宽为102MHz，等效噪声功率密度为2.0pW/Hz^1/2，增益实现三档可调，整体输出增益一致性为99%，满足合成孔径激光雷达大幅宽成像需求。     

一种高增益、大带宽跨阻放大器的设计

作为激光近炸引信中探测与目标识别核心元件的光电探测器,其性能取决于光电二极管和相应的放大电路。针对引信、制导应用对光电探测器的要求,提出一种新型高增益、大带宽跨阻放大器设计。该跨阻放大器由两级放大电路构成,第一级由两个对称的RGC（Regulated Cascode）结构组成,消除光电二极管漏电流对直流工作点影响,隔离光电二极管寄生电容提升工作带宽;第二级放大电路由三个级联的电流复用反相放大器构成,是跨阻放大器的主要增益级;最后以射级跟随器输出,为后续系统提供足够的电压摆幅。 该电路基于SMIC 0.35μm 标准CMOS工艺设计,仿真结果表明：跨阻增益为110.2dBΩ,带宽为46.7MHz,40MHz处的等效输入噪声电流谱密度低至1.09pA/ ,带宽内等效输出噪声电压为5.37mV。测试结果表明,跨阻放大器增益约为109.3 dBΩ,输出电压信号上升时间约为7.8ns,等效输出噪声电压大小为6.03mV,功耗约为10mW,对应芯片面积为1560×810μm2。 关键字：跨阻放大器、高增益、大带宽、RGC、反相放大器     

一种用于激光制导的高灵敏度制冷型APD四象限探测器组件

设计并制作了一种硅雪崩光电二极管(APD)四象限探测器芯片,基于该芯片研制了一款新型高灵敏度制冷型APD四象限探测器组件;创新性地将探测器芯片、热电制冷器、前置放大电路和增益控制模块集成在带光窗的金属外壳中;该组件制冷加热速度快,在-45～70℃环境温度内可使器件恒定工作在10±2℃。测试结果表明,相对于传统的PIN四象限探测器组件,由于APD探测器本身能产生雪崩增益,该组件的灵敏度提高了近两个数量级,作用距离更远。     

二极管非制冷红外探测器及其读出电路设计

针对非制冷红外技术的低成本高性能应用,提出了基于SOI的二极管红外探测器及其读出电路的集成设计方案。阐述了二极管非制冷红外探测器的基本原理和工艺实现。对探测器的电学特性进行理论推导,得出读出电路的设计指标。采用连续时间自稳零电路结构实现探测器输出信号的低噪声低失调放大,采用级联滤波器以减弱开关非理想因素的影响,并采用片内电容采样保持,使得I/O引脚数较少,从而减小版图面积。采用spectre工具进行仿真,在CSMC 0.5 m 2P3M CMOS工艺下实现。结果表明:读出电路性能良好,闭环增益为65.8 dB,等效输入噪声谱密度为450 nV/Hz,等效输入失调电压100 V以内,功耗为5 mW,能实现探测器信号的准确读出。     

一种用于X射线安全检测的多通道电荷读出IC

介绍了一种用于X射线安全检测的多通道电荷读出集成电路.该电路可提供32通道的探测器电荷-模拟电压转换,具有无死区时间、失调校准和低噪声特性.电路由电荷放大器增益控制、时序发生器、移位寄存器链、电荷放大器阵列、采样保持放大器和驱动器等组成.芯片采用华润上华0.6μm标准CMOS工艺实现,管芯尺寸为3.1 mm×7.1 mm,工作在3.3 MHz,5V供电和3.5V参考电压下的功耗为45 mW.测试结果表明,在25.5 pF的电荷放大器增益电容和52pF的光电二极管结电容下,电路的输出噪声性能达到90 μV (Vrms).     

一种高带宽、高电源抑制比的跨阻放大器

光电探测器是激光雷达的核心器件,通常由雪崩光电二极管(APD)阵列和相应的读出电路组成。跨阻放大器是读出电路的关键部分,其性能在很大程度上决定光电探测组件的性能。基于0.18μm CMOS工艺,针对大输入电容线性APD阵列的应用,设计了一种高增益、高带宽、高电源抑制比的跨阻放大器。基于无源反馈和有源前馈的补偿方式拓展了跨阻放大器带宽,同时实现了高增益和高带宽;设计了具有高电源抑制比的片上无电容低压差稳压器,提高了跨阻放大器的稳定性。仿真结果表明:跨阻增益为104.7 dB·Ω,带宽为198.8 MHz,等效输入噪声电流为3.65 pA·Hz~(-1/2),低频电源抑制比为-57.8 dB,全带宽范围内电源抑制比低于-10.6 dB。     

光学头中单片光电集成硅基PDIC的设计

针对应用于DVD光学头的关键部件PDIC,设计了一种芯片面积小、输出失调电压低的单片集成的硅基PDIC.芯片采用CSMC的0.5 μm BCD工艺,集成了p-i-n探测器与前置放大电路.重点介绍了p-i-n光电探测器及前置放大电路的设计思想.仿真结果表明,用于光电检测的p-i-n光电探测器在650 nm光照下响应度达0.2 A/W,互阻放大器的-3 dB带宽达到94 MHz,跨阻增益达150 kΩ.可以满足DVD系统的性能要求.     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

A rigorous proof of MIMO channel capacity’s increase with antenna number

It is well known that adding more antennas at the transmitter or at the receiver may offer larger channel capacity in the multiple-input multiple-output（MIMO） communication systems. In this letter, a simple proof is presented for the fact that the channel capacity increases with an increase in the number of receiving antennas. The proof is based on the famous capacity formula of Foschini and Gans with matrix theory.     

Teleportation of an arbitrary unknown N-qubit entangled state under the controlling of M controllers

A new quantum protocol to teleport an arbitrary unknown N-qubit entangled state from a sender to a fixed receiver under M controllers(M < N) is proposed. The quantum resources required are M non-maximally entangled Greenberger-Home-Zeilinger (GHZ) state and N-M non-maximally entangled Einstein-Podolsky-Rosen (EPR) pairs. The sender performs N generalized Bell-state measurements on the 2N particles. Controllers take M single-particle measurement along x-axis, and the receiver needs to introduce one auxiliary two-level particle to extract quantum information probabilistically with the fidelity unit if controllers cooperate with it.     

Diode-end-pumped Nd:YVO4/LBO lasers with 4.2W continuous-wave output at 457 nm

A continuous-wave (CW) 457 nm blue laser operating at the power of 4.2 W is demonstrated by using a fiber coupled laser diode module pumped Nd: YVO4 and using LBO as the intra-cavity SHG crystal With the optimization of laser cavity and crystal parameters, the laser operates at a very high efficiency. When the pumping power is about 31 W, the output at 457nm reaches 4.2 W, and the optical to optical conversion efficiency is about 13.5% accordingly. The stability of the out putpower is better than 1.2% for 8 h continuously working.     

Call for Papers

正Wireless Body-area Networks The last decade has witnessed the convergence of three giant worlds:electronics,computer science and telecommunications.The next decade should follow this convergence in most of our activities with the generalization of sensor networks.In particular with the progress in medicine,people live longer and the aging of population will push the development of wireless personal networks