用于深空探测快速反射镜的电磁驱动

为了实现深空探测系统对成像光束的高速和高精度控制,以?50 mm×4 mm的单晶硅反射镜作为负载,采用理论和仿真分析相结合的方法,对音圈电机驱动的快速反射镜进行了理论分析和实验验证。给出了该快速反射镜的一般构成、工作原理及数学模型,采用有限元法分析计算了音圈电机线圈、永磁体和气隙尺寸对驱动力矩的影响,最后设计、制作了快速反射镜样机,并进行了测试。结果表明,快速反射镜的转角范围大于±1°,带宽(3 dB)大于500 Hz。该研究结果有助于推广光学快速反射镜在深空探测、激光通信、光电对抗等领域的应用。     

空间激光通信单探测器复合跟踪控制技术研究

空间激光通信终端伺服系统是一种高精度的跟踪机构,在扰动条件下,通信系统对跟踪系统的稳定性及精度提出了较高的要求。本文主要介绍了激光通信伺服系统的复合跟踪技术,详细论述了单探测器复合跟踪方式的选择以及激光通信伺服系统的控制流程。最后,在振动平台上进行了粗精复合的激光跟踪实验。实验结果显示,当通信终端系统跟踪最大振动加速度为0.22°/s2的振动平台时,跟踪目标平稳性较好,单独采用粗跟踪时误差为60 μrad,采用粗精复合跟踪时位置误差可以达到2 μrad。实验结果表明,空间激光通信系统中单探测器复合跟踪技术的设计满足了系统跟踪精度的要求,为激光通信控制系统的设计提供了一定的参考。     

万向柔性铰链连接快速反射镜的设计与仿真

在高能激光武器系统中,快速反射镜作为光束指向控制的核心器件,对提高毁伤效能起到关键作用。针对扩展高能激光武器系统光束指向范围的战术需求,设计了一种万向柔性铰链连接快速反射镜系统。研究了各组成单元对快速反射镜系统性能的影响因素,分析了单自由度单音圈电机驱动反射镜设计方案的可行性。在此基础上给出了音圈电机和光栅测微仪的设计依据,进行参数设计,推导了万向柔性铰链的柔度表达方程,并验证了万向柔性铰链的弯曲强度。仿真结果表明,快速反射镜系统具有3.3的运动行程,一阶谐振频率达到了231.04 Hz,满足了大行程、高带宽的设计要求。     

基于自适应卡尔曼算法的单探测器解耦控制技术研究

为了提高激光通信跟瞄系统的跟踪性能,增强系统的抗扰动能力,提出基于卡尔曼滤波的单探测器复合轴控制方法。首先,对单探测器复合轴系统原理进行分析,通过误差传递函数验证了解耦算法的可行性;其次,为了改善脱靶量迟滞的影响,同时降低探测器实时处理的要求,提出一种自适应卡尔曼滤波算法;最后,根据探测器坐标系与快速反射镜坐标系之间的旋转变换关系,计算出粗精系统的解耦矩阵,并搭建一套桌面实验系统进行原理验证。实验结果表明:单探测器复合轴在0.1 Hz低频扰动条件下,精跟踪系统的相对位移不会超出反射镜偏转角度的临界值,跟踪误差由2.54 μrad下降到0.86 μrad。解耦控制能够提高系统跟踪精度并增强抗扰动能力。对于以后工程中的实际应用具有一定的指导意义。     

基于迭代学习控制的潜望式激光通信终端系统的动态跟踪设计

为提高潜望式激光通信终端伺服系统的动态跟踪性能,针对基于永磁同步电机的二维伺服转台的控制系统进行了设计。通过采取空间矢量控制方法实现电机的解耦控制,建立控制模型并完成了各控制回路的设计。针对动目标跟踪设计了迭代学习控制方法以提高通信终端的动态跟踪性能,并对控制系统的速度阶跃响应进行测试,分析通信终端系统的低速平稳性。最后,搭建了4.62 km激光通信的动态跟踪实验,利用六自由度转台模拟平台抖动,为动态跟踪验证实验创造外部平台扰动条件。实验结果表明:通信终端系统速度阶跃响应的稳态误差为±0.02 (°)/s,表明伺服系统速度回路具有较快的动态响应特性和较高的稳态精度,在最大加速度为0.219 (°)/s2的正弦波扰动条件,二维伺服转台的动态粗跟踪精度可以达到62 μrad,粗精复合跟踪精度优于2 μrad,验证了通信终端伺服系统的有效性及其动态跟踪性能,为进一步提高终端系统的跟踪精度奠定基础。     

机载激光武器高精度跟踪控制技术研究

机载激光武器系统是一种定向能武器系统,对跟踪精度要求较高,传统PID控制无法满足其高精度跟踪需求。建立了预瞄模型、探测器模型、快速反射镜模型、时滞模型等数学模型,搭建完整的仿真系统,并创新性地采用自抗扰控制算法和复合轴控制结构相结合的控制方式,以提高控制精度。通过功能验证试验验证文中搭建的仿真系统,加入实际采集的某运输机扰动,其跟踪精度为5.16 μrad,相较于传统PID控制,跟踪精度提高25倍。同时给出一种虚拟战场场景,经文中搭建的仿真模型验证,其俯仰轴和偏航轴的跟踪精度均小于10 μrad。     

舰载激光武器稳定平台粗精复合控制

为了实现舰载激光武器在复杂作战环境中对目标的精确毁伤,提出一种基于快速反射镜的粗精复合稳定平台,用以控制激光光束的稳定精度。首先,介绍了系统组成及工作原理,设计了压电陶瓷驱动的全柔性精级快速反射镜,并且分析了该快速反射镜的性能特点。然后,设计了粗精复合控制系统,在此基础上探讨了粗精复合稳定平台各组成单元之间的相互影响因素。最后,通过理论计算推导了粗精复合控制系统的误差传递函数,并搭建了实验平台,进行了稳定精度测试实验。实验结果表明:在四级海况摇摆扰动条件下,相较于传统粗级稳定平台,方位复合平台的稳定精度从191.6 μrad提高到6.7 μrad,提高了约27.6倍,俯仰复合平台的稳定精度从121.3 μrad提高到4.9 μrad,提高了约23.8倍;在各种外界摇摆扰动下,粗精复合平台对激光光束的稳定控制精度均≤10 μrad。满足了舰载激光武器平台对激光光束高精度稳定控制的作战需求。     

音圈电机快速控制反射镜研究现状

快反镜通过精确控制反射镜偏转方向从而精确控制光束偏转角度,由于其具有响应速度快、工作带宽高、指向精度高等优点,被广泛应用于激光武器、精密跟踪、自由空间光通信等领域,实现精密跟踪、稳瞄、稳像、扫描和像移补偿等功能。介绍了国内外公司和研究机构研制的音圈电机快反镜的现状,分析了音圈电机快反镜的组成,对反射镜、驱动器、转角测量模块、柔性支撑等组件的方案选型进行了讨论。介绍了所研制的音圈电机快反镜的性能。最后,讨论了音圈电机快反镜大口径、高工作带宽、大转角范围和高指向精度的未来发展方向。     

摆镜式激光通信终端光束指向与粗跟踪特性

基于两正交旋转轴的单平面镜（摆镜式）激光通信终端的粗跟踪问题,提出了一种求解光束指向的法矢量求解算法,给出了该类型通信终端的粗跟踪算法。采用矢量反射定律和矩阵旋转变换规律,理论推导了摆镜的光束指向模型和跟踪模型,对比分析了不同安装方式对光束指向和畸变的影响,并对模型分别进行了建模仿真和实验研究。结果表明:光束传输模型和粗跟踪模型的精度优于3 μrad,所研制的摆镜式激光终端粗跟踪精度,最大误差优于15.5 μrad (3σ),均方根误差优于10.5 μrad,满足激光通信终端对高精度粗跟踪的技术要求。该研究工作对摆镜式扫描系统的光束指向分析和激光终端粗跟踪具有借鉴意义。     

小型机载激光通信系统设计与验证

针对空空宽带高速通信的需求，设计了小型化机载激光通信系统。仿真分析了300 km、2.5 Gb/s无线激光链路性能，并通过运动仿真台模拟机动环境测试了系统的跟踪与通信性能，其中粗跟踪误差为533.2 μrad(1σ)，精跟踪误差为3.6 μrad(1σ)，测试数据传输240 s，通信误码率为2.82×10-9。仿真与实验验证了该系统用于远距离空空无线激光通信的可行性。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.