Current manufacturing technologies for TFT‐LCDs

Abstract— TFT‐LCD panels for notebook‐PC applications requires a thin and light form factor, low power consumption, and good display quality, whereas the desktop monitor has different requirements such as large panel size, wide viewing angle, high resolution, brightness, etc. However, for the fifth‐generation of mass production, current panel technologies have to improve in order to cope with these requirements. In this article, various approaches to the manufacturing technologies of next‐generation TFT‐LCDs are discussed.     

New approaches to process simplification for large‐area high‐resolution TFT‐LCDs

Abstract— Novel process architectures are proposed for fabricating large‐area high‐resolution TFT‐LCDs with a minimal number of process steps. A low contact resistance between Al bus lines and the transparent conductive oxide layer, necessary for large‐area panels, is obtained by inducing a self‐formed inter‐metallic compound layer at the interface without using any additional buffer or capping layers. For enhanced brightness and resolution, a new TFT array structure integrated on a color‐filter substrate, referred to as an Array on Color Filter (AOC) structure, has been developed. Good‐quality TFTs were successfully constructed on the newly developed color filter for AOC within a sufficiently wide process margin. By adopting these novel technologies, a 15.0‐in. XGA prototype panel was fabricated and shows good display performance. Thus, these novel technologies have improved cost efficiency and productivity for TFT‐LCD manufacturing, and can be applied to the development of TFT‐LCDs of extended display area and enhanced resolution, benefiting from the low resistance bus lines, the high aperture ratio, and reduction in total process steps.     

Current and future technology of low‐temperature poly‐Si TFT‐LCDs

Abstract— The state of the art of large‐area low‐temperature TFT‐LCDs will be reported in this paper. High‐performance poly‐Si TFTs are expected to realize various applications such as system display where various signal‐processing functions are added to the display. In the past few years, low‐temperature poly‐Si thin‐film‐transistor (LTPS TFT) technology has made great progress, especially in the areas of excimer laser annealing (ELA) of high‐quality poly‐Si film, ion doping for large‐area doping, and high‐quality gate SiO₂ film formation by using the low‐temperature PE‐CVD method. Also, technology trends and possible applications, such as a system displays, will be discussed.     

Ultra‐FFS TFT‐LCD with super image quality,fast response time,and strong pressure‐resistant characteristics

Fringe‐field‐switching (FFS) devices using liquid‐crystal (LC) with a negative dielectric anisotropy exhibit high transmittance and wide viewing angle simultaneously. Recently, we have developed an “Ultra‐FFS” thin‐film‐transistor (TFT) LCD using LC with a positive dielectric anisotropy that exhibits high transmittance, is color‐shift free, has a high‐contrast ratio in a wide range, experiences no crosstalk and has a fast response time of 25 msec. In this paper, the device concept is discussed, and, in addition, the pressure‐resistant characteristics of the devices compared with that of the twisted‐nematic (TN) LCD is discussed.     

Low‐power‐consumption TFT‐LCD with dynamic memory embedded in the pixels

A low‐power‐consumption thin‐film‐transistor liquid‐crystal display (TFT‐LCD) with dynamic memory cells embedded in each pixel using low‐temperature poly‐Si technology has been developed. By holding data in the memory, the operating rate of the data driver can be dramatically reduced to 4 Hz. Eight levels of gray scale with low power consumption can be achieved by using the area‐ratio gray‐scale method. This TFT‐LCD can be used for displaying fine still images, with low power consumption.     

Electrical models of TFT‐LCD panels for circuit simulations

Abstract— As thin‐film‐transistor liquid‐crystal‐display (TFT‐LCD) panels become larger and provide higher resolution, the propagation delay of the row and column lines, the voltage modulation of Vcom, and the response time of the liquid crystal affect the display images now more than in the past. It is more important to understand the electrical characteristics of TFT‐LCD panels these days. There are several commercial products that simulate the electrical and optical performance of TFT‐LCDs. Most of the simulators are made for panel designers. However, this research is for circuit, system, and panel designers. It is made in a SPICE and Cadence environment as a commercial circuit‐design tool. For circuit and system designers, it will help to design the circuit around a new driving method. Also, it can be easily modified for every situation. It also gives panel designers design concepts. This paper describes the electrical model of a 15‐in. XGA (1024 × 768) TFT‐LCD panel. The parasitic resistance and capacitance of the panel are obtained by 3‐D simulation of a subpixel. The accuracy of these data is verified by the measured values of an actual panel. The developed panel simulation platform, the equivalent circuit of a 1 5‐in. XGA panel, is simulated by HSPICE. The results of simulation are compared with those of experiment, according to changing the width of the OE signal. The proposed simulation platform for modeling TFT‐LCD panels can be especially applied to large‐sized LCD TVs. It can help panel and circuit designers to verify their ideas without making actual panels and circuits.     

Evaluation of single‐, pre‐emphasis,and dual‐driving methods in large‐sized TFT‐LCDs

Abstract— As the panel size and the frame frequency of TFT‐LCDs increases, driving issues become much more important for larger‐sized and higher‐resolution TFT‐LCDs. In our previous paper, the pre‐emphasis driving method was proposed to shorten the driving time of the data line with heavy loads of the large‐sized TFT‐LCDs. This paper proposes a simulation model based on the evaluation results of the developed pre‐emphasis source driver, and the issues of driving the data line with heavy loads are reviewed. The single‐, pre‐emphasis, and dual‐driving methods are compared in terms of their driving time and power consumption for large‐sized TFT‐LCDs with various resistances and capacitances of the data lines. At a panel load of 250‐pF capacitance and 15‐kΩ resistance in full‐HD resolution, the pre‐emphasis driving can reduce the pixel driving time to 66% with a 54% increase in the analog power consumption.     

Development of “Advanced TFT‐LCD” with good legibility under any ambient light intensity

A new LCD referred to as an “Advanced TFT‐LCD” has been developed. It consists of both transmissive and reflective electrodes in every pixel. Its subjective legibility and characteristics, such as contrast ratio, color gamut, and luminance, have been investigated at several ambient illumination intensities. As a result, it was confirmed that Advanced TFT‐LCDs offer better legibility than transmissive LCDs under any ambient illumination intensity.     

Low‐temperature poly‐Si TFT‐LCD with an integrated analog circuit

We have developed a 6‐bit D/A converter and amplifier integrated low‐temperature poly‐Si TFT‐LCD in which an integrated signal‐line driver is driven by a 5‐V power supply. We have employed a D/A converter including a new capacitor array and an original amplifier comprised of serially connected comparators to achieve high accuracy. The D/A converter performs gamma correction using upper significant bits of input data. Control signals for these circuits were generated by the integrated timing circuit. These advances in integration have been achieved for the first time using 3‐μm design rule and improved LTPS TFT technologies and provide an advanced display system with lower power consumption, smaller module size, and higher durability.     

Development of a 14.1‐in. UXGA TFT‐LCD using LTPS technology

A 14.1‐in. UXGA low‐temperature poly‐Si TFT‐LCD has been developed using p‐MOS technology. Both the peripheral driving circuits and the pixel switches are implemented using only p‐channel TFTs. The device performance for the driving circuits and the panel design issues, such as crosstalk and flicker, were investigated. The image quality required for the notebook‐PC display has been achieved by optimizing the panel design and by improving the device performance. In addition, the redundant gate driving structure has been developed to minimize the degradation of the panel yield.     

Optical design and roll‐to‐roll fabrication process of microstructure film for wide viewing LCDs

We have developed a new microstructure film for wide viewing liquid crystal displays (LCDs). By attaching it to the surface of a conventional LCD, the viewing angle characteristics of LCD has drastically improved without causing a blur of the frontal image and a decrease in the contrast ratio under bright ambient light conditions. This film can be applied to various LC modes including twisted nematic and multidomain vertical alignment by changing its internal micrometer‐size 3D structure. Further, this film can be mass‐produced efficiently by self alignment roll‐to‐roll process.     

Requirements for large‐sized high‐resolution TFT‐LCDs

Abstract— A 22‐in. prototype TFT‐LCD with a resolution of 200 pixels per inch and wide‐viewing‐angle capability has been developed and its requirements in terms of screen quality and technology will be discussed. An in‐plane‐switching mode with dual‐domain structure, post‐spacers, and high‐resolution process were implemented to achieve superior front‐of‐screen quality. And, also, in order to improve reliability and productivity, we developed a new injection method for liquid crystals which enabled us to eliminate injection holes.     

Microcrystalline‐silicon thin films by physical vapor deposition for wide‐area low‐temperature polysilicon production

A sputtered microcrystalline‐silicon thin film deposited on unannealed Corning Code 1737 glass has been shown to transform to polycrystalline material after excimer‐laser annealing at low energy densities, and below the full‐melt threshold. The homogeneous large‐grain polysilicon films obtained show promise for high‐yield manufacturing of large‐area LTPS displays. The material properties of the films will be presented and the properties of devices fabricated in the films will be discussed.     

A 15‐in. XGA thresholdless antiferroelectric LCD addressed by TFTs and using the quasi‐dc driving method

Abstract— A 15‐in. TFT‐LCD with XGA resolution using thresholdless antiferroelectric liquid crystal (TLAF) has been developed. TLAF materials show V‐shaped switching and enable display of analog gray scale, wide viewing angle, and fast response. However, in the case that high‐resolution TFT‐LCDs using materials with large spontaneous polarization such as TLAF were driven by the conventional method, alternating current (ac) driving, the obtained contrast ratio was limited because of a sharp decline of holding voltage due to the growth of a depolarization field. In order to enhance the contrast ratio, a novel driving method referred to as quasi‐dc driving was proposed. In the quasi‐dc driving, the polarity of the applied voltage to liquid crystals inverts at certain intervals of several seconds. Moreover, the applied voltage and the charging time at the time of polarity inversion are increased more than the intended signals. By this method, the 15‐in. TFT‐LCD using TLAF with high contrast ratio (more than 100:1) and wide viewing angle was realized.     

Optimization of low‐temperature poly‐Si TFT‐LCDs and a large‐scale production line for large glass substrates

Abstract— An update of the progress of inherently low‐temperature poly‐Si (LTPS) technologies, such as ELA, ion doping, and activation in conjunction with chemical vapor deposition (CVD) and photolithography will be given. We will also discuss whether LTPS LCDs will be applied to a large‐scale production line using a large motherglass substrate. It was found that a more‐powerful excimer laser as well as photolithography with higher‐resolution and a more‐precise overlaid arrangement would enable a large‐scale production line handling motherglass of 4th generation size to be constructed in the very near future with reasonable investment and productivity costs.     

Thermal dimensional stability of glass substrates for poly‐Si TFT‐LCD application

Abstract— Thermal dimensional stability of Fusion‐drawn Corning Code 1737 glass was investigated at simulated thermal cycles for low‐temperature poly‐Si TFT fabrication. For low‐temperature poly‐Si TFT processes between 550 and 600°C, annealed Code 1737 is required to meet a typical thermal shrinkage requirement of less than 20 ppm. For super‐low‐temperature poly‐Si TFT processes between 400 and 450°C, Code 1737 meets the requirement in the unannealed state. Code 1737 glass having a high strain point of 666°C provides thermal capabilities as a substrate for low‐temperature poly‐Si TFT‐LCD applications.     

Novel mobile TFT‐LCDs based on SLS technology

Abstract— Single‐crystal‐like silicon (SLS) technology is the most cost‐effective laser‐crystallization process ever invented. The throughput of the SLS process is about two times higher than that of the conventional excimer‐laser annealing (ELA) method. In addition, the performance of the TFTs fabricated by the SLS process is among the best utilized in mass production. Various TFT‐LCDs employing SLS technology, which included a 1.02‐in. full SOG LCD using an icon display for the sub‐display of cellular phones, a 1.9‐in. qVGA TFT‐LCD with a low‐power analog interface employing a low‐voltage driving scheme, and a 3.0‐in. VGA TFT‐LCD compatible with the 480i data format without additional signal processing were developed. Because the SLS process enables us to achieve highly uniform and reliable transistors, it can be effectively utilized in the mass production of mobile TFT‐LCDs with low power consumption and enhanced image quality.     

Low‐temperature poly‐Si TFT data drivers for an SVGA a‐Si TFT‐LCD panel

Low‐temperature poly‐Si TFT data drivers for an SVGA a‐Si TFT‐LCD panel have been developed. The data drivers include shift registers, sample‐and‐hold circuits, and operational amplifiers, and drive LCD panels using a line‐at‐a‐time addressing method. To reduce the power consumption of the shift register, a dot‐clock control circuit has been developed. Using this circuit, the power consumption of the shift register has been reduced to 36% of that of conventional circuits. To cancel the offset voltage generated by the operational amplifier, an offset cancellation circuit for low‐temperature poly‐Si TFTs has been developed. This circuit is also able to avoid any unstable operation of the operational amplifier. Using this circuit, the offset voltage has been reduced to one‐third of the value without using the offset cancellation circuit. These data drivers have been connected to an LCD panel and have realized an SVGA display on a 12.1‐in. a‐Si TFT‐LCD panel.     

An optical design for reflective color STN‐LCDs

In reflective color STN‐LCDs, it is necessary to achieve achromatic representation in single‐polarizer STN‐LCD modes. We propose an optimization method for the optical components of single‐polarizer STN‐LCD modes in order to achieve achromatic representation. By applying this method, it is shown that a contrast ratio of more than 20 can be achieved in the normally black (NB) mode. Furthermore, we prove that the normally white (NW) mode can be realized as well as an NB mode which is usually used in current reflective color STN‐LCDs. Comparing the viewing‐angle characteristics of the NW and NB modes, it was found that those of the NW mode are better than those of the NB mode. Particularly, high reflectance can be realized even at larger viewing angles in the NW mode.     

Novel photo‐aligned LC‐polymer compensation film for wide‐view TN displays

Abstract— We demonstrate a novel TN‐display compensation film with excellent contrast and minimal color shift, meeting the requirements for avionics displays. The film configuration was identified via extensive computer modeling. The experimental implementation based on ROLIC's LPP/LCP (linearly photopolymerizable polymer/liquid‐crystal polymer) technology results in excellent agreement with theoretical predictions.