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1.
低能Ar离子束辅助沉积Ag(111)薄膜   总被引:1,自引:0,他引:1  
采用低能Ar离子束辅助沉积方法,在Mo/Si(100)基底上制备Ag膜。实验发现,用Ar离子束溅射沉积的Ag膜呈(111)择优取向。若在溅射沉积Ag膜的同时,用能量为500eV的Ar离子束沿衬底法线方向对Ag膜进行辅助轰击,当离子/原子到达比为0.06时,Ag膜呈(111)择优取向;当离子/原子到达比增大到0.18时,Ag膜呈(111)和(100)混合晶向。若Ar离子的入射角为35.26°,离子/原子到达比为0.06时,Ag膜呈(111)择优取向;当离子/原子比增大到0.18时,Ag膜呈(111)和微弱的(100)混合晶向。若Ar离子的入射角为54.7°,离子/原子到达比为0.06时,沉积的Ag膜呈很强的(111)择优取向。  相似文献   

2.
代海洋  王治安  黄宁康 《核技术》2007,30(5):419-423
本文介绍的动态离子束混合技术制备氧化铬薄膜系在不锈钢基体上进行1keV氩离子束溅射沉积铬(同时通入一定量的O),并用100 keV的氩离子束或氧离子束轰击该样品.对两种离子束轰击形成的氧化铬薄膜进行了X射线光电子能谱(X-ray photoelectron spectroscopy,XPS)和俄歇电子能谱(Auger electron spectroscopy,AES)的分析研究.发现Ar 离子束制备的氧化铬薄膜主要是Cr2O3化合物,而O 离子束制备的氧化铬薄膜含有其它价态的铬氧化物.Ar 离子束制备氧化铬薄膜的污染碳少于O 离子束制备.与O 离子束制备相比较,相同能量的Ar 离子束轰击更有利于提高沉积的Cr原子与周围O2的反应性;Ar 离子束制备的氧化铬薄膜过渡层的厚1/3左右,较厚的过渡层显示了制备的薄膜具有较好的附着力.  相似文献   

3.
王培禄  刘仲阳 《核技术》1995,18(10):604-609
从轰击离子种类,辅助沉积方式、不同衬底材料以及存放环境湿度等因素对离子束辅助沉积的MoSx膜作特性的影响作了研究。发现这些因素在膜的沉积或使用过程中对其品质和特性都产生不能忽视的影响。  相似文献   

4.
采用电子回旋共振等离子增强化学气相沉积(ECR-PECvD)方法,以SiH4和H2为气源,在普通玻璃衬底上沉积多晶硅薄膜.利用XRD、Raman光谱和TEM研究了衬底温度、氢气流量和微波功率对多晶硅薄膜结构的影响.结果表明,制得的多晶硅薄膜多以(220)取向择优生长,少数条件下会呈现(111)择优取向.当衬底温度为300℃、H2流速为25 mL/min、微波功率为600 W时,多晶硅薄膜结晶状态最好,且呈最佳的(220)取向.  相似文献   

5.
用27keV Ar~+分别在垂直和倾斜入射情况下,轰击了Cu-Au(30wt%)合金样品,测量了Cu和Au原子的溅射角分布。角分布是用卢瑟福背散射(RBS)技术分析Al捕获膜上的Cu-Au沉积成分而定量得到的。结果表明:(1)在Ar~+倾斜(θ=40°)入射时,Cu原子择优发射,且程度比垂直入射(θ_r=O°)时增强:(2)倾斜入射时,Cu原子的角分布显示出在接近于样品表面法线方向的发射角范围内(θ<45°),发射机率比垂直入射时减小。  相似文献   

6.
离子束辅助沉积(以下简称IVD)方法是将离子束技术与真空沉积薄膜技术相结合的一种新的制膜方法。它具有沉积速率高、薄膜吸附强度大、薄膜外延温度低并能消除膜应力等优点。因此,近年来在国际上受到重视和发展。  相似文献   

7.
本文运用离子束辅助沉积法在硅片上制备了立方氮化硼薄膜 ,主要研究了辅助能量、辅助束流及辅助束中氮气含量等参数对膜中立方氮化硼 (c -BN)含量的影响。用红外光谱 (FTIR)及光电子能谱 (XPS)分析技术对得到的c -BN膜进行了分析。结果表明 :(1)合适的离子辅助能量能够获得c -BN含量高的薄膜。(2 )膜中c -BN的含量随空中N2 含量的提高而增加。 (3)辅助束流对薄膜的形成影响不明显  相似文献   

8.
谭俊  张平  蔡志海  王晓晴  唐云 《核技术》2003,26(5):349-352
运用离子束辅助沉积(IBAD)法在硅片上制备了立方氮化硼(c—BN)薄膜,研究了辅助能量、辅助束流及辅助束中氮气含量等参数对膜中c—BN含量的影响。用红外光谱(FTIR)及X射线光电子能谱(XPS)分析技术对得到的c—BN膜进行了分析。结果表明:合适的离子辅助能量能够获得c—BN含量高的薄膜;膜中c—BN的含量随辅助气体中N2含量的提高而增加;辅助束流对薄膜的形成影响不明显。  相似文献   

9.
利用由一定结构的球面 (阴极 ) 平板 (阳极 )组成的真空间隙 ,模拟特种电真空器件中电极间的微放电过程。用离子束辅助沉积 (IBAD)法 ,在阴极球面上沉积出高结合强度的晶化TiB2 薄膜。实验证明 :在高达 10 0 0℃的温度下 ,相比不锈钢材料 ,薄膜表面几乎不被氧化 ;在单次脉冲高压作用下和在经受数百次高能微粒子轰击后 ,仍呈现出弱放电特征 ,既提高了耐压能力 ,又降低了脉冲电源的动态负载  相似文献   

10.
设计了-套阳极层离子源辅助中频磁控溅射装置,并在Si(111)衬底上沉积AIN薄膜.用X射线衍射、原子力显微镜和扫描电镜分析了AIN薄膜的结构、形貌和成分.在优化的实验条件下制备的AIN薄膜具有较强的(002)衍射峰,其半高宽为612-648弧秒.气体流量、衬底偏压、离子源等对薄膜结构有明显影响.  相似文献   

11.
Zn-doped TiO2 catalysts were prepared using a sol-gel method and characterized by XPS,UV-Vis, BET, XRD in this study. Under the irradiation of simulant sunlight, the photocatalytic activity for the degradation of p-nitrophenol was studied too. After irradiation for 2.5 h, the degradation percentage of p-nitrophenol could rise to more than 80 %. The results showed that the spectrum absorption band edge of Zn/TiO2 powder does not broaden obviously comparing with pure TiO2 powder. Zinc exists as Zn (11). When calcined at 973 K, there is a new phase as ZnTiO3 in Zn/TiO2 catalyst. The order of photocatalytic activity of Zn/TiO2 catalysts calcined at different temperatures for p-nitrophenol is 773 K 〉 673 K 〉 873 K 〉 573 K 〉 973 K and the photocatalytic activity of Zn/TiO2 catalyst calcined at 773 K is better than TiO2 catalysts heated at the same temperature, and outclasses that of commercial TiO2 catalyst. It also showed that the photocatalytic degradation of p-nitrophenol follows first-order kinetics under the irradiation of simulant sunlight.  相似文献   

12.
Radiotherapy for the treatment of prostate cancer has been extensively explored in the past. Along with the comprehensive understanding of the biology of prostate cancer and rapid advances in terms of technology, the out- come of treatment for the patients with prostate cancer has improved. The authors review radiotherapy as the primary treatment for the disease, with particular emphasis on the technological advances from both the radiobiological and radiophysics aspects. Nonconventional fractionated irradiation like hyper- or hypo-fractionation has been imple- mented in the clinic, the final results still need to be confirmed in the future. Technological advances like IMRT, IGRT, in the last two decades have significantly improved the delivery of external radiotherapy to the prostate. This has re- sulted in an overall increase in the total dose that can be safely delivered to the prostate, which has led to modest im- provements in the biochemical outcome. However, establishing the standard therapy for prostate cancer remains con- troversial. It is hoped that the next decades will bring continued advances in the development of biologicals that will further improve current clinical outcomes.  相似文献   

13.
This paper introduces the injection and extraction control system design for SSRF,which is a distributed control system aimed at stability and reliability of the pulse power supplies,PPS(Personnel Protection System)and MPS(Machine Protection System).The hardware environment is mainly based on PLC(Programmable Logic Con- troller),and ARM(Advanced RISC Machine)is also applied for studying stability of the power supplies.WinCC and EPICS(Experimental Physics and Industrial Control System)have been selected as the platforms of SCADA(Super- visory Control and Data Acquisition).For unifying the interfacing to the control computer,all front-end equipments are connected via Industrial Ethemet.  相似文献   

14.
为研究含空气蒸汽在水平管内强制对流冷凝换热特性,基于对传热传质过程的分析,建立了管内为环状流与波状流条件下的流动冷凝换热模型。从潜热、显热和液膜3个环节对整个换热过程进行建模,最终得到计算局部冷凝换热系数的理论关系式。模型预测结果与实验数据的对比表明,二者相对偏差在±20%以内,验证了该换热模型的准确性与适用性。通过进一步的研究发现:从换热管入口至出口,随着冷凝的进行,管内换热主要热阻由液膜热阻向气液界面的凝结热阻转变;主流气体对流换热过程基本可忽略。  相似文献   

15.
Experiments were carried out to investigate the possible use of neutron backscattering for the detection of polyethylene (PE) sample buried in the soil. In detection of landmine by neutrons, the neutron detector and its shield play an important role. In this paper, the effects of graphite, heavy water, polyethylene and boric acid moderators on the flux of back scattered neutrons were investigated. We have also experimentally verified the effect of BF3 detector shield and obtained good agreement with theory.  相似文献   

16.
Accelerator database stores various static parameters and real-time data of accelerator. SSRF (Shanghai Synchrotron Radiation Facility) adopts relational database to save the data. We developed a data retrieval system based on XML Web Services for accessing the archive data. It includes a bottom layer interface and an interface applicable for accelerator physics. Client samples exemplifying how to consume the interface are given. The users can browse, retrieve and plot data by the client samples. Also, we give a method to test its stability. The test result and performance are described.  相似文献   

17.
Distributions of natural gamma-emitting radionuclides were determined in 93 oil samples collected from some petroleum fields in the western desert of Egypt. The radioisotope activities in the area under investigation lay in the range of (21 ± 4) to (38 ± 13) Bq?L-1 for 226Ra, (9 ± 2) to (15 ± 5) Bq?L-1 for 232Th, and (154 ± 28) to (303 ± 54) Bq?L-1 for 40K. The mean values were 27, 12, and 201 Bq?L-1, respectively. Among oils, variations in radionuclide ac- tivities could be on account of differences in TDS, HCO3, and Ba, with high or low pH. In this environment, oil prop- erties differently affected the mobilization of natural radionuclides. The range of 226Ra variation had been compared with available data from other countries. The calculated absorbed dose rate ranged from 22.33 to 32.66 nGy?h-1 in lo- cation (B) and (E) respectively, which was less than the accepted value.  相似文献   

18.
In this work,TTHMP was synthesized and labelled with 117m Sn.The preparation conditions,stability and lipophilicity of 117m Sn(IV)-TTHMP were investigated.Biodistribution of the complex in rabbits and mice was studied.It was found that the quantity of TTHMP and pH value of the prepararion solution had vital effects on the labeling yield of 117m Sn(IV)-TTHMP.It was also found that 117m Sn(IV)-TTHMP was hydrophilic and stable at room temperature and 37℃ in open air 117m Sn(IV)-TTHMP showed unexpectedly high bone uptake and bone-to-blood ratio in the animals.This made it potentially useful as an reagent for skeletal scintigraphy and radiotherapy of bone tumors.  相似文献   

19.
Linear accelerators equipped with multileaf collimators (MLC) are becoming more common and are widely used in the intensity-modulated radiotherapy (IMRT). There is an imperative need to ensure the commissioning specification of the linear accelerators for the sake of quality assurance (QA) and quality control (QC). This paper is aimed to investigate the role of AGFA high-energy CR (Computed Radiography) in calibrating dynamic multileaf collimators and evaluating the accuracy of the leaf position. The result shows that AGFA high-energy CR can easily and conveniently be used to calibrate MLC and verify its position. Hence, the application of AGFA high-energy CR is proved to be an accurate and time-saving method for routine MLC QC, especially when MLC calibration adjustments are required.  相似文献   

20.
Monitoring results of gamma dose rate level in 1992~2004 in the ambient environment of the Qinshan Nuclear Power Plants(QNPP)Base,the northeast of Zhejiang Province,are reported in this paper.It is shown that the gamma dose rate of five monitoring sites of 2.5 km to QNPP Base is 84~113 nGy/h,with an average of 96 nGy/h in the 13 years.The average value is close to the background level of 93 nGy/h prior to operation of the QNPP Base,and is lower than the monitoring result of 101 nGy/h at the reference site in Hangzhou City.Within 50 km from the QNPP Base,the cumulative dose rate of the thermoluminescent dosimeter(TLD)is 90 nGy/h,which is lower than the back- ground level of 111 nGy/h.  相似文献   

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