过滤电弧沉积的TiN/TiCrN/CrN/CrTiN多层膜

用过滤电弧技术在高速钢表面沉积了TiN／TiCrN／CrN／CrTiN多层膜，用扫描电镜(SEM)观察了截面和断口形貌及划痕后的形貌。使用俄歇电子谱仪进行剥层成分分析，用纳米压痕仪测试了多层膜和单层膜的显微硬度和弹性模量。结果表明，在调制周期大于l00nm时，多层膜的显微硬度符合Ha11—Petch关系，在80nm时，则脱离线性关系。划痕法测试多层膜的结合力达到80N。     

阴极弧径向不同位置膜层性能分布规律

利用阴极弧沉积的方法在201不锈钢基体上制备了TiN薄膜,研究了阴极弧径向不同位置大颗粒、膜厚以及膜层性能的分布规律.分别采用X射线衍射(XRD)和扫描电子显微镜(SEM)分析了膜层的相结构、膜层的表面形貌和截面形貌.研究了镀膜试样和基体在3.5%(质量分数)NaCl溶液中的腐蚀行为,并利用电化学方法分析其抗腐蚀性能,并采用球-盘式摩擦磨损、划痕测试以及微小压痕等方法测试了径向不同位置沉积的TiN薄膜摩擦磨损性能、膜基结合力以及硬度.结果表明,靠近靶材中心的位置,膜层的硬度、厚度最大,电化学腐蚀电位最高,在径向夹角20°处的膜层厚度、硬度最小.在靠近出气位置侧沉积的TiN薄膜大颗粒数目较多,造成表面缺陷增加,TiN薄膜的抗腐蚀性能下降.靠近弧源中心位置沉积的膜层摩擦磨损系数较大,两侧处的膜层摩擦系数较小,膜基结合力与表面形貌和膜层厚度有很大关系.     

真空阴极多弧离子镀沉积纳米超硬氮化钛薄膜

利用真空阴极多弧离子镀系统在Cr12Mo4V钢基材上制备出膜基间结合很好的纳米超硬氮化钛(TiN)薄膜.利用纳米硬度计、划痕仪、球一盘试验机、X射线衍射仪、透射电子显微镜和扫描电子显微镜分别考察了薄膜的纳米硬度、膜基间结合力、摩擦磨损性能和显微结构.结果表明,气体压力和脉冲基体负偏压对薄膜性能有重要影响;超硬TiN薄膜的纳米硬度为47.6 GPa、临界载荷为63 N、摩擦因数在0.5至0.8之间;结构细密的超硬薄膜在(111)晶面有强烈的择优取向.     

纳米复合Ti-B-N薄膜的结构和摩擦学性能

研究了射频等离了体辅助化学气相沉积（PCVD）技术获得的Ti-B-N薄膜的组织结构和力学性能。结果发现，B元素的加入使薄膜中出现TiN纳米晶和BN非晶（nc-TiN／a-BN）的复合结构，其硬度显著高于TiN薄膜，最高可达40GPa。用球盘式摩擦磨损实验考察了薄膜的磨损特性。结果表明：与TiN薄膜相比，Ti-B-N薄膜抗磨损性能有显著提高，磨损机制与TiN薄膜不同，摩擦系数较TiN稍高。     

TiN涂层的微观组织结构及力学性能分析

借助XRD、纳米压痕、SEM和划痕仪研究了采用磁控溅射在硬质合金基体上沉积的TiN、(Ti,Al)N单层和TiN/(Ti,Al)N多层涂层的组织结构和力学性能。研究表明:面心立方结构的TiN涂层晶粒形貌为典型的喇叭口结构,沿(200)、(111)择优生长;TiN涂层的硬度为24.6GPa;与硬质合金基体的结合强度约为62N。     

钛基材纳米化对TiO2薄膜力学性能影响研究

采用直流磁控溅射法分别在纳米晶体钛(nano-grained Ti,NG Ti)和粗晶粒工业纯钛(coarse-grained commercial pure Ti,CG Ti)表面沉积TiO2薄膜,用扫描电镜、原子力显微镜和X射线衍射仪分析了薄膜的表面形貌和晶体结构,用摩擦试验机、划痕仪和纳米压痕仪测量两种基材表面薄膜的摩擦学性能、膜/基界面结合力、纳米硬度。系统研究了钛基材微结构纳米化对薄膜形核、生长、晶体结构和力学性能的影响规律。结果表明:钛基材微结构纳米化,显著提高薄膜形核率,细化薄膜晶粒;显著促进薄膜由锐钛矿相向金红石相转变;大幅度提高薄膜纳米硬度、界面结合力、摩擦学性能。     

TiN附着膜的应力-应变关系

利用等离子体辅助化学气相沉积法(PACVD)在60Mn钢基片上沉积2．5μm厚的TiN膜．借助X射线应力分析技术和微拉伸设备，测量该附着膜纵向(加载方向)应力和横向应力及外载应变，进而求其等效应力-等效单轴应变关系，并由此算得它的条件屈服点σ0．1和σ0．2分别为4．2和4．4GPa，加工硬化指数为0．36．用纳米压痕仪测得其硬度为25GPa，弹性模量为420GPa．TiN膜在拉伸过程中发生了塑性变形．     

等离子体浸没离子注入与沉积合成TiN薄膜的滚动接触疲劳寿命和机械性能

采用等离子体浸没离子注入与沉积（PIII＆D）技术在AISI 52100轴承钢表面合成了高硬耐磨的TiN薄膜.膜层元素分布、化学组成和表面形貌分别用XRD,XPS表征.合成薄膜前后试样的滚动接触疲劳寿命和摩擦磨损性能分别由球棒疲劳磨损试验机和球-盘磨损试验机测定;疲劳破坏后的微观形貌通过SEM观察;薄膜力学性能经纳米压痕和纳米划痕实验评价.结果表明,TiN膜中还含有少量的TiO2和Ti,N,O的化合物.在优化条件下,TiN膜层致密均匀,与基体结合良好,纳米硬度和弹性模量分别达到25和350 GPa;最低摩擦系数由基体的0.92下降到0.2.被处理薄膜试件在90%置信区间下的最大L10,L50,La和-↑L寿命较基体分别提高了约4.5,1.8,1.3和1.2倍,疲劳寿命的分散性得到了显著改善.     

TiN单层和TiN/Ti(C,N)多层涂层的结构和性能研究

借助XRD、SEM、纳米压痕和划痕仪研究了采用磁控溅射在硬质合金基体上沉积的TiN单层和TiN/Ti(C,N)多层涂层的组织结构和力学性能。研究表明:TiN与TiN/Ti(C,N)多层涂层的晶粒形貌均呈柱状晶结构,而TiN/Ti(C,N)多层涂层形成了TiN、Ti(C,N)交替的调制结构。由于界面强化作用,TiN/Ti(C,N)多层涂层表现出比TiN更高的硬度及与基体更好的结合力。     

溅射技术对TiN涂层结构和力学性能的影响

目的 沉积条件对Ti N涂层的组织结构和力学性能有着至关重要的影响,而溅射技术又决定了涂层的沉积条件,探究不同溅射技术对Ti N涂层的微观组织结构和性能的影响,提高Ti N涂层的力学性能和高温摩擦磨损性能。方法 采用不同的溅射技术(dcMS、Hi PMS、Hybrid)在M2高速钢表面沉积Ti N涂层,利用扫描电子显微镜(SEM)、X射线衍射仪(XRD)、sin²ψ法、纳米压痕仪、洛氏压痕法、划痕法和CSM球盘式摩擦试验机分别测试了Ti N涂层的组织结构特征、沉积速率、残余应力、纳米硬度、膜基结合力和高温摩擦磨损性能。结果 不同溅射技术制备的Ti N涂层均为柱状晶结构和Ti N (111)择优取向。HiPIMS-TiN涂层具有最高的纳米硬度(29.7GPa)和最低的膜基结合力(HF2),而Hybrid-TiN涂层呈现出最小的残余应力、高沉积速率和高膜基结合力,其膜基结合力达到HF1级,临界载荷(Lc2)达到82.5 N。不同溅射技术制备的Ti N涂层的摩擦因数均随着温度的升高而降低,在500℃时,Ti N涂层的摩擦因数约为0.53。Ti N涂层的磨损率随着温度的升...     

Hard and wear-resistant titanium nitride coatings for cemented carbide cutting tools by pulsed high energy density plasma

Hard and wear-resistant titanium nitride coatings were deposited by pulsed high energy density plasma technique on cemented carbide cutting tools at ambient temperature. The coating thickness was measured by an optical profiler and surface Auger microprobe. The elemental and phase compositions and distribution of the coatings were determined by Auger microprobe, x-photon electron spectroscope, and X-ray diffractometer. The microstructures of the coatings were observed by scanning electron microscope and the roughness of the sample surface was measured by an optical profiler. The mechanical properties of the coatings were determined by nanoindentation and nanoscratch tests. The tribological properties were evaluated by the cutting performances of the coated tools applied in turning hardened CrWMn steel under industrial conditions. The structural and mechanical properties of the coatings were found to depend strongly on deposition conditions. Under optimized deposition conditions, the adhesive strength of TiN film to the substrate was satisfactory with the highest critical load up to more than 90 mN. The TiN films possess very high values of nanohardness and Young’s modulus, which are near to 27 GPa and 450 GPa, respectively. The wear resistance and edge life of the cemented carbide tools were improved dramatically because of the deposition of titanium nitride coatings.     

304不锈钢表面单层/多层TiN基涂层制备及耐磨蚀性能研究

目的探究钢基表面TiN基涂层在海洋环境中的耐磨蚀性能。方法采用电弧离子镀技术,在304不锈钢和单晶硅表面分别沉积TiN、TiBN、TiBN/TiN涂层,并对3种涂层样品的表面–截面形貌、摩擦系数、在人工海水中的电化学性能和摩擦腐蚀行为进行测试。结果形貌表征和干摩擦测试结果显示,TiBN和TiBN/TiN涂层有着比TiN柱状晶更加致密的微观结构,3种涂层的摩擦系数相差不大,比304SS的摩擦系数低。在人工海水环境中的电化学测试结果表明,TiBN/TiN涂层的耐腐蚀性能最佳,TiBN涂层次之,TiN涂层则表现出比304不锈钢基底更差的耐腐蚀特性。在发生摩擦腐蚀的过程中,3种涂层的电位（OCP）均发生了下降。结论利用电弧离子镀技术在304不锈钢表面沉积的单层/多层TiN基涂层,在人工海水环境下,发生的摩擦会增加涂层发生腐蚀的趋势,结构致密,表面易形成钝化膜的涂层,其耐磨蚀性较好。     

多弧离子镀制备TiSiN涂层的结构及其摩擦学行为

为了研究Si含量对TiSiN涂层性能的影响,采用多弧离子镀技术在Ti6Al4V表面制备了不同Si含量(质量分数)的TiSiN涂层。利用扫描电子显微镜(SEM)、透射电子显微镜(TEM)、电子能谱仪(EDS)、X射线光电子能谱仪(XPS)纳米压痕仪、摩擦磨损试验机表征其表面形貌、成分,力学性能及摩擦学性能。结果表明:随着靶材中Si含量的增加,涂层硬度从35GPa增加到42GPa。在TiSiN涂层中Si元素主要以Si3N4非晶态存在,形成了非晶Si3N4包裹TiN纳米晶结构。当靶材中Si含量为8%时,涂层在海水中的磨损率约为2.1×10-6 mm3/(N·m),此时涂层的摩擦性能最好。     

Cross-sectional nanoindentation and nanoscratch of compositionally graded mullite films

Nanoindentation and nanoscratch have become well-established techniques for measuring mechanical properties of thin films. Conventionally, these tests are performed on the surface of the films to evaluate their mechanical integrity: elastic modulus, hardness and adhesion strength. However, in complex systems such as compositionally graded thin films, small spatial variations in mechanical properties are difficult to distinguish using this approach. In this work, the evaluation of the above parameters was conducted on cross-sections of compositionally graded mullite coatings, chemical-vapor deposited on silicon carbide substrates. To assess the intrinsic mechanical properties and their spatial variation, nanoindentation tests were carried out on mullite coatings with constant and graded Al/Si ratios. Additionally, transverse nanoscratch tests to evaluate the cohesive and adhesive resistance of the coatings as well as the coating/substrate systems, respectively, were performed. Different damage morphologies were identified within the coating and at the interface by using complementary characterization techniques. In the case of functionally graded coatings a gradual rise in the hardness and elastic modulus with increasing distance from the coating/substrate interface was observed. Nanoscratch tests on the cross-sections allowed determining the critical loads for cohesive and adhesive damage by following this approach. Compositionally graded mullite coatings exhibited the best combination of hardness/stiffness and cohesive/adhesive scratch strength.     

Effect of coating thickness on the deformation mechanisms in PVD TiN-coated steel

The deformation mechanisms of a range of TiN coatings with different thicknesses, deposited on a V820 steel substrate following nanoindentation were characterized using focused ion beam (FIB) cross-sectioning and imaging, as well as cross-sectional transmission electron microscopy (TEM) of the indented region. Four TiN coatings were examined, including a cathodic arc evaporation (CAE) coating with a thickness of ∼ 0.7 μm and low voltage electron beam (LVEB) evaporation coatings with thicknesses of ∼ 2.0, ∼ 3.7 and ∼ 4.0 μm. Based on a model developed by Xie et al., the intercolumnar shear stresses were calculated to be approximately 2.20, 3.05, 3.50 and 3.55 GPa in the ∼ 0.7, ∼ 2.0, ∼ 3.7 and ∼ 4.0 μm thick TiN coatings respectively, that is, increasing as the coating thickness increases. Columnar cracking and shear steps at the coating/substrate interface were observed more frequently in the thinner TiN coatings indicated that these coatings deformed predominantly by shear along the columnar grain boundaries. In contrast, inclined cracking was the more dominant fracture type in the thicker TiN coatings. It is suggested that increased grain boundary strength occurs together with a lack of direct crack path along the grain boundaries through the thicker coatings due to the more equiaxed grain structure. Clearly, the grain structure and/or thickness of the TiN coating play a highly significant role in the deformation mechanisms.     

TiN/Ti(C,N)涂层的显微组织与力学性能

采用磁控溅射在TNMG120408型号的硬质合金刀片上沉积了TiN/Ti(C,N)单层与多层涂层,通过XRD、SEM、纳米压痕、划痕仪与冲击测试等方法,比较分析了TiN/Ti(C,N)涂层的显微组织与力学性能。结果表明,TiN单层涂层的晶粒形貌为典型的喇叭口结构,Ti(C,N)单层涂层为平直的柱状晶结构;而TiN/Ti(C,N)多层涂层为柱状晶结构,形成了TiN、Ti(C,N)交替排列的结构。TiN与Ti(C,N)单层涂层均呈(220)生长织构,而TiN/Ti(C,N)多层涂层呈(111)生长织构。Ti(C,N)单层涂层表现出较好的硬度,而TiN/Ti(C,N)多层涂层则表现出与基体更好的结合力。     

Multilayer coatings by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD): TiN/TaN and TiN/W

TiN/W and TiN/TaN multilayer coatings were deposited on stainless steel by Chemical Vapor Deposition in a Fluidized Bed Reactor at Atmospheric Pressure (AP/FBR-CVD). First, the conditions for the deposition of TiN single layers were investigated, both from the experiment and thermochemical estimations. TiN was deposited from TiCl₄ and NH₃ at temperatures in the range of 750-950 °C. In the synthesis of multilayers, the W- and Ta-based layers were obtained by reduction of tungsten chloride or tantalum chloride with H₂. During the deposition of the TiN layers on top of the Ta layers, Ta reacted with NH₃ to form a mixture of tantalum nitrides. Multilayer coatings were characterized by means of GD-OES, AES and XRD. Preliminary results of nanoindentation hardness and oxidation resistance are also presented. Our results show for the first time that AP/FBR-CVD can be tuned for the deposition of multilayered coatings with periodicities in the submicron range.     

Mo离子注入和离子渗硫对TiN涂层微观结构和表面性能的影响

为进一步改善氮化钛涂层的摩擦学性能,分别采用高剂量Mo离子注入和低温离子渗硫技术对Ti N涂层表面进行处理。采用扫描电子显微镜(SEM)、光学形貌仪、扫描俄歇系统(SAM)、X射线衍射仪(XRD)和纳米压痕仪等分析Ti N涂层处理前后的表面形貌、元素分布、微观结构和纳米硬度。利用球盘摩擦磨损试验机在干摩擦条件下考察涂层的摩擦学性能,并利用光学形貌仪和SEM进行磨损表面分析。结果表明,大剂量Mo离子注入后,Ti N涂层表面Mo离子深度接近200 nm,涂层硬度明显降低,涂层磨损剧烈程度得到显著改善,磨损率和摩擦因数分别降低约35%和40%;低温离子渗硫复合处理后,Ti N涂层表面溅射明显,Mo的深度降低约50%,摩擦学性能难以进一步明显改善。     

Effect of inorganic constituent on nanomechanical and tribological properties of polymer,quasi-ceramic and hybrid coatings

This study investigates the variations in nanomechanical properties of coatings made of a pristine polymeric backbone and those containing silicone segments. Four different coatings with varying degrees of inorganic segments were prepared and analyzed. The four coatings were 1) a pure epoxy polymer coating, 2) a hybrid coating consisting of epoxy and silicone, 3) a ceramer coating consisting of organo-silicone and 4) a quasi-ceramic coating consisting of specialty silicone composition. The molecular bonding characteristics of the coatings were characterized with FTIR spectroscopy. The coatings were also tested using nanoindentation and nanoscratch methods to investigate mechanical and tribological properties. The scratched surface was investigated using scanning electron microscopy and atomic force microscopy. The hybrid coating displayed superior nanomechanical properties compared to the pure polymer coating, and the coating containing high silicone levels displayed better hardness. Atomic force microscopy showed that the epoxy-based polymer coating consisted of a smooth surface that was compressed when scratched using a nanoindenter. The hybrid coating had rough surface that was damaged and partially recovered after the scratch test. The ceramer and quasi-ceramic coatings displayed brittle failure.