测量活塞环外圆轮廓的新方法

提出一种测量活塞环外圆轮廓的方法，介绍了根据该方法研制的轮廓仪的测量方案、仪器结构、误差分析和测试结果。     

齿形误差测量与渐开线仪器修正量的计算

渐开线齿形误差通常用渐开线仪器进行测量。测量时,引起测量误差的因素大部分是系统误差。由于渐开线仪器的结构复杂、测量环节较多,因此,它的系统误差变化非常复杂。据调查,华北地区86％的仪器系统误差在3～10μm,最大可达30μm。这个误差若不加以消除,其后果是严重的。渐开线仪器的系统误差,主要是指仪器的基圆半径不准确而产生的误差。该误差可以用渐开线样板来测量。即是说,用渐开线样板作为渐开线仪器的标     

多项几何量指标简易三坐标电脑量仪(上)

本文提出了一种新的测量方法,这种方法可以有效地分离仪器的制造误差和调整误差,使得在低制造精度的仪器上可以得到高精度的测量结果。基于该方法,研制成了“多项几何量指标的简易三坐标电脑量仪”,可测量轴类零件的圆度、圆柱度、作用尺寸等十几项几何量指标,并可按最小条件等多种方法进行评定,其综合测量误差小于1μm。文中详细介绍了测量原理和算法,并进行了误差分析。     

测试设备位姿失调对自准直仪法测量圆分度误差的影响

为了提高圆分度仪器分度误差的测量精度,介绍了用多面棱体自准直仪测量分度误差的原理和方法,对影响测量结果的误差源进行了分析。根据测量原理建立了多面棱体和自准直仪坐标系,利用坐标变换分别建立了多面棱体工作面与受检仪器轴线的平行差、自准直仪光轴与多面棱体工作面不垂直度误差、自准直仪电十字竖线与受检仪器轴线的平行差对分度误差影响的精确模型。在实验室内,以单轴位置转台的定位精度为测试对象,设计了以上三种位姿失调误差模型的验证实验,实验结果与理论模型仿真结果具有很好的一致性,三种位姿失调引入的误差实测值与理论值的最大偏差小于0.9″,验证了位姿失调量引入测量误差模型的正确性,该模型及仿真结果可以准确指导圆分度误差测试。     

数控机床圆轨迹运动误差测试仪器和方法的研究

介绍一种新的可用于数控机床圆轨迹运动误差测试的二雏球杆仪。该二维球杆仪包括一根两端与精密小球相连的测量杆和一台高精度的旋转编码器，测量杆内置有可用于测量位移的高精度传感器，旋转编码器用来精确测量杆的转动角度。分析了测量仪器的误差，并进行了校正。试验表明，该仪器不仅可测量出机床圆周运动轨迹精度，用于机床的精度评价，还可以测出机床圆周运动任意指令位置的定位误差值，为进一步用于对圆轨迹的误差补偿打下基础。     

基于小波变换处理圆度误差的测量方法

由于圆度误差是机械零件及其互换性的重要指标,是产品质量的关键,所以对圆度误差进行测量是十分必要的.本文提出一种利用小波变换的多分辨率分析来评价圆度误差的方法,该方法主要利用小波变换尺度函数的低通特性来对圆度测量数据进行处理,以此来提取圆周轮廓,并在此基础上求出它的半径和圆心坐标,进析求出圆度误差.文中也详细地给出了利用小波变换解决圆度误差测量问题的基本原理及其实现步骤,最后给出实验结果.仿真实验结果表明:该方法可以满足圆度误差的测量要求.     

摆线齿轮误差测量仪

本文论述了行星传动机构中摆线齿轮误差的测量技术和仪器。该仪器采用极坐标测量法，微机控制，由长、圆光栅传感器构成极坐标测量系统，可对摆线齿轮全齿廊进行连续自动测量。这项技术不仅解决了摆线齿轮误差的测量问题，而且为摆线齿轮精度标准的制订提供了测量手段。     

计算机控制的圆度测量仪

介绍一种基于计算机控制的圆度测量仪 ,该测量仪由测量工作台、位移传感器、ADLINKPCI91 1 4HG数据采集卡、计算机以及控制和误差评定软件组成 ,论述该仪器的软、硬件组成和工作原理 ,并提出在圆度测量中引入虚拟仪器的概念。     

Y9025型圆度仪测量钢球圆度时的调偏心方法

甲Y0025型圆度仪测量套圈和钢球圆度时,具重要步骤是调整被测工件截面中心与圆度仪主轴回转中心同心,因为工件与主轴偏心大小直接影响到圆度误差读数的准确性,偏心越小,测值才能越接近真值。用该仪器测量套圈圆度时,可以直接使用仪器上的调心装置,较方便地调整工件与主轴的偏心。但在测量钢球圆度时,调心装置不好用,过去一贯使用电感比较仪进行手工调整,不仅费时费力,而且调整效果不够理想。为了解决这一问题,我们摸索出借助于仪器传动和测量显示系统调整钢球偏心的方法,既提高了工作效率,又有效地控制了偏心量。     

多项几何量指标简易三坐标电脑量仪(下)

四、导轨相对工件旋转轴线的平行度和工件轴线径向运动误差的测量及算法对于通过测量工件半径来测量圆度,圆柱度的仪器来说,虽然影响测试精度的因素有很多,例如:测头的安装精度,仪器的分度误差以及工件的安装偏心等。但可以证明这些误差的影响都不大,而影响测试精度的主要因素有两个。一个是导轨相对工件旋转轴线的平行度误差,另一个是工件旋转轴线的径向运动误差。这两项误差都一比一地反映为实测半径的变化,所以是圆度、圆柱度测量中最应该予以消除的误差。然而在实际测量工作中上述两项误差的     

圆轨迹运动误差检测与信号处理

本文对精密仪器和机械中常见的运动形式——圆轨迹运动的误差建模、检测和识别进行了系统深入的研究。所提出的基于统计Ｂａｙｅｓ分类器的时域相关特征识别技术和基于距离测量分类器的频域谱线特征识别技术对实际圆轨迹运动误差的识别取得了满意的效果。该结果为精密仪器和机械圆轨迹运动精度的调试和误差控制提供了新的重要手段。     

Measurement and analysis of typical motion error traces from a circular test

The circular test provides a rapid and efficient way of measuring the contouring accuracy of a machine tool. To get the actual point coordinate in the work plane, an improved measurement instrument - a new ball bar test system - is presented in this paper to identify both the radial error and the rotation angle error when the machine is manipulated to move in circular traces. Based on the measured circular error, a combination of Fourier components is chosen to represent the systematic form error that fluctuates in the radial direction. The typical motion errors represented by the corresponding Fourier components can thus be identified. The values for machine compensation can be calculated and adjusted until the desired results are achieved.     

Measurement and analysis of typical motion error traces from a circular test

The circular test provides a rapid and efficient way of measuring the contouring accuracy of a machine tool. To get the actual point coordinate in the work plane, an improved measurement instrument - a new ball bar test system - is presented in this paper to identify both the radial error and the rotation angle error when the machine is manipulated to move in circular traces. Based on the measured circular error, a combination of Fourier components is chosen to represent the systematic form error that fluctuates in the radial direction. The typical motion errors represented by the corresponding Fourier components can thus be identified. The values for machine compensation can be calculated and adjusted until the desired results are achieved.     

Motion error compensation of multi-legged walking robots

Existing errors in the structure and kinematic parameters of multi-legged walking robots,the motion trajectory of robot will diverge from the ideal sports requirements in movement.Since the existing error compensation is usually used for control compensation of manipulator arm,the error compensation of multi-legged robots has seldom been explored.In order to reduce the kinematic error of robots,a motion error compensation method based on the feedforward for multi-legged mobile robots is proposed to improve motion precision of a mobile robot.The locus error of a robot body is measured,when robot moves along a given track.Error of driven joint variables is obtained by error calculation model in terms of the locus error of robot body.Error value is used to compensate driven joint variables and modify control model of robot,which can drive the robots following control model modified.The model of the relation between robot’s locus errors and kinematic variables errors is set up to achieve the kinematic error compensation.On the basis of the inverse kinematics of a multi-legged walking robot,the relation between error of the motion trajectory and driven joint variables of robots is discussed.Moreover,the equation set is obtained,which expresses relation among error of driven joint variables,structure parameters and error of robot’s locus.Take MiniQuad as an example,when the robot MiniQuad moves following beeline tread,motion error compensation is studied.The actual locus errors of the robot body are measured before and after compensation in the test.According to the test,variations of the actual coordinate value of the robot centroid in x-direction and z-direction are reduced more than one time.The kinematic errors of robot body are reduced effectively by the use of the motion error compensation method based on the feedforward.     

NC机床运动误差的矢量分析法

提出了数控机床圆弧插补运动误差的矢量分析方法。可用双球规测量装置测得数控机床圆弧插补运动的综合误差。在分析运动误差与误差矢量关系的基础上以几种典型误差为例，从理论上提出了单一误差源数学模型的建立方法，给出了与单一误差源所对应的误差特征曲线。用这些数学模型和特征曲线可以诊断出数控机床圆弧插补误差产生的原因。     

一种多轴数控机床末端静刚度快速辨识方法

提出了一种基于可加载式球杆仪的圆运动对多轴机床末端（刀具和工作台）静刚度进行辨识的方法。设计了一种特殊的可加载式球杆仪,能同时测量仪器两端所承受的力和发生的位移,利用该仪器能测量出数控机床末端在不同载荷下所产生的变形误差。将加工空间内机床末端静刚度分解为沿坐标轴x、y和z的方向刚度,建立了一种基于圆运动的刚度辨识模型,利用球杆仪在机床oxz、oyz和oxy平面内进行圆运动轨迹测试,得到机床末端在不同载荷下的变形误差,进而通过刚度辨识模型得到机床的方向刚度。三轴数控铣削机床刚度测试实验结果和仿真结果的一致性证明了所提出方法的有效性。该测试方法简单,仪器轻便,不需要大型和重型的加载设备,适合于工业现场条件。     

Nanopositioning and Nonlinearity Compensation for Step Imprint Lithography Tool

In this paper, the motion mode and nanopositioning accuracy in the step imprinting lithography process are presented, and the positioning errors different from the traditional errors, such as the gap error existing in the hinges of the stage structure and the random error produced during the process of the stage position adjustment, are analyzed. To avoid and eliminate these nonlinearity errors, radial basis function-proportional integral derivative and position control algorithms are introduced into the macro- and microdriving processes, respectively. The innovation of this driving method is that the motion locus is monotone, nonoscillatory, and a multistep approaching target, which eliminates the root of the random error by single direction driving mode and avoids the backlash error through preloading function. Driving experiments of different motion ranges prove that this nonlinearity compensation is very effective and the positioning accuracy during the step imprinting process can be improved up to 10-nm.     

数控机床径向运动误差的形成机理及补偿方法研究

研究数控机床圆周插补运动径向误差的形成机理,并提出一种误差软件补偿方法。分别用圆轨迹运动误差测试仪和圆度仪测出数控机床圆周插补运动的径向误差,对该误差建立计算机误差补偿模型,应用该模型进行软件补偿实验研究。实验结果验证了误差形成机理的分析,同时表明提出的误差软件补偿方法能有效地提高数控机床的圆轨迹精度。     

五轴龙门数控铣床转动轴联动中的动态轨迹误差仿真分析

针对刀具两摆的五轴龙门数控铣床,对一转动轴与一平动轴联动及两转动轴联动加工圆弧时的动态轨迹误差分别进行了分析。采用D-H(Denavit-Hartenberg)法对轴的输入的进给指令位置计算公式进行了推导,并将进给指令位置输入到由动态仿真工具Simulink构建的进给伺服系统仿真模型中,得到了圆弧上动态轨迹误差的分布曲线。通过对转动轴联动加工圆弧的动态轨迹误差分析,可为五轴龙门数控铣床转动轴动态误差的检测提供指导,使得机床的检测与调整更加快速和便捷。