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1.
利用多层膜零蠕变法,直接测量si(111)单晶片上沉积的Ag/Ni多层膜界面自由能。通过基片曲率法实时测量Ag/Ni多层膜升温退火过程中的应力变化,在450℃保温,发现此时多层膜达到平衡状态,最终的平衡应力为0.57MPa,计算出Ag/Ni的界面自由能%。为0.63J/m^3,最后结合XRD测试结果和SEM剖面形貌,从界面能角度对多层膜的稳定性进行了分析讨论。  相似文献   

2.
有关薄膜应力的一般测量方法存在精度不高和不能实时测量的缺点。多层薄膜材料是在非平衡条件下制备的性能优异并包含高密度界面的新型亚稳定材料,由于其结构的差异,一般测量薄膜应力的方法如X射线衍射法、拉曼光谱法等失去作用。阐述了基片弯曲法测量薄膜应力的原理,设计了用光杠杆法测量试样曲率的装置,并实时测量了Si基Ag/Fe多层膜在退火过程中表面弯曲曲率的变化。同时开发了软件处理系统,并计算和分析了Ag/Fe多层膜退火过程中膜-基界面的应力变化。研究表明,经过退火处理的薄膜应力有极大的增加,其中升温过程发生了再结晶,使薄膜应力降低,而降温过程则使应力不断增加。  相似文献   

3.
利用磁控溅射制备了银含量在100%至80%之间的单层银铜合金薄膜和TiO2/AgxCu-1x/Ti/TiO2:纳米四层膜。利用x射线衍射、扫描电子显微镜、扫描俄歇微探针,分光光度计、红外发射率测量仪对样品进行表征,研究了单层金属膜和多层膜的光学、电学性质随着银含量的变化以及热处理前后薄膜性能的变化。结果表明:相同厚度的合金膜,随着Ag含量的降低,导电性能下降,Ag含量低于80%的合金已不适合作为多层膜的金属层;1500C大气下热处理30min,纯银薄膜性质发生明显变化,明视透过率下降10%,方块电阻由2.5W/口增加至18W/□,红外发射率由0.17增加到0.69。AgCu合金薄膜性质未发生明显变化。方块电阻相近的TiO2/AgxCu1-x/Ti/TiO2纳米多层膜,经250℃大气下热处理40min后,TiO2/Ag/Ti/TiO2和TiO2/Ag80Cu20/Ti/TiO2纳米多层膜的性质变化较小,热稳定性较好,其余的多层膜性质发生较大变化,红外发射率显著增加。  相似文献   

4.
退火温度对硅基溅射银膜微结构和应力的影响   总被引:1,自引:0,他引:1  
用直流溅射法在硅(111)基底上制备银膜,膜厚为380nm。用BGS6341型电子薄膜应力分布测试仪对膜应力随退火温度的变化进行了研究,结果表明:膜应力随着退火温度的升高而增大,在400℃退火温度下膜应力变化明显。用MXP18AHF型X射线衍射仪测量了膜的衍射谱,对膜微结构随退火温度的变化进行了讨论。制备的Ag膜仍为面心立方结构,呈多晶状态,平均晶粒尺寸为23.63nm,薄膜晶格常数(0.40805nm)比标准样品晶格常数(0.40862nm)稍小。  相似文献   

5.
采用零蠕变法测量Si(111)单晶片上沉积的TiAl/Al多层膜界面自由能。其实验方法为:采用基片曲率法测量TiAl/Al多层膜升温退火过程中的应力变化,分别在350℃、400℃、450℃和500℃保温,发现500℃时多层膜达到平衡状态,最终的平衡应力为0.57MPa,计算TiAl/Al的界面自由能γint为0.19J/m^2。  相似文献   

6.
GZO/Ag/GZO多层薄膜制备、结构与光电特性的研究   总被引:1,自引:0,他引:1  
采用射频磁控溅射和离子束溅射联合设备在玻璃衬底上制备出了具有良好附着性、低电阻率和高透过率的GZO/Ag/GZO(ZnO掺杂Ga_2O_3简称GZO)多层薄膜.X射线衍射谱表明GZO/Ag/GZO多层薄膜是多晶膜,GZO层具有ZnO的六角纤锌矿结构,最佳取向为(002)方向;Ag层是立方结构,具有(111)取向.在GZO层厚度一定的情况下,研究了Ag层厚度的变化对多层膜结构以及光电特性的影响.研究发现,当Ag层厚度为10nm时,3层膜的电阻率为9×10~(-5)Ω·cm,在可见光范围内平均透过率达到89.7%,薄膜对应的品质因子数值为3.4×10~(-2)Ω~(-1).  相似文献   

7.
对Ag/Cu薄膜退火应力的模拟   总被引:2,自引:0,他引:2  
采用基片曲率法测量并研究了Ag/Cu薄膜的应力与温度的关系.初始应力为-250MPa压应力,退火后为370MPa拉应力.采用基于形变机制图的模型模拟了应力与温度关系的实验曲线,结果表明,温度和应力不同,在薄膜内起作用的主要形变机制也不同.可能的形变机制包括位错滑移、幂律蠕变以及扩散蠕变机制.薄膜比块体材料的应变速率低,在同样的应力下应变更加困难.在退火过程中,薄膜内先使应力松弛的是Ag,将Ag各蠕变机制中的激活能提高到块体材料的1.25~1.35倍,模拟曲线与实验曲线符合得很好。  相似文献   

8.
三维3D ES势垒直接影响着层间扩散,在Cu(111)和Cu(100)面2D ES势垒和3D ES势垒是不同的。本文主要研究了基于(1+1)维KMC模型,在这两个特殊的晶面上Cu薄膜的同质外延生长。观察两个面的生长情况,发现随着温度的增加薄膜的粗糙度逐渐减小,由于Cu(111)表面2D ES势垒较小,所以Cu(111)面粗糙度的下降的速度比Cu(100)要快,Cu(111)表面更有利于薄膜的生长。对于纳米棒的应用,在生长时间较短时两个面的生长速率逐渐减小,但是Cu(100)面的生长速度比Cu(111)面更快,随着生长时间的增加,这两个面会出现多层台阶,Cu(111)面的生长速度会逐渐增加,最终会超过了Cu(100)面。多层台阶出现后对两个面的影响是不同的。由于Cu(111)表面3D ES势垒较大,在Cu(111)表面会形成较多的多层台阶,Cu(111)面上多层台阶数有利于纳米棒的生长,然而在Cu(100)表面3D ES势垒较小,Cu(100)表面很难形成多层台阶,所以Cu(100)面上纳米棒的生长速度并没有增加。正是因为3D ES势垒的存在才会导致多层台阶的出现,较大的3D ES势垒有利于纳米棒的生长。  相似文献   

9.
三维3D ES势垒直接影响着层间扩散,在Cu(111)和Cu(100)面2D ES势垒和3D ES势垒是不同的.本文主要研究了基于(1+1)维KMC模型,在这两个特殊的晶面上Cu薄膜的同质外延生长.观察两个面的生长情况,发现随着温度的增加薄膜的粗糙度逐渐减小,由于Cu(111)表面2D ES势垒较小,所以Cu(111)面粗糙度的下降的速度比Cu(100)要快,Cu(111)表面更有利于薄膜的生长.对于纳米棒的应用,在生长时间较短时两个面的生长速率逐渐减小,但是Cu(100)面的生长速度比Cu(111)面更快,随着生长时间的增加,这两个面会出现多层台阶,Cu(111)面的生长速度会逐渐增加,最终会超过了Cu(100)面.多层台阶出现后对两个面的影响是不同的.由于Cu(111)表面3D ES势垒较大,在Cu(111)表面会形成较多的多层台阶,Cu(111)面上多层台阶数有利于纳米棒的生长,然而在Cu(100)表面3D ES势垒较小,Cu(100)表面很难形成多层台阶,所以Cu(100)面上纳米棒的生长速度并没有增加.正是因为3D ES势垒的存在才会导致多层台阶的出现,较大的3D ES势垒有利于纳米棒的生长.  相似文献   

10.
何玉定  李健  胡社军  谢光荣 《真空》2005,42(2):34-37
用射频磁控溅射法制备了调制周期分别为5 nm、10 nm、15 nm、20 nm的NiFeCo/Ag非连续多层膜.用俄歇能谱仪测量薄膜的成分,用原子力显微镜观测NiFeCo膜层及Ag膜层的表面形貌,用四探针法测量了溅射态的及在280℃、360℃、400℃退火后的多层膜的GMR值.结果表明:薄膜厚度越大,NiFeCo膜层及Ag膜层的表面粗糙度越大.在经各种不同温度退火后,具有[NiFeCo(10nm)/Ag(10nm)]×20结构的多层膜的GMR效应均比其它结构的多层膜的GMR效应强.退火温度也会影响多层膜的GMR值.经360℃退火后,在79.6 kA/m的外加饱和场下[NiFeCo(10nm)/Ag(10nm)]×20呈现出最强的巨磁电阻效应,其GMR值达到11%.  相似文献   

11.
In this paper, we present a new method for inserting several triangulated surfaces into an existing tetrahedral mesh generated by the meccano method. The result is a conformal mesh where each inserted surface is approximated by a set of faces of the final tetrahedral mesh. First, the tetrahedral mesh is refined around the inserted surfaces to capture their geometric features. Second, each immersed surface is approximated by a set of faces from the tetrahedral mesh. Third, following a novel approach, the nodes of the approximated surfaces are mapped to the corresponding immersed surface. Fourth, we untangle and smooth the mesh by optimizing a regularized shape distortion measure for tetrahedral elements in which we move all the nodes of the mesh, restricting the movement of the edge and surface nodes along the corresponding entity they belong to. The refining process allows approximating the immersed surface for any initial meccano tetrahedral mesh. Moreover, the proposed projection method avoids computational expensive geometric projections. Finally, the applied simultaneous untangling and smoothing process delivers a high‐quality mesh and ensures that the immersed surfaces are interpolated. Several examples are presented to assess the properties of the proposed method.  相似文献   

12.
Standards are the basis for production enterprises to organize production, ex-factory inspection, trade (delivery) and technical exchanges, product certification, quality arbitration and supervision.……  相似文献   

13.
14.
A flow calorimeter for enthalpy increment measurements on condensed gases is presented. A better knowledge of the properties of the liquefied natural gas is needed, and therefore a liquid loop has been designed for our flow calorimeter. The fluid loop in the calorimeter is designed in order to avoid the two-phase region, since two phases would give compositional disturbances in the measurements. The avoidance of the two-phase region is made possible by increasing the pressure of the test fluid after the measurement section, then heating the fluid at super-critical pressure past the critical point. Finally, the fluid is throttled to the low-pressure gas state at the inlet condition of the compressor that circulates the fluid. To perform the pressure increase, a new cryogenic pump has been designed. To evaluate the new equipment, measurements were taken on liquid ethane over the temperature range 146–256 K at pressure between 0.9 and 5.1 MPa.  相似文献   

15.
On November 30, 2007, the China Association for Standardization (CAS) held a press conference at Beijing Diaoyutai State Guest House. Leaders from the China Household Electric Appliance Research Institute, the China Household Electric Appliance Association, and the China Consumers' Association attended and made speeches.……  相似文献   

16.
Zusammenfassung Bei der Gestaltung von Ernteprozessen — beispielsweise des Prozesses Mähdrusch, Körnertransport und -abnahme — als transportverbundene Fließarbeitsverfahren mit mindestens zwei verschiedenen Arbeitsmitteln gibt es einen großen Optimierungsspielraum. Solche Prozesse sind mehrstufige Bedienungsprozesse mit gemischter Anordnung der Bedienungseinrichtungen. Außerdem besitzen sie stark ausgeprägte räumliche Aspekte. Es wird vor allem gezeigt, welche Merkmale solcher Prozesse in Simulationsmodellen abgebildet sein müssen, welche Zielgrößen in Abhängigkeit von welchen Einflußgrößen unter Berücksichtigung welcher Prozeßbedingungen ermittelt werden sollten und wie der Bewertungsprozeß zur Ermittlung der gewünschten Informationen gestaltet werden muß.  相似文献   

17.
In the present study a high‐boron high speed steel (HSS) roll material was designed. Many expensive alloy elements have been substituted by cheap boron alloy, and high‐boron high speed steel roll has been manufactured by centrifugal casting method. The microstructures, mechanical properties and wear resistance of centrifugal casting high‐boron high speed steel roll have been investigated by optical microscopy (OM), scanning electron microscopy (SEM), and X‐ray diffraction (XRD) analysis, hardness test, impact test and wear test. The results indicated that the solidification microstructures of high‐boron high speed steel roll consisted of M2(B,C), (W,Mo)2(B,C), M3(B,C), M23(B,C)6 type borocarbides and martensite, a small amount of retained austenite. Borocarbides were continuously distributed over the grain boundary. After quenching from 1050 °C, local broken network appeared in partial borocarbides, and fine secondary borocarbide precipitated from the matrix. After tempering from 525 °C, the amount of precipitated borocarbide increased significantly. After heat treatment, the hardness of high‐boron high speed steel roll excelled 60 HRC, and its impact toughness excelled 8.0 J/cm2. The single groove steel rolling amount of high‐boron high speed steel rolls increases by 500% than that of bainite cast iron roll, when the rolls are used in K1 mill housing of bar mill.  相似文献   

18.
The definition of the thixotropy is a decrease in viscosity with time in shear and a subsequent recovery of viscosity after the shear deformation is removed.We ...  相似文献   

19.
正Responding to ISO’s appeal for survey for the to-be-developed ISO Strategy Plan for 2016-2020,SAC hosted a special workshop over the needs and comments of various fi elds on June 8 in Beijing.The workshop was attended by ISO President-elect and Ansteel General Manager Zhang Xiaogang,SAC Vice-Administrator Yu Xinli,and 30 experts from  相似文献   

20.
正The review group of Asia Pacific Laboratory Accreditation Cooperation(APLAC)carried out a 4-day peer review of the proficiency testing provider(PTP)for China National Accreditation Service for Conformity Assessment(CNAS)from July 28 to 31,2014.CNAS passed the PTP review with excellent performance.Two senior peer reviewers of APLAC made a comprehensive,rigorous and detailed review of CNAS’s PTP accreditation activities,and made the on-spot inspection of the review groups in Shanghai and Shenzhen respectively.  相似文献   

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