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利用等离子体浸没离子注入与沉积(PIII&D)技术在AISI52100轴承钢基体表面合成了Ti-C薄膜.测试了合成薄膜后试样表面的化学组成、摩擦磨损性能、纳米硬度、弹性模量和滚动接触疲劳寿命,观察了疲劳破坏后试样断面的光学形貌.XRD结果表明处理后试样表面形成了TiC相.光学显微镜下疲劳裂纹的萌生和扩展形貌揭示出疲劳破坏可能存在表面点蚀和膜层剥离两种形式.在Hertz接触应力为5.1GPa,90%置信区间条件下的疲劳寿命延长了5.5倍;最大微观硬度和弹性模量分别增加了28.4%和12.1%;相同磨损条件下的摩擦系数从0.95下降到0.15. 相似文献
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等离子体浸没离子注入与沉积技术的发展及前沿问题 总被引:1,自引:0,他引:1
表面热功能结构是指在固体表面加工出具有不同形貌、不同尺度、不同维数,并具有散热或传热功能的结构。复杂表面热功能结构在高集成度芯片热控制方面有着广阔的应用前景。如何根据热功能需求主动设计表面结构并提出适合高效率低成本的制造方法是解决高热流密度问题的核心所在。在对当前表面热功能结构的发展现状分析基础上,较详细论述了表面热功能结构制造领域的关键技术,指出未来表面热功能结构研究的重点应集中在结构的微细化和复杂化、表面热功能结构的高效低成本制造方法等方面。 相似文献
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离子注入与沉积TiN膜层中的残余应力 总被引:1,自引:0,他引:1
利用掠入射X射线衍射(GIAXRD)研究了GCr15轴承钢表面等离子体浸没离子注入与沉积(PⅢ&D)氮化钛(TiN)薄膜后膜层表面的应力状态.用X射线衍射(XRD)分析了处理后膜层的化学组成.探讨了薄膜厚度和掠入射角对表面膜层中应力变化规律的影响.结果表明,表面膜层中主要存在TiN相,同时含有少量的TiO2和钛氮氧的化合物.不同工艺下,TiN/GCr15轴承钢试样表面膜层中存在的应力均为压应力;且应力值随着掠入射角度的增大而减小,随着薄膜厚度的增加而降低. 相似文献
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以3种不同工艺工业生产的总O含量均≤6×10-6的超洁净GCr15轴承钢为研究对象,通过推力片实验测试这3种钢的滚动接触疲劳寿命并获得额定寿命(L10)和中值寿命(L50),通过ASPEX扫描电镜获得各工艺下的夹杂物样本数据并进行统计分析,使用极值法(SEV)和广义Pareto分布法(GPD)估算出样品中最大夹杂物特征尺(CSMI),然后将其与实测L10和L50进行对比和分析。结果表明,SEV法仅检测每个样品的最大夹杂物,无法通过其获得的CSMI来合理解释3种钢L10和L50的变化,2者之间相关性较差;而GPD法分析夹杂物时,需要对阈值尺寸以上的所有夹杂物进行表征和统计分析,可以获得夹杂物的数量密度以及不同类型夹杂物的CSMI,GPD法所预测出的最危险类型TiN夹杂物的CSMI可以合理解释L10的变化,2者之间有较好相关性,但无法据此解释L50的变化;但将总的夹杂物数量密度与TiN夹杂物最大... 相似文献
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高速钢表面TiN薄膜的界面疲劳剥落行为 总被引:1,自引:0,他引:1
采用多弧离子镀技术在M2高速钢(W6Mo5Cr4V2)表面制备TiN薄膜,利用滚动接触疲劳法对薄膜界面疲劳行为开展研究.结果表明,界面疲劳失效主要表现形式为薄膜剥落,疲劳裂纹最先萌生于膜/基界面,经一定周次后向薄膜表面偏折,最终造成薄膜剥落.界面最大剪切应力幅(Δτinter)是控制界面裂纹萌生和扩展的主要力学参量,通过Δτinter和临界疲劳周次(N)构建的评价模型可有效用于薄膜界面疲劳性能表征和寿命预估.界面疲劳性能与膜/基界面状态密切相关,利用Δτinter-N评价模型可有效辨别界面状态间的差异,采用辉光清洗或预制金属打底层等预处理方式均能有效提升界面抗疲劳剥落性能.选取薄膜剥落面积比为5%和50%,以及失效概率为30%、60%和90%比较发现,薄膜剥落面积比和失效概率值大小的选取不影响膜/基界面疲劳性能的判定.研究结果为镀膜轴承等零部件的疲劳性能表征和寿命预估提供了重要理论参考. 相似文献
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滚动接触疲劳法评定硬质薄膜的结合强度 总被引:2,自引:0,他引:2
工件大多在交变应力下服役,薄膜的剥落是一个长时间高周次过程,其失败过程属疲劳失效。采用高周次界面疲劳强度作为膜基结合强度的判据,以膜基界面处的切应力△τ表征膜基界面疲劳强度。采用该方法对气相沉积硬质薄膜的结合强度进行了评定,并与划痕法比较。结果表明,薄膜在膜基界面处剥落,该方法对同因素十分敏感,而对非界面因素不敏感,因而是一个有效的测量膜基界面结合强度的方法。可用来比较不同方法制备的不同成分和硬度 相似文献
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等离子体化学气相沉积TiN膜的研究 总被引:2,自引:0,他引:2
采用直流等离子体化学气相沉积技术,在高速钢、Si(100)和Si(111)基体上沉积TiN膜,并对膜的晶体结构、表面形貌、断口结构、显微硬度、氯含量等进行了测定和分析,部分样品进行了二次离子质谱(SIMS)、Auger谱(AES)和X光光电子谱(ESCA)等分析.试验表明:在不同基材上沉积的TiN膜,只要沉积参数相同,膜的结构和性能都相同.在沉积温度500℃左右,TiN膜的生长方式有一转变,即可能是由层生长转变为岛状生长.直流PCVD法生成的TiN膜,其N:Ti≈1:1,有强的(200)织构,膜与基体间有较宽的共混区,因而结合强度高和耐磨性好,适于用作耐磨镀层. 相似文献
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Y. Cheng 《Surface & coatings technology》2007,201(15):6869-6873
A hard and adherent TiN/Ti thin film of approximately 3 μm in thickness was deposited on the surface of Ti-50.6 at.% Ni alloy by the PIIID technique. The surface composition and chemical state of the coated samples were evaluated by XPS. The XPS results indicate that titanium oxide and titanium oxynitride were present on the TiN surface. The spectra of Ti 2p, N 1s, O 1s and C 1s electrons before and after the film being sputter etched were also discussed. Scanning electron microscopy (SEM) and energy disperse spectroscopy (EDS) analyses demonstrate that an interfacial layer, containing Ti, N and Ni, was formed at the interface between the TiN and Ti coatings. Sliding wear tests show that the TiN coating significantly reduces the friction coefficient and improves wear resistance of the NiTi alloy. 相似文献
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全方位离子注入与沉积类金刚石碳膜的结构与性能 总被引:2,自引:2,他引:2
用等离子体浸没离子注入与沉积(PIIID)复合强化新技术在AISI440C不锈钢表面制备了类金刚石(DLC)碳膜。膜层表面的原子力显微镜(AFM)形貌显示出DLC膜结构致密均匀。Raman光谱分析结果表明,制备的DLC主要是由金刚石键(sp3)和石墨键(sp2)组成的混合无定形碳膜,且sp3键含量大于10%。以纯石墨棒做阴极,C2H2为工作气体条件下合成的DLC薄膜中,sp3键含量总体上较单纯用石墨作阴极而无工作气体条件下合成的DLC薄膜中sp3键含量高。与基体相比,薄膜试样的显微硬度和摩擦磨损性能均得到了较大改善,最大硬度提高88.7%,磨损寿命延长超过4倍。 相似文献
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TiC/Ti coatings were deposited on the surface of Ti-50.6 at.% Ni alloy by plasma immersion ion implantation and deposition (PIIID) technique. The microstructure, mechanical properties and hemocompatibility of the samples were investigated by means of XRD, AFM, nanoindentation, and scratch and platelet adhesion tests. The result of XRD analysis shows that the crystalline TiC coating has a preferential orientation of (111) in the normal direction. The surface presents a very smooth and dense microstructure with 1.517 nm root mean square roughness (RMS). The average hardness and modulus values of the TiC coating are much higher than those of the NiTi substrate. In the initial stage of scratching, some obvious transversal cracks and worm-like cracks spreading into the film from both side of the scratch track were observed. At higher normal loads for the scratching test, the film delaminated from the substrate at the margins of the substrate. Platelet adhesion tests demonstrate that the hemocompatibility of the coated sample is improved. 相似文献
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LIU Hong-xi TANG Bao-yin WANG Lang-ping WANG Xiao-feng YU Yong-hao SUN Tao HU Li-guo 《中国有色金属学会会刊》2004,14(Z1)
Diamond-like carbon (DLC) films were synthesized by plasma immersion ion implantation and deposition (PIIID) on 9Cr18 bearing steel surface. Influences of working gas pressure and pulse width of the bias voltage on properties of the thin film were investigated. The chemical compositions of the as-deposited films were characterized by Raman spectroscopy. The micro-hardness, friction and wear behavior, corrosion resistance of the samples were evaluated, respectively. Compared with uncoated substrates, micro-hardness results reveal that the maximum is increased by 88.7%. In addition, the friction coefficient decreases to about 0.1, and the corrosion resistance of treated coupons surface are improved significantly. 相似文献
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WANG Xi YANG Genqing LIU Xianghuai ZHENG Zhihong HUANG Wei ZHOU Zuyao ZOU Shichang Ion Beam Laboratory Shanghai Institute of Metallurgy Academia Sinica shanghai China 《金属学报(英文版)》1992,5(11):370-374
A new method for preparation of hard TiN films has been developed by using electronbeam evaporation-deposition of Ti and bombardment with 40 keV Xe~+ ion beam ina N_2 gas environment.The synthesized TiN films were superior to PVD and CVDones in respects of improved adhesion to substrate and low preparing temperature.Theyexhibited good wear resistance and high hardness up to 2200 kg/mm~2.Some industrialapplications have been reported. 相似文献
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为提高口腔医学领域用纯钛铸件的表面性能,改善其美观效果,用辉光等离子氮化、脉冲电弧离子镀涂层复合处理纯钛铸件,使用扫描电镜、接触角测量系统及X射线衍射分析仪评价其表面性能及晶相结构组成,再用分光测色计分析其色彩学特征。结果表明,纯钛铸件等离子氮化、镀氮化钛涂层复合处理后表面形成均匀稳定的TiN复合梯度涂层;人工唾液在复合处理试件表面的接触角(60.29±2.00)°明显小于纯钛(73.12±3.29)°;颜色均匀美观,在CIE表色系中L*:61.22±0.455、a*:1.84±0.055、b*:25.66±0.219,呈金黄色,表面晶相结构以耐磨性较好的TiN、Ti2N为主。 相似文献
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X.B. Tian X.F. Wang A.G. Liu L.P. Wang S. Y. Wang B. Y. Tang P. K. Chu )Advanced Welding Production & Technology National Key Laboratory Harbin Institute of Technology Harbin China ) 《金属学报(英文版)》2000,13(2):734-739
1.IntroductionIonbombardmelltusingplasmaimmersionmethodhasprovenaneffectivesurfacemodificationtechnique[2,3].Plasmaimmersionionimplantation(Pill)cansignificantlyimprovethesurfacepropertiesofthecomponents,suchashardness,friction,wear--resistanceandcorrosion--resistanceofthematerials.Meanwhileitsbiggestadvantageistheabilitytotreatirregularlyshapedobjectswithoutthenecessityoftargetmanipulation.Pillprocesscanbeconductedbyeitheratalowtemperature(<100'C)orelevatedtemperatureconditions(usually300'C… 相似文献