Integration of Microfluidics With a Love Wave Sensor for the Fabrication of a Multisample Analytical Microdevice

A novel approach for multisensing has been developed based on the integration of a parallel-channel microfluidic module with a surface acoustic wave (SAW) sensor chip. The microfluidic module was used to compartmentalize the surface of a single SAW sensor into $N$ equal subareas in order to deliver and detect multiple samples on the sensor. The design concerns and fabrication procedure using soft lithography of polydimethylsiloxane are described. Successful demonstration of a four-channel module is reported, along with a sensitivity evaluation and comparison with a standard flow cell used so far. Very promising results were revealed during the tests concerning the system's operation with liquid samples. The reliability and reproducibility of the results in all four subareas render the proposed setup very suitable for biological testing and screening of various biomolecules in an array format.$ hfill$[2008-0031]      

基于嵌入式系统的无线传感器网络节点的设计

研究一种基于嵌入式系统的无线传感器网络节点的设计方案。无线传感器节点使用模块化设计,由基于ARM7微处理器的主控模块和在2.4GHz频带上工作的CC2420芯片无线通信模块构成。详细讨论各部分的工作原理和硬件组成,并给出节点试验程序流程图。     

SPR生物传感器在急性白血病髓系抗原CD33检测中的应用

采用自组装膜技术,在传感芯片表面修饰抗CD33单克隆抗体,利用自行构建的SPR生物传感器检测人骨髓血液中急性白血病髓系抗原CD33的表达.实验结果表明SPR生物传感器对AML患者骨髓血液的响应值远远大于对健康人骨髓血液的响应值.与传统的流式细胞术(FCM)方法相比,SPR方法具有能快速给出定量分析结果,操作简单等优点....     

利用参比型SPR生物传感器进行SARS病毒抗原检测的研究

参比型SPR生物传感器是一种可以在单通道内实现对检测、参比两个位点同时检测的新型SPR分析系统.利用参比型SPR生物传感器在线制备了两种SARS病毒抗原的检测芯片.直接固定抗体法制备的检测芯片在检测时基本无反应;蛋白A固定抗体法制备的芯片在通入灭活SARS病毒时检测信号明显,参比信号略有上升.第二种芯片可以直接检测到病毒培养液上清中的灭活SARS病毒,检测灵敏度已达到1.66×104 PFU/mL.参比位点可以用来检测待测物中杂质引起的非特异性吸附.     

A monolithically integrated surface micromachined touch mode capacitive pressure sensor

A monolithically integrated surface micromachined touch mode capacitive pressure sensor and its interface circuits are presented. The device includes the capacitance to voltage, and capacitance to frequency converters on the same chip. The sensor is fabricated using a surface micromachining technology, which is processed simultaneously with a conventional 2.0-μm double-poly, double-metal n-well CMOS process. The performance of the integrated sensor meets the design specifications of good linearity and good stability. Evaluation results on the completed ‘sensor and circuit' chip are presented.     

A single chip multi-channel surface plasmon resonance imaging system

A single chip, multi-channel surface plasmon resonance (SPR) imaging system has been developed. The equipment has no moving parts and uses a single sensor chip on which multiple channels can be incorporated. A light emitting diode is used as a photon source while a CCD camera forms the detector. The optical configuration has been designed to achieve a uniform illumination of the sample over a fixed area with a range of incident angles. A calibration test using sucrose solutions shows that the sensitivity of the equipment is 4.3×10⁻⁴ refractive index units per pixel line-pair. The use of the system for simultaneous interrogation of different polyelectrolyte thin films, formed by the electrostatic layer-by-layer deposition method, is demonstrated. A reversible pH-dependent response for these organic layers is also reported.     

基于GMR传感器的金属表面缺陷检测系统设计

随着经济的发展汽车越来越普及,有些关键部位的零件如制动盘和转向节,在制造和使用的过程中容易产生一些细小的裂纹,这就需要在不给被测物体造成负面影响的前提下对关键零器件进行检测;针对传统的涡流传感器进行有限元仿真,分析了激励线圈和被测金属耦合时的传感特性;设计了一种基于GMR芯片检测微裂纹的探针,并开发了相应的测试系统;分析了GMR芯片敏感轴对检测结果的影响,采用小波分析的方法对数据进行处理,提高了信号的信噪比;实验结果表明,该探头灵敏度高,通过调整激励频率可以检测金属表面以下5mm处的缺陷。     

基于ZigBee无线网络的电源电压监控系统设计

针对当前传感器网络普遍采用的有线连接方式的布线不便、灵活性不高的缺点,提出了一种基于ZigBee无线网络的实时监控系统的实现方案。该文描述了利用CC2430芯片搭建系统硬件平台的方法和各节点协议栈的软件设计过程,后介绍了使用LabWindows／CVI制作上位机界面。最终实现了利用无线网络对电源的监控。实验表明,该系统能够采集ZigBee、无线传感器网络内节点的电源电压实时数据。     

Simulation and experimental validation of a SU-8 based PCR thermocycler chip with integrated heaters and temperature sensor

We present a SU-8 based polymerase chain reaction (PCR) chip with integrated platinum thin film heaters and temperature sensor. The device is fabricated in SU-8 on a glass substrate. The use of SU-8 provides a simple microfabrication process for the PCR chamber, controllable surface properties and can allow on chip integration to other SU-8 based functional elements. Finite element modeling (FEM) and experiments show that the temperature distribution in the PCR chamber is homogeneous and that the chip is capable of fast thermal cycling. With heating and cooling rates of up to 50 and 30 °C/s, respectively, the performance of the chip is comparable with the best silicon micromachined PCR chips presented in the literature. The SU-8 chamber surface was found to be PCR compatible by amplification of yeast gene ribosomal protein S3 and Campylobacter gene cadF. The PCR compatibility of the chamber surfaces was enhanced by silanization.     

A silicon test chip for the thermomechanical analysis of MEMS packagings

This paper reports on a method for the investigation of mechanical stress on MEMS sensor and actuator structures due to packaging processes. A silicon test chip is developed and manufactured to validate the simulation results. Finite element analysis (FEA) is used to optimize the geometric parameters and to find a stress sensitive sensor geometry. A diaphragm structure is used as mechanical amplifier for bulk induced stresses during the packaging process. Piezo resistive solid state resistors are doped into the surface of the chip to measure the stress in the diaphragms and at the contact pads being most significant locations for analysis. A high precision ohmmeter was used to measure the resistance prior and past the packaging process. The captured data allows for computation of the resulting stress loads in magnitude. Therefore, a stress evaluation of different packaging technologies is conducted and the impact of the packaging process on reliability can be estimated immediately.     

Surface functionalization for self-referencing surface plasmon resonance (SPR) biosensors by multi-step self-assembly

Recently, a novel SPR sensor with on-chip referencing has been realized. In this sensor, one-half of the gold sensing surface is covered with a high refractive index overlayer of tantalum pentoxide (Ta₂O₅). When polychromatic beam illuminates the sensing surface, surface plasmon resonance in the areas with and without the overlayer occur at different wavelengths. Therefore, the reflected light exhibits two dips associated with SPRs in those two areas. When functionalized properly, one of the areas can be used as a specific sensing channel for detection of specific bio-interactions and the other can act as a reference channel for compensation for background refractive index fluctuations. In this paper we present a new functionalization approach for these mixed architecture chips. The gold side of the chip is functionalized with a mixed self-assembled monolayer of polyethylene oxide (PEO) and biotin terminated (BAT) thiols whereas the Ta₂O₅ side is coated with PEO terminated silanes. The PEO terminated thiols and silanes serve as a protein resistant background, while the biotin terminated thiols are used to bind streptavidin, which in turn immobilizes biotinylated antibodies. Hence, the gold side of the chip is used for the binding and detection of target analytes and the Ta₂O₅ side functions as a reference channel that monitors bulk refractive index changes and temperature drift. We have studied human chorionic gonadotropin (hCG) as a model system, currently detecting down to 5 ng/ml. In addition, we demonstrate the power of the on-chip reference channel for compensating for refractive index changes and eliminating false alarms.     

一种集成式多参数硅微传感器

为了实现小体积多参数的测量,提出一种单片集成多功能传感器.该传感器包括压力、温度和湿度传感器.各部分分别基于半导体压阻效应、电阻迁移率变化、极板间电容变化为原理制作而成.该传感器采用n型(100)基底,利用体硅和面硅工艺加工而成.测量电阻通过离子注入B 形成扩散电阻.为减小各参数间的相互影响,压力传感器的测量电阻布置于[110]晶向,测温电阻沿[100]晶向布置.温度输出信号可以实现对传感器中压力输出时温度漂移的精确补偿.芯片大小为5mm× 5 mm.试验表明传感器具有良好的线性,小迟滞,较高的灵敏度.     

A microfluidic sensor based on ferromagnetic resonance induced in magnetic bead labels

This report details preliminary studies towards the development of a microfluidic sensor that exploits ferromagnetic resonance, excited in magnetic bead labels, for signal transduction. The device consists of a microwave circuit in which a slotline and a coplanar waveguide are integrated with a biochemically activated sensor area. The magnetic beads are immobilized in the sensor area by bio-specific reactions. A microwave signal applied to the slotline is coupled to the coplanar waveguide only in the presence of magnetic beads at the functionalized sensor area. Ferromagnetic resonance in the beads further enhances the coupling. This inductive detection technique lends itself to miniaturization, is inexpensive to fabricate and can be adapted for the detection of a wide range of molecules for which bio-specific ligands are available.Experimentally, the variation of the output signal as a function of the location of magnetic beads was studied for the proposed technique. Subsequently, a prototype device was constructed by biotinylation of the sensor area and integration with a microfluidic chip fabricated in polydimethyl siloxane (PDMS). Preliminary experiments were conducted on this prototype using streptavidin-functionalized magnetic beads as labels. It was shown that the magnetic beads, immobilized at the sensor area by streptavidin-biotin linkage, produced a distinct ferromagnetic resonance response easily discernable from the background signal.     

CMOS风速风向传感器的设计

介绍了一种CMOS(互补MOS)集成风速风向传感器,使用恒温差(CTD)控制模式将芯片加热,使其中间加热区域的温度高于周围环境(风)温度一定值。该传感器在有风吹过它的表面时能同时测量风速和风向。采用4个串联的热堆测量芯片中心区域的平均温度,这种测温的方法简单、新颖。在简单阐述CMOS硅热流量传感器的工作原理和结构之后,主要介绍驱动和信号读取电路。经过风洞测试,传感器能够测量风速0～23m/s,具有良好的线性度和灵敏度,同时,传感器360°内方向敏感。     

A flow sensor for liquids based on a single temperature sensor operated in pulsed mode

An anemometric flow sensor for liquids based on a single temperature sensor is presented. The sensor is based on a probe composed by a silicon chip glued to a copper cylinder acting as thermal feed-through. A precise temperature sensor and a resistive heater are integrated on the chip surface. The sensor is operated in pulsed mode to eliminate the interference of the fluid temperature, switching either the heater power or the probe temperature. The results of water flow tests in the range (1–30) l/h are presented. The problem of reducing the duration of the measurement cycle has been addressed with theoretical and experimental arguments.     

Temperature characterization of flip-chip packaged piezoresistive barometric pressure sensors

In order to miniaturize piezoresistive barometric pressure sensors, a new flip-chip packaging technology has been developed. The thermal expansions of chip and package are different. So in a standard flip-chip package the strong mechanical coupling by the solder bumps would lead to stress in the sensor chip, which is unacceptable for piezoresistive pressure sensors. To solve this problem, in the new packaging technology the chip is flip-chip bonded on compliant springs to decouple chip and package. As the first step of the packaging process an under bump metallization (UBM) is patterned on the sensor wafer. Then solder bumps are printed. After wafer-dicing the chips are flip-chip bonded on copper springs within a ceramic cavity housing. Due to the compliance of the springs, packaging stress is induced into the sensor chip. As sources of residual stress the UBM and the solder bumps on the sensor chip were identified. Different coefficients of thermal expansion of the silicon chip, the UBM and the solder lead to plastic straining of the aluminum metallization between UBM and chip. As a consequence the measurement accuracy is limited by a temperature hysteresis. The influence of the chip geometry, e.g., the thickness of the chip or the depth of the cavity, on the hysteresis was investigated by simulation and measurements. As a result of this investigation a sensor chip was designed with very low residual stress and a temperature hysteresis which is only slightly larger than the noise of the sensor.     

Development of tactile sensor for measuring hair touch feeling

In this paper, a tactile sensor system for evaluation of human hair under dry and wet conditions is developed. The polyvinylidene fluoride (PVDF) film is used as the sensory material. The sensor consists of an acrylic base, a silicone rubber, a PVDF film. A surface projection is put on the PVDF film as the contacting part. The sensor output is obtained by contacting and scanning objects. Panels imitating the physical and chemical properties of human hair surface are fabricated and used as measuring objects for stable measurement. Panels cleaned down with several kinds of hair-care products are measured by the sensor. By comparison between the sensor output and human sensory evaluation, it was confirmed that the sensor outputs have a good correlation with human sensory evaluation. It was found that the sensor system is available for monitoring hair conditions in both dry and wet conditions.     

光学视觉传感器技术研究进展

视觉传感是人类感知外界、认知世界的主要途径，研究表明人类获取的外界信息大约有80%来自于视觉。作为感知外界信息的“电子眼球”，视觉传感器是消费电子、机器视觉、安防监控、科学探测和军事侦察等领域的核心器件。近年来视觉传感器技术发展迅速，不同类型的传感器从不同维度提供丰富的视觉数据，不断增强人类感知与认知能力，视觉传感器研究工作具有重要的理论与应用需求。本报告以典型光学视觉传感器技术为主线，通过综合国内外文献和相关报道，从CCD图像传感器、CMOS图像传感器、智能视觉传感器以及红外图像传感器等研究方向，梳理论述近年来光学视觉传感器技术的发展现状、前沿动态、热点问题和趋势。     

Utilization of albumin-based sensor chips for the detection of metal content and characterization of metal–protein interaction by surface plasmon resonance

We report here the use of albumin-based biosensor chips for the determination of metal content and characterization of metal–protein interaction by surface plasmon resonance. Bovine serum albumin was immobilized onto a carboxymethylated dextran matrix and used for metal detection. The temperature for the analysis was defined and the highest interaction was observed at 25 °C. The albumin sensor chip binds cadmium, zinc or nickel in a concentration-dependent manner, but not magnesium, manganese and calcium. The optimal buffer condition used for the analysis contains 0.01 M HEPES, pH 7.4, 1 mM NaCl and 0.005% Tween-20. Using this condition, a linear calibration curve within the range of 10⁻⁸ to 10⁻⁴ M can be established for the metals. However, a dramatic increase in binding capacity was observed when metal concentration was higher than 10⁻⁴ M and reached a plateau at 10⁻² M. The detection limit for Cd can reach as low as 1 ppb. When measuring a solution containing two species of metal ions with the albumin chip, an additive effect was observed for Ni and Zn. However, 20–30% reduction in resonance response was found upon mixing Cd with Zn or Ni. These observations are consistent with the binding characteristics of albumin. The feasibility of measuring serum metal content by the albumin chip was examined. A linear calibration curve can be established if the samples are boiled and passed through a gel filtration column. The binding affinity of metal with albumin can also be achieved by using the sensor chip. The binding affinity follows the order of Ni > Zn > Cd. These results indicate that the albumin-based sensor chip is useful not only in the quantification of metal content, but also in the characterization of the biochemical properties of albumin.     

一种战场士兵多生命体征监测头带设计

针对战场环境,从便携式角度出发,采用可穿戴技术,设计了一种集成心电、脑电、脉搏波、体温以及人体姿态测量的战场士兵多生命体征监测头带。其中,以超低功耗的MSP430单片机为主控芯片,以低功耗的ADS1292R作为双电极心电和脑电采集芯片,以反射式光频转换器采集人体光电容积脉搏波,以医疗专用负温度系数（ NTC）热敏电阻器作为体温传感器,以MMA7660数字三轴加速度计作为姿态测量传感器。通过蓝牙将所采集信息传送至单兵PDA,实现了多生命体征的监测,具备体积小、重量轻、功耗低、成本低、便携舒适等特点。