平行极板间等离子体RF共振特性研究

为探索用于ＡＶＬＩＳ的更为有效的离子引出方法,对等离子的ＲＦ共振离子出引方法进行了理论研究,用ＰＩＣ方法对其了模拟。结果表明：在弱磁场下可产生鞘层－等离子体振荡,其振荡频率与理论一致;外加与振荡频率王牟的交流电压后将发生共振,其振荡幅度大幅增加,电流加大,共振在等离子体中产生的最大电位幅可高于外加电压幅度几倍;与离子引出方法中传统的平行板电场相比,ＲＦ共振法使得出出的离子流加大,离子引出时间显著     

Numerical simulation of RF discharges for plasma processing

In this paper, we present kinetic models for radio-frequency glow discharges. Discussed are models for bulk electrons and positive ions based on the solution of the Boltzmann equation in a one-dimensional geometry. The resulting spatiotemporal behaviour of the electrons is used to compute the plasma emission, which is compared with experimental data. The model for the ions is used to solve the coupled dynamics of the electric field and the ion density in the whole discharge as well as the ion velocity distribution at the electrodes. The results are compared with experimental data and with the results of a Monte Carlo code.     

Time profiles of ions produced in a hot-cavity resonant ionization laser ion source

The time profiles of Cu, Sn, and Ni ions extracted from a hot-cavity resonant ionization laser ion source are investigated. The ions are produced in the ion source by three-photon resonant ionization with pulsed Ti:Sapphire lasers. Measurements show that the time spread of these ions generated within laser pulses of about 30 ns duration could be larger than 100 μs when the ions are extracted from the ion source. A one-dimensional ion-transport model using the Monte Carlo method is developed to simulate the time dependence of the ion pulses. The prediction of the model agrees reasonably well with the experimental data. To reproduce the observed ion time profiles, we find it necessary to postulate that ion-wall collisions are suppressed inside the ion source by an undetermined ion confinement mechanism and that a substantial fraction of the extracted ions are generated in the vapor-transfer tube rather than the hot cavity. Three-dimensional modeling will be necessary to understand the strong reduction in losses expected from ion-wall collisions which we interpret as evidence for confinement.     

考虑共振电荷转移的二维等离子体离子收集过程

对考虑了共振电荷转移碰撞过程的二维ＡＶＬＩＳ离子引出收集问题进行了数值模拟，分析结果表明：碰撞主要发生在鞘层中；影响碰撞损失率的主要因素是极板间距，应选择小于３ｃｍ的收集板间距；离子引出时间不是判断碰撞损失率的标准。     

离子引出过程的实验与数值模拟的比较

研究了原子蒸汽激光同位素分离器中离子的引出过程，将阴极离子流随时间的变化，离子引出时间受外电场和等离子密度的影响以及离子密度分布的变化等实验结果与数值模拟结果进行了比较，两者符合得较好，从实验上验证了２－Ｄ离子引出理论模型有较好的适用性。     

Ion Extraction Characteristics from Photoionized Plasma by Radio-Frequency Resonance Method

In order to raise ion extraction efficiency in laser isotope separation, we have developed a radio-frequency (rf) resonance method. Then, to confirm feasibility of this method to a photoionized plasma, we experimentally studied the ion extraction characteristics.

When the rf frequency was swept under a weak magnetic field (5mT), the plasma-sheath resonance was found to occur at about 12MHz which was almost the same value as the theoretical one. Moreover, it was confirmed that the ion extraction time at the resonance frequency became the minimum.

When the magnetic field strength decreased from 5mT to zero, the ion extraction time became long. From the simulation results, this was because the plasma potential decreased with the magnetic field strength. Therefore, a magnetic field strength of more than 1mT was required to obtain a sufficient ion extraction efficiency.

To obtain the same extraction time as when applying a ?3kV dc voltage in the electrostatic method, the rf resonance method needed a voltage more than 70V_rms, in which the dc bias was ?1kV. Therefore, we confirmed that this method is feasible for the ion extraction from the photoionized plasma.     

PIC simulation of plasma properties in the discharge channel of a pulsed plasma thruster with flared electrodes

Plasma in the discharge channel of a pulsed plasma thruster (PPT) with flared electrodes is simulated by a self-developed two-dimensional code. The fully particle-in-cell method with Monte Carlo collision is employed to model the particle movement and collisions and investigate the plasma properties and acceleration process. Temporal and spatial variations of the electron density distribution and the ion velocity between electrodes are calculated and analyzed in detail. The computational results of the electron number density, which is in the order of 10²³ m⁻³, show good agreements with experimental results of a PPT named ADD SIMP-LEX. The ion velocity distributions along the center line of the channel lead to a comprehensive understanding of ions accelerated by electromagnetic field. The electron distributions of PPT with discharge voltages varying from 1300 to 2000 V are compared. The diffusion of electrons presents strong dependency on discharge voltage and implies higher degree of ionization for higher voltage.     

Study on atomic layer etching of Si in inductively coupled Ar/Cl2 plasmas driven by tailored bias waveforms

Plasma atomic layer etching is proposed to attain layer-by-layer etching,as it has atomic-scale resolution,and can etch monolayer materials.In the etching process,ion energy and angular distributions (IEADs) bombarding the wafer placed on the substrate play a critical role in trench profile evolution,thus importantly flexibly controlling IEADs in the process.Tailored bias voltage waveform is an advisable method to modulate the IEADs effectively,and then improve the trench profile.In this paper,a multi-scale model,coupling the reaction chamber model,sheath model,and trench model,is used to research the effects of bias waveforms on the atomic layer etching of Si in Ar/C12 inductively coupled plasmas.Results show that different discharge parameters,such as pressure and radio-frequency power influence the trench evolution progress with bias waveforms synergistically.Tailored bias waveforms can provide nearly monoenergetic ions,thereby obtaining more anisotropic trench profile.     

Frequency Matching Effects on Characteristics of Bulk Plasmas and Sheaths for Dual-Frequency Capacitively Coupled Argon Discharges： One-Dimensional Fluid Simulation

A one-dimensional fluid model is proposed to simulate the dual-frequency capacitively coupled plasma for Ar discharges. The influences of the low frequency on the plasma density, electron temperature, sheath voltage drop, and ion energy distribution at the powered electrode are investigated. The decoupling effect of the two radio-frequency sources on the plasma parameters, especially in the sheath region, is discussed in detail.     

Preliminary Tests of a Paul ion Trap as an Ion Source

The paper reports on the design and construction of a Paul ion trap as an ion source by using an impact electron ionization technique. Ions are produced in the trap and confined for the specific time which is then extracted and detected by a Faraday cup. Especial electronic configurations are employed between the end caps, ring electrodes, electron gun and a negative voltage for the detector. This configuration allows a constant low level of pure ion source between the pulsed confined ion sources. The present experimental results are based on the production and confinement of Argon ions with good stability and repeatability, but in principle, the technique can be used for various Argon like ions.     

Effect of radio-frequency substrate bias on ion properties and sputtering behavior of 2 MHz magnetron sputtering

The effect of radio-frequency substrate bias on ion properties and sputtering behavior of 2 MHz magnetron discharge was investigated. The ion velocity distribution function(IVDF), the maximum ion energy and ion flux density were measured at the substrate by a retarding field energy analyzer. The sputtering behavior was investigated by the electric characteristics of target and bias discharges using voltage–current probe technique. It was found that the substrate bias led to the decrease of sputtering power, voltage and current with the amplitude 7.5%. The substrate bias also led to the broadening of IVDFs and the increase of ion flux density, made the energy divergent of ions impacting the substrate. This effect was further enhanced by increasing bias power and reducing discharge pressure.     

Cu and Y ion beams by a new LIS generator

In this work, we present the experimental results of a laser ion source (LIS) implemented for ion accelerators. A KrF excimer laser beam operating at 248 nm was focused on a solid target mounted inside a vacuum chamber in order to obtain the plasma. The laser energy was fixed at 11.5 mJ/pulse. The ion components of the plasma were extracted and accelerated up to 160 keV per charge state by a double gap system formed in two different stages. The beam cross section was circular, 1.5 cm in diameter. Using Cu and Y disks, as laser targets, we produced ion beams containing 1.2 × 10¹¹ ions/pulse (0.7 × 10¹¹ ions/cm²). Applying a total accelerating voltage of 60 kV we obtained an increase in ion dose up to 3.4 × 10¹¹ ions/pulse, (2 × 10¹¹ ions/cm²) for the Cu target and up to 6.3 × 10¹¹ ions/pulse (3.5 × 10¹¹ ions/cm²) for the Y target. The characterization of the plasma was performed using a Faraday cup for the electromagnetic properties, and a pepper pot system for the geometric ones. At 60 kV accelerating voltage and 5.5 mA output current the normalized beam emittance resulted in 0.22 π mm mrad for the Cu target, while under the same accelerating voltage, but with 7.4 mA output current, the normalized beam emittance resulted in 0.14 π mm mrad for the Y target.     

Sub-100 keV ion beam generation with a Van De Graaff accelerator using an external DC voltage supply

We present a method to produce stable proton and helium ion beams with energies of 10-100 keV from a 30-year-old Van De Graaff accelerator using an external stabilized DC voltage supply instead of the belt charging system. Requiring no other modifications, this makes an ideal system for ion irradiation with fluences up to 10¹⁵ ions/cm². Such ion energies and fluences are required in the emerging fields such as silicon micromachining using ion irradiation and we give examples of structures created with sizes as small as 200 nm.     

Two-Dimensional Numerical Simulation of Ion Collection from Pulsed Laser Induced Plasma

Abstract

The process of ion collection from a plasma produced between parallel plates by pulsed lasers was simulated with a two-dimensional numerical code. The trajectories and velocities of ions in the electric field are calculated using Newton's equation of motion. Assuming the Boltzmann relation for electrons, the electric field is calculated by solving numerically the Poisson equation. The numerical results for the time development of the ion collection are shown to be in good agreement with experimental results.     

Numerical Simulation for Metastable States' Deexcitation in Electron Beam Evaporation Process

A direct simulation Monte Carlo (DSMC) method was modified in order to analyze the evaporation process in atomic vapor laser isotope separation (AVLIS), whereby energy transfer between discrete energy levels of metastable states and continuous energy level of translation took place. The atomic excitation temperatures of gadolinium atom were calculated for the model in five low-lying states. Calculation results were compared with those of the experiments obtained by laser absorption spectroscopy. Two types of DSMC simulations which were different in inelastic collision procedures were carried out. It was concluded that the energy transfer was forbidden unless the total energy of the colliding atoms exceeded a threshold value. It was also found that the DSMC method is suitable for treating deexcitation of metastable states accompanied by rapid expansion in the AVLIS evaporation process.     

Numerical research of a 2D axial symmetry hybrid model for the radio-frequency ion thruster

Since the high efficiency discharge is critical to the radio-frequency ion thruster (RIT),a 2D axial symmetry hybrid model has been developed to study the plasma evolution of RIT.The fluid method and the drift energy correction of the electron energy distribution function (EEDF) are applied to the analysis of the RIT discharge.In the meantime,the PIC-MCC method is used to investigate the ion beam current extraction character for the plasma plume region.The beam current simulation results,with the hybrid model,agree well with the experimental results,and the error is lower than 11％,which shows the validity of the model.The further study shows there is an optimal ratio for the radio-frequency (RF) power and the beam current extraction power under the fixed RIT configuration.And the beam extraction efficiency will decrease when the discharge efficiency beyond a certain threshold (about 87 W).As the input parameters of the hybrid model are all the design values,it can be directly used to the optimum design for other kinds of RITs and radio-frequency ion sources.     

Charge sharing in multi-electrode devices for deterministic doping studied by IBIC

Following a single ion strike in a semiconductor device the induced charge distribution changes rapidly with time and space. This phenomenon has important applications to the sensing of ionizing radiation with applications as diverse as deterministic doping in semiconductor devices to radiation dosimetry. We have developed a new method for the investigation of this phenomenon by using a nuclear microprobe and the technique of Ion Beam Induced Charge (IBIC) applied to a specially configured sub-100 μm scale silicon device fitted with two independent surface electrodes coupled to independent data acquisition systems. The separation between the electrodes is comparable to the range of the 2 MeV He ions used in our experiments. This system allows us to integrate the total charge induced in the device by summing the signals from the independent electrodes and to measure the sharing of charge between the electrodes as a function of the ion strike location as a nuclear microprobe beam is scanned over the sensitive region of the device. It was found that for a given ion strike location the charge sharing between the electrodes allowed the beam-strike location to be determined to higher precision than the probe resolution. This result has potential application to the development of a deterministic doping technique where counted ion implantation is used to fabricate devices that exploit the quantum mechanical attributes of the implanted ions.     

Spatiotemporal control of femtosecond laser filament-triggered discharge and its application in diagnosing gas flow fields

Precise control of the discharge in space and time is of great significance for better applications of discharge plasma. Here, we used a femtosecond laser filament to trigger and guide a high-voltage DC pulse discharge to achieve spatiotemporal control of the discharge plasma. In space, the discharge plasma is distributed strictly along the channel generated by the femtosecond laser filament. The breakdown voltage threshold is reduced, and the discharge length is extended. In time, the electrical parameters such as the electrode voltage and the electrode gap affect discharge delay time and jitter. By optimizing the parameters, we can achieve sub-nanosecond jitter of the discharge. Based on the spatiotemporal control of the discharge, we applied filament-triggered discharge for one-dimensional composition measurements of the gas flow field. Besides, the technique shows great potential in studying the spatiotemporal evolution of discharge plasma.     

Development of a silver ion source using nanosecond pulses of a Nd:YAG laser at different wavelengths

A silver ion source was designed by focusing the fundamental and harmonics of Q-switched Nd:YAG laser pulses onto a silver target and simultaneously applying an electric potential in an argon environment. The silver ions were detected at a distance of 2 cm from the target surface using a Faraday cup ion probe after letting them pass through a retarding mesh grid (copper electrode). We aim to produce and characterize the silver ions generated by the laser radiation of different wavelengths and pulse energy, ambient gas pressure and the electrode spacing under applied electric field. In addition to this, the effect of laser radiation on plasma under vacuum and at different argon gas pressures was investigated. The velocity distribution function of the plasma emitted from the silver target was investigated under argon discharge. These measurements demonstrated clearly that the velocity distribution function and current signals depend on laser power, laser wavelength and argon pressure. We observed a ten fold increase in the plume current with increase in the applied voltage and ion velocity in the presence of a laser field. The surface morphology of the laser irradiated samples was investigated using reflection optical microscopy.     

重离子和脉冲激光模拟单粒子翻转阈值等效性研究

根据重离子和脉冲激发诱发单粒子翻转机理,分析了重离子和脉冲激光模拟单粒子翻转阈值（激光能量与重离子线性能量转移（LET））等效方法，得出脉冲激光与重离子单粒子翻转阈值等效计算公式。应用实验室的激光模拟单粒子效应试验系统，开展了几种器件和集成电路的单粒子翻转实验研究。利用获得的计算公式计算激光等效LET阈值，并与国内外重离子实测数据进行比较。结果表明，脉冲激光能量等效LET阈值与重离子试验LET阈值较为一致。