400～1700 nm绝对光谱响应度校准和量值传递

介绍了高准确度光辐射功率校准原理和方法,利用低温辐射计作为主标准器,以陷阱探测器作为传递标准,激光器作为光源,通过激光功率稳定装置,校准了硅陷阱探测器和铟镓砷陷阱探测器的绝对光谱响应度。选取476.1, 488, 514.7, 521, 568, 632.8, 647.1, 785, 852, 980, 1064, 1550,nm共12条谱线完成了校准实验,绝对光谱响应度测量不确定度均优于0.05%。通过量子效率模型得出了硅陷阱探测器的绝对光谱响应曲线。利用InGaAs陷阱探测器分立波长点的绝对光谱响应度与相对光谱响应曲线进行了验证分析。结果表明,2种陷阱探测器均可用作传递标准进行高准确度的可见光和近红外光辐射功率校准和量值传递。     

Intramural Comparison of NIST Laser and Optical Fiber Power Calibrations

The responsivity of two optical detectors was determined by the method of direct substitution in four different NIST measurement facilities. The measurements were intended to demonstrate the determination of absolute responsivity as provided by NIST calibration services at laser and optical-communication wavelengths; nominally 633 nm, 850 nm, 1060 nm, 1310 nm, and 1550 nm. The optical detectors have been designated as checks standards for the purpose of routine intramural comparison of our calibration services and to meet requirements of the NIST quality system, based on ISO 17025. The check standards are two optical-trap detectors, one based on silicon and the other on indium gallium arsenide photodiodes. The four measurement services are based on: (1) the laser optimized cryogenic radiometer (LOCR) and free field collimated laser light; (2) the C-series isoperibol calorimeter and free-field collimated laser light; (3) the electrically calibrated pyroelectric radiometer and fiber-coupled laser light; (4) the pyroelectric wedge trap detector, which measures light from a lamp source and monochromator. The results indicate that the responsivity of the check standards, as determined independently using the four services, agree to within the published expanded uncertainty ranging from approximately 0.02 % to 1.24 %.     

Interpolation of the spectral responsivity of silicon photodetectors in the near ultraviolet

We improve the methods used to interpolate the responsivity of unbiased silicon photodetectors in the near-ultraviolet region. This improvement is achieved by the derivation of an interpolation function for the quantum yield of silicon and by consideration of this function in the interpolation of the internal quantum efficiency of photodiodes. The calculated quantum-yield and spectral-responsivity values are compared with measurement results obtained by the study of a silicon trap detector and with values reported by other research groups. The comparisons show agreement with a standard deviation of 0.4% between our measured and modeled values for both the quantum yield and the spectral responsivity within the wavelength region from 260 to 400 nm. The proposed methods thus extend the predictability of the spectral responsivity of silicon photodetectors to the wavelength region from 260 to 950 nm. Furthermore, an explanation is proposed for the change in the spectral responsivity of silicon photodiodes that is due to UV radiation. In our improved quantum efficiency model the spectral change can be accounted for completely by the adjustment of just one parameter, i.e., the collection efficiency near the SiO(2)/Si interface.     

Improved Near-Infrared Spectral Responsivity Scale

A cryogenic radiometer-based system was constructed at the National Institute of Standards and Technology for absolute radiometric measurements to improve detector spectral power responsivity scales in the wavelength range from 900 nm to 1800 nm. In addition to the liquid-helium-cooled cryogenic radiometer, the system consists of a 100 W quartz-tungsten-halogen lamp light source and a 1 m single-grating monochromator for wavelength selection. The system was characterized and the uncertainty in spectral power responsivity measurements evaluated. A variety of photodetectors, including indium gallium arsenide photodiodes (InGaAs), germanium (Ge) photodiodes, and pyroelectric detectors, were subsequently calibrated. Over most of the spectral range, the spectral power responsivity of the photodetectors can be measured with a combined relative standard uncertainty of 0.4 % or less. This is more than a factor of two smaller than our previous capabilities, and represents a significant improvement in the near infrared (NIR) spectral power responsivity scale maintained at NIST. We discuss the characterization of the monochromator-based system and present results of photodetector spectral power responsivity calibrations.     

陷光探测器偏振响应特性的研究

偏振响应特性是反映光探测器质量的重要参数。陷光探测器(陷光二极管)是低温辐射计的传递探测器。中对陷光探测器的偏振响应特性进行了测量研究，并提出了对它的数值表述方法。探测器偏振响应特性的测量结果的不确定度达到0．005％。测量结果表明，不同的反射型陷光探测器的偏振响应特性相差很大，在光辐射测量中不容忽视。     

Chopped Radiation Measurements With Large Area Si Photodiodes

Frequency dependent response characteristics of photocurrent meters using large area, radiometric quality Si photodiodes have been analyzed. The current responsivity, the voltage noise and drift amplification, and the gain and bandwidth of the photocurrent-measuring analog control loop were calculated. The photodiodes were selected for high shunt resistance. The effect of the photodiode junction capacitance on the response characteristics was also analyzed. As a result of photocurrent gain dependent frequency compensations, the noise boosting effect was minimized at the output of the current meter. The loop gain and bandwidth were maximized. High-accuracy photocurrent measurements can be achieved using the described procedures for both dc and modulated optical radiation.     

Calibration of an Absolute Radiation Thermometer for Accurate Determination of Fixed-Point Temperatures

For accurate determinations of thermodynamic temperature, NPL has developed its absolute radiation thermometer (ART), which is calibrated traceably against a cryogenic radiometer. This article reviews some of the potential sources of systematic uncertainty present in the calibration and use of ART. In particular, this article is concerned with the evaluation of the size-of-source effect and the lens transmittance, as well as potential differences in the responsivity of a transfer trap detector when calibrated in terms of radiant power and used in irradiance mode.     

Stability of photodiodes under irradiation with a 157-nm pulsed excimer laser

We have measured the stability of a variety of photodiodes exposed to 157-nm light from a pulsed excimer laser by using a radiometry beamline at the Synchrotron Ultraviolet Radiation Facility at the National Institute of Standards and Technology. The intense, pulsed laser light exposed the photodiodes, whereas the low-intensity, continuously tunable light from the synchrotron source measured changes in the characteristics of the photodiodes, such as in the responsivity and the reflectance from the surface of a photodiode. Photodiodes studied include both silicon pn-junction and Schottky-barrier types. Among these photodiodes, we found that the damage mechanism for photodiodes with SiO2-based passivating layers is mainly the buildup of SiO2-Si interface trap states. The interface trap state buildup is well known for other semiconductor devices and is generally recognized as a product induced by radiation with an energy more than the 9-eV SiO2 bandgap energy rather than the 7.9-eV energy of the 157-nm radiation. Based on the generation of interface trap states, a model is proposed to describe the dependence of detector responsivity on exposure to 157-nm radiation. We also observed slow recovery in some of the damaged photodiodes, confirming that some of the interface trap states are only semipermanent. Radiation damage induced by low-power continuous 157-nm synchrotron light was also studied. As for the other photodiodes with no SiO2 layers, measurement results support the assumption that the changes in responsivity are due mainly to the deposition of thin layers on the tops of the detectors during laser irradiation.     

Calibration of an extreme-ultraviolet transmission grating spectrometer with synchrotron radiation

The responsivity of an extreme-ultraviolet transmission grating spectrometer with silicon photodiode detectors was measured with synchrotron radiation. The spectrometer was designed to record the absolute radiation flux in a wavelength bandpass centered at 30 nm. The transmission grating had a period of 200 nm and relatively high efficiencies in the +1 and the -1 diffraction orders that were dispersed on either side of the zero-order beam. Three photodiodes were positioned to measure the signals in the zero order and in the +1 and -1 orders. The photodiodes had aluminum overcoatings that passed the desired wavelength bandpass centered at 30 nm and attenuated higher-order radiation and wavelengths longer than approximately 80 nm. The spectrometer's responsivity, the ratio of the photodiode current to the incident radiation power, was determined as a function of the incident wavelength and the angle of the spectrometer with respect to the incident radiation beam. The spectrometer's responsivity was consistent with the product of the photodiode responsivity and the grating efficiency, both of which were separately measured while removed from the spectrometer.     

New PTB Setup for the Absolute Calibration of the Spectral Responsivity of Radiation Thermometers

The paper describes the new experimental setup assembled at the PTB for the absolute spectral responsivity measurement of radiation thermometers. The concept of this setup is to measure the relative spectral responsivity of the radiation thermometer using the conventional monochromator-based spectral comparator facility also used for the calibration of filter radiometers. The absolute spectral responsivity is subsequently measured at one wavelength, supplied by the radiation of a diode laser, using the new setup. The radiation of the diode laser is guided with an optical fiber into an integrating sphere source that is equipped with an aperture of absolutely known area. The spectral radiance of this integrating sphere source is determined via the spectral irradiance measured by a trap detector with an absolutely calibrated spectral responsivity traceable to the primary detector standard of the PTB, the cryogenic radiometer. First results of the spectral responsivity calibration of the radiation thermometer LP3 are presented, and a provisional uncertainty budget of the absolute spectral responsivity is given.     

Calibration of the Irradiance Responsivity of a Filter Radiometer for T Measurement at NIM

At the National Institute of Metrology of China (NIM), silicon photodiode-based narrow-band interference filter radiometers (FRs) have been designed for the radiometric determination of the thermodynamic temperature. The FR calibrations were performed on a new spectral comparator with a trap detector which was calibrated against the cryogenic radiometer at several discrete laser lines. The new spectral comparator is constructed from two grating monochromators assembled to give lower stray light and higher transmitted flux. Applying a transmittance measurement of the filter in the out-of-band region and careful control of the temperature, the irradiance responsivity of a 633 nm centered FR has been obtained over a dynamic range of nearly eight decades in the wavelength range from 450 nm to 1200 nm. The relative standard uncertainty of the responsivity is also analyzed and estimated to be less than 7 × 10^?4 at the 1 ?? level.     

Traceable radiometric calibration of semiconductor detectors and their application for thermodynamic temperature measurement

The non-contact measurement of temperature by using the emitted thermal radiation has been an innovative field of measurement science and fundamental physics for more than a hundred years. It saw the first highlight in Gustav Kirchhoff’s principle of a blackbody with ideal emission characteristics and culminated in Max Planck’s formulation of the law of thermal radiation, the so-called Planck’s law, forming the foundation of quantum physics. A boost in accuracy was the development of semiconductor detectors and the cryogenic electrical substitution radiometer in the late 1970s. Semiconductor detectors, namely photodiodes, deliver an electrical current proportional to the absorbed optical radiation. Due to the measurements of thermal radiation over a wide range of temperature and wavelength, thermodynamic temperature measurements with radiometric methods have set benchmarks to all, the electrical, dimensional and optical metrology. The paper describes the measurement of the spectral responsivity of semiconductor detectors traceable to the SI units and their application for thermodynamic temperature measurement by the absolute measurement of thermal radiation using filter radiometers with calibrated spectral irradiance responsivity.     

Comparison of absolute spectral irradiance responsivity measurement techniques using wavelength-tunable lasers

Independent methods for measuring the absolute spectral irradiance responsivity of detectors have been compared between the calibration facilities at two national metrology institutes, the Helsinki University of Technology (TKK), Finland, and the National Institute of Standards and Technology (NIST). The emphasis is on the comparison of two different techniques for generating a uniform irradiance at a reference plane using wavelength-tunable lasers. At TKK's Laser Scanning Facility (LSF) the irradiance is generated by raster scanning a single collimated laser beam, while at the NIST facility for Spectral Irradiance and Radiance Responsivity Calibrations with Uniform Sources (SIRCUS), lasers are introduced into integrating spheres to generate a uniform irradiance at a reference plane. The laser-based irradiance responsivity results are compared to a traditional lamp-monochromator-based irradiance responsivity calibration obtained at the NIST Spectral Comparator Facility (SCF). A narrowband filter radiometer with a 24 nm bandwidth and an effective band-center wavelength of 801 nm was used as the artifact. The results of the comparison between the different facilities, reported for the first time in the near-infrared wavelength range, demonstrate agreement at the uncertainty level of less than 0.1%. This result has significant implications in radiation thermometry and in photometry as well as in radiometry.     

Primary Radiometry for the Mise-en-Pratique for the Definition of the Kelvin: The Hybrid Method

A task group of CCT-WG5 (radiation thermometry) was established in May 2008 to write text for the mise-en-pratique for the definition of the kelvin (MeP-K) for high temperatures. This task group reviewed and gave summaries for the existing techniques for filter radiometry as a means of determining the absolute radiance, and hence the thermodynamic temperature of a blackbody source. Three approaches were described??the radiance method, which calibrates the radiation thermometer for radiance responsivity, the irradiance method, which calibrates a filter radiometer for irradiance responsivity and then measures the source through two apertures, and the hybrid method that introduces a lens to the irradiance method. In the ??hybrid method?? the radiation thermometer consists of a filter radiometer, a double aperture system, and a lens. The lens allows the instrument to view a small area blackbody source. The system is calibrated ??in parts????i.e., the filter radiometer is calibrated for irradiance responsivity, and the transmittance of the lens and the geometric factor are determined separately. The main drawbacks of this single lens instrument are its high size-of-source effect (~0.2 %), and that this effect has to be determined in an ??absolute?? sense??relative to a theoretical infinite source. However, although the correction is large, with careful evaluation, the associated uncertainty can be made sufficiently small to measure the temperature of fixed-point cell transitions with low uncertainties. This article reviews the hybrid method and gives a comprehensive discussion of the associated uncertainty components.     

Stability under vacuum of silicon trap detectors and their use as transfer instruments in cryogenic radiometry

The stability of the responsivity of trap detectors under vacuum has been studied by means of a special chamber designed for the test of photodetectors at low pressure. The first experiments at a wavelength of 647 nm show that the responsivity variations are smaller than the uncertainties of the measurements, approximately 3 parts in 10(5), when the detector operates successively in air, under vacuum, and then again in air. Calculations based on experiments with single windowless photodiodes indicate that the change in trap responsivity that is due to vacuum effects should be smaller than 1 part in 10(5), at least in the visible part of the wavelength range. This stability makes trap detectors suitable for cryogenic radiometry when one uses transfer detectors under vacuum.     

Infrared Filter Radiometers for Thermodynamic Temperature Determination below 660 °C

At the Physikalisch-Technische Bundesanstalt (PTB), absolutely-calibrated filter radiometers based on silicon photodiodes are routinely used for thermodynamic temperature determinations of blackbodies in the range from the zinc fixed point (FP) (419 °C) up to 3,000 °C. To extend the temperature range down to the tin FP (232 °C), we have designed two new filter radiometers based on indium gallium arsenide (InGaAs) photodiodes with center wavelengths at 1,300 nm and 1,550 nm. For the absolute calibration of the spectral irradiance responsivity of the new InGaAs filter radiometers, the spectral responsivity measurement in the near-infrared (NIR) spectral range has been significantly improved. With a newly developed tuneable laser and monochromator-based cryogenic radiometer facility, the relative standard uncertainty of the NIR spectral responsivity has been reduced from 0.17 % to about 0.03 %. By using the calibrated InGaAs filter radiometer in conjunction with the large-area double sodium heat pipe of the PTB, the first results for the difference between the thermodynamic temperature T and the ITS-90 temperature T ₉₀ in the temperature range from the zinc FP up to the aluminum FP (660 °C) are presented. The values for T – T ₉₀ determined with the new InGaAs filter radiometers are consistent within their relative standard uncertainty of about 30 mK at 419 °C to about 60 mK at 660 °C. References to commercial products are for identification purposes only and constitute neither endorsement nor representation that the item identified is the best available for the stated purpose.     

The 1997 North American Interagency Intercomparison of Ultraviolet Spectroradiometers Including Narrowband Filter Radiometers

The fourth North American Intercomparison of Ultraviolet Monitoring Spectroradiometers was held September 15 to 25, 1997 at Table Mountain outside of Boulder, Colorado, USA. Concern over stratospheric ozone depletion has prompted several government agencies in North America to establish networks of spectroradiometers for monitoring solar ultraviolet irradiance at the surface of the Earth. The main purpose of the Intercomparison was to assess the ability of spectroradiometers to accurately measure solar ultraviolet irradiance, and to compare the results between instruments of different monitoring networks. This Intercomparison was coordinated by NIST and NOAA, and included participants from the ASRC, EPA, NIST, NSF, SERC, USDA, and YES. The UV measuring instruments included scanning spectroradiometers, spectrographs, narrow band multi-filter radiometers, and broadband radiometers. Instruments were characterized for wavelength accuracy, bandwidth, stray-light rejection, and spectral irradiance responsivity. The spectral irradiance responsivity was determined two to three times outdoors to assess temporal stability. Synchronized spectral scans of the solar irradiance were performed over several days. Using the spectral irradiance responsivities determined with the NIST traceable standard lamp, and a simple convolution technique with a Gaussian slit-scattering function to account for the different bandwidths of the instruments, the measured solar irradiance from the spectroradiometers excluding the filter radiometers at 16.5 h UTC had a relative standard deviation of ±4 % for wavelengths greater than 305 nm. The relative standard deviation for the solar irradiance at 16.5 h UTC including the filter radiometer was ±4 % for filter functions above 300 nm.     

Noise-Optimized Silicon Radiometers

This paper describes a new, experimentally verified, noise analysis and the design considerations of the dynamic characteristics of silicon radiometers. Transimpedance gain, loop gain, and voltage gain were optimized versus frequency for photodiode current meters measuring ac and dc optical radiation. Silicon radiometers with improved dynamic characteristics were built and tested. The frequency-dependent photocurrent gains were measured. The noise floor was optimized in an ac measurement mode using photodiodes of different shunt resistance and operational amplifiers with low 1/f voltage and current noise. In the dark (without any signal), the noise floor of the optimized silicon radiometers was dominated by the Johnson noise of the source resistance. The Johnson noise was decreased and equalized to the amplified 1/f input noise at a 9 Hz chopping frequency and 30 s integration time constant, resulting in an equivalent root-mean-square (rms) photocurrent noise of 8 × 10⁻¹⁷ A. The lowest noise floor of 5 × 10⁻¹⁷ A, equal to a noise equivalent power (NEP) of 1.4 × 10⁻¹⁶ W at the 730 nm peak responsivity, was obtained at a 100 s integration time constant. The radiometers, optimized for ac measurements, were tested in a dc measurement mode as well. Performances in ac and dc measurement modes were compared. In the ac mode, a ten times shorter (40 s) overall measurement time was needed than in the dc mode (400 s) to obtain the same 10⁻¹⁶ A noise floor.     

Comparison of a Detector-Based Near-IR Radiance Scale to an ITS-90 Calibrated Radiation Thermometer

Integrating-sphere-input InGaAs radiometers (ISIR) have been developed at the National Institute of Standards and Technology (NIST) to extend the detector-based calibration of radiation thermometers from the Si range to the near-infrared (NIR). These near-infrared radiometers are used to determine the reference spectral irradiance responsivity scale based on the primary-standard cryogenic radiometer. The irradiance responsivity scale is then propagated to spectral radiance at the exit port of an integrating sphere. The near-infrared radiation thermometer (NIRT) is calibrated using this detector-based radiance scale. The first phase of this research work is reported here where the relative spectral radiance responsivity of the NIRT has been determined using a monochromator-based system. Thereafter, the relative spectral responsivity of the NIRT is converted into an absolute responsivity using the radiances from the Zn fixed point blackbody. Then, the NIRT is used to extend these calibrations for temperature measurements between 157 °C and 1000 °C. The NIRT has also been calibrated in this temperature range using the five, fixed point blackbodies of the ITS-90. The two different calibration approaches for temperature measurements are compared.