基于0.35μm CMOS工艺的APD器件仿真分析

提出了一种基于0.35μm CMOS工艺的、具有p+/n阱二极管结构的雪崩光电二极管(APD),器件引入了p阱保护环结构.采用silvaco软件对CMOS-APD器件的关键性能指标进行了仿真分析.仿真结果表明:p阱保护环的应用,明显降低了击穿电压下pn结边缘电场强度,避免了器件的提前击穿.CMOS APD器件的击穿电压为9.2V,工作电压下响应率为0.65 A/W,最大内部量子效率达到90％以上,响应速度能够达到6.3 GHz,在400～900 nm波长范围内,能够得到很大的响应度.     

Ge/Si波导集成型APD器件的仿真分析

设计了一种Ge/Si波导集成型雪崩光电二极管(APD).器件采用将Si波导层置于Ge吸收层之下的结构,光经波导层进入吸收层只需一次耦合,降低了光的损耗,提高了光的吸收率和光电流.采用silvaco软件对器件的结构和性能进行仿真,结果表明:器件的雪崩击穿电压为-28 V,最大内量子效率达到89％,在1.15～1.60 μm范围内具有较高响应度,峰值波长位于1.31μm,单位响应度最高达0.74 A/W,3 dB带宽为10 GHz.     

使用纳米硅薄膜技术改进现有硅器件的性能

使用PECVD薄膜沉积技术制成的具有新结构特征的纳米硅薄膜(nc—Si2H)拥有一系列物性，以纳米硅膜为母体研制成异质结二极管，发现它具有一系列优于单晶硅二极管的独特性能，探讨了使用纳米硅薄膜制造的其它硅器件的可能性，如肖特基器件、TFT晶体管等。     

硅基量子点器件

硅基量子点器件由于其独特的性能以及和硅集成电路相容的特点成为研究的重点。量子点中电子和空穴强的量子限制作用使其表现出一些新颖的物理性能,从而在微电子和光电子器件方面有着重要的应用价值。本文介绍了硅基量子点器件的一些应用,包括单电子晶体管、红外探测器、发光二极管。     

使用纳米硅薄膜技术改进现有硅器件的性能

使用PECVD薄膜沉积技术制成的具有新结构特征的纳米硅薄膜(nc-Si∶H)拥有一系列物性.以纳米硅膜为母体研制成异质结二极管,发现它具有一系列优于单晶硅二极管的独特性能.探讨了使用纳米硅薄膜制造的其它硅器件的可能性,如肖特基器件、TFT晶体管等.     

使用纳米硅薄膜技术改进现有硅器件的性能

使用PECVD薄膜沉积技术制成的具有新结构特征的纳米硅薄膜(nc-Si∶H)拥有一系列物性.以纳米硅膜为母体研制成异质结二极管,发现它具有一系列优于单晶硅二极管的独特性能.探讨了使用纳米硅薄膜制造的其它硅器件的可能性,如肖特基器件、TFT晶体管等.     

一种硅基雪崩光电探测器的研究

硅基雪崩光电探测器（Si-APD）性能参数的研究可以优化改进器件结构的设计,而结构设计直接影响雪崩光电探测器的光电特性。本文针对Si基雪崩光电探测器的性能参数和器件结构进行研究,提出了改善器件性能参数的工艺方法,最终设计了一种硅基雪崩光电探测器结构。     

硅基光波导结构与器件

简要评述硅基光波导的结构，工艺及其器件，包括低损耗的硅基光波导，电光波导器件，红外波导探测器，氧化硅光回路等。     

硅集成器件工艺中的二次缺陷

本文从硅材料质量与器件关系研究入手，对工艺中发现的滑移位错、失配位错、热氧化堆垛层错，以及微缺陷等几种二次缺陷进行了研究，并试图对它们的性质、工艺中的变化、产生原因及消除办法进行归纳，以便对有关工作有所裨益。     

Equivalent-circuit parameters of a silicon avalanche photodiode

The dependence of the relative phase shift in a silicon avalanche photodiode on the multiplication is used for the determination of the intrinsic response time in the avalanche region. The value of the intrinsic response time of a silicon avalanche photodiode was found to be 0.85 ps. The procedure used to estimate the equivalent-circuit parameters of the detector is also described.     

基于硅雪崩光电二极管的双光子吸收实验

研究了硅雪崩光电二极管(APD)对光通信波段近红外光子在不同频率、强度,以及APD 不同偏压下的双光子吸收效应(TPA)。通过实验详细测量了光频率从186.3 THz 到196.1 THz 变化时APD的TPA 效率,结果表明:随着入射光频率的不断增加,TPA 效率呈现出先增大、后减小的规律,并且在190.5 THz 附近达到最优效率。此外,在实验中观察到,随着入射光强的增大,TPA 效率也呈现出先增大、后减小的现象(此实验中的峰值光强度约10 mW)。     

Analysis of the dynamics of the local microbreakdown in silicon avalanche photodiode structures

The methods of mathematical simulation are used to study the dynamics of the local microbreak-down in silicon avalanche photodiode structures. The model takes into account the locality of the region of the avalanche multiplication and the delay of the spreading of the avalanche current over the area of the back electrode of the diode. The calculations yield two transient phases of the voltage build-up across the diode: fast (due to the current spreading) and slow (related to the conventional RC recharging). The load resistances needed for the pulsed operation of the avalanche photodiodes are calculated for a series of practically important diode capacitances and spreading resistances of the back electrode.     

超晶格雪崩光电二极管的结构优化及性能研究

基于碰撞离化理论研究了异质材料超晶格结构对载流子离化率的作用,设计得到In0.53Ga0.47As/In0.52Al0.48As超晶格结构的雪崩光电二极管。通过分析不同结构参数对器件性能的影响,得到了低隧道电流、高倍增因子的超晶格结构雪崩层,根据电场分布方程模拟了器件二维电场分布对电荷层厚度及掺杂的依赖关系,并优化了吸收层的结构参数。对优化得到的器件结构进行仿真并实际制作了探测器件,进行光电特性测试,与同结构普通雪崩光电二极管相比,超晶格雪崩光电二极管具有更强的光电流响应,在12.5~20 V的雪崩倍增区,超晶格雪崩光电二极管在具备高倍增因子的同时具有较低的暗电流,提高了器件的信噪比。     

Two-dimensional simulation of silicon avalanche cathodes

The characteristics of silicon avalanche cathode as a novel electron emitting device with ultra-shallow p-n junctions have been studied using the two-dimensional device simulator PISCES-IIB. The steady-state simulation indicates that the nonplanar surface topology resulting from fabrication process causes current crowding near the edge of the emitting area where the surface step exists. Current crowding degrades the emission uniformity and also reduces the emission current under increased reverse bias. The nonplanar surface structure also causes punchthrough in the epitaxial layer as the reverse bias on the cathode increases. As a result, the percentage of the cathode current contributing to emission decreases, reducing the emission efficiency consequently. The simulation shows that the portion of the cathode current that flows through the emitting area drops to as much as 30% at cathode bias higher than 12 V, compared to the same current just after breakdown. This also affects the rate of increase in the total emission current which is the product of the emission efficiency and the overall cathode current     

An optimized avalanche photodiode

The feasibility of a fast, high-gain photodetector based on the phenomenon of avalanche multiplication in semiconductors has been investigated. Based on the process of carrier multiplication in a high electric field, criteria for the design of an optimized avalanche photodiode and for the choice of the best semiconductor material are developed. The device theory of an optimized, realizable avalanche photodiode is presented. A practical silicon device optimized for the detection of light with a wavelength of 9000Å is suggested and design parameters are presented. Details of the fabrication process are given and the performance of experimental devices is compared to the device theory presented. The results of the study indicate that it is possible to achieve a silicon photomultiplier with a quantum efficiency-bandwidth product of the order of 100 GHz for the detection of light up to a wavelength of over 9000Å.     

一种高速雪崩光电探测器

High-speed avalanche photodiodes are widely used in optical communication systems. Nowadays, separate absorption charge and multiplication structure is widely adopted. In this article, a structure with higher speed than separate absorption charge and multiplication structure is reported. Besides the traditional absorption layer, charge layer and multiplication layer, this structure introduces an additional charge layer and transit layer and thus can be referred to as separate absorption, charge, multiplication, charge and transit structure. The introduction of the new charge layer and transit layer brings additional freedom in device structure design. The benefit of this structure is that the carrier transit time and device capacitance can be reduced independently, thus the 3 dB bandwidth could be improved by more than 50% in contrast to the separate absorption charge and multiplication structure with the same size.     

碲镉汞雪崩焦平面器件

碲镉汞雪崩光电二极管以其高增益、高灵敏度和高速探测的优点成为第3代红外光电探测器的重要发展方向之一.制备了截止波长3.56μm的雪崩光电二极管焦平面器件,面阵规模为16×16.焦平面器件在0～6V偏压下有效像元率大于90%,非均匀性小于20%.6 V偏压下NEPh约为60,过剩噪声因子为1.2.     

4H-SiC 雪崩光电探测器中倍增层参数的优化模拟

应用ATLAS模拟软件,设计了吸收层和倍增层分离的（SAM）4H-SiC 雪崩光电探测器（APD）结构。分析了不同外延层厚度和掺杂浓度对器件光谱响应的影响,对倍增层参数进行优化模拟,得出倍增层的最优化厚度为0.26μm,掺杂浓度为9.0×1017cm^-3。模拟分析了APD的反向IV特性、光增益、不同偏压下的光谱响应和探测率等,结果显示该APD在较低的击穿电压66.4V下可获得较高的倍增因子105;在0V偏压下峰值响应波长（250nm）处的响应度为0.11A/W,相应的量子效率为58%;临近击穿电压时,紫外可见比仍可达1.5×103;其归一化探测率最大可达1.5×1016cmHz ^1/2 W^-1。结果显示该APD具有较好的紫外探测性能。