Control of the microparticle position in the channel based on dielectrophoresis

We report here the control of the microparticles position within fluid flow based on its size by using dielectrophoresis (DEP) with a microelectrode array consisted of rectangular features with the different size of width and gap. 3 μm- and 10 μm-diameter particles were introduced into the channel with 300 μm height at 30 μl/min. An AC electric field (20 V peak–peak and 2 MHz) was then applied to microelectrode arrays to form dielectrophoretic fluid cage, resulting in a formation of flow paths with low electric fields on the arrays. The microparticles separately flow in line streams along the paths formed between the rectangular features of the arrays, the 3 μm-diameter particles mainly flow through the narrow path and 10 μm-diameter particles through the wide path. These results indicated that positions of two types of microparticles in the fluidic channel were easily separated and controlled using the n-DEP.     

A large-displacement 65Pb(Mg1/3Nb2/3)O3–35PbTiO3/Pt bimorph actuator prepared by screen printing

In this paper we present a novel approach to preparing large-displacement 65Pb(Mg_1/3Nb_2/3)O₃–35PbTiO₃/Pt (65/35 PMN–PT/Pt) bimorph actuators. These “substrate-free”, bending-type actuators were prepared by screen-printing the 65/35 PMN–PT and Pt thick-film pastes as the electrodes on alumina substrates. After this screen printing and the subsequent firing the 65/35 PMN–PT/Pt composites were peeled off from the substrates. Displacements of nearly 100 μm at 18 V were achieved for actuators with dimensions of 1.8 cm × 2.5 mm × 50 μm for the 65/35 PMN–PT layer. The normalized displacement (the displacement per unit length) was 40 μm/cm at 18 V. The experimental results together with a computation procedure were used to obtain the material parameters for a finite-element analysis of the 65/35 PMN–PT/Pt bimorph actuators.     

A novel biosensor using entangled carbon nanotubes layer grown on an alumina substrate by CCVD of methane on FeOx–MgO

Glucose oxidase (GOx) was immobilized on entangled and high surface area carbon nanotubes (CNTs) grown on an alumina substrate, and direct electron transfer reaction between GOx and the electrode was revealed. Fe/MgO catalyst layer was spin-coated on the insulating alumina substrate and the CNT layer was grown on the catalyst by chemical vapor deposition of methane at 950 °C for 15 min. About 20–30 nm bundles of about 1 nm single-wall as well as 10 nm multiwall CNTs are formed. The redox process was surface-controlled and electron transfer coefficient and the rate constant were estimated to be 0.35 and 0.64 s⁻¹, respectively. In addition GOx immobilized on CNT layer showed a linear response range between 12 and 62 μM of glucose concentration. A detection limit and sensitivity of 0.1 μM and 635 μA mM⁻¹ cm⁻², respectively, were obtained for the biosensor.     

Characterization of Young's modulus and residual stress gradient of MetalMUMPs electroplated nickel film

Metal multi-user MEMS processes (MetalMUMPs) offered by MEMSCAP provide a 20 μm thick electroplated nickel film suitable for constructing micro RF tunable capacitors, RF inductors, relays, switches, etc. Currently the Young's modulus and the residual stress gradient of the MetalMUMPs nickel film have not been characterized. In this paper the resonance method is used to characterize the Young's modulus of the MetalMUMPs nickel film. The characterization results show that the nickel film has a Young's modulus of 155–164 GPa with an average of 159 GPa. A stress gradient induced free beam mechanism is proposed in this paper to characterize the residual stress gradient in the MetalMUMPs nickel film. Characterization results show that the residual stress in the electroplated nickel film has a gradient across the film thickness of −5.49 MPa/μm to −4.30 MPa/μm with the average of −4.72 MPa/μm. The residual stress change from the bottom surface to the top surface of the nickel film is −97.7 MPa. The Young's modulus and residual stress gradient of the MetalMUMPs nickel film obtained in this paper provide MetalMUMPs users an important reference for designing, optimizing and analyzing suspended nickel structures. The stress gradient induced free beam mechanism proposed in this paper provides a method of characterizing negative residual stress gradient in thin films without using trenches or through-wafer holes.     

Tensile and high cycle fatigue test of Al–3% Ti thin films

This paper presents the results of tensile and high cycle fatigue tests with stress ratio R = 0.1 for an Al–3% Ti thin film of 1 μm thickness in atmospheric air at room temperature. Specimens with three different widths (50, 100, and 150 μm) were fabricated to study the width effects of each sample. Test results show that tensile and fatigue properties for the Al–3% Ti thin film with different widths are very close, and, thus, width effects were found to be minimal. The elastic moduli ranged from 80 to 82 GPa, and the tensile strengths ranged from 369 to 379 MPa. Fatigue strength coefficients of the specimens with 50, 100, and 150 μm width were 193, 181, and 164 MPa, respectively. In addition, fatigue strength exponents of the specimens with 50, 100, and 150 μm width were −0.023, −0.020, and −0.013, respectively. When present test results are compared with typical properties of bulk aluminium, the Al–3% Ti thin film is found to have longer life at the same stress, but it is more sensitive to the stress level.     

Droplet creation using liquid dielectrophoresis

Dielectrophoresis (DEP) is defined as polarizable particles moving into regions of higher electric field intensity. In liquid DEP (LDEP), a dielectric liquid tends to flow toward regions of high electric field intensity under a non-uniform electric field. This work presents a theoretical model of LDEP based on parallel electrodes. The LDEP force is derived using the lump parameter electromechanical method. The relationship between the minimum actuation voltage and the electrode width is investigated experimentally and theoretically. We also propose a method for creating a 20 nl droplet of deionized water using LDEP. The creation of a water droplet containing 15 μm polystyrene beads is placed at the desired location from a continuous flow driven by LDEP using the developed method.     

Patterning of carbon nanotube films on PDMS using SU-8 microstructures

In this paper, we propose a simple and low-cost fabrication technique for patterning carbon nanotube (CNT) films on polydimethylsiloxane (PDMS), which can be used in flexible sensors and electronics. We demonstrate CNT patterning on both recessed and flat PDMS surfaces using a standard photolithography method. By this proposed technique, we were able to fabricate a CNT film, having a high flexibility and good conductivity, on a PDMS surface. A CNT pattern with a minimum feature resolution of 150 μm was obtained using the proposed fabrication technique. The sheet resistance of the CNT film on the PDMS surface was determined to be in the 100–280 Ω/sq range. The thickness and resultant resistivity of the CNT film can be easily controlled by controlling just the spray duration. Furthermore, the gauge factor of the proposed device is higher than that of metal and it increases as the thickness of the CNT film increases.     

Growth of uniform carbon‐nanotube arrays with sandwich technology

Abstract— In this work, a novel approach to grow structured, highly oriented carbon nanotubes (CNTs), which are vertically aligned to the substrate and show large field emission is reported. Growth is performed on lithographically defined dots of catalysts, which can be deposited on metallic, semiconducting, and glass substrates. A sandwiched catalyst structure and microwave plasma chemical vapor deposition enables the formation of uniform CNT arrays of 1.6 × 1.6 μm². The method is easily scalable to large areas. The CNT arrays exhibit a stable field emission of 20 mA and a macroscopic current density of 50 mA/cm² at a rather low electric field of 5.33 V/μm. Modeling of space charge indicates that space charge reduces the magnitude of the CNT emission at high field strength: this agrees satisfactorily with the measurements.     

Simultaneous measurement of Pb, Cd and Zn using differential pulse anodic stripping voltammetry at a bismuth/poly(p-aminobenzene sulfonic acid) film electrode

A novel sensor was developed for simultaneous detection of Pb, Cd and Zn, based on the differential pulse anodic stripping response at a bismuth/poly(p-aminobenzene sulfonic acid) (Bi/poly(p-ABSA)) film electrode. This electrode was generated in situ by depositing simultaneously bismuth and the metals by reduction at −1.40 V on the poly(p-ABSA) modified electrode. Compared with the bismuth film electrode, the Bi/poly(p-ABSA) film electrode can yield a larger stripping signal for Pb, Cd and Zn. Under the optimum conditions, a linear response was observed for Cd and Zn in the range from 1.00 to 110.00 μg L⁻¹ and for Pb in the range from 1.00 to 130.00 μg L⁻¹. The detection limits of Pb(II), Cd(II) and Zn(II) were 0.80, 0.63 and 0.62 μg L⁻¹, respectively. Finally this sensor had been applied to the simultaneous determination of Pb(II), Cd(II) and Zn(II) in river water samples and the results were quite corresponding to the value obtained by atomic absorption spectrometry.     

Manipulation of ZnO nanostructures using dielectrophoretic effect

In this paper, the dielectrophoretic manipulation of the nanostructured zinc oxide (ZnO) with microfabricated electrodes and electrode arrays had been studied. The nanorod-like ZnO prepared by the chemical solution growth, with the length of 10 μm, was used as the manipulation target. The electrodes and electrode arrays were prepared by standard IC process. The SEM pictures have been used to examine and evaluate the manipulation results. The influences of the pattern of electrodes, the applied frequency, the concentration and the applied voltage on the dielectrophoretic manipulation effect have been investigated to research the manipulation of particles by dielectrophoresis. We succeeded in manipulating ZnO particles along the electric field and depositing them across the gaps between two electrodes by modulating different factors. It is concluded that the nanostructured ZnO can be manipulated by dielectrophoresis and both the positive dielectrophoretic effect and the negative dielectrophoretic effect can be observed. This manipulation technique is potential for lots of application such as the construction of micro/nano sensors and the nanoelectronic devices.     

Study of symmetric microstructures for CMOS multilayer residual stress

This study presents a fabrication-based approach to improve the curl-up effect in complementary metal oxide semiconductor (CMOS) multilayer large-area planar structures. Control of the residual stress of CMOS multilayer microstructures is necessary for development of microelectromechanical systems (MEMS) sensors such as accelerometers and micromirrors. In this work, 3D symmetric geometry can be used to overcome effectively the residual stresses in CMOS multilayer microstructures. To demonstrate this concept, a symmetric multilayer flat-plane is fabricated and release-etched using an isotropic plasma etching process. The isotropic etch characteristics and lateral undercut can be controlled using a chamber pressure of 0.47 ± 0.2 Torr. A flat-plane structure with an area of 500 μm × 500 μm is fabricated using multilayer materials, including four metal and three silicon dioxide layers. Based on this approach, the measured results show the residual stress effect can be minimized in CMOS multilayer microstructures, and furthermore the curl-up effect of flat-plane is less than 2 μm across the 500 μm × 500 μm area.     

Continuous-flow particle and cell separations in a serpentine microchannel via curvature-induced dielectrophoresis

Particle and cell separations are critical to chemical and biomedical analyses. This study demonstrates a continuous-flow electrokinetic separation of particles and cells in a serpentine microchannel through curvature-induced dielectrophoresis. The separation arises from the particle size-dependent cross-stream dielectrophoretic deflection that is generated by the inherent electric field gradients within channel turns. Through the use of a sheath flow to focus the particle mixture, we implement a continuous separation of 1 and 5 μm polystyrene particles in a serpentine microchannel under a 15 kV/m DC electric field. The effects of the applied DC voltages and the serpentine length on the separation performance are examined. The same channel is also demonstrated to separate yeast cells (range in diameter between 4 and 8 μm) from 3 μm particles under an electric field as low as 10 kV/m. The observed focusing and separation processes for particles and cells in the serpentine microchannel are reasonably predicted by a numerical model.     

Uniform carbon‐nanotube emitter for field‐emission displays

Abstract— The synthesis of carbon‐nanotube (CNT) field emitters for FEDs by thermal chemical vapor deposition (CVD) and their structural and emission characterization are described. Multi‐walled nanotubes (MWNTs) were grown on patterned metal‐base electrodes by thermal CVD, and the grown CNTs formed a network structured layer covering the surfaces of the metal electrode uniformly, which realized uniform distribution of electron emission. A technique for growing narrow MWNTs was also developed in order to reduce the driving voltage. The diameter of MWNT depends on the growth temperature, and it has changed from 40 nm at the low temperature (675°C) to 10–15 nm at the high temperature (900–1000°C). Moreover, narrower MWNTs were grown by using the metal‐base electrode covered with a thin alumina layer and a metal catalyst layer. Double‐walled nanotubes (DWNTs) were also observed among narrow MWNTs. The emission from the narrow CNTs showed a low turn‐on electric field of 1.5 V/μm at the as‐grown layer.     

Performance of nanocomposites stacked with carbon nanotubes and Nafion films

Nanocomposites stacked layer-by-layer with carbon nanotubes (CNTs), referred to as CNT–Nafion?, are prepared using a spray and reproducible spin-cast deposition methodology. The CNTs used for the nanocomposite film were cylindrical with diameters in the range of 10–15 nm and lengths of up to several micrometers. The CNTs had a high purity of more than 95%. CNT–Nafion? nanocomposites with uniformly spray-coated CNTs provide sufficiently high electrical conductivity throughout, and show enhanced mechanical strength due to laterally aligned CNTs between each interface of the spin-coated Nafion film. Our results indicate that such a layer-by-layer film composed of CNTs and Nafion? is suitable for potential transducer applications at the microscale.     

Design and fabrication of a capacitive infrared detector with a floating electrode and thermally isolatable bimorph legs

A new capacitive infrared detector structure that incorporates one electrically floated top electrode that acts as an infrared absorber and two bottom electrodes is proposed and fabricated. The concept begins from an attempt to remove metal lines, the main heat transfer media in the thermal-type infrared detector, from the device's thermal insulation section. A thermal insulation section can be composed without metal lines and instead be solely comprised of an insulator having very low thermal conductivity compared to metals. Therefore, low thermal conductance can be easily achieved with small dimensions of thermal insulation section material. The floating electrode is electrically disconnected from the substrate. Instead, the capacitance change is read only using the two bottom electrodes, which are separated from the absorber and placed on the substrate. The position of the top electrode (infrared absorber) is changed through a bimorph actuation in accordance with the absorption of LWIR (8–12 μm) rays, with an absorptance of 70%. This approach provides an enlarged fill-factor (25%) compared with earlier devices, because the portion of the leg in the pixel area is reduced, whereas the portion of the absorber area is increased. With the small dimension of the thermal insulation section (0.2 × 2 × 10 μm³), thermal conductance of 1.27 × 10⁻⁷ W/K is achieved. In addition, the shortened leg lends the device a higher spring constant relative to the conventional devices, and therefore a higher signal reading voltage can be achieved, resulting in increased temperature responsivity. With the bimorph-type infrared detector's characteristics of low noise and high sensitivity, the proposed structure can achieve a low NETD value of 12.7 mK.     

Using a PEDOT:PSS modified electrode for detecting nitric oxide gas

PEDOT:PSS thick films, prepared by the drop-coated method, were used in this study for sensing nitric oxide (NO) gas. The thickness of PEDOT-PSS film was controlled by dropping different volumes of PEDOT-PSS solution to improve the response of PEDOT-PSS film. Due to its porous structure, the thicker the PEDOT-PSS film is, the higher the noticeable surface area. Thus, a larger response is found. However, since the concentration of NO gas used was low (10 ppm), the effect of the surface area was not noticeable when the thickness of the film was greater than 5 μm. In the range of 2.5–10 ppm NO, the relationship between the response of the PEDOT-PSS film and the NO concentration was linear. The limit of detection (S/N = 3), response time (t₉₅), and recovery time (t₉₅) were about 350 ppb, 527 s, and 1780 s, respectively. The response of PEDOT-PSS film to 10 ppm NO gas was dramatically affected by the presence of either O₂ or CO. The standard deviation, with respect to the sensitivity of the NO gas sensor based on PEDOT:PSS film, was 2.2%. The sensitivity of the sensor remained at about 74.5% that of a fresh one.     

Design and optimization of a lactate amperometric biosensor based on lactate oxidase cross-linked with polymeric matrixes

The design and characterization of a lactate biosensor is described. The biosensor is developed through the immobilization of lactate oxidase (LOD) in an albumin and mucin composed hydrogel. The enzyme is then cross-linked with glutaraldehyde to the polymeric matrix and entrapped between two polycarbonate membranes. The hydrogen peroxide produced by the reaction of lactate and LOD is detected on a Pt electrode operated at 0.65 V versus Ag|AgCl. The performance of the biosensor was evaluated in matrixes with different amounts of albumin, mucin and glutaraldehyde. The response time of the sensor to 10 μM lactate required 90 s to give a 100% steady-state response of 0.079 μA. Linear behavior was obtained for 0.7 μM < c_Lac < 1.5 mM. The detection limit calculated from the signal to noise ratio was 0.7 μM. Only 0.1 U of enzyme was necessary to get a biosensor with a relatively high current flow and an excellent stability over a storage period of 30 days. High reproducibility in the response was obtained when several biosensors were prepared with the same composition.     

Single-crystalline Te microtubes: Synthesis and NO2 gas sensor application

Tellurium tubular crystals were grown by direct thermal evaporation of tellurium metal in an inert atmosphere on quartz substrates at ambient pressure without employing any catalyst. Tellurium powder was evaporated by heating at 600 °C and was condensed at a substrate temperature of 300–350 °C in the downstream of argon gas at a flow rate of 100 mL/min. The structure and chemical composition of the as-synthesized samples were examined by X-ray diffraction analysis, scanning electron microscopy, energy-dispersive X-rays microanalysis and micro-Raman spectroscopy. Scanning electron microscopy images and X-ray diffraction patterns showed that the as-synthesized Te had a tubular single-crystalline morphology with a hexagonal cross-section. The Te microtubes were typically 0.5–6 mm long, 30–70 μm in external diameter, and 5–20 μm thick. NO₂ gas-sensing properties of the Te microtubes at room temperature were also investigated. They showed a promising sensitivity and response towards tested gas.     

Novel tunable laser sources with 1.5-μm and 1.57-μm cascaded DFB reflectors for in situ gas monitoring applications

Novel tunable lasers based on 1.5-μm and 1.57-μm cascaded distributed-feedback reflectors are realized for real-time monitoring of H₂O and CO gas mixtures immediately in multi-gas sensor systems. With simple fabrication procedures, the new design allows the realization of a widely tunable laser source that can cover the H₂O and CO absorption wavelength bands. With the temperature tuning of 0.1 nm/°C and current tuning of 0.014 nm/mA, the laser can be tuned to cover over 3 nm wavelength range in each wavelength band. Experiments verify that the lasers can have more than 38 dB SMSR over the tuning range. The characteristics of high power, excellent spectral purity, and simple wavelength switching control can simplify the analysis procedures of gas sensing and thus reduce the cost. By direct absorption method, the tunable laser has been successfully adopted in a diode laser sensor system for monitoring of water vapor concentration near 1.5 μm and carbon monoxide near 1.57 μm. Less than 15% error in the line strength is observed between the measured data and HITRAN database.     

Active‐matrix field‐emission display based on a CNT emitter and a‐Si TFTs

Abstract— An active‐matrix field‐emission display (AMFED), based on carbon‐nanotube (CNT) emitters and amorphous‐silicon thin‐film transistors (a‐Si TFTs), was developed. The AMFED pixels consisted of a high‐voltage a‐Si TFT and mesh‐gated CNT emitters. The AMFED panel demonstrated high performance for a driving voltage less than 15 V. The low‐cost large‐area AMFED approach using a metal‐mesh technology is proposed.