Review on miniaturized paraffin phase change actuators,valves, and pumps

During the last 15 years, miniaturized paraffin actuation has evolved through the need of a simple actuation principle, still able to deliver large strokes and high actuation forces at small scales. This is achieved by the large and rather incompressible volume expansion associated with the solid-to-liquid phase transition of paraffin. The common approach has been to encapsulate the paraffin by a stiff surrounding that directs the volume expansion toward a flexible membrane, which deflects in a directed stroke. However, a number of alternative methods have also been used in the literature. The most common applications to this date have been switches, positioning actuators, and microfluidic valves and pumps. This review will treat the historical background, as well as the fundamentals in paraffin actuation, including material properties of paraffin. Besides reviewing the three major groups of paraffin actuator applications—actuators, valves, and pumps—the modelling done on paraffin actuation will be explored. Furthermore, a section focusing on fabrication of paraffin microactuators is also included. The review ends with conclusions and outlook of the field, identifying unexplored potential of paraffin actuation.     

Design, Modeling, and Demonstration of a MEMS Repulsive-Force Out-of-Plane Electrostatic Micro Actuator

An analytical model is developed for a two-layer repulsive-force out-of-plane micro electrostatic actuator by using conformal mapping techniques. The model provides the means to establish the performance characteristics in terms of stroke and generated force of the actuator and is used to develop design and optimization rules for the actuator. Numerical simulations were conducted in order to verify the analytical model. A simple physical model is also presented that explains the mechanism for generating the repulsive force. A Multi-User-MEMS-Processes repulsive-force out-of-plane rotation micromirror is developed to experimentally verify the analytical model and to demonstrate the repulsive-force actuator's capability of driving large-size rotation plates by using surface micromachining technology. Experimental measurements show that the repulsive-force rotation micromirror with a size of 312 mum times 312 mum achieved a mechanical rotation of 0deg-2.1deg at a dc driving voltage of 0-200 V. The micromirror achieved an open-loop settling time of 2.9 ms for a mechanical rotation of 2.3deg and an open-loop bandwidth of 150 Hz (-3 dB).     

Fabrication of distributed electrostatic micro actuator (DEMA)

A distributed electrostatic micro actuator (DEMA) has been proposed. The actuator has many small driving units which consist of two wave-like insulated electrodes. Both ends of insulated electrodes are connected to each other, and the driving unit has narrow gap for deformation caused by electrostatic forces. The driving units have large area of electrodes and are distributed in series and in parallel. So, a strong electrostatic force can be obtained, and the deformation and the generated force of the actuator would be large. Macro model of the DEMA was fabricated with polyimide films, and the deformation of the actuator was measured. When the applied voltage was 200 V, the deformation ratio was 36%. A micro actuator was fabricated by use of photolithography and electroplating. The displacement of 28 μm was observed when applied voltage was 160 V. Experimental results of the micro actuator were compared with the results simulated by finite element method (FEM) analysis     

Combdrive Configuration for an Electromagnetic Reluctance Actuator

This paper presents a novel combdrive configuration of a linear magnetic microactuator. We discuss in detail the influence of the air-gap geometry on the plunger motion and give design rules to avoid pull-in behavior. This analysis results in a new configuration, which is, so far, only known for electrostatic actuators. The magnetic flux is guided over several interdigitating comb structures with moderate large gap width of 25 mum instead of one single plunger, as reported for earlier designs. This results in larger forces, scaling with the number of comb fingers, until the material reaches saturation. The new configuration linearizes the characteristics and saves driving power without sacrificing fabrication stability, which would arise from small air-gap widths. Several combdrive actuators featuring one, two, and eight comb fingers were fabricated in LIGA technology, simulated, and tested. For a driving current of 40 mA, the achievable stroke is measured to increase by 800% for eight comb fingers in comparison to one finger. Alternatively, for a given stroke, a reduction of the driving current of more than 50% is measured.     

Finite element analysis of a IBM suspension integrated with a PZT microactuator

This paper presents a piezoelectric-based microactuator concept that could provide an economical and easily integrated option for dual stage actuation used in hard disk drives (HDDs). A simple cantilever beam integrated with the PZT actuator was simulated first in order to testify the driving mechanics of the new design. A modern suspension (IBM Deskstar DTLA-307015) integrated with the developed PZT actuator was then simulated by finite element method (FEM). Theoretical dynamic and electrostatic analyses were performed to investigated the resonant frequency and displacement sensitivity. Good dynamic characteristics were obtained. Further simulation was done based on the optimized structure of the actuator/suspension assembly and results show that >1 μm tip stroke can be obtained while the driving voltage is only 20 V. A 10 V is sufficient to get >1 μm tip stroke if double layer PZT actuator is used.     

Design and pressure analysis for bulk-micromachined electrothermal hydraulic microactuators using a PCM

Paraffin wax exhibits a volumetric expansion of ∼15%, at around its melting point. By exploiting this phenomenon, high performance bulk-machined electrothermal hydraulic microactuators have been demonstrated. The microactuators have been integrated into microfluidic valves, microgrippers and micropipettes. The paraffin wax is confined within a bulk-micromachined silicon container. This container is sealed using an elastic diaphragm of PDMS, while it is heated via gold microheaters located on an underlying glass substrate. All the layers used to make up the containers are bonded together using a unique combination of overglaze paste and PDMS. The hydraulic pressure of expanding paraffin wax was determined using the deflection theory of a circular plate. For the first time, the hydraulic pressure of expanding paraffin wax was calculated using the theory of large deflections for a circular plate and measured data from the type-A microgripper. This theory has been exploited for the deflection analysis of micromachined thin elastic diaphragms. In order to calculate the hydraulic pressure, the theory of large deflections of a circular plate is calculated using the measured actuation height, the PDMS diaphragm dimension of the microgripper (type-A) and mechanical properties of the PDMS. The hydraulic pressure was calculated to be approximately 0.12 MPa. All the devices were successfully demonstrated and operated at either 10 or 15 V.     

Design of moving magnet type pickup actuator using inserted coil

Recently, the demand of the information storage devices with large storage capacity such as Blu-ray Disc and high-definition television is increased. In keeping with this trend, the optical storage devices are also required to have high data transfer rate and large storage capacity. To satisfy these requirements, the actuator for optical disc drive should have a high servo bandwidth to compensate the vibration of optical disc. The servo bandwidth is limited by some flexible modes of the actuator, thus it is essential to make these frequencies of flexible modes to high frequency region. The frequency of flexible mode depends on materials and shape. Stiff materials and simple shape is useful to increase the frequency of flexible mode. In this paper, we suggested a moving magnet type actuator having flexible modes which are happened at high frequency region. Generally, the moving magnet type actuator has an advantage to increase the frequency of flexible mode because the moving magnet type actuator has simple structure and the Young’s modulus of magnet is high. However, large moving mass and inefficiency of Electromagnetic (EM) circuit cut down driving sensitivities of actuator. To improve driving sensitivities, we designed the model with the closed EM circuit for tracking actuation. The design of experiments (DOE) procedure is applied to get proper design parameters and the variable metric method (VMM) which is a technique of optimization is used to improve driving sensitivity. The lens holder is also improved based on the optimization result of EM circuit. And to make up for the low efficiency of EM circuit, the thermal stability is checked on condition that the input current is very high. At last, the final design of moving magnet type actuator is suggested and it is verified that the driving performance and the structural stiffness of the final design is sufficient.     

A MEMS conical spring actuator array

A new MEMS conical spring actuator array is proposed. Previously, we have developed conical spring microactuators having a long stroke (180 /spl mu/m) in the out-of-plane direction. However, the maximum output force and the packing density were not satisfactory. In the present paper, mechanical and electrical models of a conical spring are described for the calculation of the maximum output force and the driving voltage. Geometrical parameters were optimized using these models and a new geometry for the actuator was derived. The new geometry incorporates a wider and thicker spring that increased the maximum output force from 0.087 mN up to 0.83 mN. The packing density was increased up to 1 actuator/mm/sup 2/ using an additional interconnect layer. In addition, the driving voltage was decreased using a thinner insulating layer. The use of an ac drive prevented the sticking of the actuator during operation. A detailed investigation of the ac drive was also performed.     

Thin-Film PZT Lateral Actuators With Extended Stroke

Many microelectromechanical system applications require large in-plane actuation forces, with stroke lengths ranging from submicrometer to tens of micrometers in distance. Piezoelectric thin films are capable of generating very large actuation forces, but their motion is not easily directed into lateral displacement in microscale devices. A new piezoelectric thin-film actuator that uses a combination of piezoelectric unimorph beams to generate lateral displacement has been developed. The piezoelectric actuators were fabricated using chemical-solution-derived lead zirconate titanate thin films. These actuators have demonstrated forces greater than 7 mN at displacements of nearly 1 $muhbox{m}$, with maximum stroke lengths at 20 V greater than 5 $muhbox{m}$ in a 500- $muhbox{m}$-long by 100-$mu hbox{m}$-wide actuator. Force and displacement capabilities can be manipulated through simple changes to the actuator design, while actuator nonlinearity can produce dramatic gains in work capacity and stroke length for longer actuators.$hfill$[2007-0298]      

Simulation study on the improvements of machining accuracy by using smart materials

This work utilizes smart material to counteract the radial disturbing cutting forces and reduce machining error in the turning process. The finite element method (FEM) is employed to explore the capability of such a method in controlling tool position. Toolpost dynamic response is investigated where the pulse width modulation (PWM) technique is launched for actuator voltage input. The result from tool response using dynamic absorber does not encourage the use of such a vibration attenuator in error elimination in the presence of the PWM voltage input. Even though increasing toolpost damping within a reasonable range shows a reduction in toolpost error, major improvement is noticed by modifying the PWM voltage level and its time duration. For error elimination, the estimate of static actuator voltage does not reflect the actual level of required dynamic applied voltage. This work also emphasizes the importance of tool bit to actuator stiffness and tool carrier (holder) to actuator stiffness in reducing tool positional error.     

Development of large-scale stacked-type electrostatic actuators for use as artificial muscles

Electrostatic actuators have the advantages of light weight, flexibility, and high energy efficiency, which make them suitable for use as artificial muscles. However, a traditional electrostatic actuator cannot generate long strokes and a high force density at the same time because such actuator would excessively widen the gap between the electrodes because of its structure. This paper presents a newly developed large-scale stacked-type electrostatic actuator (LSEA) intended for use as an artificial muscle for robots. LSEA is a multi-stacked electrostatic actuator that can be linearly contracted by the application of a voltage. It has a unique structure that prevents overextension of the gap between the electrodes. It can therefore generate a large force. The spring characteristics and the relationship between the contractive force and the stroke were experimentally determined. The findings showed that LSEA prevents the overextension of the gap between the electrodes and has a high contraction ratio that is equivalent to that of a mammalian skeletal muscle.     

Electrothermally activated paraffin microactuators

A new family of electrothermally activated microactuators that can provide both large displacements and forces, are simple to fabricate, and are easily integrated with a large variety of microelectronic and microfluidic components are presented. The actuators use the high volumetric expansion of a sealed, surface micromachined patch of paraffin heated near its melting point to deform a sealing diaphragm. Two types of actuators have been fabricated using a simple three mask fabrication process. The first device structure consists of a 9 μm thick circularly patterned paraffin layer ranging in diameter from 400 to 800 μm all covered with a 4-μm-thick metallized p-xylylene sealing diaphragm. All fabricated devices produced a 2.7-μm-peak center deflection, consistent with a simple first order theory. The second actuator structure uses a constrained volume reservoir that magnifies the diaphragm deflection producing consistently 3.2 μm center diaphragm deflection with a 3-μm-thick paraffin actuation layer. Microactuators were constructed on both glass and silicon substrates. The actuators fabricated on glass substrates used between 50-200 mW of electrical power with response times ranging between 30-50 ms. The response time for silicon devices was much faster (3-5 ms) at the expense of a larger electrical power (500-2000 mW)     

Fringing capacitance and tolerance of DRIE effect on the performance of bulk silicon comb-drive actuator

A bulk silicon comb-drive actuator with low driving voltage and large displacement is presented in this paper. The bulk silicon comb-drive actuator is fabricated by a simple bulk micromachining process based on the low temperature Au–Au bonding technology. A cascade folded beam is designed to improve the displacement of comb-drive actuator at low driving voltages. The instability of the whole system decreases by utilizing unequal wide comb fingers design. The fringing capacitance and the fabrication tolerances together with their effects on the performances of the comb-drive actuators are also discussed. The measurement results show that the capacitance change rate and the displacement change rate of the comb-drive actuator are 1.5 fF/V² and 0.125 μm/V², respectively. The displacement of the actuator can reach 28.5 μm at 15 V driving voltages. The experimental results of the comb-drive actuator are in good agreement with the modified theoretical predictions.

     

新型动磁式直线振荡执行器的动子位移自传感

针对一种新型无内定子动磁式直线振荡执行器,在建立其机电系统数学模型的基础上,提出一种基于全维状态观测器的动子位移自传感算法。通过对执行器输入电压和输出电流信号的处理和计算来估算动子位移。仿真和实验结果均表明:在变压变频控制方式下,该算法能实现不同电气驱动频率下的动子位移自传感;采用该算法进行行程估算的绝对误差最大值为0.32 mm,相对误差最大值为2.6%。此算法可以满足直线压缩机和直线泵类负载的变行程控制要求。     

Electrothermally Actuated RF MEMS Switches Suspended on a Low-Resistivity Substrate

This paper presents an electrothermally actuated lateral resistive-contact switch for application to low-gigahertz-band communication systems. It was manufactured on a standard low-resistivity substrate, and its RF performance was improved by suspending the structures 25 mum from the substrate, which is a strategy for future integration with active devices in the system-on-chip concept. Measured insertion losses are -0.26 dB at 1 GHz and -0.65 dB at 6 GHz, return losses are -29 dB at 1 GHz and -25 dB at 6 GHz, and isolations are -52 dB at 1 GHz and -26 dB at 6 GHz. The device is driven by a metal electrothermal actuator, which achieves large displacements and contact forces at much lower temperatures than traditional polysilicon electrothermal actuators. The RF power handling characteristics are also addressed and measured.     

An Electrothermal Tip–Tilt–Piston Micromirror Based on Folded Dual S-Shaped Bimorphs

This paper presents the design, optimization, fabrication, and test results of an electrothermally actuated tip-tilt-piston micromirror with a large optical aperture of 1 mm. The fabrication of the device is a combination of thin-film surface micromachining and bulk silicon micromachining based on silicon-on-insulator wafers. The device has 3-DOF of actuations, including rotations around two axes in the mirror plane, and out-of-plane piston actuation. The micromirror shows an optical scan range of plusmn30^deg about both x- and y-axes and displaces 480 mum in the z-axis, all at dc voltages that are less than 8 V. Dynamic testing of the micromirror shows that the thermal response time of each actuator is about 10 ms. Resonant frequencies of the piston and rotation motion are 336 and 488 Hz, respectively. The unique structural design of the device ensures that there is no lateral shift for the piston motion and no rotation-axis shift for the rotation scanning. With the large tip-tilt-piston scan ranges and low driving voltage, this type of device is very suitable for biomedical imaging and laser beam steering applications.     

Feasibility study of thermal positioning control actuator for hard disk drives

We have developed an actuator with a heater embedded in the head slider. This actuator, called the thermal positioning control (TPC) actuator, is integrated next to the read write elements in the head slider. By applying electric power to the TPC actuator, the actuator causes thermal expansion and the read write elements then move in the positioning direction. We demonstrated its feasibility in terms of the stroke and frequency response. We designed and fabricated head sliders that integrated a TPC actuator and a read element. We also conducted an experimental evaluation at the spin-stand. The results of 5?nm stroke and a 5-kHz bandwidth were experimentally demonstrated. These results showed the feasibility of the TPC actuator for future 550?kilo?track per inch class hard disk drives.     

A layered modular polymeric <Emphasis Type="Italic">μ</Emphasis>-valve suitable for lab-on-foil: design,fabrication, and characterization

Cost-effective fabrication of microfluidic networks require that all components have to be manufactured with up-scalable processes such as reel-to-reel fabrication of foil-based devices. A microvalve design must take into account functional requirements together with manufacturing feasibilities. Here we present the development of a modular polymeric laser structured microvalve. The complete valve structure is designed to be used in a bendable lab-in-foil system. The modular microvalve design consists of three layers: an actuator layer, an interfacing membrane, and a passive microchannel layer to be separately fabricated and then stacked. Different actuator layer concepts are compared out of which a thermal actuation scheme generating sufficient stroke using phase changing paraffin is chosen. The passive layer is designed with a shallow and sufficiently smooth spherical cavity that acts as the valve seat from which paraffin material can reliably retract during solidification. The shape and dimensions of the shallow cavity are derived from the natural membrane deflection and from the channel cross section. It is not essential that all the paraffin within the actuator cavity to be molten for valve closure allowing a high degree of assembly tolerance and inherent sealing of actuator cavity. All the module layers in the current prototype are structured using 3D laser fabrication processes but mass-fabrication methods like reel-to-reel hot-embossing are foreseen as well. A prototype microvalve stack was assembled with a thickness of 1.1 mm which could be further reduced to meet the requirements of extremely flexible lab-on-foil systems. The closed valve is tested up to a pressure of 3 kPa without any measurable leakage. The dynamics of valve closure is evaluated by a new optical characterization method based on image processing of color micrograph sequences taken from the transparent valve.     

Deflection of coupled elasticity–electrostatic bimorph PVDF material: theoretical,FEM and experimental verification

Piezoelectric materials have wide applications in the field of mechanical, aerospace and civil engineering because of its voltage dependent actuation. Piezoelectric material goes through voltage generation whenever deflection is induced in it and vice versa. Piezoelectric bimorph beam has been widely used for sensing and actuating. In the actuation mode, an electric field is applied across the beam thickness, one layer contracts while the other expands. This results in the bending of the entire structure and tip deflection. In the sensing mode, the bimorph is used to measure an external load by monitoring the piezoelectric induced electrode voltages. In this research work, a 2D bimorph piezoelectric actuator model having two layers made of polyvinylidene fluoride (PVDF) material was developed to examine the inverse piezoelectric effect. Finite element analysis (FEA) was carried out on specially designed actuator model by using MATLAB Partial Differential Equation (PDE) Toolbox™. Theoretical analysis has been carried out to measure the tip deflection under applied electric field. The laboratory test was performed to investigate the deformation behavior of piezoelectric actuator. It is observed that, more the electric field applied, more the material would be deformed in a particular direction. The experimental results are in good agreement with numerical results.

     

A micromachined reaction force actuator (RFA) for a nanomanipulator preparation

A reaction force actuator (RFA) was fabricated to translate a microstage with nanostep movement, and its performance was experimentally evaluated using an optical fiber based built-in microinterferometer. The proposed RFA consists of a shuttle mass, movable electrode, fixed electrode, springs, and spring anchor, all of which reside on the movable substrate. The RFA placed on the platform is free to move when the driving force is larger than the static friction. The fixed electrodes are gold-wired to the external electrodes on the platform covered with a dielectric layer for electrical isolation. When external voltage is applied to the electrodes, the springs experience deflections, and the electrostatic force and restoring force react on the movable substrate through the spring anchor and the fixed electrode, respectively. If the driving voltage is large enough that the resultant force overcomes the friction from the platform, the RFA including the movable substrate can make a displacement with no physical collision between the movable and fixed electrodes. In order to suppress the drift motion due to external noise, electrostatic pressure was applied between the movable substrate and the platform on which a 100-/spl mu/m-thick dielectric thin film is positioned. The nanomotion of the fabricated actuator was evaluated with various voltages using an optical fiber interferometer. The minimum step movement 1.21/spl plusmn/0.24 nm was experimentally obtained at the driving voltage of 18 V, and the estimated total displacement was 450 nm at the highest affordable driving voltage of 85 V.