不同沉积温度下CrCN涂层的力学性能

使用磁控溅射技术在304不锈钢表面制备CrCN涂层,研究了沉积温度(200、250、300、350和400 ℃)对涂层结构及力学性能的影响。研究表明,沉积温度为250 ℃时,涂层的晶粒尺寸及表面粗糙度最大,但随着沉积温度的进一步升高,涂层的晶粒逐渐细化,表面粗糙度明显下降;同时涂层硬度伴随沉积温度的升高出现先增大后减少的趋势,沉积温度为350 ℃时,薄膜具有最高的硬度(22.85 GPa),抗弹性形变和抗塑性形变能力最好,体现出优异的力学性能。     

基体偏压对电弧离子镀AlCrSiON涂层结构和热稳定性的影响

为研究基体偏压对AlCrSiON纳米复合涂层结构、力学性能和热稳定性的影响规律及机制,采用电弧离子镀技术在硬质合金基体上沉积AlCrSiON涂层。利用扫描电子显微镜(SEM)、X射线衍射仪(XRD)、透射电子显微镜(TEM)、纳米压痕仪(划痕仪)研究涂层组织结构和力学性能;通过真空退火试验研究涂层的高温稳定性。结果表明:AlCrSiON涂层为致密柱状晶结构,并主要由c-(Al,Cr)N和c-(Al,Cr)(O,N)两相组成,呈现出纳米复合结构。随着偏压的升高,涂层表面的颗粒数目和尺寸减少,组织结构更加致密;硬度和弹性模量均呈现出先增加后减小的趋势,当偏压为–80 V时分别达到最大值30.1 GPa和367.9 GPa。涂层具有良好的高温稳定性,不同偏压下沉积的AlCrSiON涂层经800~950℃热处理后均能够保持良好的结构稳定性及力学性能,但经1 100℃热处理后涂层发生相分解并引发组织结构变化,导致涂层硬度减小。     

沉积温度对CrB_2涂层结构与性能的影响

为了研究沉积温度对涂层微结构与力学性能的影响,采用直流磁控溅射技术制备了CrB_2涂层。通过XPS、XRD、SPM、SEM、HRTEM、纳米压痕仪和维氏压痕仪分别分析了涂层的成分、结构、微观形貌和力学性能。结果表明:在不同沉积温度下,CrB_2涂层均由CrB_2和少量Cr相组成。涂层具有致密的纳米柱状结构,其直径大约为7nm,且沿着生长方向贯穿整个涂层截面。随沉积温度升高,涂层晶体取向由(101)和(001)的混合取向逐渐转变为(001)择优取向,涂层由纤维状结构转变为柱状晶结构,且柱状晶尺寸随沉积温度的增加逐渐细化,致密化程度增加。涂层的力学性能随沉积温度的升高而显著增加;当沉积温度达到400℃时,涂层具有最高硬度(50.7±2)GPa和最高弹性模量(513.6±10)GPa。微观结构和力学性能随沉积温度的演变归因于沉积原子运动的逐渐增强和结构的致密化。     

基体温度对磁控溅射CrN涂层微观结构和性能的影响

采用直流反应磁控溅射技术在1Cr18Ni9Ti奥氏体不锈钢表面沉积Cr N涂层,利用SEM、XRD、显微硬度仪、划痕仪和摩擦磨损试验仪研究了基体温度对涂层组织结构、力学性能和摩擦磨损性能的影响。结果表明,Cr N涂层主要呈现出fcc结构,并存在(111)晶面择优取向,基本温度为100℃时制备的涂层(111)和(220)取向竞争生长,300℃时制备的涂层(200)晶面生长增强;涂层的表面晶粒主要呈现三棱锥形貌;基体温度对涂层的力学性能影响较大,300℃时制备的涂层显微硬度和结合力的最高值分别达到1900 HV和50 N;涂层磨损率随基体温度的升高而降低。     

氧含量对高功率脉冲磁控溅射AlCrSiON涂层高温摩擦学性能的影响

由于真空度的要求,制备氮化物涂层时将不可避免的会有氧的存在,因此了解氧元素对涂层性能的影响至关重要。采用高功率脉冲磁控溅射(HIPIMS)技术在Ar/N2/O2混合气氛下制备AlCrSiON涂层,研究氧含量(0%~30.4%,原子数分数)对涂层结构、力学性能和摩擦学性能的影响及作用机制。结果表明,AlCrSiN涂层由fcc-Cr N、β-Cr2N和hcp-Al N组成,AlCrSiON则由(Cr,Al)N、立方Cr2N和(Cr,Al)(O,N)组成。AlCrSiN涂层硬度为(14.3±1.8)GPa,随着氧含量增加至24.3%,涂层硬度增加至(20.1±3.0)GPa;继续增加氧含量则将导致涂层硬度下降。当环境温度由室温增加至400℃,涂层摩擦因数由0.6~0.7增加至0.9;温度升至800℃,涂层摩擦因数降至0.4。氧含量对涂层高温摩擦因数的影响较小,对涂层的磨损率却有着重要影响。当氧含量为30.4%时,AlCrSiON涂层具有最优耐磨损性能。     

加热温度对Al-Si涂层热成形钢组织及性能的影响

利用粗糙度仪、扫描电镜、硬度计、辉光放电原子发射光谱仪等检测方法,研究分析了热冲压成形工艺过程中的加热温度对Al-Si涂层22MnB5热成形钢组织及性能的影响。结果表明,随着加热温度的升高,Fe沿垂直于表面方向由热成形钢基体向Al-Si涂层表面的迁移量逐渐增大,O沿垂直于表面方向由Al-Si涂层表面向热成形钢基体的迁移量逐渐增大,且迁移的最大深度约为2.80 μm。Fe沿垂直于表面方向由热成形钢基体向Al-Si涂层表面的迁移量直接决定了Fe-Al-Si相的形态、生成位置及界面结合层厚度。随着加热温度的升高,Al-Si涂层表面粗糙度R_a、峰值计数R_pc值先增大后减小;当加热温度为930 ℃时,涂层表面粗糙度R_a达到最大值1.89 μm,峰值计数R_pc值达到最大值218。随着加热温度的升高,Al-Si涂层总厚度从27.78 μm增加至40.46 μm,界面结合层厚度从1.08 μm增加至15.11 μm。当加热温度为930 ℃时,热成形钢基体的硬度达到最大值505 HV0.2。     

基片偏压占空比对多弧离子镀TiAlSiN涂层形貌及力学性能的影响

目的采用多弧离子镀膜技术在硬质合金基体表面沉积TiAlSiN涂层,研究占空比参数对TiAlSiN涂层的表面形貌和力学性能的影响。方法使用扫描电子显微镜对涂层的形貌进行观察,使用自动划痕仪、纳米压痕仪对涂层的力学性能进行检测。结果占空比在10%~70%范围内增加,离子轰击得到加强,涂层表面得到很好的改善,大颗粒与微坑缺陷数量逐渐减少。当占空比增大到90%时,大颗粒和微坑缺陷数量反而增多。结论随着占空比的增加,纳米硬度、弹性模量和涂层结合力均先增大后减小,占空比为50%时,分别达到最大值48.15 GPa、518.24 GPa、50.55 N。     

固态输送ZrCl4低压化学气相沉积制备ZrC涂层的特征

采用ZrCl4-CH4-H2-Ar反应体系、固态输送ZrCl4粉末低压化学气相沉积(CVD)制备ZrC涂层。研究温度对低压化学气相沉积ZrC涂层物相组成、晶体择优生长、涂层表面形貌、断面结构、涂层生长速度和沉积均匀性等方面的影响。结果表明:不同温度下沉积的涂层主要由ZrC和C相组成;随着温度的升高,ZrC晶粒(200)晶面择优生长增强,颗粒直径增大,表面致密性增加,沉积速率上升;涂层断面结构以柱状晶为主;随着离进料口距离的增加,涂层的沉积速率逐渐减小;1 500℃时,沉积系统的均匀性比1 450℃时的差。     

还原性气氛制备Zr-B-N纳米复合涂层的结构及性能分析

目的 制备高纯度、超硬、高耐磨的Zr-B-N纳米复合涂层。方法 在反应气体中掺入还原性气体H2,利用氢元素强还原性去除真空室以及反应气氛中残留的O杂质,采用脉冲直流磁控溅射技术,通过调节N2+H2混合气体流量制备高纯度Zr-B-N涂层。利用扫描电镜、纳米压痕仪、摩擦磨损试验机等设备对涂层的微观结构、力学性能和摩擦性能进行测试,并分析其变化机理。结果 随着N2+H2流量的增加,Zr-B-N涂层内N含量在N2+H2流量为10 mL/min时达到最高。从截面形貌可以看出,涂层结构由粗大的柱状晶逐步转变为玻璃状细小柱状晶结构,涂层更加致密,呈现典型的纳米复合结构。微量H元素的掺入,减少了涂层制备过程中O相关化学键的生成,制备出的Zr-B-N涂层晶粒的生长环境得到改善。在N2+H2流量为 10 mL/min时,涂层的硬度和弹性模量达到最大值40.26 GPa和532.98 GPa,临界载荷最大约为60.1 N,摩擦系数较小,为0.72,磨损率在此时最低,为1.12×10^–5mm³/(N.m)。结论 当N2+H2流量为10 mL/min时,制备出了超硬Zr-B-N纳米复合涂层。适量氢元素的掺入,充分去除真空室内氧杂质,改善了涂层中晶粒的生长环境,有效地提高涂层的硬度及摩擦磨损性能。     

高功率调制脉冲磁控溅射沉积TiAlSiN纳米复合涂层对钛合金基体抗氧化性能的影响研究

目的 研究Ti6Al4V基TiAlSiN涂层在800 ℃下的抗循环氧化性能。方法 采用高功率调制脉冲磁控溅射技术,通过调节N2/Ar的流量比fN2,在Ti6Al4V合金和Si(100)上沉积了一系列不同Si含量的TiAlSiN涂层。通过X射线衍射仪、扫描电子显微镜、电子探针、透射电镜和纳米压痕仪,表征了TiAlSiN涂层的成分、相组成、微结构和硬度,并通过X射线衍射仪和扫描电子显微镜,进一步对TiAlSiN涂层在800 ℃下循环氧化后的微观结构和形貌进行分析。结果 脉冲平均功率为2 kW时,fN2由10%增至30%,TiAlSiN涂层的Si含量(以原子数分数计)由6.1%增加至16.4%,涂层中Ti和Al含量则相应地降低。当fN2为10%时,TiAlSiN涂层呈现典型的X射线非晶结构特征,涂层中N含量(以原子数分数计)约为47%;当fN2为30%时,TiAlSiN涂层呈现TiAlN和非晶相的混合结构。TEM结果表明,涂层中TiAlN晶粒尺寸约为5 nm并均匀镶嵌在非晶相上。所有沉积于Si基底上的TiAlSiN涂层均具有相近的纳米硬度、弹性模量及残余应力,分别为17 GPa、225 GPa和–300 MPa。选取fN2为10%和25%,溅射具有不同氮含量和特征微结构的TiAlSiN涂层作为Ti6Al4V合金防护涂层,研究涂层的抗循环氧化性能。在800 ℃高温循环氧化70 h后,TiAlSiN涂层保护的合金样品较原始样品呈现更优异的抗氧化性能,且fN2为25%制备的高Si含量TiAlSiN涂层较fN2为10%制备的涂层具有更为优异的抗循环氧化性能。循环氧化后,TiAlSiN氧化层结构完整致密并呈现柱状晶特征,氧化层由上至下分别形成富α-Al2O3、a-TiO2及r-TiO2三层结构。结论 高Si含量的TiAlSiN涂层具有更低的氧化速率,涂层的纳米复合结构和低压缩应力是其抗循环氧化能力提高的主要原因。     

Plasma Sprayed Coating Using Mullite and Mixed Alumina/Silica Powders

Plasma sprayed ceramic coatings are widely used for thermal barrier coating applications. Commercially available mullite powder particles and a mixture of mechanically alloyed alumina and silica powder particles were used to deposit mullite ceramic coatings by plasma spraying. The coatings were deposited at three different substrate temperatures (room temperature, 300?°C, and 600?°C) on stainless steel substrates. Microstructure and morphology of both powder particles as well as coatings were investigated by using scanning electron microscopy. Phase formation and degree of crystallization of coatings were analyzed by x-ray diffraction. Differential thermal analysis (DTA) was used to study phase transformations in the coatings. Results indicated that the porosity level in the coatings deposited using mullite initial powder particles were lower than those deposited using the mixed initial powder particles. The degree of crystallization of the coatings deposited using the mixed powder particles was higher than that deposited using mullite powder particles at substrate temperatures of 25 and 300?°C. DTA curves of the coatings deposited using the mixed powders showed some transformation of the retained amorphous phase into mullite and alumina. The degree of crystallization of the as sprayed coatings using the mixed powder particles was significantly increased after post deposition heat treatments. The results indicated that the mechanically alloyed mixed powder can be used as initial powder particles for deposition of mullite coatings instead of using mullite powders.     

沉积温度对高性能TiAlN涂层微观结构和力学性能的影响

采用真空电弧离子镀（AIP）技术在不同沉积温度下TiAlN涂层,用于高性能制造,并研究了沉积温度与表面性能的关系。结果表明,由于离子轰击作用,表面大颗粒随沉积温度的升高而减少。随着沉积温度的升高,涂层表面的晶粒尺寸先急剧减小后逐渐增大。此外,沉积温度对合成涂层的相组成和化学成分影响不大。随着沉积温度的升高,硬度和粘结强度先迅速增加,后逐渐降低。当沉积温度在450℃左右时,沉积的TiAlN涂层硬度最高,粘结强度最大。上述现象的发生机理与沉积过程中表面与界面之间的微观组织和残余应力的变化有关。合成的涂层在高达900℃的空气中具有良好的热稳定性。     

Microstructure and tribological properties of low-friction composite MoS2(Ti,W) coating on the oxygen hardened Ti-6Al-4V alloy

Duplex surface treatment, which combines the oxygen diffusion hardening with a deposition of low friction MoS₂(Ti,W) coating, was applied to improve the Ti-6Al-4V alloy load bearing capacity and tribological properties. The coating (3.1 μm thick) was deposited on the oxygen hardened alloy by magnetron sputtering. Microstructure characterisation was performed by scanning- and transmission electron microscopy methods, as well as X-ray diffractometry. The results of micro/nanostructural analyses performed by high-resolution transmission electron microscopy showed that the coatings are composed of MoS₂ nanoclusters embedded in an amorphous matrix. Some Ti α, W, and Ti₂S nanocrystals were also found in the coating microstructure. The wear resistance and friction coefficient of the hardened oxygen, as well as the coated alloy, was investigated at room temperature (RT), 300 °C, and 350 °C. The presence of the MoS₂(Ti,W) coating decreases the friction coefficient from 0.85 for the oxygen hardened alloy to 0.15 (at RT) and 0.09 (at 300 °C and 350 °C) for the coated one. The coating essentially increases the wear resistance of the alloy at RT and 300 °C. It was found that the wear resistance of the coated alloy decreased significantly during the wear test performed at 350 °C.     

Oxidation of double glow plasma discharge coatings of iridium on molybdenum for liquid fuelled rocket motor casings

Abstract

Dense and uniform coatings of iridium (Ir), 5–7 μm in thickness, were deposited onto molybdenum (Mo) substrates by double glow plasma discharge in the temperature range of 800–850°C at 35 Pa. During deposition, the Mo substrate was biased at a voltage of ?300 V while the 99·9% Ir target was at a bias voltage of ?800 V. After deposition, the Ir coating was ablated using an oxyacetylene torch with a flame temperature of ～2000°C to determine the high temperature stability of the coated substrate. The morphology and microstructure of the Ir coating were observed using scanning electron microscopy while the composition and structure were measured using X-ray diffraction and energy dispersive spectroscopy. The thickness of the as deposited Ir coating was uniform and the interface between the coating and the substrate exhibited excellent adhesion with no evidence of delamination and cracks. After exposure to the flame, the surface of the as ablated coating presented imperfections including pores, bulges and cracks; however, the Ir coating retained sufficient adhesion to limit the weight loss of the Ir coated Mo substrate to 10 mg cm^?2 s^?1.     

Measuring Substrate Temperature Variation During Application of Plasma-Sprayed Zirconia Coatings

Substrate temperature variation was measured during plasma spraying of ZrO₂ 7% Y₂O₃ powder using fast-response thermocouples embedded in the stainless steel surface. Coatings were deposited with both stationary and moving torches. The substrate was either kept at room temperature at the start of coating deposition or pre-heated to 270-300 °C. Peak temperature during spraying reached 450 °C for a surface initially at room temperature, and 680 °C for a surface preheated to 300 °C before coating deposition. Preheating the substrate reduced coating porosity by approximately 40%. The porosity at the center of the deposit was significantly lower than that at its periphery since particle temperature and velocity were lower at the edges of the plasma plume than along its axis. When a coating was applied with a moving torch the substrate temperature did not increase above 450 °C, at which temperature heat losses to the ambient equalled the heat supplied by the plasma plume and particles. Coating porosity decreased with distance from the substrate. As sequential layers of coating are applied surface temperature increases and roughness decreases. Both of these factors suppress break-up of particles landing on the substrate and thereby reduce coating porosity.     

HiPIMS沉积光电薄膜研究进展:放电特性和参数调控

高功率脉冲磁控溅射(HiPIMS)技术具有离化率高、等离子体密度高、沉积温度低、薄膜结构致密等优点,与沉积超硬耐磨涂层相比,HiPIMS技术在光电薄膜沉积中的应用相对较少,且HiPIMS镀膜过程中涉及工艺参数较多,工艺参数的选择直接影响着沉积薄膜的结构和性能。基于这两个问题,系统梳理HiPIMS在光电薄膜沉积中放电的时空演变特性,重点介绍HiPIMS技术在光电薄膜沉积过程中的关键工艺参数,包括峰值功率密度、衬底材料、掺杂、偏置电压等,对薄膜结构和性能的影响规律,最后展望HiPIMS技术在光电薄膜沉积中的应用前景与发展趋势。     

Innovation of Ultrafine Structured Alloy Coatings Having Superior Mechanical Properties and High Temperature Corrosion Resistance

High temperature protection requires full coating density, high adhesion, minor oxide inclusions, and preferably fine grains, which is not achievable in most thermal spray processes. High velocity oxygen fuel (HVOF) thermal spray process has been applied extensively for making such coatings with the highest density and adhesion strength, but the existence of not melted or partially melted particles are usually observed in the HVOF coatings because of relatively low flame temperature and short particle resident time in the process. This work has investigated the development of an innovative HVOF process using a liquid state suspension/slurry containing small alloy powders. The advantages of using small particles in a HVOF process include uniform coating, less defective microstructure, higher cohesion and adhesion, full density, lower internal stress, and higher deposition efficiency. Process investigations have proven the benefits of making alloy coatings with full density and high bond strength attributing to increased melting of the small particles and the very high kinetic energy of particles striking on the substrate. High temperature oxidation and hot corrosion tests at 800 °C have demonstrated that the alloy coatings made by novel LS-HVOF process have superior properties to conventional counterpart coatings in terms of oxidation rates and corrosion penetration depths.     

Effect of Thermal Annealing on Tribological and Corrosion Properties of DLC Coatings

In this study, the mechanical, tribological, and corrosion properties of annealed diamond-like carbon (DLC) coatings on M2 steel with various annealing temperatures were investigated. The results indicated that DLC coating on M2 steel annealed at 500 °C had the worst performance. Both corrosion polarization resistance and wear resistance against ceramic alumina counterface of DLC coatings decreased with increasing annealing temperature, which can be due to the decline of the coating hardness after the thermal treatment. When sliding against aluminum counterface material, the DLC annealed at 600 °C had the lowest coefficient of friction (cof) and wear resistance due to its high graphitic structure and low hardness. Compared with the original coating, cofs increased for coatings treated at below 300 °C; however, further increasing the annealing temperature led to the decrease of the cofs. Little material attachment occurred between DLC coatings (original and annealed) and counterface materials (both alumina and aluminum balls) except for the DLC annealed at 600 °C, in which coating material transferred to the surface of counterface ball.     

Characterisation and corrosion resistance of Zn–Mn coatings electrodeposited from acidic chloride bath

Zn–Mn alloy coatings were galvanostatically electrodeposited from an acidic chloride bath. Effects of deposition current density, pH and temperature on surface morphology, microstructure and corrosion resistance of Zn–Mn coatings were studied. The coatings deposited at 10, 50 and 100 mA cm^?2 had a single η-Zn phase structure. However, a dual phase structure of η-Zn and ?-Zn–Mn with higher Mn content was found for the coatings deposited at 200 mA cm^?2. The dual structure degraded the corrosion resistance of the coatings. The highest corrosion resistance was achieved for the Zn–Mn coating deposited at 100 mA cm^?2, pH 4·9 and 25°C. This coating contained 4·1 wt-%Mn and showed a unique surface morphology consisting of randomly arranged packs of very thin platelets, laid perpendicular to the surface and provided a high compactness deficient free structure.