多量子阱RCE光探测器的响应及调谐特性的实验研究

报道了在国内首次研制成功的 Ga As/ A1Ga As材料系的多量子阱结构的谐振腔增强型(RCE)光探测器。实验测得器件的响应具有明显的波长选择特性 ,其峰值响应波长位于 84 3nm附近 ,半峰值宽度 6 .96 nm,并初步观察到了器件的电调谐特性。经进一步优化改进 ,该器件有望成为窄线宽、可调谐的新型解复用型光探测器。     

多量子阱光开关器件的激子吸收及光调制特性

我们分析了 Ga As/Al Ga As半导体多量子阱 (MQW)光开关器件的室温激子吸收行为及光调制特性 ,优化设计了多量子阱结构 ,研制出常通型和常关型两种类型光开关器件 ,并对器件的光调制特性进行了测量与研究。实验得出的结论与理论计算相符合 ,常通型器件对比度约为 10∶ 1;常关型器件对比度约为 4∶ 1。     

InAs/GaSbⅡ类超晶格红外探测器量子效率计算研究

首先分析了量子效率计算的相关理论,然后分析利用红外中波In As/Ga SbⅡ类超晶格材料进行光伏探测器研制,在对器件进行电学性能测试及光谱响应测试基础上,利用理论分析和测试数据计算出研制器件的实际电流响应率,再将实际电流响应率与理论分析的电流响应率相比,同时消除芯片表面Si O2钝化层光学透过率的影响,计算出器件对红外波段2~6μm辐射响应的量子效率最高可达35%,达到了国外同类型器件响应的量子效率指标。本文的研究为评价In As/Ga SbⅡ类超晶格红外探测器的光电转换性能提供了一种有效的方法。     

InGaAs/GaAs多量子阱SEED面阵结构特性与设计

讨论了谐振腔中的 DBR对 In Ga As/ Ga As多量子阱 SEED面阵光反射特性的影响 .采用 In Ga As/ Ga As作为多量子阱 SEED器件的有源区 ,从而获得了 980 nm工作波长 .设计和分析了 In Ga As/ Ga As多量子阱 SEED中的一种用于倒装焊的新型谐振腔结构 .多量子阱材料是用 MOCVD系统生长 ,利用微区光反射谱、PL 谱以及 X射线双晶衍射对多量子阱材料进行了测量和分析 ,测量结果表明多量子阱材料具有良好的质量 ,证明了器件结构的设计和分析是准确的     

可见增强的32×32元平面型InGaAs/InP面阵探测器

为了实现In Ga As探测器响应波段向可见增强,在传统的外延材料中加入一层In Ga As腐蚀阻挡层,制备了32×32元平面型In Ga As面阵探测器,采用机械抛光和化学湿法腐蚀相结合的方法,去除了In P衬底.结果表明,探测器的响应波段为0.5~1.7μm,室温下在波长为500 nm处的量子效率约为16%,850 nm处量子效率约为54%,1 550 nm处量子效率约为91%.暗电流大小与衬底减薄之前基本保持一致.理论分析了材料参数对器件量子效率的影响,为进一步优化可见波段探测器的量子效率提供了依据.     

RCE光电探测器顶部DBR的优化

对研制的VCSEL结构外延片制成的谐振腔增强型（简称RCE）光电探测器进行了物理分析和实验研究,由于VCSEL与RCE光电探测器对谐振腔反射镜的反射率要求不同,通过腐蚀VCSEL器件顶部DBR,改变顶镜反射率,能够得到量子效率峰值和半宽优化兼容的RCE光电探测器,实现VCSEL与RCE探测器的单片集成．     

1064nm RCE探测器光电响应特性分析

对1064nm谐振腔增强型(RCE)光电探测器(PD)的光电响应特性进行了分析研究.利用MBE生长技术得到有源区分别为量子阱和量子点的1064nm RCE探测器的外延片,并对制作的探测器进行了各种光电特性测试.结果表明量子阱结构的RCE探测器量子效率峰值达到57%,谱线半宽6～7nm,峰值波长1059nm;而量子点结构的RCE探测器量子效率峰值达到30%,谱线半宽5nm,峰值波长1056nm.通过分析量子效率和吸收系数之间的关系,对两种结构器件的吸收进行了比较,发现虽然量子点探测器的吸收小,但通过合理设计共振腔等方法也可以达到较高的量子效率.两种结构的器件都有很好的I-V特性.     

1064nm RCE探测器光电响应特性分析

对1064nm谐振腔增强型（RCE）光电探测器(PD)的光电响应特性进行了分析研究．利用MBE生长技术得到有源区分别为量子阱和量子点的1064nm RCE探测器的外延片,并对制作的探测器进行了各种光电特性测试．结果表明量子阱结构的RCE探测器量子效率峰值达到57%,谱线半宽6～7nm,峰值波长1059nm;而量子点结构的RCE探测器量子效率峰值达到30%,谱线半宽5nm,峰值波长1056nm．通过分析量子效率和吸收系数之间的关系,对两种结构器件的吸收进行了比较,发现虽然量子点探测器的吸收小,但通过合理设计共振腔等方法也可以达到较高的量子效率．两种结构的器件都有很好的Ｉ-Ｖ特性．     

RCE光电探测器顶部DBR的优化

对研制的 VCSEL 结构外延片制成的谐振腔增强型 (简称 RCE)光电探测器进行了物理分析和实验研究 ,由于 VCSEL 与 RCE光电探测器对谐振腔反射镜的反射率要求不同 ,通过腐蚀 VCSEL 器件顶部 DBR,改变顶镜反射率 ,能够得到量子效率峰值和半宽优化兼容的 RCE光电探测器 ,实现 VCSEL 与 RCE探测器的单片集成 .     

非对称异质波导半导体激光器结构

提出了一种非对称异质波导半导体激光器外延结构,即通过优化选择材料体系和结构厚度,对器件外延层的P侧限制结构和N侧限制结构分别设计,从而降低器件的电压损耗,使其满足高输出功率以及高的电光转换效率的要求.从载流子的输运和限制等微观机制出发,对器件的主要输出特性进行了理论分析和数值模拟,并以此为根据设计和制作了一种1060 nm In Ga As/Ga As单量子阱非对称异质波导结构半导体激光器,并对器件的主要输出特性进行了测试.实验结果表明,非对称异质结构是降低器件的电压降、增大限制结构对注入载流子的限制,提高半导体激光器电光转换效率的有效措施.     

谐振腔增强型光探测器的高速响应性能研究

高速长波长光探测器是高速光纤通信系统和网络的关键器件，它要求光探测器具有宽的频率响应带宽和高量子效率。常用的PIN光探测器由于量子效率和高速性能均受到吸收层厚度的牵制，使得二者相互制约，成为一对矛盾。谐振腔增强型(RCE)光探测器为这一矛盾的解决提供了有效的方案。基于谐振腔增强型光探测器的实际设计和制作模型，分析了器件吸收层中的光场分布，并将其运用于载流子的连续方程，从理论上详细地分析了器件的高速响应特性，给出了计算结果。针对研制的高速长波长谐振腔增强型光探测器，进行了理论分析和实际器件测试的结果比较，得到了比较一致的结果。     

新型三腔谐振腔增强型光探测器的理论分析和数值模拟

提出了一种新的谐振腔增强型 (RCE)光探测器结构 ,它将器件结构中的谐振腔分为三个子腔。分析表明 ,采用这种新结构的光探测器在保留了 RCE光探测器优点的同时 ,还实现了器件量子效率及其光谱响应线宽之间制约关系的解耦 ,因而可以同时获得窄的光谱响应线宽 (<1 nm) ,高的量子效率 (>90 % )和高的响应速度。该器件可望在密集波分复用 (DWDM)光通信系统中得到广泛应用     

基于双吸收结构的谐振腔增强型光探测器

为了实现对传统谐振腔增强型（RCE）光探测器的优化,提出了一种具有双吸收结构的RCE光探测器。首先从理论上分析了它的量子效率和高速响应特性,然后将其与传统的RCE光探测器进行了比较。结果表明,双吸收结构RCE光探测器在保持高速响应特性的基础上,其量子效率较传统RCE光探测器得到了进一步提高。实验上成功制备了双吸收结构的...     

Optimization procedure for the design of ultrafast, highlyefficient and selective resonant cavity enhanced Schottky photodiodes

An expression of quantum efficiency for high-speed resonant-cavity-enhanced (RCE) Schottky photodiodes is derived. This expression includes the structural and the physical parameters of the photodetector and takes into account the parameters of the metallic Schottky mirror and the wavelength dependence of the reflectivities. The metal layer thickness sets the maximum achievable quantum efficiency as it decays exponentially with it. The antireflection coating layer, on the other hand, determines the photodetector selectivity and the optimum absorption layer thickness that maximizes its quantum efficiency. An algorithm for the design and optimization of RCE Schottky photodetectors has been developed. Theoretical values of 647 GHz and 129 GHz were obtained, respectively, for the carrier-transit time limited 3-dB bandwidth and bandwidth-efficiency product for an RCE Schottky photodetector with a 0.02 μm gold layer     

Resonant cavity-enhanced (RCE) photodetectors

The photosensitivity characteristics of resonant cavity-enhanced (RCE) photodetectors are investigated. The photodetectors were formed by integrating the active absorption region into a resonant cavity composed of top and bottom (buried) mirrors. A general expression for quantum efficiency for RCE photodetectors was derived taking the external losses into account. Drastic enhancement in quantum efficiency is demonstrated at resonant wavelengths for a high quality factor Q cavity with a very thin absorption layer. An improvement by a factor of four in the bandwidth-efficiency product for RCE p-i-n detectors is predicted. Molecular beam epitaxy grown RCE-heterojunction phototransistors (RCE-HPT) were fabricated and measured demonstrating good agreement between experiment and theory     

GaAs基量子阱谐振腔增强型光电探测器特性研究

通过对谐振腔增强型（RCE）光电探测器的理论分析和实验测试结果，证明对应不同光束入射角度， RCE光电探测器的模式波长按一定规律可调谐. 并给出当入射角度变化10°～60° ，模式调谐范围约为40nm，而谐振波长处的量子效率峰值及半高宽FWHM的变化与材料吸收系数紧密相关.     

Design of ultra-fast dual-wavelength resonant-cavity-enhancedSchottky photodetectors

A systematic optimization procedure for the design of RCE Schottky photodetectors to achieve maximum quantum efficiency and high speed operation at 1.3 and 1.55 μm wavelengths is presented. The quantum efficiency formulation used includes the structural parameters of the photodetector and takes into account the wavelength dependence of the top and bottom mirrors reflectivities. The results have shown that the value of the thickness of the antireflection coating layer has a major influence in selecting the width of the photodetector to simultaneously achieve maximum quantum efficiency and high bandwidth at the two wavelengths. Simulated values of 270 and 40 GHz were obtained, respectively, for the 3-dB carrier-transit time-limited bandwidth and bandwidth-efficiency product for an RCE Schottky photodetector with a 0.02-μm gold layer     

Design of resonant-cavity-enhanced photodetectors using geneticalgorithms

Expressions of quantum efficiency of resonant-cavity-enhanced (RCE) PIN photodetectors reported in the literature are based on the assumption of constant reflectivities of the quarter-wave stacks (QWS) at the ends of the cavity. The quantum efficiency is formulated in a closed analytical form that includes the structural parameters of the photodetector and takes into account the wavelength dependence of the reflectivities and the active region absorption coefficient. The variation of the QWS reflectivity and, in particular, its phase constant with wavelength has a significant influence on the resulting quantum efficiency spectra, as demonstrated in this paper. The results are in very good agreement with recently published experimental data which show a dominant peak at the operating wavelength. This behavior has not been predicted by previous simulation results. Since the quantum efficiency spectra are not periodic, the use of the finesse, defined as the ratio of the free spectral range to the full width at half maximum, as a measure of wavelength selectivity is not valid. The conventional quality factor definition used for filter design is thus adopted as a measure of selectivity. A genetic algorithm-based optimization and design procedure for RCE photodetectors have also been developed with the quantum efficiency, quality factor, and frequency bandwidth as input design parameters