Growth Optimization of an Electron Confining InN/GaN Quantum Well Heterostructure

The molecular beam epitaxy of In-face InN (0001) epilayers with optimized surface morphology, structural quality, and electrical properties was investigated. Namely, compact InN epilayers with atomically flat surfaces, grown in a step-flow mode, were obtained using stoichiometric fluxes of In and N and substrate temperatures in the range from 400°C to 435°C. Typical values for the electron concentration and the Hall mobility at 300 K were 4.3 × 10¹⁸ cm⁻³ and 1210 cm²/Vs, respectively. The growth mode of InN during the very first stage of the nucleation was investigated analytically, and it was found that the growth proceeds through nucleation and fast coalescence of two-dimensional (2-D)–like InN islands. The preceding conditions were used to grow an InN/GaN quantum well (QW) heterostructure, which exhibited well-defined interfaces. Schottky contacts were successfully fabricated using a 15-nm GaN barrier enhancement cap layer. Capacitance-voltage measurements revealed the confinement of electrons within the InN QW and demonstrated the capability to modulate the electron density within an InN channel. The sheet concentration of the confined electrons (1.5 × 10¹³ cm⁻²) is similar to the calculated sheet polarization charge concentration (1.3 × 10¹³ cm⁻²) at the InN/GaN interface. However, electrons may also originate from ionized donors with a density of 8 × 10¹⁸ cm⁻³ within the InN layer.     

Effect of MBE Growth Conditions on Multiple Electron Transport in InN

A quantitative mobility spectrum analysis (QMSA) of multiple magnetic field data has been used to determine the transport properties of bulk and surface electron species in InN films, grown by plasma-assisted molecular beam epitaxy (PAMBE) with varying substrate temperatures and In/N flux ratios. While all films have similar bulk electron densities, ∼4 × 10¹⁷ cm⁻³, the highest mobility was obtained in the highest growth temperature film (3100 cm²/V s at 150 K), while In-rich growth also gave good mobility values even at a much lower growth temperature. The surface sheet electron concentration increased with surface roughness, which increased with N-flux during growth.     

Electrical transport properties of single GaN and InN nanowires

The transport properties of single GaN and InN nanowires grown by thermal catalytic chemical vapor deposition were measured as a function of temperature, annealing condition (for GaN) and length/square of radius ratio (for InN). The as-grown GaN nanowires were insulating and exhibited n-type conductivity (n ≈ 2×10¹⁷ cm⁻³, mobility of 30 cm²/V s) after annealing at 700°C. A simple fabrication process for GaN nanowire field-effect transistors on Si substrates was employed to measure the temperature dependence of resistance. The transport was dominated by tunneling in these annealed nanowires. InN nanowires showed resistivity on the order of 4×10⁻⁴ Ω cm and the specific contact resistivity for unalloyed Pd/Ti/Pt/Au ohmic contacts was near 1.09×10⁻⁷ Ω cm². For In N nanowires with diameters <100 nm, the total resistance did not increase linearly with length/square of radius ratio but decreased exponentially, presumably due to more pronounced surface effect. The temperature dependence of resistance showed a positive temperature coefficient and a functional form characteristic of metallic conduction in the InN nanowires.     

X-Ray Diffraction and Photoluminescence Studies of InN Grown by Plasma-Assisted Molecular Beam Epitaxy with Low Free-Carrier Concentration

We report studies of InN grown by plasma-assisted molecular beam epitaxy. GaN templates were first grown on sapphire substrates followed by InN overgrown at 457°C to 487°C. Atomic force microscopy shows the best layers to exhibit step-flow growth mode of the InN, with a root-mean-square roughness of 0.7 nm for the 2 μm × 2 μm scan and 1.4 nm for the 5 μm × 5 μm scan.␣Measurements of the terrace edges indicate a step height of 0.28 nm. Hall measurements at room temperature give mobilities ranging from 1024 cm²/V s to 1904 cm²/V s and the electron concentrations are in the range of 5.9 × 10¹⁷ cm⁻³ to 4.2 × 10¹⁸ cm⁻³. Symmetric and asymmetric reflection x-ray diffraction measurements were performed to obtain lattice constants a␣and c. The corresponding hydrostatic and biaxial stresses are found to range from −0.08 GPa to −0.29 GPa, and −0.05 GPa to −0.32 GPa, respectively. Low-temperature photoluminescence peak energies range from 0.67 eV to 0.70 eV, depending on residual biaxial stress, hydrostatic pressure, and electron concentrations. The electron concentration dependence of the estimated Fermi level is analyzed using Kane’s two-band model and conduction-band renormalization effects.     

Molecular beam epitaxial growth of P-ZnSe:N using a novel plasma source

We have studied the p-type doping in ZnSe molecular beam epitaxial growth using a novel high-power (5 kW) radio frequency (rf) plasma source. The effect of growth conditions such as the rf power, the Se/Zn flux ratio and the growth temperature on p-ZnSe:N was investigated. The net acceptor concentration (N_A—N_D) of around 1 × 10¹⁸ cm⁻³ was reproducibly achieved. The activation ratio ((N_A—N_D)/[N]) of p-ZnSe:N with N_A—N_D of 1.2 × 10¹⁸ cm⁻³ was found to be as high as 60%, which is the highest value so far obtained for N_A—N_D ∼ 10¹⁸ cm⁻³. The 4.2K photoluminescence spectra of p-ZnSe:N grown under the optimized growth condition showed well-resolved deep donor-acceptor pair emissions even with high N_A—N_D. On leave from Sumitomo Electric Industry Ltd. On leave from Sony Corp.     

Photon assisted growth of nitrogen-doped CdTe and the effects of hydrogen incorporation during growth

Nitrogen doping in CdTe epilayers grown by photo-assisted molecular beam epitaxy was demonstrated using an rf plasma source. The effect of the presence of atomic hydrogen during growth of undoped and nitrogen-doped CdTe was investigated. The layers were characterized using photoluminescence spectros-copy (PL), Hall effect, secondary ion mass spectroscopy (SIMS), Fourier transform infrared spectroscopy, and atomic force microscopy. PL confirmed the incorporation of nitrogen as acceptors. While p-type carrier concentrations greater than 10¹⁸ cm⁻³ were easily obtained, SIMS measurements indicated that nitrogen was concentrated near the undoped-doped and epilayer-substrate interfaces which complicates interpretation of activation efficiency. Hydrogen incorporation was found to be enhanced by the presence of nitrogen. Infrared absorption measurements strongly suggested the formation of N-H complexes. Hall measurements indicated that complexes are formed which are donor-like in nature. The presence of atomic hydrogen during growth radically changed the low temperature photoluminescence in both undoped and nitrogen-doped layers. Exciton-related luminescence was quenched at low temperature. Nitrogenrelated donor-acceptor pair luminescence was also absent from the N-doped hydrogenated layers, consistent with complex formation. Copper (a cation-site acceptor) donor-acceptor pair luminescence appeared to be enhanced by hydrogenation.     

Properties of conducting zinc oxide films prepared by R.F. Sputtering

An effective method of dopant incorporation in rf sputtered ZnO film is reported. The electrical, optical and structural properties of zinc doped ZnO films are investigated. Electron mobility of∼10 cm² /V-sec and electron concentration of∼10¹⁹ cm⁻³ have been measured at room temperature. X-ray diffraction data obtained on films prepared on Corning 7059 glass show (002) peak, dominating. The high electrical conductivity and transmission makes ZnO films very attractive as a component for heterojunction solar cells.     

Growth and characterization of indium arsenide thin films

The growth and characterization of indium arsenide films grown on indium phosphide substrates by the metal organic chemical vapor deposition (MOCVD) process is reported. Either ethyl dimethyl indium or trimethyl indium were found to be suitable in combination with arsine as source compounds. The highest electron mobilities were observed in films nucleated at reduced growth temperature. Scanning electron microscopy studies show that film nucleation at low temperature prevents thermal etch pits from forming on the InP surface before growth proceeds at an elevated temperature. Electron mobilities as high as 21,000 cm²V⁻¹ sec⁻¹ at 300 K were thus obtained for a film only 3.4 μm thick. This mobility is significantly higher than was previously observed in InAs films grown by MOCVD. From the depth dependence of transport properties, we find that in our films electrons are accumulated near the air interface of the film, presumably by positive ions in the native oxide. The mobility is limited by electrons scattering predominantly from ionized impurities at low temperature and from lattice vibrations and dislocations at high temperature. However, scattering from dislocations is greatly reduced in the surface accumulation layer due to screening by a high density of electrons. These dislocations arise from lattice mismatch and interface disorder at the film-substrate interface, preventing these films from obtaining mobility values of bulk indium arsenide.     

Characterization of GaxIn1−xAs grown with TMIn

High quality Ga_xIn_1−xAs, lattice matched to InP, has been reproducibly grown by organometallic vapor phase epitaxy using trimethylgallium (TMGa), trimethylindium (TMIn), and AsH₃ in an atmospheric pressure reactor with no observable adduct formation. For the first time, using TMIn, room temperature electron mobilities of 10⁴ cm²/Vs and 77 K mobilities greater than 4 × 10⁴ cm²/Vs have beep obtained. Residual donor doping densities in the low 10¹⁵ cm⁻³ range have been routinely obtained. Material with excellent morphology has been grown from 540 to 670 C with the highest quality material being obtained near 650 C. The 4 K photoluminescence (PL) peak due to carbon is not seen in the material grown at higher temperatures; however, it increases dramatically as the growth temperature is lowered. This increased carbon incorporation leads to a sharp drop in the electron mobility, which exhibits a T^−0.5 behavior between 77 and 300 K. With optimum growth conditions, 4 K PL halfwidths of 4–5 meV are commonly observed. This high quality material is characterized by x-ray diffraction, PL, and Hall mobility measurements. Carbon and other impurity incorporation as a function of the growth parameters will be described.     

Correlation Between Threading Dislocations and Nonradiative Recombination Centers in InN Observed by IR Cathodoluminescence

The correlation between threading dislocations (TDs) and nonradiative recombination centers in InN films was investigated by infrared cathodoluminescence (CL). Samples were grown on nitridated (0001) sapphire substrates with a low-temperature-grown InN buffer layer by radio frequency molecular-beam epitaxy (RF-MBE). Panchromatic CL images of the InN films showed a high density of dark spots in a range of 10⁸ cm⁻² to 10⁹ cm⁻². The sample with a higher density of TDs had a higher density of CL dark spots. A depth-dependent CL measurement confirmed that CL dark spots aligned almost vertically in the film like TDs. Reasonable correlation between TDs and the nonradiative regions was also observed by a cross-sectional CL image of the InN film regrown on a microfaceted InN template, in which the TD density was dramatically reduced in part. These results suggest that threading dislocations act as nonradiative recombination centers in InN.     

The effects of V/III ratio and growth temperature on the electrical and optical properties of InP grown by low-pressure metalorganic chemical vapor deposition

Electrical and optical properties of InP grown by low-pressure metalorganic chemical vapor deposition using triethylindium (TEI) and phosphine (PH₃) are described. It was found that the net ionized impurity concentration shows a monotonic decrease as the PH₃/TEI ratio increases. Similarly, the electron mobility and the photoluminescent intensity increases with the PH₃/TEI ratio. The effect of growth temperature has also been investigated in the range from 500 to 650°C. For a variety of PH₃/TEI ratios, the optimal growth temperature is in the range of 550×600éC. In terms of impurities, the dominant shallow acceptors are Zn and possibly C, and the most common deep acceptor is Mn. The best material obtained shows a net electron concentration of 1 × 10¹⁵ cm⁻³ with an associated 77K electron mobility of 41,000 cm² /Vsec, implying that the total ionized,impurity concentration is in the range of 3'4 □ 10¹⁵ cm⁻³     

Dopant incorporation in GaAs and AlGaAs grown by MOMBE for high speed devices

Continued improvement in GaAs/AlGaAs device technology requires higher doping levels, both to reduce parasitics such as source resistances, and to enhance speed in devices such as the heterostructure bipolar transistor (HBT). In this paper we will discuss doping issues which are critical to high speed performance. In particular, we will focus on doping of GaAs and AIGaAs using carbon as the acceptor and Sn as the donor. Due to the unique growth chemistry of metalorganic molecular beam epitaxy (MOMBE), both of these impurities can be used to achieve high doping levels when introduced from gaseous sources such as trimethylgallium (TMG) or tetraethyltin (TESn). Comparison of SIMS and Hall measurements show that both elements give excellent electrical activation to 1.5 × 10¹⁹ cm³ for Sn and 5 × 10²⁰ cm⁻³ for C. More importantly, we have found that both impurities canbe used to achieve high quality junctions, indicating that little or no diffusion or segregation is occurring during growth. Because of the excellent incorporation behavior of these dopants, we have been able to fabricate a wide range of devices including field effect transistors (FETs), high electron mobility transistors (HEMTs), and Pnp HBTs whose performance equals or exceeds that of similar devices grown by other techniques. In addition to these results, we will briefly discuss the key differences in growth kinetics which allow such abruptness and high doping levels to be achieved more readily in MOMBE than in other growth techniques.     

The influence of OMVPE growth pressure on the morphology, compensation, and doping of GaN and related alloys

Growth pressure has a dramatic influence on the grain size, transport characteristics, optical recombination processes, and alloy composition of GaN and AlGaN films. We report on systematic studies which have been performed in a close spaced showerhead reactor and a vertical quartz tube reactor, which demonstrate increased grain size with increased growth pressure. Data suggesting the compensating nature of grain boundaries in GaN films is presented, and the impact of grain size on high mobility silicon-doped GaN and highly resistive unintentionally doped GaN films is discussed. We detail the influence of pressure on AlGaN film growth, and show how AlGaN must be grown at pressures which are lower than those used for the growth of optimized GaN films. By controlling growth pressure, we have grown high electron mobility transistor (HEMT) device structures having highly resistive (10⁵ Ω-cm) isolation layers, room temperature sheet carrier concentrations of 1.2×10¹³ cm⁻² and mobilities of 1500 cm²/Vs, and reduced trapping effects in fabricated devices.     

Gas-source molecular beam epitaxial growth and characterization of InNxP1−x on InP

We report a study of N incorporation into InP using a radio frequency (rf) N plasma source. Very streaky reflection high-energy electron diffraction patterns are observed for InN_xP_1−x (x <1%) grown on InP, indicating layer-by-layer growth of the film. The sharp x-ray diffraction peak and the clear Pendelloesung fringes in the high-resolution x-ray rocking curves reveal the high crystalline quality and uniformity of the film. They also suggest the smoothness of the interface between InP and InN_xP_1−xand of the surface of the InN_xP_1−x layer. This is further confirmed by scanning electron microscopy on these samples, where featureless surface is obtained. The formation of an InNP alloy is confirmed by x-ray θ-2θ diffraction measurement where no phase separation is observed. Different ways to increase the N composition in InNP were explored. At a fixed N₂ flow-rate fraction, lowering the growth temperature increases the N composition in InNP. Raising the rf power or using a larger beam exit aperture will also increase the N incorporation as a result of the availability of more active N species.     

MOCVD Growth of InN on Si(111) with Various Buffer Layers

We report the growth of InN by metalorganic chemical vapor deposition on Si(111) substrates. It was found that the sharpest InN(002) x-ray diffraction peak could be achieved from the sample prepared on a complex buffer layer that consists of a low-temperature AlN, a graded Al _x Ga_1−x N (x = 1 → 0), and a high-temperature GaN. The resultant mobility of 275 cm²/V s thus obtained was 75% larger than that of the InN prepared on a single LT-AlN buffer layer only.     

The temperature and pressure dependence of the electron and hole mobilities in GaxIn1-xAsyP1-y alloys

A wide range of samples of both n-type and p-type Ga_xIn_1-xAs_yP_1-y on InP has been grown by LPE with carrier concentrations in the low 10¹⁶cm⁻³range. The electron mobility (μ_e) at room temperature decreased from about 4000 cm²V⁻¹s⁻¹ at y = 0 and passed through a shallow minimum near y = 0.25. At high y values, μ_e rose steeply, reaching 11 000 cm²V⁻¹s⁻¹ at the ternary boundary. In the p-type material the hole mobility (μ_p) varied from 140 cm V⁻¹s⁻¹ in InP, passed through a minimum of about 70 cm²V⁻¹s⁻¹ near y = 0.5 and then increased swiftly towards the ternary boundary. The temperature dependence of both μ_e and μ_p suggested the presence of alloy or space-charge scattering. In order to distinguish between these two mechanisms the pressure coefficient of the direct band-gap dE_o/dP was measured as a function of y by observing the movement with pressure of the photoconductive edge. From dE_o/dP the pressure variation of the effective mass was deduced. By measuring the change in electron and hole mobilities with pressure, it was then possible to establish that alloy scattering rather than space-charge scattering was occurring. From the composition dependence of the alloy scattering potentials for electrons and holes predictions have been made of the variation of μ_e and μ_P with temperature, pressure and dopant Presently a Nuffield Science Fellow concentration. At room temperature a maximum electron mobility of about 11,200 cm²V⁻¹ s⁻¹ is indicated. Presently a Nuffield Science Fellow     

Synthesis and Properties of High-Quality InN Nanowires and Nanonetworks

We report on the growth of high-quality InN nanowires by the vapor–liquid–solid mechanism at rates of up to 30 μm/h. Smooth and horizontal nanowire growth has been achieved only with nanoscale catalyst patterns, while large-area catalyst coverage resulted in uncontrolled and three-dimensional growth. The InN nanowires grow along the [110] direction with diameters of 20 to 60 nm and lengths of 5 to 15 μm. The nanowires bend spontaneously or get deflected from other nanowires at angles that are multiples of 30°, forming nanonetworks. The gate-bias-dependent mobility of the charge carriers ranges from 55 cm²/V s to 220 cm²/V s, and their concentration is ∼10¹⁸ cm⁻³.     

Influence of growth conditions and surface reaction byproducts on GaN grown via metal organic molecular beam epitaxy: Toward an understanding of surface reaction chemistry

The surface reaction byproducts during the growth of GaN films via metal organic molecular beam epitaxy (MOMBE) were investigated as a means to optimize material properties. Ethylene and ethane were identified as the dominant surface reaction hydrocarbon byproducts, averaging 27.63% and 7.15% of the total gas content present during growth. Intense ultraviolet (UV) photoexcitation during growth was found to significantly increase the abundance of ethylene and ethane while reducing the presence of H₂ and N₂. At 920°C, UV excitation was shown to enhance growth rate and crystalline quality while reducing carbon incorporation. Over a limited growth condition range, a 4.5×10¹⁹−3.4×10²⁰ cm⁻³ variation in carbon incorporation was achieved at constant high vacuum. Coupled with growth rate gains, UV excitation yielded films with ∼58% less integrated carbon content. Structural material property variations are reported for various ammonia flows and growth temperatures. The results suggest that high carbon incorporation can be achieved and regulated during MOMBE growth and that in-situ optimization through hydrocarbon analysis may provide further enhancement in the allowable carbon concentration range.     

A study of chemical beam epitaxy of GaAs using tris-dimethylaminoarsenic

The growth of GaAs by chemical beam epitaxy using triethylgallium and trisdimethylaminoarsenic has been studied. Reflection high-energy electron diffraction (RHEED) measurements were used to investigate the growth behavior of GaAs over a wide temperature range of 300–550°C. Both group III- and group Vinduced RHEED intensity oscillations were observed, and actual V/III incorporation ratios on the substrate surface were established. Thick GaAs epitaxial layers (2–3 μm) were grown at different substrate temperatures and V/III ratios, and were characterized by the standard van der Pauw-Hall effect measurement and secondary ion mass spectroscopy analysis. The samples grown at substrate temperatures above 490°C showed n-type conduction, while those grown at substrate temperatures below 480°C showed p-type conduction. At a substrate temperature between 490 and 510°C and a V/III ratio of about 1.6, the unintentional doping concentration is n ∼2 × 10¹⁵ cm⁻³ with an electron mobility of 5700 cm²/V·s at 300K and 40000 cm²/V·s at 77K.     

Transport properties of undoped Cd0.9Zn0.1Te grown by high pressure bridgman technique

The electron drift mobility of undoped Cd_0.9Zn_0.1Te grown by high-pressure Bridgman method is measured by a time-of-flight technique. The sample shows a room temperature mobility and mobility lifetime product of 950 cm²/Vs and 1.6 × 10⁻⁴cm²/V, respectively. The mobility increases monotonically with decreasing temperature to 3000 cm²/Vs at 100 K. The dominant scattering mechanism for the electron transport is discussed by comparing with the theoretical mobility obtained by iterative solution of the Boltzmann equation.