Gadolinium and lutetium hafnates: Materials for the preparation of high-quality optical coatings

We have studied the spectroscopic properties and service performance of gadolinium hafnate and lutetium hafnate optical coatings. The coatings have been shown to possess improved optical parameters in comparison with binary oxide films and enhanced optical damage threshold     

Multilayer coatings for narrow-band imaging in the extreme ultraviolet

Multilayer coatings for the extreme ultraviolet with high reflectance at a spectral band of interest and zero reflectance at another band to be suppressed have been designed and prepared. Multilayer coatings were designed to maximize normal-incidence reflectance at the O(+) 83.4-nm spectral line and to suppress at the same time radiation at the 121.6-nm hydrogen Lyman alpha line. Fresh Al/MgF(2)/Mo multilayer coatings resulted in high reflection/suppression ratios at the above wavelengths. The coatings also exhibited a dip in reflectance at 102.6-nm Lyman beta. The coatings showed some slow but steady degradation over time that could be partially eliminated by sample cleaning. Al/MgF(2)/Mo multilayer coatings protected with a thin ion-beam-deposited C film were found to give a high reflection/suppression ratio with lower degradation over time.     

Materials for birefringent coatings

We discuss recent developments in methods for monitoring the anisotropic growth and properties of tilted columnar films and present results for the perpendicular incidence birefringence of aluminum oxide, Merck Substance Hi, silicon oxide, tantalum oxide, titanium oxide, and zirconium oxide.     

Electron-beam deposited boron coatings for the extreme ultraviolet

Boron films deposited by evaporation with an electron-beam were found to have a relatively high reflectance in the extreme ultraviolet with values similar to those of ion-beam-sputtered (IBS) SiC and IBS B(4)C. The largest reflectance was measured for an 11 nm thick boron film. Some reflectance degradation was observed for boron films stored in a desiccator. Reflectance degradation varied from sample to sample and was found to be either similar to that of IBS SiC and IBS B(4)C or larger.     

Ion-beam-deposited boron carbide coatings for the extreme ultraviolet

The normal-incidence reflectance of ion-beam-deposited boron carbide thin films has been evaluated in the extreme ultraviolet (EUV) spectral region. High-reflectance coatings have been produced with reflectances greater than 30% between 67 and 121.6 nm. This high reflectance makes ion-beam-deposited boron carbide an attractive coating for EUV applications.     

Interfacial roughness and related scatter in ultraviolet optical coatings: a systematic experimental approach

For a variety of UV optical coatings, surface roughness was measured by use of an atomic-force microscope (AFM) to study its dependence on the film material and thickness, coating design, and deposition process. After analyzing the corresponding power spectral density functions, we propose a simple classification model for coatings according to the contributions of substrate roughness and intrinsic film roughness to the scattering. Results of scattering measurements on different types of coatings are presented and are found to be in good agreement with predictions based on the AFM data. Consequences for a scatter reduction strategy are discussed.     

Materials for solar-transmitting heat-reflecting coatings

A coating for solar energy applications which combines heat reflection with transparency to solar radiation may be of four different types: a metallic film which is sufficiently thin to be transparent; a metal-based multilayer coating; a wide band gap heavily doped semiconductor such as SnO₂ or In₂O₃; a conducting microgrid. We prepared such coatings on glass by evaporating thin films of silver, copper, gold, aluminium, cobalt, iron, chromium and nickel of various thicknesses and by spraying SnO₂ films. The spectral variations in the transmittance, and the front side and back side reflectances were measured in the wavelength range 0.4–15 μm. The properties of a three-layer coating of the dielectric/metal/dielectric type were calculated with a multilayer program using known bulk optical constants. The effect of these films when coated onto a domestic window was demonstrated with a heat transfer calculation using an equivalent thermal net. When a large transmittance over a broad range of the solar spectrum is required, gold is an equally good, or a slightly better, choice than silver as the metal in a three-layer coating. In general, an SnO₂ film exhibits a higher solar transmittance as well as a higher emittance than a coating containing metals. This implies that the oxide is to be preferred as a coating on a window when the maximum passive solar heating is sought. However, a metal-based coating could be better when a very low U_L value is the most important requirement.     

Materials for optical limiters

Nonlinear limiters may protect optical sensors against pulsed lasers of any wavelength. New nonlinear materials have been produced, offering increased nonlinear sensitivity and reduced visual loss. Particle suspensions, macrocyclic dyes, and two-photon absorbers are particularly promising. Issues surrounding incorporation into optical systems are under study.     

Sub-quarter-wave multilayer coatings with high reflectance in the extreme ultraviolet

Multilayer coatings with a small number of layers were designed and prepared to provide an increase in normal-incidence reflectance in the extreme ultraviolet compared with the reflectance of available single-layer coatings, namely, SiC, B4C, and Ir. Multilayers were designed to produce coatings with the highest possible reflectance at 91.2 and at 58.4 nm. At these wavelengths all the materials absorb radiation strongly, but still a reflectance enhancement can be obtained by means of sub-quarter-wave multilayer coatings with two or more different materials. Sub-quarter-wave multilayer coatings based on Al, MgF2, diamondlike carbon, B4C, SiC, and Ir showed higher reflectance than single-layer coatings of SiC and B4C not only at the target wavelength but in a wide band ranging from 50 nm to the 121.6-nm H Lyman-alpha line. Multilayer coatings suffered some reflectance degradation over time. However, after approximately 80-100 days of aging in a desiccator, the reflectance for the multilayer coatings was greater than for the single-layer coatings.     

Ion-beam etching for the precise manufacture of optical coatings

We propose using ion-beam etching as an additional tool for the accurate control of the thickness of thin films during the manufacture of sensitive optical multilayer coatings. We use a dual ion-beam sputtering system in the deposition and etch modes. In the deposition mode both the assist and sputtering ion beams are used to produce dense films at deposition rates in the range of 0.1-0.3 nm/s. In the etch mode, only the assist ion beam is used to remove material at a rate of less than 0.1 nm/s. A very high precision in the layer thicknesses can be obtained by alternating between deposition and etch modes. We observed that etching did not significantly affect the surface quality and the uniformity of the coatings. We introduced etching into our current manufacturing process and demonstrated its potential for the fabrication of several optical multilayer systems with performances that are very sensitive to the thickness of their layers.     

Hard UV-curable organo-mineral coatings for optical applications

Organically-modified silicate incorporating various amounts of zirconium precursor was synthesized via a sol-gel route. The material was deposited as thin films on PMMA substrates and densified by UV-curing. Mechanical properties were measured by nanoindentation and data were recorded continuously as a function of the penetration depth during the loading-unloading cycles. Values of hardness and Young modulus were found in the range 340-440 MPa and 4-6 GPa, respectively. It was shown that these values could be tailored by varying the relative amount of zirconium in the layer. The material exhibited a very elastic behaviour that was related to its high degree of cross-linking assessed by infrared spectroscopy. Results were compared with measurements published by various groups on related materials. The mechanical and optical properties of the samples made this class of materials promising as hard coatings for optical applications.     

Starting designs for the computer optimization of optical coatings

Several generic starting designs are used for the computer optimization of multilayer optical coatings. The first is a stack of many thin layers. Another, which is applicable to the needle-layer optimization method, is at least one thick layer. Examples include the following coatings: antireflection, beam divider, enhanced metallic reflector, dark mirror, and total internal reflection with prescribed differential phase shift.     

Comparison of algorithms used for optical characterization of multilayer optical coatings

Two algorithms used for the on-line and off-line characterization of multilayer optical coatings are experimentally compared using test samples produced by two different deposition processes and different monitoring approaches. One of these algorithms, called the triangular algorithm, demonstrates its superiority in all considered situations. We performed experiments with multilayer samples formed by high-density thin films, which allowed us to neglect possible errors in the film refractive indices and concentrate only on errors in the thicknesses of the layers of the produced coatings.     

Sub-diffraction-limited multilayer coatings for the 0.3 numerical aperture micro-exposure tool for extreme ultraviolet lithography

Multilayer coating results are discussed for the primary and secondary mirrors of the micro-exposure tool (MET): a 0.30 NA lithographic imaging system with a 200 microm x 600 microm field of view at the wafer plane, operating in the extreme ultraviolet (EUV) region at an illumination wavelength around 13.4 nm. Mo/Si multilayers were deposited by DC-magnetron sputtering on large-area, curved MET camera substrates. A velocity modulation technique was implemented to consistently achieve multilayer thickness profiles with added figure errors below 0.1 nm rms demonstrating sub-diffraction-limited performance, as defined by the classical diffraction limit of Rayleigh (0.25 waves peak to valley) or Marechal (0.07 waves rms). This work is an experimental demonstration of sub-diffraction- limited multilayer coatings for high-NA EUV imaging systems, which resulted in the highest resolution microfield EUV images to date.     

New optimization algorithm for the synthesis of rugate optical coatings

A model of a rugate coating that takes into account production potentialities of the Leybold Syrus Pro 1100 deposition system is presented. An efficient algorithm for the synthesis of rugate coatings is proposed. Numerical results are also presented.     

Efficient refinement algorithm for the synthesis of inhomogeneous optical coatings

An efficient first-order algorithm with an exact calculation of the gradients is described and applied to the refinement of inhomogeneous dielectric thin films. Numerical results calculated at normal and oblique angles of incidence are correlated with an important mathematical theorem. It is shown that, when appropriate conditions are satisfied, the synthesis process generates binary type solutions based on two materials, including classical multilayers.     

Highly reflecting aluminum-protected optical coatings for the vacuum-ultraviolet spectral range

We discuss the approaches to preserve the high-reflectance aluminum mirror for the vacuum-ultraviolet spectral region. Single fluoride and oxide layers, a homogeneous multilayer, and hybrid multilayer solutions are put forward. Single fluoride and oxide materials have achieved reflectance above 90% at 193 nm. Multilayer capping can provide reflectance of 93.4% at 193 nm, and a hybrid multilayer of fluoride and oxide can achieve reflectance above 90% to 160 nm.