钛酸锶钡薄膜掺杂改性研究进展

钛酸锶钡(BaxSr1-xTiO3,BST)薄膜具有优良的铁电、介电性能,在可调谐微波器件、动态随机存储器、红外探测器阵列等方面具有良好的应用前景.综述了近年来BST薄膜掺杂改性研究所取得的进展,特别是对晶格掺杂和晶界掺杂进行了较详细的评述,并对目前BST薄膜掺杂研究的几个前沿问题进行了详细的讨论.     

应用于DRAMs的钛酸锶钡薄膜的研究进展

随着DRAMs存储密度的增加,传统材料已不再适用于将来的DRAMs技术的发展.在目前研究的新型替代材料中,钛酸锶钡以其优越的介电性能越来越引起人们的关注.介绍了随DRAMs的发展趋势,钛酸锶钡薄膜的研究进展,包括其制备方法、研究状况及影响其介电性能的因素,并提出了下一步研究工作中需要解决的几个问题.     

钛酸锶钡（BST）薄膜的介电性能机理研究进展

钛酸锶钡(BST)薄膜是一种重要的铁电薄膜，应用广泛，是高新技术研究的前沿和热点之一。简要介绍BST薄膜的制备方法和应用，重点讨论BST薄膜的极化、电压非线性、漏电流的机理、表征及影响因素，并综述了铁电薄膜的疲劳机制和消除疲劳措施等方面的研究进展，提出了研究中需要解决的一些问题。     

钛酸锶钡(BST)薄膜的介电性能机理研究进展

钛酸锶钡 (BST)薄膜是一种重要的铁电薄膜 ,应用广泛 ,是高新技术研究的前沿和热点之一。简要介绍BST薄膜的制备方法和应用 ,重点讨论BST薄膜的极化、电压非线性、漏电流的机理、表征及影响因素 ,并综述了铁电薄膜的疲劳机制和消除疲劳措施等方面的研究进展 ,提出了研究中需要解决的一些问题     

钛酸锶钡（BST）薄膜的组成、结构与性能研究进展

钛酸锶钡(BST)薄膜是一种重要的铁电薄膜，应用广泛，是高新技术研究的前沿和热点之一。简要介绍了BST薄膜的制备方法和应用，对此薄膜的基片、电极、晶界、界面、热处理、膜厚及组成、结构、性能等方面作了重点讨论，提出了研究中需要解决的一些问题。     

激光脉冲沉积制备钛酸锶钡薄膜及其介电调协特性

在Pt（111）／Ti／SiO2／Si（100）衬底上,用脉冲激光沉积工艺制备出了高度a轴取向生长的（Ba0.65Sr0．35）TiO3（BsT）薄膜。薄膜为柱状生长的纳米晶粒,平均晶粒尺寸为50nm。在外加电场254kV／cm时,BST薄膜的相对介电常数与介电调谐率为810和76．3％。高的介电调谐率主要是BST薄膜具有高度a轴取向的柱状生长晶粒,因为来自沿平面c轴极化而产生的内部应力,在电场作用下,获得了高介电调谐率。     

钛酸锶钡薄膜C-V曲线不对称现象研究

采用射频（RF）磁控溅射在Pt／Ti／SiO2／Si（100）衬底上制备了Ba0.6Sr0.4TiO3（BST）薄膜。通过研究BST薄膜的电容-偏压（C-V）特性曲线发现,溅射过程中的离子注入引起底电极／铁电薄膜界面处产生了过渡层,从而导致C-V曲线不对称。最后我们通过改进溅射工艺对这一机理进行了实验验证。     

钛酸锶钡(BST)薄膜的介电性能研究

采用射频磁控溅射法制备了BaxSr1-xTiO2（简称BST）薄膜材料,研究了不同膜厚,晶粒尺寸的BST薄膜的介电系数温度特性（ε1-T),频率特性（ε-r-f),电压特性（εr-U)及损耗的温度特性（tgδ-T),频率特性（tgδ-f),找出了BST薄膜的非线性,损耗随尺度变化的规律。     

钛酸锶钡(BST)薄膜的组成、结构与性能研究进展

钛酸锶钡 (BST)薄膜是一种重要的铁电薄膜 ,应用广泛 ,是高新技术研究的前沿和热点之一。简要介绍了BST薄膜的制备方法和应用 ,对此薄膜的基片、电极、晶界、界面、热处理、膜厚及组成、结构、性能等方面作了重点讨论 ,提出了研究中需要解决的一些问题     

硅纳米晶微观结构缺陷的高分辨电子显微学研究

利用离子注入结合后续高温退火的方法成功地制备出包埋在二氧化硅(SiO_2)基质中的硅纳米晶.利用透射电子显微学对所制备的硅纳米晶(离子注入浓度为3×10~(17)cm~(-2))的微观结构缺陷进行了详细的研究.通过高分辨像分析发现:较大的纳米晶(直径＞6nm)中存在很多面缺陷,主要为孪晶与层错.孪晶包括一次孪晶、二重孪晶、三重孪晶及五重孪晶.层错分为内禀和外禀两种类型,并讨论了内禀层错占多数的原因.除了面缺陷以外,还有一部分纳米晶中存在位错.     

Structural engineering of Ba0.5Sr0.5TiO3 epitaxial films

Ba_0.5Sr_0.5TiO₃ single-layered and multilayered films were epitaxially grown on a (001) LaAlO₃ substrate using single target and dual target pulsed laser deposition, respectively. Compared to the single-layered films, the multilayered films exhibited broader phase transition and improved thermo-stability. The microstructure of these epitaxial films was investigated using high-resolution transmission electron microscopy in details. Misfit and threading dislocations were observed in the single-layered film, while the threading dislocations were dramatically decreased and no misfit dislocations were found in the multilayered film. It is suspected that the difference in dislocation densities is responsible for the different behaviors of the permittivity with temperature.     

La0.75Na0.25MnO3外延膜的制备及磁电特性

通过射频磁控溅射在单晶LaAlO₃(100)衬底上生长了膜厚为120nm的La_0.75Na_0.25MnO₃外延膜. 通过X射线衍射、超导量子干涉仪、直流四探针法对其进行了表征. 结果表明, 薄膜为(100)取向外延膜. 居里温度T_C=270K, 在居里温度附近, 发生铁磁-顺磁转变. 此材料呈现出典型的自旋玻璃特性, 是由于应力造成的. 在室温附近, 此材料在1T磁场下, 其磁电阻极大值为40.3％. 80K<T<210K时, 其输运机制为电子-电子散射, 电阻率满足ρ=ρ₀+ρ₁T²+ρ₂T⁵; 220K<TT>T_MI时, 其输运机制满足小极化子模型.     

Thin film Ba0.25Sr0.75TiO3 voltage tunable capacitors on fused silica substrates for applications in microwave microelectronics

Thin film Au/Pt/Ba_0.25Sr_0.75TiO₃/Pt/Au/Ti capacitor structures were fabricated on fused silica substrates using pulsed laser deposition of ferroelectric films. Low-field dielectric measurements were performed as a function of frequency in the range 1-25 GHz at different external dc fields up to 360 kV/cm. Resonant microwave power absorption observed at frequencies less than 10 GHz under dc field is due to electrostriction and field induced piezoelectric effects. The effects are simulated using an electroacoustic model of the multilayer capacitor structure. A circuit model is applied to investigate the influence of series resistance and inductance of interconnect/lead strips on capacitor performance. Analysis shows that the measured loss tangent of the capacitor is mainly due to series resistance and frequency dispersion of capacitance is caused by series inductance. The de-embedded value of the loss tangent is 0.005 at 10 GHz. The measured loss tangent is less than 0.02 and tunability is up to 40% in the whole frequency range. These parameters indicate high potential of Ba_0.25Sr_0.75TiO₃ capacitors for applications in voltage controlled devices of microwave microelectronics.     

Interfacial characteristics and dielectric properties of Ba0.65Sr0.35TiO3 thin films

Ba_0.65Sr_0.35TiO₃ (BST) thin films were deposited on Pt/Ti/SiO₂/Si substrates by radio frequency magnetron sputtering technique. X-ray photoelectron spectroscopy (XPS) depth profiling data show that each element component of the BST film possesses a uniform distribution from the outermost surface to subsurface, but obvious Ti-rich is present to BST/Pt interface because Ti⁴⁺ cations are partially reduced to form amorphous oxides such as TiO_x (x < 2). Based on the measurement of XPS valence band spectrum, an energy band diagram in the vicinity of BST/Pt interface is proposed. Dielectric property measurements at 1 MHz reveal that dielectric constant and loss tangent are 323 and 0.0095 with no bias, while 260 and 0.0284 with direct current bias of 25 V; furthermore, tunability and figure of merit are calculated to be 19.51% and 20.54, respectively. The leakage current density through the BST film is about 8.96 × 10^− 7 A/cm² at 1.23 V and lower than 5.66 × 10^− 6 A/cm² at 2.05 V as well as breakdown strength is above 3.01 × 10⁵ V/cm.     

Voltage tunable Ba0.6Sr0.4TiO3 thin films and coplanar phase shifters

Not only the ferroelectric properties of Ba_0.6Sr_0.4TiO₃ thin films but also the design, fabrication and microwave properties of coplanar waveguide (CPW) phase shifter were investigated. When the applied voltage changes from zero to 20 V range at a frequency of 1 kHz, the dielectric constant, tunability, remanent polarization (2P_r) and coercive electric field (Ec) of the BST films are 1266, 29.5%, 2.29 μC/cm² and 22.27 kV/cm, respectively. The structure of CPW phase shifter was designed by ANSOFT High Frequency Structure Simulator (HFSS) and Agilent Advanced Design System (ADS). The designed phase shifter consists of 56 same sections. It is observed from the photograph of the fabricated device that the lines of electrodes are regular and the widths of bottom electrodes overlapped by top electrodes are about 5 μm. It was found that the phase shift gradually increases as the voltage increases from 0 V to 20 V, which may be due to the tunability of BST films varies with external dc field. About 168° phase shift was achieved at 28 GHz with a bias voltage of 20 V.     

Dielectric and tunable properties of Pb0.25BaxSr0.75−xTiO3 thin films fabricated by a modified sol-gel method

A modified sol-gel method was used to fabricate (Pb_0.25Ba_x Sr_0.75−x)TiO₃ (PBST) thin films with x = 0.05,0.1,0.15 and 0.2 on Pt/TiO₂/SiO₂/Si substrate. The structure, surface morphology, dielectric and tunable properties of PBST thin films were investigated as a function of barium content (x). X-ray diffraction and scanning electron microscopy analysis showed that we could get pure PBST perovskite phase and relative fine density thin films with smooth surface. It was found that the crystal lattice constant, grain size, room temperature dielectric constant, dielectric loss and tunability of Ba solutionizing PST thin films increased with the increase in Ba content. For (Pb_0.25Ba_0.2Sr_0.55)TiO₃ thin film, it had the highest dielectric constant of 1390 and the largest tunability of 80.6%. The figure of merit parameter reached a maximal value of 28.9 corresponding to the (Pb_0.25Ba_0.05 Sr_0.7)TiO₃ thin film, whose dielectric constant, dielectric loss and tunability measured at 1 MHz were 627, 0.024 and 69.4%, respectively.     

Ba0.65Sr0.35TiO3陶瓷材料的制备及介电特性研究

采用溶胶－凝胶工艺制备了Ba0.65Sr0.35TiO3粉体，并利用微波烧结技术对粉体进行了合成和烧结，研究分析了样品的介电特性，并与传统制备工艺获得的样品进行了性能比较。实验结果表明，获得的Ba0.65Sr0.35TiO3粉体颗粒较细，其合成温度和烧结成瓷温度都较传统工艺有大幅度降低，分别为900和1310℃；可以获得晶粒尺寸在1μm以内的陶瓷；随晶粒的减小，材料的相对介电常数变化不大，而介电损耗大大降低。     

Preparation and humidity sensing properties of Ba0.8Sr0.2TiO3 nanofibers via electrospinning

Ba_0.8Sr_0.2TiO₃/Poly (vinylpyrrolidone) (BST/PVP) composite fibers were successfully synthesized via electrospinning. The ceramic nanofibers were obtained after calcining the composite at 800 °C for 2 h. The morphology and structure of the BST fibers were characterized by scanning electron microscopy (SEM) and X-ray diffraction (XRD). The results reveal that the as-synthesized BST nanofibers show a diameter of 50-150 nm with the length over 0.1 mm, and a well-defined perovskite crystal structure. The electrical properties of the as-synthesized BST nanofibers were investigated through an impedance-type humidity sensor. The nanofibers exhibited excellent humidity sensing properties at room temperature. The possible sensing mechanism was proposed.     

Self-patterned Nano Structures in Structurally Gradient Epitaxial La0.5Ba0.5CoO3 Films

Highly epitaxial La_0.5Ba_0.5CoO₃ (LBCO) thin films with sharp interface and a thickness of 200 nm were epitaxially grown on (001) SrTiO₃ substrates using pulsed laser deposition. High-resolution transmission electron microscopy and electron diffraction analysis revealed that the films have a triple-layered structure. The first layer, close to the film/substrate interface, has a thickness of ~ 6 nm and is a defect free single crystal disordered cubic structure (a = 3.882 Å) which has a lattice mismatch of − 0.59% with respect to the substrate. The second layer which dominates the film structure has a single crystal disordered cubic structure (a = 3.854 Å) which has a lattice mismatch of − 1.31% with respect to the substrate. The third layer located on the top of the film has a thickness of several nanometers and consists of 112-type ordered tetragonal structure. The cubic structures in the first and second layer have an orientation relationship of (001)_LBCO//(001)_STO and < 100 > _LBCO//< 100 > _STO with respect to the substrate. Self-patterned 3-dimensional nano structures with a dimension range from 2 to 10 nm were formed in the second and third layers. These nano structures were formed by the enclosure of anti-phase boundary planes which are parallel to the {100} of the cubic structure. Epitaxial LBCO thin films with such nano structures are hard ferromagnetic with a large coercive field value and magnetoresistance effect value (~ 24%), and exhibit semiconductor behavior at temperatures < 300 K.     

The properties of Ba0.5Sr0.5TiO3 thin film prepared by RF magnetron sputtering from powder target

The Ba_0.5Sr_0.5TiO₃ (BST) thin film with the thickness of 400 nm deposited from powder target is prepared by the radio-frequency magnetron sputtering technique. The deposition rate of BST film is estimated to be 45 nm/min, which is very fast for ferroelectric materials. The dielectric properties of the as-prepared BST thin film are demonstrated. High dielectric tunability up to 42.7% and low dielectric loss small to 0.01 are achieved at a low applied voltage of 5 V. The results demonstrate that the RF magnetron sputtering from powder target is a versatile, novel technique for the deposition of high-quality ferroelectric thin films.