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串口通信在CVD金刚石膜生长系统中的应用 总被引:1,自引:0,他引:1
本文主要介绍在CVD金刚石膜生长系统中如何利用MSComm控件实现串口通信,并给出了以Delphi开发的实例程序。此外阐述了以分时循环方式实现单通道多信号采集的原理和实现方案。 相似文献
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泵的性能对系统有重要影响,为了对泵的各项参数进行监测,利用ARM和uClinux成功地开发了泵性能参数监测系统.该系统完成对泵性能参数的监测和数据的存储.整个系统采用数据采集板加上位机的开发模式.数据采集板采用单片机完成信号的分类与采集.上位机采用基于ARM和uClinux的嵌入式系统完成数据的接收,显示和存储.数据采集板和上位机之间采用RS232进行通信.目前,该系统已经应用于对潜艇上的泵的性能的监测.该系统很好地实现了对泵的性能的监测,通过对监测得到的泵的运行参数的分析,可以对泵进行故障预测. 相似文献
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为了解决离网型小容量风光互补发电系统在设计过程中缺乏必要的运行参考数据的问题,设计了一套运行参数数据采集系统.该系统主要由太阳能电池板、直流风力发电机、上位机、数传电台以及ADAM-5000数据采集模块等组成.利用Visual Basic 6.0开发上位程序,通过MSComm控件接收并记录运行参数以及自动计算气象等参数.该系统还具有报表和曲线绘制功能.所采集的运行参数为风光互补发电系统的设计、风光互补的匹配和优化计算、控制器开发等项目的开展提供了依据. 相似文献
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该文介绍了人造金刚石生产过程数据采集及Fuzzy-PID功率控制系统研制,系统由基于Rs485总线的嵌入式数据采集器/控制器和PC计算机组成。嵌入式数据采集/控制器由51单片机实现,采用C51语言编写数据处理程序;PC机作为监控主机,采用图形化语言LABVIEW开发上位机软件,并具有显示温度、功率等参数曲线、数据表格和存盘打印等功能;控制上采用模糊PID控制算法实现对金刚石压机系统功率的连续精确控制。实践表明,系统达到了设计要求功能和技术指标,取得比较好的测量与控制效果。 相似文献
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环境监测系统是当前物联网在环境领域的一个重要应用.现场数据采集仪对污染排放点进行实时监测和采集,通过各种通信网络实时发送到后端服务器进行处理.该系统从底层逐级向上可分为现场数据采集仪(现场机)、通信网络及监控中心(上位机)三层组成.通过测试工具SilkPerformer模拟现场机与上位机之间指令交互,验证通信协议符合性... 相似文献
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设计实现了基于虚拟仪器技术的电力谐波检测系统,该系统以80C196kc作为数据采集电路的核心部件,通过RS232串行口把采集到的数据发送给PC机,由PC端基于LabView软件编程实现各次谐波分量的有效值及相关参数的计算、电压电流波形和各参数的显示、控制等功能.实验结果表明该系统检测方便,精度较高,运行稳定可靠. 相似文献
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Although the unique properties of chemical vapor deposition (CVD) diamond films have made it a candidate material for radiation detectors, the polycrystalline nature of the films has severely limited the development of CVD diamond detectors. In this work, three CVD diamond films with different microstructure were grown by using a hot-filament chemical vapor deposition (HFCVD) technique and were fabricated as CVD diamond detectors. The electric contact is good ohmic for bias voltage up to 150 V. 5.9 keV 55Fe X-ray was used to measure the photocurrent and the pulse height distribution (PHD). For the detector based on the best quality film, the dark-current of 16.0 nA and the net photocurrent of 15.9 nA are obtained at an electric field of 50 kV cm−1. The PHD peak is well separated from the noise pedestal, indicating a high counting efficiency and a low detection limit. 相似文献
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文章采用微波等离子体化学气相沉积法,以单晶金刚石籽晶为衬底进行金刚石外延生长,通过拉曼光谱、扫描电子显微镜及光学显微镜等多种表征测试手段,系统地研究了衬底温度对单晶金刚石同质外延生长的影响机理.研究结果表明,衬底温度是影响同质外延单晶金刚石生长速率、生长模式和生长缺陷的重要因素:在一定温度范围内,单晶金刚石的生长速率随衬底温度的升高而增加,与此同时,金刚石的生长模式也由丘状生长转变为台阶生长.当单晶金刚石的生长厚度超过1 mm时,较高的衬底温度容易导致沉积层边缘部分产生孪晶等缺陷.拉曼光谱表征结果显示,微波等离子体化学气相法沉积的单晶金刚石质量优于传统的高温高压法. 相似文献
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The microstructure for high-density thermal inkjet (TIJ) is proposed to overcome the defect due to the limit of the nozzle density in conventional TIJs. To bring high-density TIJ, the heat transfer of diamonds by means of placing heaters on sidewall of ink inlet is used in order to minimize the area occupied by the heaters. In addition, manifold, inlet, pressure chamber and nozzle concerning the flow of ink are placed in-line. To demonstrate feasibility, TIJ for bubble visualization test is designed and fabricated. Diamond is deposited on the sidewall of inlet with Hot Filament CVD (HFCVD). The trench filling method and the side deposition method are executed for the vertical sidewall of diamond. To solve the problem for direct CVD deposition on Pt layer, Ta film is utilized as a passivation layer in the fabrication processing. The generated bubble confirms the possibility of the bubble formation by heat transfer of diamond.This work was supported by the Research Institute for Applied Science and Technology, Sogang University. 相似文献
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Alexandre BongrainAuthor Vitae Emmanuel ScorsoneAuthor VitaeLionel RousseauAuthor Vitae Gaëlle LissorguesAuthor VitaePhilippe BergonzoAuthor Vitae 《Sensors and actuators. B, Chemical》2011,154(2):142-149
We report on novel MEMS micro-transducers made of diamond and targeted for bio-sensing applications. To overcome the non-straightforward micromachining of diamond, we developed a bottom up process for the fabrication of synthetic diamond micro-structures involving the patterned growth of diamond using the CVD (chemical vapour deposition) technique, inside micro-machined silicon moulds. Here typical resonant MEMS structures including cantilevers fabricated using this method were characterized by measuring their first mode resonance (frequency and Q-factor) by Doppler laser interferometry. The experimental data matched the simulation data. Data from bare diamond cantilevers and from diamond cantilevers with actuation gold track on the surface were compared and showed a significant decrease in the resonant frequency in the presence of gold tracks. Nevertheless, comparisons with equivalent silicon structures demonstrated the superior performances of diamond cantilevers: the resonance frequencies were twice higher and the Q-factors 2.5 times higher for the diamond transducers. Diamond cantilevers sensitivity were measured using PMMA deposition and values as high as 227.4 Hz ng−1 were found. It was shown that diamond mass sensitivity values are typically two times higher than identical silicon devices. Finally, the limit of detection (LOD) of diamond cantilevers was found experimentally to be as low as 0.86 pg using our set up. This is suitable for many bio-sensing applications. 相似文献
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Maira Possas Lionel Rousseau Farbod Ghassemi Gaelle Lissorgues Emmanuel Scorsone Philippe Bergonzo 《Microsystem Technologies》2016,22(3):609-615
The exceptional chemical, mechanical and thermal properties of diamond make this material the ideal choice for resonant MEMS. Micro-cantilevers designed for biochemical applications have been fabricated using CVD diamond. In this work, the mechanical properties of these cantilevers were investigated by two different techniques: bending test using a Contact Surface Profilometer and resonant test, using a Laser Doppler Vibrometer. The Young’s Modulus of diamond thin film was estimated by these two tests. For the resonance test, the estimated values are comprised between 930 and 1300 GPa while bending test gives values between 950 and 1030 GPa. The load–displacement characteristics and the fracture point (or ultimate stress) have also been investigated. 相似文献
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Recent improvements in the quality of diamond films grown by Chemical Vapour Deposition (CVD) have made synthetic diamond
a very attractive material for detection applications. In this paper, polycrystalline diamond films synthesised by microwave
plasma enhanced CVD using a CH4–CO2 gas mixture, previously investigated as particle detectors, have been characterised by X-ray diffraction and Raman spectroscopy.
The detector response was measured in vacuo under irradiation with 5.5 MeV α-particle from a 241Am source. A systematic study of the influence of the film structural properties on the detector performance has been carried
out by changing the methane concentration in the growth plasma and the deposition temperature. The existence of a correlation
between growth conditions, film texturing and detector performance has been demonstrated. Independently of the substrate temperature,
(1 0 0) orientated films exhibit the lowest detection efficiencies. The meas ured collection distances are smaller than the
average grain sizes and seem to be limited by trapping centres within the grains. These results are confirmed by Raman analysis.
Received: 6 January 1999 / Accepted: 18 January 1999 相似文献
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A. Balducci Marco Marinelli M. E. Morgada G. Pucella G. Rodriguez M. Scoccia G. Verona-Rinati 《Microsystem Technologies》2006,12(4):365-368
The possibility to realize a high sensitive thermocouple by means of boron doped chemical vapour deposition (CVD) diamond
was investigated. The thermoelectric power of p-type diamond, grown by plasma enhanced CVD was studied for films of electrical resistivity in the 0.2–40 Ω cm range in order
to asses the dependence of thermocouple sensitivity on the doping level. The p-type diamond films were prepared by CH3OH + B2O3 vapour addition to a 1% CH4–H2 gas mixture during the growth. The conductive films were then tested tracing the I–V characteristic in order to study the
conduction properties of the films. An appropriate experimental setup was built to evaluate the thermoelectric properties
of the grown samples for different temperatures imposed between two ends of the samples. Firstly, the output voltage was measured
maintaining a reference temperature of 273 K at one end and varying the second temperature between 275.5 and 360.5 K. A constant
value of the temperature drop of 5 K was then used for an accurate evaluation of the thermoelectric properties of the diamond
films for different value of the average temperature. The measurements provided values of thermoelectric power in the range
0.3–0.6 mV/K while conductivity increases. These values showed different decreasing behaviour with increasing temperature
for different resistivity of the sample. In particular, more relevant changes in thermoelectric power were measured for high
resistive samples. 相似文献
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Medical applications on cardiovascular disease (CVD) for hybrid computing models are an emerging research area. The CVD, including stroke, hypertension, and high cholesterol, is one of 10 leading causes of death in Taiwan in middle-aged and elderly; in particular, the CVD has become the top killer in advanced countries. Thus, this serious but interesting issue triggers the study to focus on patients of the CVD. The study explores variables, influencing cardiovascular functions for four risk factors of blood pressure, blood glucose, blood fat, and kidney diseases, in the middle-aged and elderly. By the data collection of regular physical examination system from a regional hospital, the original dataset contains 52 variables collected from October 2011 to February 2014. We model a hybrid knowledge-based classification system to organize expert experiences, integrated linear and nonlinear attribute selection methods, data discretization of smart expert method, rough set theory, the LEM2 algorithm, and rule-filtering technique to classify the CVD for the early warning purpose. After data cleaning, 20 attributes with 2027 records are remained. For effectively identifying the variables of CVD subjects, this study reclassifies the above four risk diseases into three classes: no disease, 1&2 diseases, and 3&4 diseases. To verify performance of the proposed procedure, we experience an empirical experiment to compare the full 20 used attributes, the used attributes of integrated linear and nonlinear attribute selections with rule-filtering technique, and various classifiers. Conclusively, the 13 used attributes obtained from optimal accuracy become the key determinants that affect the four risk factors of the CVD. The empirical results and findings benefit doctors’ and medical institutions’ early medical recommendations and treatments with the advantages of significantly reducing morbidity of CVD. 相似文献