Nanometer stepping drives of surface acoustic wave motor

High resolution (from nanometer to subnanometer) stepping drives of a surface acoustic wave motor are presented. It was shown that step displacement was easily controlled by adjusting a number of driving waves, using a steel ball slider equipped with permanent magnet for preload. By means of this open loop control, the step displacement was controlled from centimeter-order to submicrometer-order. In this paper, using a silicon slider equipped with a ball bearing linear guide, the stepping motions of a surface acoustic wave motor were investigated. A laser interferometer equipped with a 2-picometer resolution displacement demodulator was introduced. Motions of the slider ranging from several hundreds of nanometers to several nanometers in each step displacement were observed. Reduction of the driving waves down to 25 cycles, under a 100 V/sub peak/ driving voltage and a 30 N preload condition, generated about 2 nm stepping motion using our experimental setup under an open loop condition. We also demonstrated subnanometer step movements. These experimental results indicated that the surface acoustic wave motor has an ability of subnanometer positioning with a centimeter-level stroke.     

Simulation of surface acoustic wave motor with spherical slider

The operation of a surface acoustic wave (SAW) motor using spherical-shaped sliders was demonstrated by Kurosawa et al. (1994). It was necessary to modify the previous simulation models for usual ultrasonic motors because of this slider shape and the high frequency vibration. A conventional ultrasonic motor has a flat contact surface slider and a hundredth driving frequency; so, the tangential motion caused by the elasticity of the slider and stator with regard to the spherical slider of the SAW motor requires further investigation. In this paper, a dynamic simulation model for the SAW motor is proposed. From the simulation result, the mechanism of the SAW motor was clarified (i.e., levitation and contact conditions were repeated during the operation). The transient response of the motor speed was simulated. The relationships between frictional factor and time constant and vibration velocity of the stator and the slider speed were understood. The detailed research regarding the elastic deformation caused by preload would be helpful to construct an exact simulation model for the next work.     

Estimation of the squeeze film effect in a surface acoustic wave motor

This paper describes the air film characteristic in the interface between the slider and stator substrate of a surface acoustic wave (SAW) motor, and the difference of the squeeze film effect by the form of the slider. Because the vibration amplitude of the SAW motor is several 10 nm order, analysis of pressure was performed by using the molecular gas-film lubrication (MGL) equation. In the analysis, the MGL equation was split into advection phase and nonadvection phase, and calculation of advection and nonadvection phases was performed by using the cubic interpolated propagation (CIP) method and the finite difference method, respectively. From analysis results it was found that the time to steady pressure of air film depends on the radius of projection arranged on the contact surface of the slider. Also found was that the steady pressure in the interface does not depend on the radius and height of the projection, but it depends on the minimum spacing between the slider and the stator substrate.     

表面弹性波马达的工作机理和优化设计研究

探讨了表面弹性波马达的工作机理和优化设计。采用具有能量循环功能的表现弹性波换能器结构，提高了表面弹性波马达效率，将马达的驱动电压阈值从100V降到了10V以下。在频率10MHz，峰峰值为10V的正弦的电压激励下，获得振动幅度为20nm的表面性波，马达的无负载速度达到0．34m/s，最大推动力输出达到0．06N。     

驻波声流马达

目前的超声马达研究与应用主要关注于接触驱动型,而对非接触型、非线性驱动的研究较少。在声场强度足够大时,声场的非线性效应足以在低频情形下驱动马达转子。利用驻波管中的强声场引起空气质点非周期运动形成声流,获得时均不为零的驱动力,驱动非接触型轻质马达叶轮运转。在理论分析的基础上,经过管端修正,最后通过实验发现,马达相对转速曲线与驻波声场理想声压曲线吻合。在实验中还观察到马达叶轮能够达到较快的转速,并且转速可以通过声场频率和马达所处位置来调节。     

Emission of a surface acoustic wave by an internal acoustic wave propagating near the surface

It was observed that the propagation of an internal acoustic wave near a surface is accompanied by the excitation of a surface acoustic wave directed at an angle to the internal wave. Pis’ma Zh. Tekh. Fiz. 24, 57–61 (September 26, 1998)     

Elastic wave propagation in a microstructured acoustic fiber

Elastic wave propagation along the structure of hollow cylinders in a linear isotropic medium is investigated. The multipole method for modeling elastic waves propagation in such structures is formulated and implemented. Using the multipole method, dispersion dependencies of the structures (microstructured fibers) containing 3, 6, and 7 hollow cylinders are calculated. Comparison with wave dispersion properties along one cylinder is made. Also, an approximate physical model based on an equivalent coaxial waveguide and multipole method is proposed. Exploiting this model, wave dispersion of the wave propagating along a structure with 18 hollow cylinders is calculated. Validation of the model is also proposed.     

Simulation of surface acoustic wave devices

The Mason crossed-field circuit model is generalized to simulate apodized interdigital transducers without channel division. The apodized transducer model is based on the transmission line model, and the artificial transformer with different voltage and current coupling ratios is used to independently obtain the transfer function and radiation admittance. In addition, a heuristic expression for transformer current ratios is used to approximate the radiation admittance of apodized transducers. Through comparing with the multichannel model, this unichannel model is illustrated to successfully describe the frequency response of apodized interdigital transducers.     

A new point contact surface acoustic wave transducer for measurement of acoustoelastic effect of polymethylmethacrylate

A new acoustic transducer and measurement method have been developed for precise measurement of surface wave velocity. This measurement method is used to investigate the acoustoelastic effects for waves propagating on the surface of a polymethylmethacrylate (PMMA) sample. The transducer uses two miniature conical PZT elements for acoustic wave transmitter and receiver on the sample surface; hence, it can be viewed as a point- source/point-receiver transducer. Acoustic waves are excited and detected with the PZT elements, and the wave velocity can be accurately determined with a cross-correlation waveform comparison method. The transducer and its measurement method are particularly sensitive and accurate in determining small changes in wave velocity; therefore, they are applied to the measurement of acoustoelastic effects in PMMA materials. Both the surface skimming longitudinal wave and Rayleigh surface wave can be simultaneously excited and measured. With a uniaxial-loaded PMMA sample, both acoustoelastic effects for surface skimming longitudinal wave and Rayleigh waves of PMMA are measured. The acoustoelastic coefficients for both types of surface wave motions are simultaneously determined. The transducer and its measurement method provide a practical way for measuring surface stresses nondestructively.     

Elastic effects of polymer coatings on surface acoustic waves

Surface acoustic wave (SAW) devices are presently receiving careful scrutiny for applications in chemical sensing as well as in polymer characterization. Gas monitors based on SAW sensors have the potential for miniaturization and high sensitivity to a wide variety of substances. Polymer characterization is applicable to such diverse fields as protective coating design and decontamination of polymers. To better understand the physical mechanisms behind SAW response, the effects of the elastic properties in comparison to the mass loading of polymer coatings on SAW substrates were investigated. A theoretical basis for the effects of vapor-induced swelling or of thermal expansion was established. Compressive tension and its effect on SAW frequencies were found to be simple to describe, if there is no film slippage or polymer flow. The response of quartz substrate SAW crystals coated with polycarbonate and polyimide (glassy polymers) upon exposure to toluene and methanol was measured. Practical problems as to film uniformity, thickness measurement, and environmental control necessary in such measurements are described. Contrary to recent reports in the literature, no significant elastic tightening effect was observed with these vapor/polymer pairs.     

Ultrasonic linear motor using surface acoustic waves

The first success in the operation of an ultrasonic linear motor at HF band driving frequency using the Rayleigh wave is described. The substrate material is a 127.8° Y-cut LiNbO₃ wafer whose diameter is three inches. Four interdigital transducers (IDT's) are arranged to excite x- and y-propagation waves in both directions. The dimensions of the IDT are 25 mm aperture size, 400 μm pitch, 100 μm strip width, and 10 pairs. The operation area is about 25 mm square, The driving frequency is about 9.6 MHz in the x direction and about 9.1 MHz in the y direction. The most important point of the success is the shape of the contact surface and slider materials. For the contact materials, small balls about 1 mm in diameter are introduced to obtain sufficient contact pressure around 100 MPa. The use of ruby balls, steel balls, and tungsten carbide balls is investigated. Each slider has three balls to enable stable contact at three points. The maximum transfer speed is about 20 cm/s. The transfer speed is controllable by changing the driving voltage     

Sensitivity of point- and line-source laser-generated acoustic wave to surface flaws

Laser generation and air-coupled detection were combined as a hybrid ultrasonic technique for the inspection of surface flaws in rails. Narrowband acoustic signals were generated using a formed laser source by focusing the laser light to a point and to a line on the surface of the rail. The pulse energy, and therefore the intensity of the laser source, varied such that the generated signal transitioned from the weak thermoelastic to the strong ablative regime. The detection of flaws using a laser-generated surface acoustic wave, in the presence of surface flaws, was compared between both point and line laser sources operating under different pulse energy levels. The line source was found to be more sensitive to the presence of surface flaws than a point source. The sensitivity of the laser-generated acoustic signal appeared to be independent of the severity of the flaw and, within the ablative regime, independent of the laser-pulse energy. Theoretical analysis is provided to explain the underlying cause that influences the interaction of a formed laser-generated surface acoustic wave to surface flaws and how this sensitivity may vary between the thermoelastic and ablative regimes.     

Calculations of the coefficient of friction under elastic contact conditions

Expressions for the friction coefficient were derived for the case of elastic contact between rough materials. The computation was based on the assumption that the friction force in the case under consideration is due to hysteresis losses during the deformation of a thin surface layer of one friction pair component by protuberances on the counterpart surface and due to molecular interaction at the solid/solid interface in the contact zones. The minimum value of the friction coefficient was calculated, and it was shown that it depends on the degree of surface roughness, physicomechanical properties of friction pair materials and the magnitude of tangential stresses ₀ at the solid/solid interface.     

Elastic surface wave devices based on piezoelectric thick-films

A study has been performed for the development of elastic-waves structures, involving screen printed and fired piezoelectric layers on nonpiezoelectric substrates, intended for new families of thick film sensors. This study approached the electroacoustic effects, i.e., the coupling between electromechanical parameters of the layers and elastic properties of the substrate, related to the wave propagation. In this work, particular attention is devoted to devices implemented on alumina substrates where SAW as well as (symmetric and antisymmetric) Lamb's waves are generated. The realization processes and the performance characteristics of these structures are presented     

Evaluation of a novel surface acoustic wave gyroscope

A novel type of gyroscope sensor using metal dot arrays on the surface of a surface acoustic wave (SAW) device has recently been independently proposed. In this paper, we report experimental trials of several devices fabricated to evaluate the effects described and also an order-of-magnitude estimate of the sensitivity to be expected. The conclusions are that this device is extremely insensitive as currently proposed     

声表面波谐振器型振荡器的研制

本文介绍了金属条射栅双端对声表面波谐振器型的原理和结构特点，给出了一种采用声表面波谐振器稳频的低噪声，高稳定性的振荡器电路设计方案。对影响振荡器频率稳定度的因素进行了分析讨论，并探讨改善声表面波振荡器频率稳定性的方法。该声表面波谐振器的中心频率为１２０ＭＨｚ，无载Ｑｖ，大于２０，０００，插入损耗小于６．０ｄＢ，经测试，秒级频率稳定度为１０＾－１０数量级，在自由室温下的日平均波动为１０＾－６／ｄ数量     

Nonlinear reflection of surface acoustic waves from contact lines

We present the results of an experimental investigation of nonlinear processes accompanying the interaction of surface acoustic waves (SAWs) with real cracking defects and contact lines. The dynamic characteristics of the nonlinear reflection of higher harmonics are presented. It is shown that the third harmonic generation has a pronounced threshold character, the dynamic characteristics exhibit hysteresis, and the efficiency of nonlinear response depends on the duration of SAW action on the defect. The results lead to a conclusion that the nonlinear reflection of SAWs from a contact line provides an adequate model of reflection from a real cracking defect.