衍射法X射线激光分束光栅平行度测量系统(英文)

介绍了软X射线光栅分束镜Mach-Zehnder干涉等离子体诊断系统调整用双频光栅线条平行度的衍射法测量系统.该系统主要由激光器,准直镜,待测光栅,精密转台(含角度测量仪),直线工作台,光栅调节架和探测器组成.分析了系统中各种误差对测量精度的影响其中包括距离测量误差、波长误差、光栅准直误差即光栅刻线与入射光和反射光组成的平面不垂直、光栅转动过程的误差、光栅表面面型误差、探测器误差,经计算得到系统的绝对误差为minute.计算表明,该系统的测量精度满足软X射线Mach-Zehnder干涉系统对双频调整光栅的性能要求.     

用数字波面干涉仪快速检测平晶的平行度

文章提出了一种新的检测方法即用数字波面干涉仪检测平晶的平行度.分析了测量不确定度的来源,并对测量不确定度进行了分析评定.与传统的方法相比在保证测量准确度的前提下,大大提高了工作效率.     

Simple high-precision method for measuring the specular reflectance of optical components

We present a simple method to determine precisely the specular reflectance of optical components. The absence of transmissive elements in this method makes a wide spectral range available. High accuracy and precision are achieved with a fast, periodic change between the reference beam and the probe beam. Special efforts were made to eliminate inhomogeneities of beam intensity and detector sensitivity. With our experimental setup we obtain a precision of ±3 × 10(-4) at the wavelength of 10.6 μm and ±3 × 10(-5) at 1.06 μm for a single-bounce-measuring setup.     

Numerical study of a method for measuring small linear and angular displacements by laser interferometers

A measurement method for small linear and angular displacements with laser interferometers is developed; a mathematical model is presented for measurements taking account the vector nature of laser radiation. Results of a calculation-theoretical study on the basis of this method are presented. __________ Translated from Izmeritel’naya Tekhnika, No. 1, pp. 9–13, January, 2007.     

An optical method of measuring aqueous-solution pH

Measurement Techniques -     

用于微位移测量的迈克尔逊激光干涉仪综述

迈克尔逊干涉术测量微位移可实现纳米甚至更高的分辨力,并且具备能直接溯源至激光波长等诸多优点,是目前微位移测量的重要技术手段.以限制迈克尔逊干涉仪品质提高的非线性误差为主要切入点,对目前各种基于迈克尔逊干涉原理的激光干涉技术进行了分类介绍,主要讨论了微位移测量中实现高精度和高分辨率的干涉测量技术,最后展望了激光干涉法测量...     

Experimental evaluation of the interference method of measurement of displacements on the basis of illumination of the surface of a test object

Results from experimental studies of a laser displacement measurement device that implements a new interference method of measurement based on illumination of the surface of a test object are presented. Translated from Izmeritel’naya Tekhnika, No. 10, pp. 26–30, October, 2008.     

双波长激光量块干涉仪减小量块中心长度测量不确定度的措施

该文总结了双波长激光干涉仪研制过程中减小量块中心长度测量不确定度的几项重要措施,该干涉仪对量块中心长度的测量不确定度达到(0.02±0.2L)μm,并已成功应用于高等级量块的自动测量。     

1等标准光滑圆柱环规检测装置

本装置是在具有高精度导轨的SIP三坐标测量机上架设激光干涉仪作为测量标准器,利用电感测微仪作为瞄准器,使测量可以直接溯源到激光波长,实现了1等标准光滑圆柱环规的高精度测量。装置对φ50mm标准环规直径测量的不确定度达到70．15μm。通过与瑞士国家计量局和国家计量院的比对测量证实,无论在国内还是国际环规测量方面,该装置已达到先进水平。     

基于面阵CCD的激光角度测量系统的研究

介绍了一种以激光作光源,采用光学成像原理和CCD图像采集技术实现激光角度测量的方法,给出了系统构成和测量原理,并对系统可达精度及其影响因素进行了分析。结果表明,系统在50~200m的测量距离和±5°的测量角度内时,测量精度可以达到0.05mrad,满足了隧道盾构施工中对盾构机方位角的高精度测量要求。     

An optical method for measuring the near-wall volume fraction in granular dispersions

The volume fraction plays a crucial role in the dynamics of granular flows. This work is devoted to developing a novel cost-effective optical method for determining the near-wall volume fraction. By means of a numerical investigation, performed by Monte Carlo generations of mono-disperse sphere distributions under controlled illumination conditions, the stochastic relationship between the near-wall volume fraction and a measurable quantity, referred to as two-dimensional volume fraction, is figured out. A binarization algorithm is proposed for estimating the two-dimensional volume fraction from gray-scale digital images. The relation is found to be of exponential type, with parameters only depending on the angle of incidence of light. An experimental investigation is designed for implementing the proposed method to a real laboratory context. The laboratory campaign, performed on dispersions of white plastic grains immersed in different ambient fluids, enables us to validate the proposed approach. It is found that the exponential law provides results in sound agreement with experimental data. Sensitivity analyses are also performed to confirm and evaluate the robustness and the accuracy of the proposed method.     

光反射干涉谱新方法测试薄膜厚度和光学常数

依据测量薄膜和光之间相互作用可确定薄膜特性的原理,并基于光反射干涉谱与德国最新研发薄膜分析软件SCOUT的新方法可测量已知或未知材料的多层薄膜厚度及其折射率n、消光系数k。通过实际测试证明：该方法可测试单晶硅、玻璃、ITO玻璃基底上沉积薄膜的厚度,样品基本不需要特别准备,对样品无破坏性,测试精准。理论上可以测量所有透光或半透光薄膜的厚度和光学常数,操作非常简便,适合于镀膜行业的在线检测和实时监控,且SCOUT软件在多层膜及多种材料的研发、制备等方面具有应用潜力。     

激光干涉仪与纳米精度检测

文章对光外差、移相、正弦相位调制等几种常见的纳米精度干涉测量技术进行了综述 ,并介绍了上海光机所的相关工作 .     

An interferometric method for simultaneously determination the phase retardation and fast-axis azimuth angle of a wave plate

In this study, an interferometric method was proposed for the simultaneous measurement of phase retardation and fast-axis azimuth angle of a wave plate by using a Mach–Zehnder interferometer. The wave plate to be tested is placed in one of the light passages in the interferometer, and two analyzers with transmission axes at horizontal and vertical orientations are arranged at the two output regions. When a linearly polarized laser light beam is passed through the interferometer, two interference light beams are simultaneously generated. Through an analysis of the intensities of the two light beams, the phase retardation and fast-axis azimuth angle of the tested wave plate can be simultaneously determined using specially derived equations. The feasibility of the proposed method was demonstrated using measurements of zero-order half-wave and zero-order quarter-wave plates. The proposed method is easy to operate, enables rapid measurement, and has high stability and accuracy.     

利用线阵CCD非接触测量材料变形量的方法

用线阵CCD作为光电传感器非接触测量材料拉伸过程中的变形量，不但比常规的引伸计测量的方法更客观，而且可以测量材料拉伸变形到断的全过程。该方法能在X和Y两上方向上同时测量材料变形量，可以获得材料在实验的全过程中两上方向的“应力－应变”关系曲线。采用CCD拼接技术，测量精度可达到1μm，测量范围80mm。     

Method for measuring nitrogen and helium concentration in fuel components

An approach is considered for organizing indirect measurements of nitrogen and helium in liquid fuel components based on creating an equilibrium distribution between vapor-gas and liquid phases, determination of temperature, pressure, and thermal conductivity of the equilibrium vapor phase, followed by calculation using Henry constants. Translated from Izmeritel’naya Tekhnika, No. 4, pp. 65–67, April, 2009.     

Two-beam interferometer for measuring aberrations of optical components with axial symmetry

We present a concept of interferometric testing, believed to be novel, that can be applied to measuring aberrations of optical components that have rotational symmetry. The optical configuration uses two coherent, collimated wave fronts that are tilted to impinge upon the optical component being tested such that one beam is on axis and the other is off axis. For small tilt angles the two aberrated wave fronts can be considered to be carrying the same aberrations. Furthermore, the off-axis beam is displaced along a direction orthogonal to the optical axis of the component. Interference between the two aberrated wave fronts produces a fringe pattern that is similar to a lateral shear interference pattern. Moiré fringes are obtained by spatial beating of the interference pattern with a CCD TV camera array. Under such conditions it is possible to subtract most of the linear carrier that is intrinsically present in the resultant fringe pattern owing to the large defocus aberration and tilt.     

激光干涉比长仪的新型瞄准方法——提高线纹尺的测量精度

介绍一种在激光干涉仪上对线纹尺进行高精度瞄准的新方法－－单狭缝多点采集系统,详细描述了其设计方案和工作原理,并介绍了确定刻线定中心位置的计算方法、消除随机噪声的数字滤波法及对钟形曲线进行直线拟合的合适区段。实测数据表明,这种新型瞄准方法的测量不确定度有很大的提高。