Preparation and characterisation of a-C and a-C:H coatings deposited by pulsed magnetron sputtering

The amorphous carbon coatings of a-C and a-C:H type were deposited by pulsed magnetron sputtering in argon and argon/acetylene atmosphere, respectively. The deposition rate, chemical composition, structure and mechanical properties of these coatings were studied as a function of acetylene flow rate. The adding of acetylene to working atmosphere caused increase of deposition rate and hydrogen content in coatings, and at the same time decrease in their hardness. The friction and wear behaviour of a-C and a-C:H coatings in ambient air are highly dependent on kind of counterparts material. The “true” friction coefficients of a-C and a-C:H coatings sliding against a-C and a-C:H coatings, respectively, are similar in values (0.06-0.08) and wear rates are similar too. Significantly higher friction coefficients (0.2-0.3) and wear rates were observed for both a-C and a-C:H coatings sliding against 100Cr6 steel. The lowest friction coefficients (0.02-0.04) and wear rates were obtained for a-C and a-C:H coatings sliding against Alumina counterpart.     

Microstructure and tribology of TiC(Ag)/a-C:H nanocomposite coatings deposited by unbalanced magnetron sputtering

TiC(Ag)/a-C:H nanocomposite coatings with various Ag concentrations were fabricated on Si p(100) substrates. The composition and structure of as-deposited nanocomposite coatings were systemically investigated, and the friction and wear behaviors were also evaluated under the ambient, high temperature and high vacuum, respectively. Results show that the TiC nanocrystallites were formed in the amorphous hydrogenated carbon matrix near the substrate. The co-dopant Ag possessed nanocrystalline structure in the as-fabricated coatings whilst it formed Ag clusters (10–50 nm) on the surface. Furthermore, the introduction of Ag caused a significant reduction in the residual compressive stress without considerable decrease of the hardness and improved the adhesive strength of nanocomposite coatings. Tested as-deposited and after annealed at 500 °C coatings, the TiC(Ag)/a-C:H coatings showed a reduction of friction coefficients and wear rates with increment of Ag concentration. Under high vacuum condition, the TiC(Ag)/a-C:H coatings presented superlow friction behavior where the friction coefficient was reduced from 0.01 to 0.005 and lifetime increased from 0 to 1500 cycles. The significant improvement in tribological properties was mainly attributed to the low shear strength of Ag clusters on the surface as well as Ag diffusion to surface and wear track of coatings. The superior friction and wear behaviors of TiC(Ag)/a-C:H coatings make them good candidates as solid lubrication materials in space and aircraft applications.     

Depth profile analyses of nc-TiC/a-C:H coating prepared by balanced magnetron sputtering

Nanocrystalline titanium carbide embedded in an hydrogenated amorphous carbon matrix (nc-TiC/a-C:H) shows high hardness and Young's modulus together with low wear and low friction coefficient. In this paper, we report on the preparation of well adherent nc-TiC/a-C:H coatings ~ 5 μm thick on stainless steel substrates using a well balanced magnetic field configuration and only very low power RF bias on the substrate. Hardness and Young's modulus of these coatings are 43 GPa and 380 GPa, respectively. The mechanical properties – hardness and Young's modulus – measured from the coating's top reach the values obtained at optimized experiments where the unbalanced magnetic field configuration was used. A simple method of depth profiling suitable for evaluation of mechanical properties of several micrometers thick coatings is developed and employed. The paper reports on the depth profile analyses of the coating hardness, Young's modulus, composition and morphology.     

Corrosion and tribo-corrosion enhancement of SS301 and Ti–6Al–4V substrates by amorphous hydrogenated SiN/SiC/a-C multilayer coating architecture

Amorphous hydrogenated silicon-based multilayer coatings were deposited on 301 stainless steel (SS301) and Ti–6Al–4V alloy substrates using plasma enhanced chemical vapor deposition (PECVD), in order to integrate the advantages of the respective layers. Corrosion and tribo-corrosion behaviors of the complete coating/substrate system on different substrates were investigated. The SiN/SiC double-layer coating substantially improved the corrosion resistance of the metals: For SS301, the corrosion current, i_corr, was reduced by more than three orders of magnitude, and the breakdown voltage was increased from 0.34 to 1.37 V. For Ti–6Al–4V, the i_corr was decreased by a factor of ~ 50. Particularly, the Ti–6Al–4V/SiN/SiC multilayer system exhibited excellent anti-corrosion properties according to potentiodynamic polarization measurements, due to the superior corrosion resistance of both the Ti–6Al–4V substrate and the silicon-based coatings. Further enhancement of the tribo-corrosion resistance has been achieved by applying an amorphous hydrogenated carbon (a-C) coating as a top layer in the three-layer system. In the tribo-corrosion test in 1 wt.% NaCl solution, the SiN/SiC/a-C coating reduced the wear rate and the friction coefficient by a factor of ~ 175 and ~ 4, respectively, compared with the bare Ti–6Al–4V. The Ti–6Al–4V/SiN/SiC/a-C multilayer system integrates in synergy the advantages of the respective layers, and its versatility makes it a particularly attractive candidate for applications in different harsh working environments.     

Effect of hydrogen content in a-C:H coatings on their tribological behaviour at room temperature up to 150 °C

Hydrogenated amorphous carbon (a-C:H) coatings deposited onto steel substrates by plasma assisted CVD, using different precursor gases (1 < H/C ratio < 4) were tested for their tribological behaviour. The H content in these coatings ranged from 25 to 29 at.%. Fretting mode I tests were performed on different couples consisting of coated and/or uncoated first bodies. Some tests were performed after a heat treatment of the coatings. As-deposited a-C:H/corundum couples tested at 23 °C and 50% RH showed lowering of the coefficient of friction at increasing normal load. Graphitisation is taking place in sliding contacts at high normal loads. For a-C:H/corundum couples a clear minimum in the coefficient of friction was noticed at 100 °C for coatings containing 27 at.% H. The coefficient of friction recorded on such couples is high compared to the one recorded on as-deposited a-C:H/a-C:H couples. However for the a-C:H/a-C:H couple, a lowering of the coefficient of friction with increasing fretting test temperature was noticed. The decreasing coefficient of friction was accompanied by an increasing wear. Graphitisation is causing severe degradation of a-C:H coatings at high test temperatures. An energetic analysis of the wear is finally reported. It appeared that the wear volume recorded at RT on as-deposited a-C:H coatings varies linearly with the cumulative dissipated energy. The wear rate coefficient decreases with increasing H-content. A stabilization of the sp³ bonds with increasing H-content might explain this behaviour. Confirmation was found by performing high temperature fretting tests. Interesting is the finding that fretting tests at RT performed after a thermal treatment of a-C:H coatings at either 100 or 150 °C, show a friction and wear behaviour identical to the ones recorded on as-deposited coatings tested at RT.     

Improvement in load support capability of a-C(Al)-based nanocomposite coatings by multilayer architecture

Due to severe operating conditions and long lifetime requirements for mechanical components, the great challenge is to develop coatings with anti-wear and high load support capability. The designs for nanocomposite protective coatings are very promising and provide an attractive alternative to take into account the multilayer architecture. In this work, a-C(Al)-based nc-TiC/a-C(Al), nc-CrC/a-C(Al) and nc-WC/a-C(Al) nanocomposites were constructed by Cr/CrN/CrCN multilayer. The microstructure, mechanical properties, friction and wear behaviors for these multilayer coatings were systemically investigated. Results showed that the top-layered nc-TiC/a-C(Al), nc-CrC/a-C(Al) and nc-WC/a-C(Al) nanocomposites were dominated by typically nanocrystallite/amorphous microstructure, and these nanocomposites constructed by multilayer approach presented superior mechanical properties which possessed relatively high hardness, low internal stress as well as high adhesion strength. Particularly, the as-fabricated nc-TiC/a-C(Al), nc-CrC/a-C(Al) and nc-WC/a-C(Al) multilayer coatings exhibited superior anti-wear capability under relatively high applied Hertzian contact pressure compared to corresponding monolayer coatings. The improvement in friction and wear performances of as-fabricated multilayer coatings was mainly attributed to superior mechanical properties and formation of graphitized tribofilm as well as high load support capability by multilayer architecture, indicating that these coatings might be good candidates as solid lubrication materials in engineering applications.     

Wear and corrosion behavior of CrCN/CrN coatings deposited by cathodic arc evaporation on nitrided 42CrMo4 steel substrates

In the paper, the results of wear and corrosion tests of the CrCN/CrN multilayer coatings, formed by cathodic arc evaporation on 42CrMo4 (AISI 4140) steel substrates are presented. The substrates were subjected to thermo-chemical treatment–nitriding with various nitriding potential. The results of nitriding were determined by XRD and the hardness profile in the samples cross-section. The morphology of thin coatings was examined with SEM. A Vickers FV-700 and Fisherscope HM2000 hardness testers enabled to investigate hardness of steel substrates and CrCN/CrN coatings respectively. A pin-on-disc wear tests were used to determine the hardness and tribological parameters of the coatings: the coefficient of the friction and wear rate. The scratch test and Rockwell test were applied to assess the adhesion of the coatings to the substrates. The corrosion properties of coating–steel substrate systems were investigated using potentiodynamic polarisation tests. Corrosion potential, corrosion current density and polarization resistance were determined. It was found that that the nitriding of steel substrates improves properties of the coating–substrate system. The nitriding 42CrMo4 steel substrate with low nitriding potential enable to obtain substrates without surface “white layer” what favours good adhesion of the coating to the substrate. The CrCN/CrN multilayer coating–steel substrate systems show good mechanical and tribological properties and corrosion resistance.     

Optimizing the tribological properties and high-speed drilling performance of a-C:H coatings via nitrogen addition

a-C:H:N_x% coatings with various levels of nitrogen addition ranging from 0 to 29 at.% are deposited on high-speed steel substrates and micro-drills utilizing a Closed Field Unbalanced Magnetron (CFUBM) sputtering technique. The tribological properties of the various coatings are evaluated by performing reciprocating sliding wear tests against an AISI 1045 steel cylinder under an applied load of 100 N. Additionally, the machining performance of the coated micro-drills is investigated by conducting high-speed through-hole drilling tests utilizing Printed Circuit Board (PCB) specimens. The experimental results reveal that the a-C:H:N_8% coating possesses the best tribological properties, namely the lowest wear depth, the lowest friction coefficient and the longest lifetime. In addition, it is shown that the a-C:H:N_8% coating increases the lifetime of the micro-drill by a factor of three compared to that of an uncoated micro-drill.     

TiN/TiCN/Al2O3/TiN与TiN/TiCN/Al2O3/TiCNO多层涂层的组织性能比较

目的对比TiN/TiCN/Al_2O_3/TiN和TiN/TiCN/Al_2O_3/TiCNO两种多层涂层的组织性能。方法采用化学气相沉积(CVD)技术在硬质合金基体上沉积TiN/TiCN/Al_2O_3/TiN和TiN/TiCN/Al_2O_3/TiCNO两种多层涂层。通过X射线衍射仪(XRD)和扫描电子显微镜(SEM)分析涂层的物相和组织形貌,采用纳米力学测试系统测试涂层顶层的硬度和弹性模量,利用显微维氏硬度计和划痕仪分别测量涂层的显微硬度和结合强度,利用往复式多功能摩擦磨损试验机研究涂层的摩擦磨损性能。结果顶层TiN晶粒为柱状晶,顶层TiCNO晶粒呈细针状。与顶层TiN相比,顶层TiCNO硬度更大,抗塑性变形能力更强。与以TiN为顶层的多层涂层相比,以TiCNO为顶层的多层涂层表面粗糙度、摩擦系数较大,结合强度较低。当磨损只发生在顶层时,耐磨性取决于顶层涂层的性能,TiN/TiCN/Al_2O_3/TiN的磨损体积和磨损率为TiN/TiCN/Al_2O_3/TiCNO的1.2倍。当磨损进行到顶层与Al_2O_3层界面时,结合强度对耐磨性也有重要影响,TiN/TiCN/Al_2O_3/TiN的磨损体积和磨损率是TiN/TiCN/Al_2O_3/TiCNO的82%。结论与TiN/TiCN/Al_2O_3/TiN相比,TiN/TiCN/Al_2O_3/TiCNO的顶层TiCNO硬度较大,抗塑性变形能力强,其顶层耐磨性较好。改善TiN/TiCN/Al_2O_3/TiCNO多层涂层表面粗糙度和结合强度将进一步提高该涂层的摩擦磨损性能。     

Improvement of a-C:H film adhesion by intermediate layers and sputter cleaning procedures on stainless steel, alumina and cemented carbide

The adhesion of amorphous hydrogenated carbon (a-C:H) films deposited in a radio frequency (r.f.) plasma discharge on stainless steel, alumina and cemented carbide with different intermediate layers (Ni, Ti and TiC) and sputter cleaning procedures was studied. The composition of the carbon films and the intermediate layers as well as the interface between the coating and the substrate was determined by secondary ion mass spectroscopy (SIMS). The adhesion experiments were carried out using a scratch tester. Tested specimens were also studied by scanning electron microscopy (SEM) to reveal the morphology of the coatings and the scratches.

Without any intermediate layer, the a-C:H coatings generally had insufficient adhesion to the substrate materials studied. For stainless steel and cemented carbide substrates, the TiC intermediate layer and, for alumina substrates, the titanium intermediate layer gave the best adhesion values evaluated by the scratch test. Also, the sputter cleaning of the substrates prior to deposition was necessary for sufficient adhesion of the coating. The intermediate layers also change the failure mode of the coating in the scratch test in some cases.     

Structure and properties of silver-containing a-C(H) films deposited by plasma immersion ion implantation

In this study, we have grown silver-containing hydrogenated (a-C:H) and non-hydrogenated (a-C) amorphous carbon coatings by two plasma immersion ion implantation methods: I) chemical vapor deposition of methane combined with pulsed filtered cathodic arc deposition of silver, and II) by alternating arc pulses from graphite and silver in a dual cathodic arc plasma source. This unique “bias selective” feature of the deposition system allowed the deposition of silver with the substrates at ground and avoided the sputtering of the grown a-C film. Chemical composition of the samples was analyzed by acquiring their compositional depth-profiles using radio-frequency Glow Discharge Optical Emission Spectroscopy (rf-GDOES), while the microstructural properties were analyzed by X-ray absorption near edge spectroscopy (XANES) and Raman spectroscopy. In this contribution, we compare mechanical and biomedical properties by means of nanoindentation and cell viability tests, respectively, of a-C(H) films obtained by two different plasma immersion ion implantation techniques.     

Wear Properties of Plasma Nitrided H13 Steel at Room and Elevated Temperature

H13 steel was nitrided using a plasma surface alloying technique at the temperature of 570℃.The nitrided layers with different thicknesses and components were obtained by changing nitriding pressure.The microstructure and composition of the nitrided layers were evaluated by optical microscopy(OM)and X-ray diffraction(XRD).The wear properties of the nitrided layer against Al2O3 ball at room temperature using a ball-on-disc tribometer and against Si3N4 ball at elevated temperature using a HT-2001 abrasive wear test machine were investigated.The results show that the nitrided layers are composed of compound layer and diffusion layer at the pressure of 100 and 450 Pa.No obvious compound layer appears at pressure of 200 and 300 Pa.XRD analysis shows the nitrided layers are mainly composed ofε-Fe2-3N,γ’-Fe4N,α-Fe,Fe2O3 and Fe3O4 phases.The surface hardness of plasma nitrided H13 steel is about 1100HV0.050 doubled that of substrate.The room temperature friction coefficient of H13 steel is reduced and wear rate is decreased by nitriding at 200 and 300 Pa.Elevated temperature wear test indicates the nitrided H13 steel at the pressure of 100 Pa shows lower friction coefficient and wear rate which are reduced more than 6 times compared with that of H13 substrate.     

Adhesion and dynamic impact wear of nanocomposite TiC-based coatings prepared by DCMS and HiPIMS

Nanocomposite nc-TiC/a-C:H coatings exhibit a unique combination of mechanical properties such as high hardness, and low friction and wear. These physical and mechanical properties make those coatings attractive for application in industry. However, the properties of the whole coating/substrate system such as adhesion of the coating to substrate and its response on repeated impact loading known such as dynamic impact wear are also important for industrial applications. Thus, this paper is focused on the adhesion and the dynamic impact wear of nc-TiC/a-C:H coatings prepared by the hybrid PVD-PECVD process. Two series of nc-TiC/a-C:H coatings with a different amount of carbon were deposited onto commonly used industrial cemented tungsten carbide substrates using DC magnetron sputtering (DCMS) and the high power impulse magnetron sputtering (HiPIMS) of a titanium target in argon and acetylene mixture atmosphere. Both series of coatings were analysed using a scratch test and dynamic impact tester with an impact load of 600 N. The HiPIMS prepared coatings exhibited lower thickness and lower thicknesses of the Ti adhesive interlayers between the substrates and coatings than the DCMS prepared coatings. Thus, the adhesion and the impact wear of both series were discussed separately. These properties were discussed with respect to the coating microstructure, phase composition and mechanical properties such as the hardness H, the effective elastic modulus E, and the H/E and H³/E² ratios. The scratch adhesion of coatings depended on the H³/E² ratio and coating microstructure, hardness and surface roughness. The impact wear of the nc-TiC/a-C:H coatings depended on the H/E ratio and coating microstructure.     

等离子喷涂强化H13钢铸铝压铸模实验研究

为解决H13钢铸铝压铸模普遍存在的抗热腐蚀能力差、强度低等问题,采用等离子喷涂工艺在H13钢基体上制备了Al2O3和Al2O3-TiO2两种硬质涂层。以喷涂电流、喷涂电压、喷涂距离为试验参数进行正交试验,采用MH-6型显微硬度仪和HSR-2M往复摩擦磨损试验机测试了涂层的显微硬度和磨损质量,通过对显微硬度的极差和方差分析,确定了影响涂层显微硬度的主次因素和显著因素,优化了喷涂工艺参数。结果表明,Al2O3-TiO2涂层的硬度982.0 HV,摩擦系数平均值为0.41～0.45,磨损量平均为0.89～0.93 mg;Al2O3涂层的硬度1446.2 HV,摩擦系数平均值为0.32～0.35,磨损量平均为0.58～0.62 mg。Al2O3涂层的性能较好,优化工艺参数为:电流为600 A,电压为65 V,喷涂距离为110 mm,预热温度为200℃。     

Hard coatings on thermochemically pretreated soft steels: application potential for ball valves

The combination of a thermochemical heat treatment (e.g., nitriding or carburizing, with or without plasma enhancement) and a hard coating [e.g., titanium nitride (TiN), chromium nitride (CrN) or amorphous hydrogenated carbon (a-C:H)] is known as “duplex treatment”. It offers the possibility to improve the functional properties of tools and machine parts compared with a single treatment. The combination of plasma nitriding and physical vapour deposited hard coating has been investigated by various groups, mostly for increasing the wear resistance of tools. However, machine parts and precision components are also very promising candidates for duplex treatments, especially when they are made of soft steels such as stainless steels. This paper shows that the functional behaviour of duplex-treated parts is determined both by the application-oriented optimization of the thermochemical heat treatment and by selection of the appropriate hard coating. The hard coatings include TiN, chromium-containing amorphous hydrogenated carbon (a-C:H:Cr) and “pure” a-C:H. For demonstration purposes, this paper focuses on the ferritic stainless valve steel X20Cr13.     

Comparison testing of diamond-like a-C:H coatings prepared in plasma cathode-based gas discharge and ta-C coatings deposited by vacuum arc

The method of amorphous carbon coating deposition based on decomposition of acetylene in a non-self-sustained hollow cathode pulsed-DC discharge is investigated. The discharge is maintained by the electron emission of a grid-stabilized plasma cathode based on a DC glow discharge. The method allows the gas pressure in the discharge gap and the non-self-sustained discharge parameters to be varied in a wide range. It makes it possible to optimize the properties of the deposited coating and to perform in situ the preliminary ion cleaning of sample surface and the plasma immersion ion implantation to form an interface and to improve the coating's adhesion. The 0.1-10-μm-thick a-C:H films were deposited on tungsten carbide and stainless steel substrates at a deposition rate of 0.5-8 μm/h. The coatings were investigated using the methods of atomic-force microscopy (AFM), scanning electron microscopy (SEM) and Raman spectroscopy. The arithmetic average surface roughness (9-34 nm), the friction coefficients (0.01-0.3), the density (2.2-2.4 g/cm³), the microhardness (16-75 GPa) and the internal stresses in the films (3-7 GPa) were measured. Comparison was made between the properties of the resulted a-C:H coating with the properties of the ta-C coating obtained by cathodic vacuum arc deposition.     

Microstructure and mechanical properties of graphitic a-C:H:Si films

A series of graphitic a-C:H:Si films with different Si content were prepared by altering the sputtering current in a hybrid RF-PECVD and magnetron sputtering system. Microstructures and mechanical properties of them were characterized by IR, Raman, XPS, nanoindentation and scratch tests. Results show that although the sp³/sp² ratio increases with increasing Si content and as high as 8.2 at.% of silicon was doped, the a-C:H:Si films remain graphitic in nature and the I_D/I_G ratio is nearly constant for all. The coupling effects of sputtering-induced heating and strong ion bombarding due to negatively biasing were considered to be responsible for the film graphitization. The graphitic nature also accounts for the lower nanohardness of prepared a-C:H:Si films than the diamond-like a-C:H and a-C:H:Si films.     

离子源功率对a-C:H(Al)薄膜结构及性能的影响

目的研究离子源功率对a-C:H(Al)薄膜结构及性能的影响。方法采用阳极离子源离化CH_4气体,中频磁控溅射Al靶,通过改变离子源功率,在n(100)型单晶硅及16Mn Cr5钢基体上沉积a-C:H(Al)薄膜。利用扫描电镜、维氏显微硬度计、摩擦磨损试验机和表面轮廓仪等设备对a-C:H(Al)薄膜的结构及性能进行表征。结果薄膜的硬度均在1000HV以上。摩擦系数较低,为0.05~0.15。离子源功率为450 W时,薄膜摩擦系数和结合力均出现了最优值,分别为0.05和21.46 N。离子源功率在550 W时,磨损率达到最低值,为3.59×10~(-7) mm~3/(N·m)。结论离子源功率较低时,薄膜表面较疏松,随着离子源功率的增加,薄膜逐渐趋于平整致密。随离子源功率的增加,薄膜的硬度增大,薄膜的结合力先增大后减小,而薄膜的摩擦系数先减小后增大,磨损宽度减小,磨损深度降低,磨损率减小。     

High rate deposition of hard a-C:H films using microwave excited plasma enhanced CVD

High rate deposition processes for hydrogenated diamond-like carbon films (a-C:H) were developed using microwave plasma enhanced CVD (PECVD) techniques. Basic investigations were carried out in a laboratory scale deposition apparatus (0.04 m³ chamber) and after that the processes were transferred to an industrial scale PECVD machine (1 m³) and optimized therein. The application of an asymmetric bipolar pulsed mid-frequency substrate bias allowed controlling the ion fluxes to the growing films independently of the generation of film forming species (radicals and ions) by the microwave plasma source. After preliminary experiments using five different hydrocarbon precursors, more thorough investigations were done with the selected precursors acetylene (C₂H₂) and isobutene (C₄H₈; isobutylene, 2-Methyl-1-propene). The a-C:H films were characterised with respect to deposition rates, hardness, abrasive wear rates, internal stresses and topography.Wear resistant, atomically smooth a-C:H films with a hardness above 25 GPa were deposited at a very high rate of 15 μm/h. The combination of high rate and high hardness values should be promising for industrial applications, even for in-line technologies. For the both mentioned precursors C₂H₂ and C₄H₈ some differences in hardness–rate relations were observed.     

nc-(Ti,Al)(C,N)/a-SiNx纳米复合薄膜的制备及性能研究

目的 研究Si、C单元素掺杂及其共同掺杂TiAlN涂层对涂层性能的影响.方法 基于阴极电弧+辉光放电技术,在SUS304不锈钢基体及硬质合金刀具上分别制备nc-(Ti,Al)N、nc-(Ti,Al)N/a-SiNx、nc-TiAlCN及nc-TiAlCN/a-SiNx/a-C纳米复合薄膜,通过SEM观察涂层的微观组织形貌,并借助EDS表征涂层的元素成分,用XRD分析涂层的物相构成,探究C、Si元素对涂层生长的影响.采用纳米硬度仪测试涂层的硬度,采用二维轮廓仪及三维形貌仪表征涂层的表面粗糙度及表面形貌,通过滑动摩擦磨损试验测定涂层的耐磨性,用纳米划痕仪表征涂层的摩擦系数及涂层与基体的结合强度,用铣削实验表征涂层的切削性能.结果 该技术制备的TiAlN涂层,内部晶相结构复杂,硬度为29.57 GPa,主要归因于Ti2AlN、Ti2N等硬质相及TiN0.3相的形成降低了涂层的晶格常数.此为首次报道通过物理气相沉积方法制备含TiN0.3相的涂层.TiAlSiN涂层的硬度最高,为37.69 GPa,且耐磨性最好,主要原因是Si的添加起到了细晶强化和晶界强化的作用.C掺杂TiAlN使涂层析出更多非晶相,涂层硬度降低.C、Si元素共同掺杂,使得nc-TiAlCN/a-SiNx/a-C涂层表现出较低的摩擦系数及表面粗糙度,但与基体的结合性能最差,nc-(Ti,Al)N/a-SiNx薄膜的结合强度最好.结论 涂层均提高了基体表面的显微硬度,Si、C元素的掺杂可使涂层的某些性能得以大幅提升,但在实际应用中,还需根据应用需求选择合适的涂层.