Processes,characterizations, and system applications of color‐filter liquid‐crystal‐on‐silicon microdisplays

Abstract— A color‐filter liquid‐crystal‐on‐silicon (CF‐LCOS) microdisplay that integrates color filters on silicon for color will be presented. The color‐filter process on silicon was optimized to achieve fine resolution and precise alignment of the color filters on the pixel array, good adhesion to the silicon suface, and a flat surface for the liquid‐crystal cell assembly. Important optical and electrical parameters of the color filters were extracted to establish an electro‐optical model of the CF‐LCOS microdisplays for device simulation. Thermal, chemical, and light‐stability characterizations were performed to ensure the stabilty of the color filters and CF‐LCOS microdisplays. With color CF‐LCOS microdisplays already available, the projection or viewing optics is greatly simplified. This CF‐LCOS microdisplay is ideal for near‐to‐eye displays because of its low‐power consumption and compactness. The CF‐LCOS microdisplay could also withstand medium light illumination for medium‐sized projectors. A single‐panel projector based on one CF‐LCOS microdisplay of 1280 × 768 × RGB resolution was demonstrated.     

Microdisplay‐based industrial 3‐D and microstructure measurement systems

Abstract— Microdisplays, whether they are of the liquid‐crystal‐on‐silicon (LCOS) or organic light‐emitting diode (OLED) type, have been, up until now, mainly used in multimedia applications or head‐mounted displays. Due to their interesting possibilities, these displays open more and more alternative applications; for example, in optical metrology. Projection lenses for this application area need to be specially designed because the requirements on these systems differ completely from those for multimedia applications. The lenses must have very low geometrical image distortion and they have to be adapted to small objects and/or image distances. On the other hand, they often work with light sources with small spectral bandwidths; consequently, they do not need to be corrected for chromatic aberrations. In addition, the numerical aperture has to be large enough to collect and transfer as much light as possible, but also the size of the projection lens has to be as small as possible to ensure compact measurement systems. All these requirements lead to a compromise in optical lens design. Three optical system designs and realizations — one with an OLED microdisplay and two with an LCOS microdisplay — are presented.     

Full‐color SVGA+ OLED‐on‐silicon microdisplay

OLED‐on‐silicon microdisplays represent a new generation of microdisplay technology built on conventional integrated circuits. OLED‐on‐silicon offers significant benefits to the realization of active‐matrix microdisplays for a number of commercial and industrial applications. This paper reviews the design, fabrication, and characterization of a full‐color 852 × 600 active‐matrix OLED‐on‐silicon microdisplay.     

Color‐breakup suppression and low‐power consumption by using the Stencil‐FSC method in field‐sequential LCDs

Abstract— Field‐sequential color (FSC) is a potential technique for low‐power liquid‐crystal displays (LCDs). However, it still experiences a serious visual artifact, color break‐up (CBU), which degrades image quality. Consequently, the “Stencil Field‐Sequential‐Color (Stencil‐FSC)” method, which applies local color‐backlight‐dimming technology at a 240‐Hz field rate to FSC‐LCDs, is proposed. Using the Stencil‐FSC method not only suppressed CBU efficiently but also enhanced the image contrast ratio by using low average power consumption. After backlight signal optimization, the Stencil‐FSC method was demonstrated on a 32‐in. FSC‐LCD and effectively suppressed the CBU, which resulted in more than a 27,000:1 dynamic contrast ratio and less than 40‐W average power consumption.     

Contrast optimization for MacNeille‐PBS‐based LCOS projection systems

Abstract— Contrast limits are investigated for MacNeille‐PBS‐based LCOS projection systems that use retarder stack filters (RSFs). The two contributing factors are considered separately; namely, the color‐management system and the panel port. To enhance performance of the former, skew‐ray‐compensated RSFs are introduced. For the latter, a general three‐step methodology is presented to optimize contrast by compensating the LCOS panel. It is shown that the orientation of the LCOS panel and compensator, relative to the MacNeille PBS, is critical. The significant impact of AR‐coating performance on system contrast is also revealed. Methods to enhance ANSI contrast are proposed. A high‐contrast architecture will be presented by way of example.     

Multi‐color LC/BL algorithm in field‐sequential‐color LCD for color‐breakup suppression

Abstract— The proposed liquid‐crystal and backlight (LC/BL) algorithm presents the dynamic field‐sequential‐color (D‐FSC) algorithm to reduce the color‐breakup (CBU) effect without greatly increasing the subframe rate. The D‐FSC algorithm can intelligently select one adequate color sequence from multiple color sequences according to the image data. In other words, the scope of CBU suppression of the proposed LC/BL algorithm is more extensive than other conventional FSCs. Simulation results show that the CBU suppression can be improved substantially by the proposed evaluation equation.     

Eye‐safety analysis of phase‐only holographic projection systems

Abstract— Recently, laser‐safety analyses have been presented for scanned‐beam and LCOS imaging projectors. A third class of projection technology, based on the properties of phase‐only diffraction, is differentiated from scanned‐beam and LCOS counterparts in its ability to provide a significantly higher effective luminous flux for video style images. In this paper, this desirable property is recognized by the definition of the “video lumen” and a detailed design fora hypothetical holographic projector and corresponding laser safety analysis is presented. As in the case of conventional amplitude‐modulating LCOS projectors, a holographic projector is capable of delivering several hundred white lumens in Class 2; an appropriately specified holographic projector can also provide several tens of video lumens while maintaining a Class 1 classification.     

Narrow‐gap field‐sequential TN‐LCD with and without nanoparticle doping

Abstract— The fabrication and demonstration of field‐sequential‐color (FSC) LCDs using modules of narrow‐gap twisted‐nematic (NTN) LCDs with and without doping of newly synthesized PγCyD‐ZrO² nanoparticles is reported. Two types of FSC‐LCDs are demonstrated: one is a direct multiplexed NTN‐LCD and the other is TFT driven. The advantages of FSC‐LCDs include their high legibility even under direct sunlight, and the mechanism for the doping of nanoparticles in LCDs is discussed.     

Microdisplay wafer‐flatness metrology by optical interferometry

Abstract— We report a microdisplay wafer‐flatness metrology technique based on digital high‐pass filtering of topography data obtained from a commercial optical interferometer. This technique discriminates against both wafer‐scale bow/warp and pixel‐scale roughness to reveal die‐scale flatness variations that are the most relevant to microdisplay gap uniformity. We report flatness measurements of a variety of live and test silicon wafers supporting VLSI microdisplay circuitry, and show how these measurements correlate with the performance of liquid‐crystal microdisplays assembled from similar wafers. The technique is sensitive to cross‐die flatness variations as small as 25 nm in the presence of wafer bow of tens of microns. The wafer flatness variations that make the greatest contribution to liquid‐crystal cell‐gap non‐uniformity arise from interactions between the chemical mechanical planarization (CMP) process and the VLSI circuit layout. Our metrology technique can help the VLSI designer optimize microdisplay layout, and provides an objective flatness specification for wafers purchased from third‐party foundries.     

Electro‐optic properties of an intrinsic half‐V‐mode FLCD and its application to field‐sequential full‐color LCDs using a poly‐Si TFT matrix array

Abstract— An intrinsic half‐V‐mode ferroelectric liquid‐crystal display (FLCD) exhibiting a high contrast ratio (300:1), owing to defect‐free gray‐scale capability, with a high response speed (τ ? 400 μsec) and good switchability with TFTs, has been developed. Furthermore, this FLCD features high‐temperature reliability owing to the use of a special hybrid alignment technique. We successfully fabricated an active‐matrix poly‐Si TFT field‐sequential full‐color (FS FC) LCD with XGA specifications and a 0.9‐in. diagonal using a half‐V‐mode FLCD and an RGB light‐emitting‐diode (LED) array microdisplay. It is shown that the fabricated active‐matrix FS FCLCD exhibits good moving‐image performance with high full‐color display capability.     

Wire‐grid polarizers in modern LCOS light‐engine configurations

Abstract— Wire‐grid polarizers that have a very high transmission, reflection, polarized‐light optical performance, and opto‐mechanical packaging advantages compared to the older polarization technologies have been developed. The wire‐grid polarizer operation principles and performance data are reviewed. The power of using finite‐difference time‐domain (FDTD) modeling techniques to understand the interaction of the electromagnetic waves with the wires and improve the optical performance of the wire‐grid polarizers and ultimately the light‐engine optical performance is shown. The ability to ray trace through a complete digital projector light engine from light source to the screen, including the wire‐grid polarizers, will be discussed. The main focus is to present the modern LCOS light‐engine architectures that use the wire‐grid polarizers. One‐, two‐, and three‐panel LCOS light engines are covered.     

Passive‐matrix‐driven field‐sequential‐color displays

Abstract— Passive‐matrix‐driven field‐sequential‐color (FSC) displays were successfully fabricated. It makes use of a new multiplex driving scheme that does not depend on voltage averaging. Instead, a transient response of the liquid crystal is employed. An addressing and response time of less than 70 μsec and 2.0 msec, respectively, are used. Scanning time compensation is also introduced to improve the brightness uniformity of the display.     

Three‐panel LCOS projection systems

Abstract— Three‐panel liquid‐crystal‐on‐silicon (LCOS) projection systems are presented with an emphasis on the commercially successful shared retarder‐stack‐filter (RSF) polarizing‐beam‐splitter (PBS) architectures. The design and operation of the specific CQ90 projection core is presented in detail, and its contrast and transmission derived. alternative three‐PBS/X‐cube LCOS architectures are briefly introduced and their performance is compared to that of the CQ90.     

4032 ppi High‐resolution OLED microdisplay

A 0.5‐inch Ultra Extended Graphics Array (UXGA) organic light‐emitting diodes microdisplay has been developed with 6.3 μm pixel pitch. Not only 4032 ppi high resolution but high frame rate, low power consumption, wide viewing angle, and high luminance have been achieved. This newly developed organic light‐emitting diodes microdisplay is suitable for Near‐to‐Eye display applications, especially electronic viewfinders.     

Measuring color breakup of stationary images in field‐sequential‐color displays

Abstract— Color breakup is an artifact perceivable on field‐sequential‐color (FSC) displays, both in stationary and in moving images. In this work, a unique device and a method for measuring color breakup on stationary images is proposed. Rotating the field of view of a high‐speed measurement camera in milliseconds simulates saccadic behavior. The target can be a virtual display, a direct‐view display or a projector image. Captured images can be used for quantifying the color breakup of a target display. The results along with an exploration of their application to breakup characterization will be presented.     

MUTED: Multi‐user 3‐D display

Abstract— Research described in this paper encompasses the design and building of glasses‐free (autostereoscopic) displays that utilize a direct‐view liquid‐crystal display whose backlight is provided by a projector and novel steering optics. This is controlled by the output of a multi‐user head‐position tracker. As the displays employ spatial multiplexing on a liquid‐crystal‐display screen, they are inherently 2‐D/3‐D switchable with 2‐D being achieved by simply displaying the same image in the left and right channels. Two prototypes are described in this paper; one incorporating a holographic projector and the other a conventional LCOS projector. The LCOS projector version addresses the limitations of brightness, cross‐talk, banding in the images, and laser stability that occur in the holographic projector version. The future development is considered and a comparison between the prototypes and with other 3‐D displays is given.     

High‐resolution and high‐brightness full‐colour “Silicon Display” for augmented and mixed reality

High‐brightness micro‐LED display bonded onto silicon backplane has been successfully demonstrated. The 0.38‐inch full‐colour active matrix LED microdisplay system consists of 352 × 198 pixels. Each pixel is 24 μm square composed of red, green, and blue (RGB) subpixels corresponding to a pixel resolution of 1053 ppi. Quantum‐dot materials are formed on III‐nitride blue micro‐LED array to convert blue light into red and green for full‐colour operation. We have confirmed that this microdisplay, which we call “Silicon Display” has wide colour gamut exceeding 120% of sRGB. We describe the advantage of this colour‐converting approach for the full‐colour micro‐LEDs. Progress toward higher resolution is also described. Brightness of more than 30 000 cd/m² has been confirmed at a driving current density of 4 A/cm² for 3000 ppi blue monochrome micro‐LED prepared for full‐colour Silicon Display. We believe our “Silicon Display” is ideally suited for near‐to‐eye displays for augmented and mixed reality.     

Plasma‐beam alignment technique for ferroelectric liquid crystals

Abstract— The plasma‐beam alignment procedure earlier developed for the alignment of nematic liquid crystals is successfully extended to ferroelectric liquid crystals (FLC). The highly uniform alignment of the “chevron” structure (before electrical treatment of FLC cells) and “quasi bookshelf” structure (after the electrical treatment) are realized. The contrast of bistable switching larger than 350:1 is achieved. This makes the non‐contact plasma‐beam alignment procedure especially attractive for high‐contrast bistable LCDs on an LCOS base, particularly used in PDA and e‐books. Fast switching and realization of gray scale in the plasma‐beam aligned FLC cells makes this technique also promising for full‐color displays including color LCD TV.     

Projection‐based head‐tracking 3‐D displays

Abstract— This paper describes the construction and operation of four 3‐D displays in which each display produces two images for each eye and thus fits into the category of projection‐based binocular stereoscopic displays. The four 3‐D displays described are pico‐projector‐based, liquid‐ crystal—on—silicon (LCOS) conventional projector‐based, 120‐Hz digital‐light‐processor (DLP) projector‐ based, and the HELIUM3D system. In the first three displays, images are produced on a direct‐view LCD whose conventional backlight is replaced with a projection illumination source that is controlled by a multi‐user head tracker; novel steering optics direct the projector output to regions referred to as exit pupils located at the viewers' eyes. In the HELIUM3D display, the image information is supplied by a horizontally scanned, fast, light valve whose output is controlled by a spatial light modulator (SLM) to direct images to the appropriate viewers' eyes. The current statu s and the multimodal potential of the HELIUM3D display are described.