共查询到20条相似文献,搜索用时 15 毫秒
1.
Ying-Che Tseng Huang W.M. Diaz D.C. Ford J.M. Woo J.C.S. 《Electron Device Letters, IEEE》1998,19(9):351-353
We report the impact of submicron fully depleted (FD) SOI MOSFET technology on device AC characteristics and the resultant effects on analog circuit issues. The weak DC kink and high frequency AC kink dispersion in FD SOI still degrade circuit performance in terms of distortion and low-frequency noise requirements. These issues raise concerns about FD devices for mixed-mode applications. Therefore, further device optimization such as source/drain engineering is still necessary to solve the aforementioned issues for FD SOI. On the other hand, partially depleted SOI MOSFET with body contact structures provide an alternative technology for RF/baseband analog applications 相似文献
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Ying-Che Tseng Huang W.M. Mendicino M. Monk D.J. Welch P.J. Woo J.C.S. 《Electron Devices, IEEE Transactions on》2001,48(7):1428-1437
Low-frequency (LF) noise, a key figure-of-merit to evaluate device technology for RF systems on a chip, is a significant obstacle for CMOS technology, especially for partially depleted (PD) silicon-on-insulator (SOI) CMOS due to the well-known kink-induced noise overshoot. While the dc kink effect can be suppressed by either using body contact technologies or shifting toward fully depleted (FD) operation, the noise overshoot phenomena still resides at high frequency for either FD SOI or poor body-tied (BT) SOI CMOSFETs. In this paper, floating body-induced excess noise in SOI CMOS technology is addressed, including the impact from floating body effect, pre-dc kink operation, and gate overdrive, followed by the proposal of a universal LF excess noise model. As the physical mechanism behind excess noise is identified, this paper concludes with the suggestion of a device design methodology to optimize LF noise in SOI CMOSFET technology 相似文献
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Mansun Chan Bin Yu Zhi-Jian Ma Nguyen C.T. Chenming Hu Ko P.K. 《Electron Devices, IEEE Transactions on》1995,42(11):1975-1981
This paper compared the performance of conventional fully depleted (FD) SOI MOSFETs and body-grounded nonfully depleted (NFD) SOI MOSFETs for analog applications, A new low-barrier body-contact (LBBC) technology has been developed to provide effective body contact. Experimental results show that the NFD MOSFET's with LBBC structure give one order of magnitude higher output resistance, significantly lower flicker noise, improved subthreshold characteristics, and minimal threshold voltage variation compared with conventional FD SOI MOSFETs. The device characteristics of the LBBC MOSFET's are more desirable for fabricating high performance analog or mixed analog/digital CMOS circuits 相似文献
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A device design methodology for sub-100-nm SOC applications using bulk and SOI MOSFETs 总被引:1,自引:0,他引:1
CMOS for the mixed-mode applications has gained much interest recently. While the International Technology Roadmap for Semiconductors provides two different scaling guidelines for the analog and digital circuit operation using the bulk MOSFET, there are no well-defined scaling guidelines for improving the analog performance of silicon-on-insulator (SOI) MOSFETs. This paper presents a systematic and quantitative comparison between the analog characteristics of the bulk and SOI technology. The intrinsic gain, f/sub T/ and g/sub m//I/sub ds/ ratio are considered as a metric for this comparison. It is shown that, even for the operating frequencies in the range of gigahertz (where the ac kink effect is suppressed), analog performance of SOI devices is inferior to that of the bulk devices due to the capacitive drain-to-body coupling. Based on our study, we show that hat the gate-workfunction engineering (close to mid-gap workfunction) is essential in fully depleted SOI (FDSOI) devices for improving analog performance. The analog performance of partially depleted SOI (PDSOI) devices can be improved by using body-tied structures. An increased gate control in double-gate MOSFETs can provide very high output resistance for short-channel devices. 相似文献
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A junction breakdown model and the results of PISCES II simulations are presented for silicon-on-insulator (SOI) devices. This model shows the dependence of breakdown voltage in fully depleted (FD) SOI diode on the backgate bias, the properties of the buried oxide layer, and the device parameters. Breakdown in a thin FD SOI diode is quite different from that observed in a thicker, partially depleted (PD) diode. The analysis is supported by breakdown voltage measurements of separation by implantation of oxygen (SIMOX)-based SOI diodes, the results of which suggest that body breakdown is dominant in FD SOI diodes, and the junction curvature effect is dominant in PD SOI diodes. Furthermore, the results also show that breakdown voltage in the FD SOI diode is higher than their bulk-silicon counterpart and can be further increased by applying the appropriate backgate bias 相似文献
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Mukhopadhyay S. Keunwoo Kim Ching-Te Chuang 《Electron Devices, IEEE Transactions on》2008,55(1):152-162
Ultrathin-body fully depleted silicon-on-insulator (UTB FD/SOI) devices have emerged as a possible candidate in sub-45-nm technologies and beyond. This paper analyzes leakage and stability of FD/SOI 6T SRAM cell and presents a device design and optimization strategy for low-power and stable SRAM applications. We show that large variability and asymmetry in threshold-voltage distribution due to random dopant fluctuation (RDF) significantly increase leakage spread and degrade stability of FD/SOI SRAM cell. We propose to optimize FD devices using thinner buried oxide (BOX) structure and lower body doping combined with negative back-bias or workfunction engineering in reducing the RDF effect. Our analysis shows that thinner BOX and cooptimization of body doping and back biasing are efficient in designing low-power and stable FD/SOI SRAM cell in sub-45-nm nodes. 相似文献
9.
Sung-Weon Kang Jong-Son Lyu Jin-Young Kang Sang-Won Kang Jin-Hyo Lee 《Electron Device Letters, IEEE》1995,16(6):236-238
Leakage current through the parasitic channel formed at the sidewall of the SOI active region has been investigated by measuring the subthreshold I-V characteristics. Partially depleted (PD, ~2500 Å) and fully depleted (FD, ~800 Å) SOI NMOS transistors of enhancement mode have been fabricated using the silicon direct bonding (SDB) technology. Isolation processes for the SOI devices were LOCOS, LOCOS with channel stop ion implantation or fully recessed trench (FRT). The electron concentration of the parasitic channel is calculated by the PISCES IIb simulation. As a result, leakage current of the FD mode SOI device with FRT isolation at the front and back gate biases of 0 V was reduced to ~pA and no hump was seen on the drain current curve 相似文献
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Investigation of the novel attributes of a fully depleted dual-material gate SOI MOSFET 总被引:8,自引:0,他引:8
The novel features of a fully depleted (FD) dual-material gate (DMG) silicon-on-insulator (SOI) MOSFET are explored theoretically and compared with those of a compatible SOI MOSFET. The two-dimensional numerical simulation studies demonstrate the novel features as threshold voltage roll-up and simultaneous transconductance enhancement and suppression of short-channel effects offered by the FD DMG SOI MOSFET. Moreover, these unique features can be controlled by engineering the workfunction and length of the gate material. This work illustrates the benefits of high-performance FD DMG SOI MOS devices over their single material gate counterparts and provides an incentive for further experimental exploration. 相似文献
11.
Fossum J.G. Krishnan S. Faynot O. Cristoloveanu S. Raynaud C. 《Electron Device Letters, IEEE》1995,16(12):542-544
Measured current-voltage characteristics of scaled, floating-body, fully depleted (FD) SOI MOSFET's that show subthreshold kinks controlled by the back-gate (substrate) bias are presented. The underlying physical mechanism is described, and is distinguished from the well known kink effect in partially depleted devices. The physical insight attained qualifies the meaning of FD/SOI and implies new design issues for low-voltage FD/SOI CMOS 相似文献
12.
Ying-Che Tseng Huang W.M. Monk D.J. Welch P. Ford J.M. Woo J.C.S. 《Electron Devices, IEEE Transactions on》1999,46(8):1685-1692
We report the extensive study on ac floating body effects of different SOI MOSFET technologies. Besides the severe kink and resultant noise overshoot and degraded-distortion in partially depleted (PD) floating body SOI MOSFET's, we have investigated the residue ac floating body effects in fully depleted (FD) floating body SOI MOSFET's, and the different body contacts on PD SOI technologies. It is important to note that there is a universal correlation between ac kink effect and Lorentzian-like noise overshoot regardless of whether the body is floating or grounded. In addition, it was found that third-order harmonic distortion is very sensitive to floating body induced kink or deviation on output conductance due to the finite voltage drop of body resistance. These results provide device design guidelines for SOI MOSFET technologies to achieve comparable low-frequency noise and linearity with Bulk MOSFET's 相似文献
13.
Fully-Depleted SOI CMOS Technology for Low-Voltage Low-Power Mixed Digital/Analog/Microwave Circuits
D. Flandre J. P. Colinge J. Chen D. De Ceuster J. P. Eggermont L. Ferreira B. Gentinne P. G. A. Jespers A. Viviani R. Gillon J. P. Raskin A. Vander Vorst D. Vanhoenacker-Janvier F. Silveira 《Analog Integrated Circuits and Signal Processing》1999,21(3):213-228
This paper demonstrates that fully-depleted (FD) silicon-on-insulator (SOI) technology offers unique opportunities in the field of low-voltage, low-power CMOS circuits. Beside the well-known reduction of parasitic capacitances due to dielectric isolation, FD SOI MOSFETs indeed exhibit near-ideal body factor, subthreshold slope and current drive. These assets are both theoretically and experimentally investigated. Original circuit studies then show how a basic FD SOI CMOS process allows for the mixed fabrication and operation under low supply voltage of analog, digital and microwave components with properties significantly superior to those obtained on bulk CMOS. Experimental circuit realizations support the analysis. 相似文献
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Tao Chuan Lim Bernard E. Rozeau O. Ernst T. Guillaumot B. Vulliet N. Buj-Dufournet C. Paccaud M. Lepilliet S. Dambrine G. Danneville F. 《Electron Devices, IEEE Transactions on》2009,56(7):1473-1482
In this paper, for the first time, we present a detailed RF experimental and simulation study of a 3-D multichannel SOI MOSFET (MCFET). Being different from the conventional planar technology, the MCFET features a total of three self-aligned TiN/HfO2 gate stacks fabricated on top of each other, allowing current to flow through the three undoped ultrathinned silicon bodies (UTBs). In other words, the operation of the MCFET is theoretically based on two UTB double-gate SOIs and a single-gate UTB fully depleted SOI (FDSOI) at the bottom. Using on-wafer S-parameters, the RF/analog figures-of-merit of an MCFET with a gate length of 50 nm are extracted and discussed. Thanks to the enormous transconductance (gm) and very low output conductance, the RF/analog performances of MCFET-voltage gain (A VI) and early voltage (V EA) are superior compared with that of the single-gate UTB-FDSOI. However, these advantages diminish in terms of transition frequency (fT), due to the large total input gate capacitances (C GG). This inspires the introduction of spacer engineering in MCFET, aiming at improving both C GG and fT. The sensitivity of the spacer length to the RF/analog performances is experimentally analyzed, and the performance optimization is validated using ac simulation. This paper concludes that optimized MCFETs are a serious contender to the mainstream MOSFETs including FinFETs for realizing future low-power analog applications. 相似文献
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A new 2D analytical drain current model is presented for symmetric double-gate fully depleted nanoscale SOI MOSFETs. Investigation of device parameters like transconductance for double-gate fully depleted nanoscale SOI MOSFETs is also carried out. Finally this work is concluded by modeling the cut-off frequency, which is one of the main figures of merit for analog/RF performance for double-gate fully depleted nanoscale SOI MOSFETs. The results of the modeling are compared with those obtained by a 2D ATLAS device simulator to verify the accuracy of the proposed model. 相似文献
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Fully‐depleted silicon‐on‐insulator (FD‐SOI) devices with a 15 nm SOI layer thickness and 60 nm gate lengths for analog applications have been investigated. The Si selective epitaxial growth (SEG) process was well optimized. Both the singleraised (SR) and double‐raised (DR) source/drain (S/D) processes have been studied to reduce parasitic series resistance and improve device performance. For the DR S/D process, the saturation currents of both NMOS and PMOS are improved by 8 and 18%, respectively, compared with the SR S/D process. The self‐heating effect is evaluated for both body contact and body floating SOI devices. The body contact transistor shows a reduced self‐heating ratio, compared with the body floating transistor. The static noise margin of an SOI device with a 1.1 µm2 6T‐SRAM cell is 190 mV, and the ring oscillator speed is improved by 25 % compared with bulk devices. The DR S/D process shows a higher open loop voltage gain than the SR S/D process. A 15 nm ultra‐thin body (UTB) SOI device with a DR S/D process shows the same level of noise characteristics at both the body contact and body floating transistors. Also, we observed that noise characteristics of a 15 nm UTB SOI device are comparable to those of bulk Si devices. 相似文献
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The zero temperature coefficient (ZTC) is investigated experimentally in partially (PD) and fully depleted (FD) SOI MOSFET fabricated in a 0.13 μm SOI CMOS technology. A simple model to study the behavior of the gate voltage at ZTC (VZTC) is proposed in the linear and the saturation region. The influence of the temperature mobility degradation on VZTC is analyzed for PD and FD devices. Experimental results show that the temperature mobility degradation is larger in FD than in PD devices, which is responsible for the VZTC decrement observed in FD instead of the increment observed in PD devices when the temperature increases. The analysis takes into account temperature dependence model parameters such as threshold voltage and mobility. The analytical predictions are in very close agreement with experimental results in spite of the simplification used for the VZTC model as a function of temperature in the linear and the saturation region. 相似文献
20.
Adan A.O. Yoshimasu T. Shitara S. Tanba N. Fukurni M. 《Electron Devices, IEEE Transactions on》2002,49(5):881-888
The MOSFET parameters important for RF application at GHz frequencies: a) transition frequency, b) noise figure, and c) linearity are analyzed and correlated with substrate type. This work demonstrates that, without process changes, high-resistivity silicon-on-insulator (high-ρ SOI) substrates can successfully enhance the RF performance of on-chip inductors and fully depleted (FD)-SOI devices in terms of reducing substrate losses and parasitics. The linearity limitations of the SOI low-breakdown voltage and "kink" effect are addressed by judicious device and circuit design. Criteria for device optimization are derived. A NF = 1.7 dB at 2.5 GHz for a 0.25 μm FD-SOI low-noise amplifier (LNA) on high-ρ SOI substrate obtained the lowest noise figure for applications in the L and S-bands 相似文献