Measurement and compensation of error motions of a diamond turning machine

This paper describes the measurement and compensation of error motions of a diamond turning machine for nanofabrication of large sinusoidal metrology grids. The diamond turning machine has a T-base design, which consists of a spindle with its rotation axis along the Z-direction and a cross-slide with its movement direction along the X-direction. A fast-tool-servo (FTS) unit is mounted on the X-slide to generate sinusoidal microstructures on a flat workpiece surface mounted on the spindle. The error motions of the X-slide and the spindle, which introduce Z-directional profile errors (out-of-flatness) on the grid surface, are measured and compensated. The out-of-straightness of the X-slide is measured to be approximately 60 nm over a travel of 80 mm by using the reversal method. It is also confirmed that the out-of-straightness of the X-slide has a 10-nm periodic component with a period of 11 mm corresponding to the diameter of the needles used in the roller bearing of the X-slide. The angular motion of the spindle is measured to be approximately 0.3″ by using an autocollimator, which can cause a 73-nm out-of-flatness over a workpiece 100 mm in diameter. The axial motion of the spindle is measured to be approximately 5 nm, which is the smallest error motion. The out-of-flatness of the workpiece is reduced from 0.27 to 0.12 μm through compensating for the error motions by utilizing the FTS unit based on the measurement results of error motions.     

直线电机驱动的H型气浮导轨运动平台

建立了双边直线电机驱动的H型气浮精密定位平台,对该精密定位系统的气浮导轨设计方法和双边直线电机同步运动控制等关键技术进行了研究。利用有限元法设计了气浮导轨,分析了气膜压力场的分布情况,采用预加载技术提高气浮导轨的承载能力和刚度等性能。静态特性实验表明,开发的定位平台气浮导轨具有较高的承载能力和刚度,X、Y导轨的竖直方向静刚度为276.9 N/μm和333.3 N/μm。设计了基于同步速度偏差的改进型并联结构同步控制器,采用模糊控制实现PID参数的自适应在线整定。运动实验表明,改进的控制器具有较高的同步控制精度,速度同步精度比一般同步控制提高了3倍多,适合于具有强机械耦合的多电机同步运动控制。H型直线电机气浮定位平台具有承载能力强、精度高的优点,可以用于光刻机和光学检测等精密工程领域。     

Design and construction of a two-degree-of-freedom linear encoder for nanometric measurement of stage position and straightness

This paper presents a two-degree-of-freedom (two-DOF) linear encoder which can measure the position along the moving axis (X-axis) and the straightness along the axis vertical to the moving axis (Z-axis) of a precision linear stage simultaneously. The two-DOF linear encoder is composed of a reflective-type scale grating and an optical sensor head. A reference grating, which is identical to the scale grating except the scale length, is employed in the optical sensor head. Positive and negative first-order diffracted beams from the two gratings are superposed with each other in the optical sensor head to generate interference signals. The optical configuration is arranged in such a way that the direction of displacement in each axis can also be detected. A prototype two-DOF linear encoder is designed and constructed. The size of the optical sensor head is about 50 mm (X) × 50 mm (Y) × 30 mm (Z) and the pitch of the grating is 1.6 μm. It has been confirmed that the prototype two-DOF linear encoder has sub-nanometer resolutions in both the X- and Z-axes.     

金属条材直线度在线测量的新方法

提出了一种测量金属条材直线度的新方法—新组合法.该方法将频域两组两点法与逐次两点相结合,在实现工件直线度无理论误差重构的同时,解决了传统频域法重构短工件时横向分辨率低的问题,能够高精度地测量金属条材的直线度.首先,将所有的采样点通过新组合法分为若干组;其次使用频域两组两点法将其重构为相同数量且横向分辨率较低的曲线,应用...     

A novel Fourier-Eight-Sensor (F8S) method for separating straightness,yawing and rolling motion errors of a linear slide

A novel method called the Fourier-Eight-Sensor (F8S) method is proposed for the separation of the straightness, yawing and rolling motion errors as well as the profiles of a linear slide. Eight distance sensors are positioned on a vertical stage in two lines parallel to the target profiles with five sensors in the lower row and the other three in the upper row. The outputs of the sensors are fused together at different times to eliminate the dependence of motion errors. The method adopts a two-stage approach. First, the profile faced by the lower row sensors is represented by Fourier series the coefficients of which are obtained by matrix inversion. Then, another Fourier series is used to represent the difference between the two target profiles. By fusing the outputs of the three sensors in the upper row and their corresponding counterparts in the lower row, the coefficients of the Fourier series are determined by the Fourier series based error separation technique. In this way, different error components can be successfully separated from the sensor outputs. The effectiveness of the method is validated by simulation and experiment.     

用于精密定位平台的直线超声电机的异步并联

提出了直线超声电机异步并联的概念以提高精密定位平台驱动单元的位移分辨率、输出力及速度.基本原理是若干定子(或振子)在一个振动周期内交替驱动动子(或转子),使实际的驱动频率成倍提高,可以获得更好的输出性能.分析显示,提高定子与动子之间的接触频率可以提高输出力和速度,改善瞬态响应特性,并可避免同步并联方式下定子的相互干扰问...     

石英陶瓷在精密平台中的应用

分析研究了分别采用钢、铝、氧化铝陶瓷、石英陶瓷四种材料的精密直线电机驱动平台的温升、热变形、变形受室温变化的影响、到达热平衡时间等情况。结果表明:有较小导热系数的石英使得热量不易传递,温升明显减小;由于较小的热膨胀系数使得平台热变形较小,同时石英由热膨胀引起的内应力及受室温变化引起的变形变化远小于铝、钢与氧化铝;导热系数小的石英热量传递速度慢,到达热平衡的时间长。精密直线电机驱动平台中,运动平台受直线电机初级部件发热影响最大,所以精密平台应选择导热系数、热膨胀系数小、对温度变化不敏感的材料,石英是此类平台比较理想的陶瓷材料。     

Development of a three-degree-of-freedom laser linear encoder for error measurement of a high precision stage

In this study, a laser linear encoder with three degrees of freedom (3-DOFs) based on diffraction and interference was developed to measure the linear displacement and two angular errors of a linear moving stage. Parts of the linear motion errors induced from the two angular errors can be calculated by this prototype 3-DOF laser encoder. It was an effective method for online error calculation and compensation to improve precision stage performance. This new function was superior to other laser encoders. The verification results showed that the resolution is 20 nm. It detected displacements relative to an external grating scale with accuracy of about +/-150 nm for a measuring range of +/-1 mm, and detected the angular errors with related accuracy of about +/-1 arc sec for a measuring range of +/-100 arc sec.     

Influence of linear-axis error motions on simultaneous three-axis controlled motion accuracy defined in ISO 10791-6

Five-axis machine tools, which combine three linear axes and two rotary axes, are required for accuracy in machining complex shapes. In this paper, to clarify the influence of simultaneous three-axis control motion measurements as specified in ISO 10791-6, the measured results using a ball bar and R-test are compared. As the motion trajectories of the linear axes are not identical in both measurement devices, it is expected that the error motions of the linear axes cause different measurement results depending on the measurement devices. Thus, the squareness errors between the linear axes and the error motions of the linear axes are assumed as error factors that influence the measured results in this study. A mathematical model of a five-axis control machine tool that considers the error motions and squareness errors of the linear axis is constructed, and the influence of those error factors on motion accuracy is examined using an experiment and a simulation. As a result, the squareness errors and error motions of the linear axis are observed to greatly affect simultaneous three-axis controlled motion accuracy.     

Development of a linear electrostrictive servo motor

This paper presents a linear electrostrictive servo motor with high resolution and large stroke for ultra-precision motion control. High thrust force is obtained by making use of an electromagnetic clamping mechanism with force magnifying structure in the motor design. An operator alterable iterative learning control algorithm is proposed for the motion control of the motor. A prototype is designed, fabricated and tested. Experimental results show that the prototype has a mechanical resolution of 0.02 μm, yaw error less than 2 μm and maximum thrust force of 30N. Applications of the motor include producing the servo feed motions required in micro electrical discharge machining (micro-EDM) system or as a motion control device for other precision machining systems.     

A surface motor-driven planar motion stage integrated with an XYθZ surface encoder for precision positioning

This paper describes a surface motor-driven XY planar motion stage equipped with a newly developed XYθ_Z surface encoder for sub-micron positioning. The surface motor consists of four linear motors placed on the same surface, two pairs in the XY-axes. The magnetic array and the stator winding of the linear motor are mounted on the platen (the moving element) and the stage base, respectively. The platen can be moved in the X-direction by the X-linear motors, and in the Y-direction by the Y-linear motors. It can also be rotated about the Z-axis if the X- or Y-linear motors generate a moment about the Z-axis. The surface encoder consists of two two-dimensional angle sensors and an angle grid with two-dimensional sinusoidal waves on its surface. The angle grid is mounted on the platen of the stage which is levitated by air-bearings. The angle sensors and the air-bearing pads are fixed on the stage base so that the motion of the platen is not affected by the electronic cables and air hoses. The XY-positions and θ_Z rotation of the platen can be obtained from the angle sensor outputs with resolutions of approximately 20 nm and 0.2′′, respectively. The surface encoder is placed inside the stage so that the stage system is very compact in size. Experimental results indicate that precision positioning can be carried out independently in X, Y and θ_Z with resolutions of 200 nm and 1′′, respectively.     

An Improved Fourier Five-Sensor (IF5S) method for separating straightness and yawing errors of a linear slide based on multiple sensor parameter sets and least square regression technique

In this paper, an Improved Fourier Five-Sensor (IF5S) measurement method is proposed for separating the straightness and yawing motion errors as well as determining the profile of a linear slide. The previous F5S method [3] used the constant parameters initially to estimate the profile function based on three sensor equations for different angle ranges. The profile estimation and error separation are implemented via an iterative method which can only yield acceptably accurate results with tremendous computational efforts. Here, the improved F5S method applies the least square regression technique instead of the iterative method to estimate the profile functions by using three distinct sets of parameters and different fused sensor data according to the travel of the linear slide. Various errors can then be separated based on the calculated profile function. Simulation results confirm that the IF5S method provides better performance and effectiveness as compared to the previous F5S method.     

Precision control system of two-DOF stage with linear ultrasonic motor

Using an appropriate control method, linear ultrasonic motors can be used in applications requiring high position accuracy. In this paper, a closed loop PI control system is designed to achieve high position accuracy during the control of a two-DOF stage driven by linear ultrasonic motors. Two ultrasonic motors are mounted on the stage to generate motion in two orthogonal directions. The PI control algorithm is used to increase the stability and accuracy of position control. The x-axis mover covers 30 mm forward and backward in less than 0.3 s settling time and the y-axis mover in less than 0.4 s. Experimental results denote that the control strategy proposed in this paper appears to have high efficiency, quick response, and high accuracy.     

Simple and simultaneous measurement of five-degrees-of-freedom error motions of high-speed microspindle: Error analysis

We have developed a simple and low-cost optical measurement system for the simultaneous measurement of the five-degrees-of-freedom error motions of high-speed microspindles. We demonstrated the usefulness of the system by using it to measure actual spindle rotation errors, and analyzed the major error factors. First, the measurement error due to the form error of the lens was analyzed by ray tracing. Second, we analyzed the measurement error due to a displacement of an irradiation laser point on a 3 mm diameter ball lens. Furthermore, we investigated the effect of the centrifugal force and the crosstalk problem of multiple laser beams. The results indicated that a form error of the rod lens significantly affected the measurement accuracy and that a change in the laser beam irradiation point of the ball lens due to a radial displacement had no significant effect on the measurement accuracy. Finally, we confirmed that, owing to the centrifugal force, the measurement accuracy decreased as the speed of rotation increased, and that there was no crosstalk that the reflected and transmitted laser beams in the X direction were detected by the photodiode in the Y direction for displacements within −10 to 10 μm.     

Positioning error improvement based on ultrasonic oscillation for a linear motion rolling bearing during sinusoidal motion

Friction can be a major disturbance to precision positioning. This study presents a method for improving positioning error in a linear motion rolling bearing based on ultrasonic oscillations. Experiments were conducted in which a single-axis linear motion rolling bearing was driven in a sinusoidal motion to simulate circular motion. Two ultrasonic actuators excited both the rail and the carriage of the guide to create relative displacements between raceways and rolling elements. The carriage of the linear motion rolling bearing was driven by a frictionless voice coil motor (VCM). The displacement of the carriage and the friction force were measured by a springless linear encoder and the VCM's current, respectively. The early stages of the experiments focused on several oscillating patterns, and their consequent impacts on positioning error during sinusoidal motion were investigated. Finally, the oscillating pattern that maximally improved the positioning error was proposed and tested. By applying the proposed pattern, the maximum displacement error, exhibited just after velocity reversal, was reduced by approximately 40%, while the average error was reduced by 26%.     

精密加工中心热误差检测与温度测点优化

以卧式加工中心MCH63为研究对象,首先利用研制的温度和热误差检测系统测量了加工中心的温度场和热误差。然后基于变量分组优化的基本原理,引入修正的相关系数,确立了X、Y、Z三个方向用于建模的温度变量。最后通过RBF网络模型对该温度测点选择方法进行了验证。结果表明,该方法既能减少温度测点数量,又能保证模型的预测精度。     

基因测序仪运动平台的高精度定位控制

为了实现对基因测序仪运动平台的高精度定位控制,建立了基因测序仪运动平台控制系统。对该系统所采用的数学建模、模型辨识、控制器设计、输入整形等方法进行研究。根据运动平台动力学方程和永磁同步直线电机电压-推力关系构建了运动平台数学模型,利用频域扫描法在实物实验的基础上辨识出运动平台的模型参数。最后,基于运动平台模型设计了双闭环控制器和前馈控制器组成的复合控制器来保证运动平台的稳定性和高精度,同时根据整个系统的主导极点设计了输入整形器以抑制运动平台的残余振荡。实验结果表明:加入了输入整形的复合控制器将运动平台的稳态重复定位精度从±1.47μm提高到±0.354μm。较传统复合控制器,本文提出的方法能使基因测序仪运动平台更快进入可用重复定位精度范围,并基本满足基因测序仪采集图像时所需的稳定性强、精度高等要求。     

一种热态锻件测量系统的误差分析

摘要：针对一种已用于生产实践的热态锻件尺寸测量系统,介绍其测量原理、安装调试原理和具体测量方法,并在此基础上对该系统进行误差分析,从而提出有效的方法预防或者降低误差,提高测量精度,为维修和操作人员提供更好的服务。     

Feedforward element design using learning controller for precision control of linear synchronous motor with nonlinear characteristics

This study presents a time-invariant feedforward (FF) element design for the high-speed and high-precision tracking control of an ultrahigh-acceleration, high-velocity linear synchronous motor (LSM). The linear motor can generate an acceleration greater than 70 G (= 686 m/s²) and move at a velocity above 10 m/s. To take advantage of this performance and realize high response, the design and usage of suitable FF elements is crucial. However, as the LSM includes highly nonlinear characteristics, it is difficult to provide an exact dynamic model for FF design. To overcome this problem, a control system with a learning controller (LC) as the FF element has been designed previously, demonstrating high-precision and high response motion. However, the motion performance can be achieved only with sufficient pre-learned motions. The integrator and the disturbance observer that were effective in suppressing disturbances were removed from the control system. In addition, the control system has some FF time-invariant elements along with the LC. This study proposes a design method for easy design of all FF elements using an LC. The designed FF elements are time invariant and are used with an integrator and a disturbance observer, without pre-learning. Using the proposed method, two sets of time-invariant FF elements are designed. The performances of two control systems, which include a set of time-invariant FF elements for each, and a simple disturbance observer are experimentally examined and compared with two previously designed control systems. Experimental results demonstrate that the performance of one of the control systems with a set of time-invariant FF elements designed in this study and a disturbance observer is good and almost comparable with that of the previously designed control system with high-precision and high response motion.