共查询到19条相似文献,搜索用时 156 毫秒
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针对深反应离子刻蚀(DRIE)工艺加工高深宽比梳齿电容存在侧壁倾斜角的情况,分析了该倾斜角对梳齿谐振器频率的影响。为了使设计的梳齿谐振器频率符合应用要求,推导出了梳齿谐振器在正负侧壁倾斜角θ下的谐振频率计算公式。利用ANSYS Workbench11.0平台,分别对侧壁倾斜角为0°,0.2°,0.35°和0.5°的情形进行了有限元建模与模态仿真。仿真结果表明:随着正倾斜角的增大,谐振频率减小;负倾斜角增大时,谐振频率增大,且一阶模态振形的平稳程度越差。比较数值仿真结果与考虑了正负倾斜角误差的梳齿谐振器谐振频率计算公式计算结果对比,吻合较好。 相似文献
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建立了L梁微机械梳齿谐振器的仿真模型,利用ANSYS有限元仿真软件对其进行模态和谐响应仿真分析。通过模态分析,得到谐振频率等重要性能参数以及不同L梁结构参数对它们的影响:谐振频率随着L长梁梁长的增加而减小;随着L长梁梁宽,L短梁梁长、梁宽的增加而增加。并在谐响应仿真分析中得到微机械谐振器的幅频响应特性,设计了谐振器的工艺流程和相应的掩膜版图。 相似文献
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该文对横向电场激励下的(yxl)-58°LiNbO_3压电谐振器的高频振动进行了研究。首先,基于Mindlin一阶板理论,计算了压电谐振器的模态频谱关系,得到晶体基板长厚比;然后,利用有限元分析软件COMSOL Multiphysics建立了谐振器的三维有限元模型,通过增加厚度方向网格扫掠层数的方法,验证了仿真模型的网格无关性;其次,通过特征频率计算与频域计算得到了谐振器一阶厚度剪切模态频率值;最后,通过改变电极与晶体板质量比以及电极间距的大小,获得了不同尺寸参数对谐振器高频振动特性的影响规律。仿真分析结果表明,电极与晶体板的质量比同谐振器谐振频率成负相关,质量比越大,谐振频率越小;电极间距值与谐振频率成负相关,间距值越大,谐振频率越小。 相似文献
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综述了氮化铝面内伸缩模态的射频MEMS谐振器。氮化铝面内伸缩模态谐振器(contour-mode resonator,CMR)利用了氮化铝薄膜的压电效应,由器件的机械谐振再通过机电转化实现谐振功能,基本结构为电极层-氮化铝层-电极层。当前研究的两种典型的器件结构为方形振子梳齿电极结构和圆盘振子电容式结构。概述了氮化铝CMR的制备工艺,并重点介绍了磁控溅射法生长薄膜和ICP刻蚀等主要工艺环节。分别对氮化铝CMR的谐振频率、品质因子、温度稳定性和动态电阻等主要性能参数进行了理论分析,针对谐振器各参数的提升给出了具体的改进方向,同时讨论了某些性能的提升所带来的负面影响。氮化铝CMR具备面内集成的优点,随着器件频率的提高,将在无线通信领域具有广阔的应用前景。 相似文献
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贾建科王新宽郑春来耶晓东 《电子元件与材料》2019,(5):84-88
提出了利用介质材料进行微扰实现多模谐振的微带谐振器设计方案。首先分析了材料微扰多模谐振器的谐振机理,然后在谐振器两端介质材料不变情况下,通过改变谐振器中间部分的介质材料,分别设计了两端开路和两端短路的半波长微带多模谐振器。仿真结果表明,上述不同设计得到的微带谐振器均可实现简并模分裂,具有多模谐振的特点。 相似文献
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针对纳米级定位平台小型化和高定位精度的要求,基于体硅工艺研制出一种集结构、驱动和位移检测一体化的集成式微型纳米级xy定位平台.采用体硅双面深度反应离子刻蚀(DRIE)技术释放出高深宽比的静电梳齿驱动器、检测梁及定位平台结构.由于定位平台属于面内运动,为了提高面内运动位移榆测的灵敏度提出了一种利用离子注入工艺和DRIE技术相结合制作检测梁侧壁压阻的方法.并利用该侧壁压阻工艺成功地把基于侧壁压阻式的位移传感器集成到微型xy定位平台上.实验测试表明,位移传感器的灵敏度优于1.17mV/μm,线形度优于0.814%,当驱动电压取30V时,定位平台的单轴输出位移可达±10/μm,并且定位平台x方向和y方向上的位移耦合量非常小;在空气条件下测得定位平台的一阶固有频率为983Hz. 相似文献
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A rigorous spectral-domain analysis is carried out to determine the resonant frequency characteristics of resonators in a general suspended substrate stripline. The resonant frequency characteristics of single as well as coupled rectangular resonators are computed. An important observation for resonators in broadside-coupled suspended substrate stripline is that the even- and odd-mode resonant frequencies are considerably different. 相似文献
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石英谐振器可以作为传感器的敏感元件。为了减小温度等因素的干扰,提高石英晶体谐振器力敏特性,通过能陷理论及其厚度剪切石英晶体谐振能量分布曲线的计算,在同一圆形晶片上设计了多电极力敏谐振器集群。根据共模抑制原理,将谐振器集群输出频率信号作差频处理,以此抑制温度等因素的干扰,再将差频信号叠加以提高石英晶体谐振器集群整体力敏特性。实验结果表明,石英谐振器集群差频输出的温频特性明显优于传统的单电极谐振器,石英晶体谐振器集群整体力灵敏度系数提高到9 992 Hz/N。 相似文献
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为简化声表面波(SAW)传感器的编码过程,提出了一种基于SAW谐振器的编码方法,通过多个不同中心谐振频率的SAW谐振器分别连接不同的负载阻抗进行传感器的编码。设计了传感器的具体结构,建立了传感器的等效电路模型,利用ADS仿真软件对中心谐振频率分别为868MHz和915MHz的2个SAW谐振器组成的传感器进行仿真,结果表明,SAW谐振器外接1pF与4pF的阻抗,其谐振频率差可达200300kHz。根据仿真结果,设计制作了不同编码的2个传感器,一个不外接阻抗,一个外接10pF的阻抗,测试谐振频率差别可达39.75300kHz。根据仿真结果,设计制作了不同编码的2个传感器,一个不外接阻抗,一个外接10pF的阻抗,测试谐振频率差别可达39.7540.2kHz,因此,SAW谐振器外接不同阻抗时谐振频率的差异明显,基于SAW谐振器与外接阻抗的传感器编码方法是可行的。 相似文献
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Hee Yong Hwang Sang-Won Yun 《Microwave Theory and Techniques》2002,50(7):1821-1831
New dielectric-filled rectangular-waveguide-type TE10δ resonators are presented. A dielectric-filled rectangular waveguide section (WGS) has inductive impedance at the open-end faces. Using this property and the frequency dependency of the wave impedance of the WGS, we calculated the resonant frequency and the slope parameter of the waveguide-type resonators. The resonant frequency depends strongly on the width of the WGS and loosely on the height and the length. The calculated resonant frequencies agree well with measured data. One of the proposed bandpass filters shows highly reduced spurious up to three times the center frequency. Quality factors of the resonator and effects of a housing are also discussed 相似文献
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Ring resonators have been widely used for various applications. Dual-mode ring resonators have also been investigated due to their applicability to multifrequency mode requirement. In this paper, dual-mode ring resonators using a branch line are designed along with a systematic approach. Triple-mode branch-line ring resonators are also designed adding two branch lines to the ring resonator. Adding more branch lines, multimode resonators can be realized based on the design procedure developed here. The location of the branch lines determines the additional resonant frequencies other than the fundamental resonant frequency generated by the enclosing ring. Furthermore, half-ring resonators working at 2.5 GHz are proposed for suppressing multiple harmonics (second and third harmonics) and providing size reduction with employment of various physical configurations. Equalizing the even- and odd-mode phase delays, harmonics are suppressed effectively in the design of half-ring resonators. Double half-ring resonators with a long opening gap are investigated to continuously decrease the resonant frequency. An open-loop structure provides flexible design and lowers the resonant frequency. Two dual-mode ring resonators and one triple-mode ring resonator are simulated and fabricated along with three different half-ring resonators 相似文献
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基于杠杆的微机械陀螺结构设计与仿真 总被引:1,自引:0,他引:1
提出了一种基于机械杠杆放大机构的微机械陀螺设计方案,用于提高微机械陀螺的灵敏度和精度。该杠杆放大机构使用在陀螺的驱动模态中,通过杠杆将驱动梳齿位移放大后传递到质量块上,在陀螺驱动模态谐振频率一定的情况下增大了质量块在驱动方向的运动速度,提高了陀螺敏感模态的科氏力及陀螺表头的机械灵敏度,从而提高陀螺系统的灵敏度和精度。在Coventor-ware中对陀螺结构进行了系统级仿真,仿真结果表明在杠杆动力臂和阻力臂长度之比为1∶5.2时,陀螺机械灵敏度放大了5.9倍。因此,通过在微机械陀螺驱动模态中使用杠杆结构可以提高其灵敏度和精度。 相似文献
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The output of a femtosecond fiber laser will form a frequency comb that can be phase-locked through feedback to the cavity length and pump power. A perturbative theory is developed to describe this frequency comb output, in particular for a solitonic fiber laser. The effects of resonant dispersion, saturation of the self-amplitude modulation, cavity loss, third-order dispersion, Raman scattering, self-phase modulation, and self-steepening on the spacing and offset of the fiber-laser frequency comb are given. The mechanisms by which the pump power, cavity length and cavity loss control the frequency comb spacing and offset are identified. Transfer functions are derived for the comb response to change in cavity length, pump power or cavity loss. This theory can potentially be applied to other frequency comb sources as well. 相似文献