阶梯结构微梁传感器优化设计

为了实现微悬臂梁传感器的自驱动自感知功能,设计了嵌套式阶梯结构微悬臂梁传感器。采用有限元分析的方法对其微梁的自由端弯曲位移和固有频率进行了仿真,研究了阶梯结构对微悬臂梁传感器性能的改善,确定了微悬臂梁传感器的阶梯结构参数。结果表明,经优化设计后的微梁传感器,微悬臂梁自由端弯曲位移可达566 nm,提高了2倍;固有频率可达385 k Hz,提高了1. 45倍。阶梯式微梁的成功设计为传感器的集成与小型化奠定了基础。     

悬臂梁式环形谐振腔微压传感器的研究

针对传统微压传感器灵敏度低、体积大的问题,提出了一种新型悬臂梁式环形谐振腔微压传感器。首先理论分析了悬臂梁式环形谐振腔微压传感器的工作原理,然后对悬臂梁结构进行了建模仿真,同时也确定了悬臂梁和环形谐振腔的最佳结构参数,最后利用MEMS工艺在SOI材料上制备了该新型传感器。利用光学耦合测试平台,对所加工的环形谐振腔进行性能测试,实验测得环形谐振腔的Q值为7.75×10~4,传感器的灵敏度为31 pm/k Pa,可以满足微压传感器高灵敏度的要求。     

105g压阻效应阵列式加速度微传感器硅悬臂梁结构分析

在已有10^5g压阻效应阵列式加速度微传感器版图设计的基础上,应用有限元理论及相关软件,对版图中的硅微悬臂梁进行了模态分析和结构动态计算。将宏观理论应用到微观结构分析中;并对该种结构的加速度传感器的样品进行了冲击实验,得到实验曲线。对计算分析与实验结果进行了比较,指出并分析了误差可能出现的方面。     

曲面过载保护的新型高g值冲击硅微机械加速度传感器的设计

给出一种测量高g值冲击加速度的硅微机械加速度传感器的结构和动力学模型，此传感器为整体式悬臂梁结构，采用硅微机械加工技术制作，便于封装和大批量低成本制造，其敏感方向在硅片平面内，两个压敏电阻分布在悬臂梁的顶端，两个完全相同的悬壁梁沿相反方向分布，四个压敏电阻构成惠斯通全桥连接，悬臂梁的过载保护采用上下两个曲面，一方面有效地提高悬壁梁的过载保护能力，另一方面调节加速度传感器的压膜阻尼，使之接近临界阻尼，有效抑制自由振动模态，提高测量精度。     

三维微力探针传感器技术研究

结合光纤探针与四悬臂梁支撑结构的特点,研制了一种基于微探针形式,具有μN级三维微力测量和传感能力的压阻式三维微力探针传感器.通过ANSYS数值仿真的方法研究了传感器结构之间的应力特点.并且通过实验验证了所研制的传感器的综合精度可达到0.2%FS,干扰误差≤0.3%FS.     

ZnO压电薄膜微悬臂梁的结构设计及研究

当压力作用在ZnO压电薄膜微悬臂梁上时,产生电荷量的大小将直接决定压电传感器灵敏度的高低.根据等效截面法,推导了复合微悬臂梁所受的作用力与其产生电荷量的关系方程,为传感器标定和力的测量提供理论依据,并依据此转换方程,对压电微悬臂梁的结构尺寸进行比较分析,以提高传感器的灵敏度和分辨率.此研究为压电微悬臂梁压力传感器的结构优化设计提供了一定的参考.     

不锈钢基压电厚膜微悬臂梁传感器的制作与测试

制备了不锈钢基底压电厚膜微悬臂梁传感器。利用精密激光加工技术制备了厚度为100μm的不锈钢微悬臂梁基底,由于不锈钢具有良好的导电性,可以作微悬臂梁传感器的下电极,采用模板辅助电雾化沉积技术在不锈钢微悬臂梁基底上制备了厚度为20μm的致密PZT厚膜,利用磁控溅射技术制备了30/200 nm厚的Ti/Pt上电极,最终形成了压电厚膜微悬臂梁传感器。多普勒激光测振实验表明,在20 V的激励电压下,压电厚膜微悬臂梁谐振频率为19 kHz。     

基于MEMS技术的时差振荡高精度硅压力传感器

基于MEMS技术的时差振荡高精度硅压力传感器是一种全新理念的高精度压力传感器。它通过检测压力敏感膜片正向和反向电阻的放电时间的比值间接测量压力,为数字信号输出。其抗干扰能力强,性能稳定、结构紧凑,相对微硅压阻压力传感器和微硅电容式压力传感器精度高、稳定可靠,主要性能指标和微硅谐振式压力传感器相当,但较之微硅谐振式压力传感器具有工艺简单、成本低、便于产业化生产。其原理由安徽皖科电子工程有限公司首次提出,具有原创性,拥有自主知识产权,并掌握核心技术。     

悬臂梁式硅纳米谐振器的量子压缩效应

分析了厚度分别为12 nm和38.5 nm的悬臂梁式硅纳米谐振器内由海森堡不确定原理所决定的零点位置不确定度,分析结果表明,零点位置不确定度与悬臂梁的厚度和宽度成反比、与悬臂梁的长度成正比,12 nm厚的悬臂梁其零点位置不确定度为4.1×10-3 nm.结合参量泵量子压缩技术,分析了不同厚度的悬臂梁式硅纳米谐振器的量子压缩系数与器件结构尺寸、温度、泵激电压之间的关系,结果显示,量子压缩系数与温度成正比、与泵激电压成反比.当温度为0.01 K、泵激电压为4V时,12 nm厚的悬臂梁式硅纳米谐振器的量子噪声降低了26.56 dB.该项研究有助于提高极薄悬臂梁式硅纳米谐振器在量子噪声影响下的极限检测精度.     

微悬臂梁生化传感器在液体环境中的应用

近年来,生化传感器中加入了新型的微悬臂梁装置．不仅为生化传感器中的集成、便捷功能提供了前提条件,微悬臂梁生化传感器还有可能发展成为离灵敏度探测识别多种分子的检测仪器。微悬臂梁作为一门新兴的生化传感器技术,具有体积小、灵敏度好、响应速度快以及较易集成等优点,因此在液体环境中发挥着极大地作用而得到广泛应用。     

基于新型MEMS三轴加速度传感器的矿震监测系统

微机电系统是指融合了硅微加工,光刻成型和精度机械加工等多种微加工技术制作的微传感器、微执行器和微系统.MMA7260Q是飞思卡尔推出的一款微型电容式三轴加速度传感器,内部采用了信号调理、单极低通滤波器和温度补偿技术,可以采集震动产生的加速度在三坐标中的各个分量.三轴加速度传感器MMA7260Q与嵌入式计算机组成测量节点,各节点由CAN总线组成分布式检测网络,完成矿震的监测、震源的定位和趋势分析.使监测灵敏度、定位精度、传感器可靠性有了很大的提高.     

耐高温压阻式压力传感器研究与进展

传统的硅扩散压阻式压力传感器用重掺杂4个P型硅应变电阻构成惠斯顿电桥的力敏检测模式，采用PN结隔离，高温压阻式压力传感器取消了PlN结隔离，与半导体集成电路平面工艺兼容，符合传感器的发展方向。根据力敏材料的分类，分别介绍了多晶硅中高温压力传感器、SiC高温压力传感器和单晶硅SOI（silicon on insulator）高温压力传感器的基本工作原理和国内外的发展现状，重点论述了BESOI（bonding and etch-backSOI）、SMARTCUT和SIMOX（separation by implanted oxygen）技术的SOI晶片加工工艺。以及由此晶片微机械加工成的芯片封装的高温微型压力传感器部分特性，对此领域的发展作了展望。     

Hybrid micro-machining processes: A review

Micro-machining has attracted great attention as micro-components/products such as micro-displays, micro-sensors, micro-batteries, etc. are becoming established in all major areas of our daily life and can already been found across the broad spectrum of application areas especially in sectors such as automotive, aerospace, photonics, renewable energy and medical instruments. These micro-components/products are usually made of multi-materials (may include hard-to-machine materials) and possess complex shaped micro-structures but demand sub-micron machining accuracy. A number of micro-machining processes are therefore, needed to deliver such components/products. The paper reviews recent development of hybrid micro-machining processes which involve integration of various micro-machining processes with the purpose of improving machinability, geometrical accuracy, tool life, surface integrity, machining rate and reducing the process forces. Hybrid micro-machining processes are classified into two major categories namely, assisted and combined hybrid micro-machining techniques. The machining capability, advantages and disadvantages of the state-of-the-art hybrid micro-machining processes are characterized and assessed. Some case studies on integration of hybrid micro-machining with other micro-machining and assisted techniques are also introduced. Possible future efforts and developments in the field of hybrid micro-machining processes are also discussed.     

An analytical model for the prediction of temperature distribution and evolution in hybrid laser-waterjet micro-machining

A hybrid laser-waterjet micro-machining technology was developed for near damage-free micro-ablation recently. It uses a new material removal concept where the laser-softened material is expelled by a pressurised waterjet. The temperature field in this hybrid machining process is an essential quantity for understanding the underlying material removal mechanism and optimizing the process conditions. This study presents a three-dimensional (3-D) analytical model for the temperature field in this hybrid laser-waterjet micro-machining process. The interaction among the laser, waterjet, and workpiece is considered in the model. The absorption of laser by water, the formation of laser-induced plasma in water, the bubble formation and the laser refraction at the air-water interface are discussed. DuHamel’s principle is used to determine a closed-form temperature equation and a solution in a variable separation form is obtained. A calculation for silicon carbide is conducted. The results are illustrated by a group of 3-D temperature profiles intuitively and visually. It is shown that the temperatures are below the melting point during the process due to the cooling action of waterjet. The almost damage-free micro-machining can be achieved. Besides, the maximum temperature increases with the increased average laser power and waterjet offset distance and decreased nozzle exit diameter where the average laser power takes a major action.     

几种新型集成硅微(型)传感器系统

介绍了作者近年来在硅微机械加工技术和半导体集成电路技术相结合的基础上研制的硅微机械与光纤组合式阵列声传感器、集成硅微机械光压力传感器和微型多道成像光谱分析系统的结构、工作原理及制造工艺.     

通用型高温压阻式压力传感器研究

针对石油化工等领域高温下压力测量的要求,设计了压阻式压力传感器硅芯片,采用SIMOX 技术SOI晶片,在微加工平台上制作了硅芯片.对不同的用户工况设计了装配结构,采用耐高温封装工艺,研究了耐高温微型压力传感器封装材料匹配与热应力消除技术,解决了内外引线的技术难点.从低成本、易操作性出发,设计了温度系数补偿电路,研制了精度高、稳定性佳的耐高温通用压力传感器.     

机载压阻式压力传感器设计与加工

介绍一种压阻式压力传感器的设计原理和加工技术，设计出了敏感电路和硅膜结构，根据所设计压力传感器的结构特点和国内现有加工设备，采用了体硅加工技术和表面加工技术相结合的方法进行加工研究并给出了加工模型。     

Current Status of Hybrid Bearing Damage Detection

Advances in material development and processing have led to the introduction of ceramic hybrid bearings for many applications. The introduction of silicon nitride hybrid bearings into the high-pressure oxidizer turbopump on the space shuttle main engine led NASA to solve a highly persistent and troublesome bearing problem. Hybrid bearings consist of ceramic balls and steel races. The majority of hybrid bearings utilize Si₃N₄ balls. The aerospace industry is currently studying the use of hybrid bearings and, naturally, the failure modes of these bearings become an issue in light of the limited data available.

In today's turbine engines and helicopter transmissions, the health of the bearings is detected by the properties of the debris found in the lubrication line when damage begins to occur. Current oil debris sensor technology relies on the magnetic properties of the debris to detect damage. Because the ceramic rolling elements of hybrid bearings have no metallic properties, a new sensing system must be developed to indicate the system health if ceramic components are to be safely implemented in aerospace applications. The ceramic oil debris sensor must be capable of detecting ceramic and metallic component damage with sufficient reliability and forewarning to prevent a catastrophic failure.

The objective of this research is to provide a background summary on what is currently known about hybrid bearing failure modes and to report preliminary results on the detection of silicon nitride debris in oil using a commercial particle counter.     

微细加工技术与应用

微细加工技术是现代机电领域新兴学科微机电系统（MEMS）研究的关键技术之一。分析了近年来微机械领域的主要微细加工方法、能达到的加工尺度与水平、加工范畴及应用;阐述了微细加工技术的发展趋势。     

超声电解复合微细加工装置与试验研究

分析微细电解复合超声频振动加工过程机理,提出一种微细加工新方法--超声电解复合微细加工;设计、构造并完善复合微细加工装置;研究微细阴极制作工艺,利用微细组合电加工技术制作各类截面形状的微细阴极;进行超声电解复合微细加工试验,验证微细电解复合超声频振动实现微细加工的可行性及其在加工速度、精度、表面质量等方面的技术优势,探讨超声电解复合微细加工制作微结构的工艺规律。