A high-frequency, 2-D array element using thermoelastic expansion in PDMS

Optical generation of ultrasound is a promising alternative to piezoelectricity for high-frequency arrays. An array element is defined by the size and location of a laser beam focused on a suitable surface. Optical generation using the thermoelastic effect has traditionally suffered from low conversion efficiency. We previously demonstrated an increase in conversion efficiency of nearly 20 dB with an optical absorbing layer consisting of a mixture of polydimethylsiloxane (PDMS) and carbon black spin coated onto a glass microscope slide. Radiation pattern measurements with an 85 MHz spherically focused transducer indicated an array element size of 20 /spl mu/m. These measurements lacked the spatial resolution required to reveal fine details in the radiated acoustic field. Here we report radiation pattern measurements with a 5-/spl mu/m spatial sampling, showing that the radiated acoustic field is degraded by leaky Rayleigh waves launched from the PDMS/glass interface. We demonstrate that replacing the glass with a clear PDMS substrate eliminates the leaky Rayleigh waves, producing a broad and smooth radiation pattern suitable for a two-dimensional (2-D) phased array operating at frequencies greater than 50 MHz.     

Improvements in optical generation of high-frequency ultrasound

The thermoelastic effect in a black polydimethylsiloxane (PDMS) film is used to produce high-frequency, high-intensity ultrasound for applications in water and soft tissue. We show that the optoacoustic transduction efficiency is improved by about 10 dB by decreasing the thickness of the black PDMS film from 25 microm to 11 microm. The center frequency of the generated ultrasound is 60 MHz, with a -6 dB bandwidth of 80%. When a 5 ns laser pulse with energy of 50 microJ is delivered to a spot size of 25 microm, the acoustic pressure 10 mm away from the film surface is about 800 kPa. Furthermore, we demonstrate that the center frequency and bandwidth of the generated ultrasound is mainly determined by the temporal profile of the input optical pulse, and it has the potential to be easily improved to above 100 MHz.     

Modeling of piezoelectric multilayer ceramics using finite elementanalysis

For medical ultrasound imaging, 2-D array transducers have greater versatility than linear arrays. Unfortunately, the tiny array elements in a 2-D array have poor signal-to-noise ratio (SNR). We have previously shown that SNR is increased in 2-D array transducers made from piezoelectric multilayer ceramics. Conventional one-dimensional models provide accurate results when comparing multilayer ceramic performance relative to single layer transducers. However, these models are not accurate when comparing simulations directly to measurements. Because multilayer ceramics have a complex structure, a 3-D model, such as finite element analysis, is needed for accurate simulations. We modeled four arrays that were previously fabricated: a single layer and multilayer 1 MHz, 2-D array element, and a single layer and multilayer 2.25 MHz, 1.5-D array element that can focus and steer in azimuth but only steer in the elevation dimension. We compared the simulated and measured impedance plots for each transducer. The finite element analysis plots accurately predicted the impedance for each vibration mode. On the other hand, the one dimensional KLM transmission line model could simulate only the thickness mode vibrations and the results were inaccurate compared to measurements. We also simulated the transmit output pressure for the 2.25 MHz arrays and compared the results to measurements. The simulated pressure vs. time plots and their spectra were accurate when compared to measurements. Finally, we obtained a series of images that show the impulse response vibrations for the 2.25 MHz, arrays. These animations show the vibration modes in the complex multilayer ceramic structure. Measurements were not available to confirm the animations. Our results show that finite element analysis in three dimensions is a valuable tool to predict the performance of multi-layer transducers     

Finite element modeling and experimental characterization of crosstalk in 1-D CMUT arrays

Crosstalk is the coupling of energy between the elements of an ultrasonic transducer array. This coupling degrades the performance of transducers in applications such as medical imaging and therapeutics. In this paper, we present an experimental demonstration of guided interface waves in capacitive micromachined ultrasonic transducers (CMUTs). We compare the experimental results to finite element calculations using a commercial package (LS-DYNA) for a 1-D CMUT array operating in the conventional and collapsed modes. An element in the middle of the array was excited with a unipolar voltage pulse, and the displacements were measured using a laser interferometer along the center line of the array elements immersed in soybean oil. We repeated the measurements for an identical CMUT array covered with a 4.5-microm polydimethylsiloxane (PDMS) layer. The main crosstalk mechanism is the dispersive guided modes propagating in the fluid-solid interface. Although the transmitter element had a center frequency of 5.8 MHz with a 130% fractional bandwidth in the conventional operation, the dispersive guided mode was observed with the maximum amplitude at a frequency of 2.1 MHz, and had a cut-off frequency of 4 MHz. In the collapsed operation, the dispersive guided mode was observed with the maximum amplitude at a frequency of 4.0 MHz, and had a cut-off frequency of 10 MHz. Crosstalk level was lower in the collapsed operation (-39 dB) than in the conventional operation (-24.4 dB). The coverage of the PDMS did not significantly affect the crosstalk level, but reduced the phase velocity for both operation modes. Lamb wave modes, A0 and S0, were also observed with crosstalk levels of -40 dB and -65 dB, respectively. We observed excellent agreement between the finite element and the experimental results.     

Characterization of a broadband all-optical ultrasound transducer-from optical and acoustical properties to imaging

A broadband all-optical ultrasound transducer has been designed, fabricated, and evaluated for high- frequency ultrasound imaging. The device consists of a 2-D gold nanostructure imprinted on top of a glass substrate, followed by a 3 microm PDMS layer and a 30 nm gold layer. A laser pulse at the resonance wavelength of the gold nanostructure is focused onto the surface for ultrasound generation, while the gold nanostructure, together with the 30 nm thick gold layer and the PDMS layer in between, forms an etalon for ultrasound detection, which uses a CW laser at a wavelength far from resonance as the probing beam. The center frequency of a pulse-echo signal recorded in the far field of the transducer is 40 MHz with -6 dB bandwidth of 57 MHz. The signal to noise ratio (SNR) from a 70 microm diameter transmit element combined with a 20 microm diameter receive element probing a near perfect reflector positioned 1.5 mm from the transducer surface is more than 10 dB and has the potential to be improved by at least another 40 dB. A high-frequency ultrasound array has been emulated using multiple measurements from the transducer while mechanically scanning an imaging target. Characterization of the device's optical and acoustical properties, as well as preliminary imaging results, strongly suggest that all-optical ultrasound transducers can be used to build high-frequency arrays for real-time high-resolution ultrasound imaging.     

SPR imaging measurements of 1-D and 2-D DNA microarrays created from microfluidic channels on gold thin films

Microfluidic channels fabricated from poly(dimethylsiloxane) (PDMS) are employed in surface plasmon resonance imaging experiments for the detection of DNA and RNA adsorption onto chemically modified gold surfaces. The PDMS microchannels are used to (i) fabricate "1-D" single-stranded DNA (ssDNA) line arrays that are used in SPR imaging experiments of oligonucleotide hybridization adsorption and (ii) create "2-D" DNA hybridization arrays in which a second set of PDMS microchannels are placed perpendicular to a 1-D line array in order to deliver target oligonucleotide solutions. In the 1-D line array experiments, the total sample volume is 500 microL; in the 2-D DNA array experiments, this volume is reduced to 1 microL. As a demonstration of the utility of these microfluidic arrays, a 2-D DNA array is used to detect a 20-fmol sample of in vitro transcribed RNA from the uidA gene of a transgenic Arabidopsis thaliana plant. It is also shown that this array fabrication method can be used for fluorescence measurements on chemically modified gold surfaces.     

Real-time 3-D ultrasound guidance of interventional devices

We have previously developed 2-D array transducers for many real-time volumetric imaging applications. These applications include transducers operating up to 7 MHz for transthoracic imaging, up to 15 MHz for intracardiac echocardiography (ICE), 5 MHz for transesophageal echocardiography (TEE) and intracranial imaging, and 7 MHz for laparoscopic ultrasound imaging (LUS). Now we have developed a new generation of miniature ring-array transducers integrated into the catheter deployment kits of interventional devices to enable real-time 3-D ultrasound scanning for improved guidance of minimally invasive procedures. We have constructed 3 new ring transducers. The first consists of 54 elements operating at 5 MHz. Typical measured transducer element bandwidth was 25%, and the 50 Ohm round trip insertion loss was -65 dB. Average nearest neighbor cross talk was -23.8 dB. The second is a prototype 108-element transducer operating at 5 MHz. The third is a prototype 108-element ring array with a transducer center frequency of 8.9 MHz and a -6 dB bandwidth of 25%. All transducers were integrated with an 8.5 French catheter sheath of a Cook Medical, Inc. vena cava filter deployment device.     

High frame rate imaging with a small number of array elements

Recently, a high frame rate imaging method has been developed to construct either 2-D or 3-D images (about 3750 frames or volumes/s at a depth of about 200 mm in biological soft tissues because only one transmission is needed). The signal-to-noise ratio (SNR) is high using this method because all array elements are used in transmission and the transmit beams do not diverge. In addition, imaging hardware with the new method can be greatly simplified. Theoretically, the element spacing (distance between the centers of two neighboring elements) of an array should be lambda/2, where lambda is the wavelength, to avoid grating lobes in imaging. This requires an array of a large number of elements, especially, for 3-D imaging in which a 2-D array is needed. In this paper, we study quantitatively the relationship between the quality of images constructed with the new method and the element spacing of array transducers. In the study, two linear arrays were used. One has an aperture of 18.288 mm, elevation dimension of 12.192 mm, a center frequency of 2.25 MHz, and 48 elements (element spacing is 0.381 mm or 0.591 lambda). The other has a dimension of 38.4 mmx10 mm, a center frequency of 2.5 MHz, and 64 elements (0.6 mm or 1.034 lambda element spacing). Effective larger element spacings were obtained by combining signals from adjacent elements. Experiments were performed with both the new and the conventional delay-and-sum methods. Results show that resolution of constructed images is not affected by the reduction of a number of elements, but the contrast of images is decreased dramatically when the element spacing is larger than about 2.365 lambda for objects that are not too close to the transducers. This suggests that an array of about 2.365 lambda spacing can be used with the new method. This may reduce the total number of elements of a fully sampled 128x128 array (0.5 lambda spacing) from 16384 to about 732 considering that the two perpendicular directions of a 2-D array are independent (ignoring the larger element spacing in diagonal directions of 2-D arrays).     

High frequency optoacoustic arrays using etalon detection

Two-dimensional phased arrays for high frequency (>30 MHz) ultrasonic imaging are difficult to construct using conventional piezoelectric technology. A promising alternative involves optical detection of ultrasound, where the array element size is defined by the focal spot of a laser beam. Element size and spacing on the order of a few microns are easily achieved, suitable for imaging at frequencies exceeding 100 MHz. We have previously shown images made from a receive-only, two-dimensional optoacoustic array operating at 10 to 50 MHz. The main drawback of optical detection has been poor sensitivity when compared with piezoelectric detection. In this paper, we explore a different form of optical detection demonstrating improved sensitivity and offering a potentially simple method for constructing two-dimensional arrays. Results from a simple experiment using an etalon sensor confirm that the sensitivity of etalon detection is comparable with piezoelectric detection. This paper concludes with a proposal for a high frequency optoacoustic array system using an etalon.     

Volumetric ultrasound imaging using 2-D CMUT arrays

Recently, capacitive micromachined ultrasonic transducers (CMUTs) have emerged as a candidate to overcome the difficulties in the realization of 2-D arrays for real-time 3-D imaging. In this paper, we present the first volumetric images obtained using a 2-D CMUT array. We have fabricated a 128 x 128-element 2-D CMUT array with through-wafer via interconnects and a 420-microm element pitch. As an experimental prototype, a 32 x 64-element portion of the 128 x 128-element array was diced and flip-chip bonded onto a glass fanout chip. This chip provides individual leads from a central 16 x 16-element portion of the array to surrounding bondpads. An 8 x 16-element portion of the array was used in the experiments along with a 128-channel data acquisition system. For imaging phantoms, we used a 2.37-mm diameter steel sphere located 10 mm from the array center and two 12-mm-thick Plexiglas plates located 20 mm and 60 mm from the array. A 4 x 4 group of elements in the middle of the 8 x 16-element array was used in transmit, and the remaining elements were used to receive the echo signals. The echo signal obtained from the spherical target presented a frequency spectrum centered at 4.37 MHz with a 100% fractional bandwidth, whereas the frequency spectrum for the echo signal from the parallel plate phantom was centered at 3.44 MHz with a 91% fractional bandwidth. The images were reconstructed by using RF beamforming and synthetic phased array approaches and visualized by surface rendering and multiplanar slicing techniques. The image of the spherical target has been used to approximate the point spread function of the system and is compared with theoretical expectations. This study experimentally demonstrates that 2-D CMUT arrays can be fabricated with high yield using silicon IC-fabrication processes, individual electrical connections can be provided using through-wafer vias, and flip-chip bonding can be used to integrate these dense 2-D arrays with electronic circuits for practical 3-D imaging applications.     

Calculation of ultrasonic transducer signal-to-noise ratios usingthe KLM model

This paper describes a method for adding thermal and amplifier noise to a KLM model for a transducer element. The model is used to compare the magnitudes of various noise sources in a 5 MHz array element typical of those used for linear array imaging with and without an amplifier. Fundamental signal-to-noise ratio (SNR) issues of importance to array and amplifier designers are explored, including the effect on SNR of effective dielectric constant of the piezoelectric material, individual element size, changing the number of elements, and adding an amplifier to an element before and after a cable. SNR is considered both for the case in which the acoustic output is limited by the maximum rarefactive pressure which is considered safe for a particular application (Mechanical Index limitation) and the case in which acoustic output is limited by the maximum transmit voltage than can he delivered by the imaging system or tolerated by the transducer. It is shown that the SNR performance depends on many controllable parameters and that significant improvements in SNR can be achieved through proper design. The implications for 1.5-D and 2-D array elements are discussed     

Three-dimensional photoacoustic imaging using a two-dimensional CMUT array

In this paper, we describe using a 2-D array of capacitive micromachined ultrasonic transducers (CMUTs) to perform 3-D photoacoustic and acoustic imaging. A tunable optical parametric oscillator laser system that generates nanosecond laser pulses was used to induce the photoacoustic signals. To demonstrate the feasibility of the system, 2 different phantoms were imaged. The first phantom consisted of alternating black and transparent fishing lines of 180 μm and 150 μm diameter, respectively. The second phantom comprised polyethylene tubes, embedded in chicken breast tissue, filled with liquids such as the dye indocyanine green, pig blood, and a mixture of the 2. The tubes were embedded at a depth of 0.8 cm inside the tissue and were at an overall distance of 1.8 cm from the CMUT array. Two-dimensional cross-sectional slices and 3-D volume rendered images of pulse-echo data as well as photoacoustic data are presented. The profile and beamwidths of the fishing line are analyzed and compared with a numerical simulation carried out using the Field II ultrasound simulation software. We investigated using a large aperture (64 x 64 element array) to perform photoacoustic and acoustic imaging by mechanically scanning a smaller CMUT array (16 x 16 elements). Two-dimensional transducer arrays overcome many of the limitations of a mechanically scanned system and enable volumetric imaging. Advantages of CMUT technology for photoacoustic imaging include the ease of integration with electronics, ability to fabricate large, fully populated 2-D arrays with arbitrary geometries, wide-bandwidth arrays and high-frequency arrays. A CMUT based photoacoustic system is proposed as a viable alternative to a piezoelectric transducer based photoacoustic systems.     

Hybrid multi/single layer array transducers for increased signal-to-noise ratio

In medical ultrasound imaging, two-dimensional (2-D) array transducers are necessary to implement dynamic focusing in two dimensions, phase correction in two dimensions and high speed volumetric imaging. However, the small size of a 2-D array element results in a small clamped capacitance and a large electrical impedance, which decreases the transducer signal-to-noise ratio (SNR). We have previously shown that SNR is improved using transducers made from multi-layer PZT, due to their lower electrical impedance. In this work, we hypothesize that SNR is further increased using a hybrid array configuration: in the transmit mode, a 10 Omega electronic transmitter excites a 10 Omega multi-layer array element; in the receive mode, a single layer element drives a high impedance preamplifier located in the transducer handle. The preamplifier drives the coaxial cable connected to the ultrasound scanner. For comparison, the following control configuration was used: in the transmit mode, a 50 Omega source excites a single layer element, and in the receive mode, a single layer element drives a coaxial cable load. For a 5x102 hybrid array operating at 7.5 MHz, maximum transmit output power was obtained with 9 PZT layers according to the KLM transmission line model. In this case, the simulated pulse-echo SNR was improved by 23.7 dB for the hybrid configuration compared to the control. With such dramatic improvement in pulse-echo SNR, low voltage transmitters can be used. These can be fabricated on integrated circuits and incorporated into the transducer handle.     

An integrated circuit with transmit beamforming flip-chip bonded to a 2-D CMUT array for 3-D ultrasound imaging

State-of-the-art 3-D medical ultrasound imaging requires transmitting and receiving ultrasound using a 2-D array of ultrasound transducers with hundreds or thousands of elements. A tight combination of the transducer array with integrated circuitry eliminates bulky cables connecting the elements of the transducer array to a separate system of electronics. Furthermore, preamplifiers located close to the array can lead to improved receive sensitivity. A combined IC and transducer array can lead to a portable, high-performance, and inexpensive 3-D ultrasound imaging system. This paper presents an IC flip-chip bonded to a 16 x 16-element capacitive micromachined ultrasonic transducer (CMUT) array for 3-D ultrasound imaging. The IC includes a transmit beamformer that generates 25-V unipolar pulses with programmable focusing delays to 224 of the 256 transducer elements. One-shot circuits allow adjustment of the pulse widths for different ultrasound transducer center frequencies. For receiving reflected ultrasound signals, the IC uses the 32-elements along the array diagonals. The IC provides each receiving element with a low-noise 25-MHz-bandwidth transimpedance amplifier. Using a field-programmable gate array (FPGA) clocked at 100 MHz to operate the IC, the IC generated properly timed transmit pulses with 5-ns accuracy. With the IC flip-chip bonded to a CMUT array, we show that the IC can produce steered and focused ultrasound beams. We present 2-D and 3-D images of a wire phantom and 2-D orthogonal cross-sectional images (Bscans) of a latex heart phantom.     

Real-time rectilinear 3-D ultrasound using receive mode multiplexing

In previous work, we developed two generations of a real-time rectilinear volumetric scanner operating at 5 MHz for abdominal, breast, or vascular imaging using a Mills cross two-dimensional (2-D) array and a rectilinear periodic 2-D array. To improve spatial resolution performance and sensitivity, we developed a new design using 4:1 receive mode multiplexing. With 4:1 multiplexing, the new 65,000 element 2-D array has 4 x 256 = 1024 receivers so that 256 receivers can be used on any image line. The two major benefits of using receive mode multiplexing are an increase in receive sensitivity due to a greater number of receive elements, and a decrease in grating lobe and clutter levels due to increased receive element density. Theoretical simulations and analysis show an increase of about 13 dB in sensitivity compared to our previous work. With these encouraging results, a new 65,000 element 5-MHz, 2-D array having 1024 receivers and 169 transmitters was prototyped. In addition, the multiplexer and control circuitry were designed, built, and interfaced with both the transducer and volumetric scanner. Images of tissue-mimicking phantoms and in vivo targets were obtained. Using a spherical cyst phantom, experimental results showed a +12 dB improvement in signal-to-noise ratio and a +6 dB improvement in contrast compared to our previous work.     

MEMS ultrasonic transducers for the testing of solids

Arrays of capacitive diaphragm ultrasonic transducers could potentially be used for non-destructive ultrasonic testing and structural monitoring. In this paper, we consider the efficiency of coupling of these transducers to solid media. We show that efficient coupling can be realized by using a silicone coating as a coupling medium. We present the results of experimental characterization of ultrasonic transducers coupled to solids in this way. We show that these transducers can be used with piezoelectric emitting transducers within the range from 1 to 5 MHz, and we demonstrate the use of several transducers as a phased array to determine the direction and distance of an ultrasonic source.     

Integrated catheter for 3-D intracardiac echocardiography and ultrasound ablation

A catheter device with integrated ultrasound imaging array and ultrasound ablation transducer is introduced. This device has been designed for use in interventional cardiac procedures in which the cardiac anatomy is first imaged using real-time three-dimensional (3-D) ultrasound, then ablated to treat arrhythmias. The imaging array includes 112 elements operating at 5.4 MHz arranged in a 2-D matrix. Individual elements have a bandwidth of 21% and an insertion loss of 80 dB. The array has an azimuth resolution of 12 degrees and an elevation resolution of 8.7 degrees. The ablation transducer is a concentric piezoelectric transducer PZT-4 ring (outside diameter (O.D.), 4.5 mm, inside diameter (I.D.), 3.1 mm) operating at 10 MHz that surrounds the imaging array. It can produce a spatial-peak, temporal-average intensity up to 16 W/cm2. The entire device fits into a 9 Fr lumen with a 14 Fr tip to accommodate the ablation ring. With this device we have imaged, in realtime 3-D, a variety of targets including wire phantoms, fixed sheep hearts, and fresh bovine tissue. The ablation ring has been used to heat tissue-mimicking rubber 14 degrees C, as well as create lesions in fresh bovine tissue.     

Optoelectronic transmitters for medical ultrasound transducers

Optoelectronics and fiber optics can be used to miniaturize and improve the flexibility of the transducer cable and transducer handle of medical diagnostic ultrasound scanners. The reduction in size has gained importance as 2-D array transducers with up to 1000 independent channels become accepted to improve diagnostic ultrasound images. The authors describe the analysis, design, fabrication and testing of a prototype silicon photoconductive semiconductor switch (PCSS). The monolithic silicon PCSS was used in combination with an infrared semiconductor diode laser with a fiber optic “pigtail” to shock excite and burst excite a 2-D array transducer element resonant at 2.5 MHz. Optically controlled voltage, current, and ultrasound pulses are compared to those from conventional electronic shock excitation and narrow band Doppler pulses. The optically triggered ultrasound pulse for single shock excitation produced 30 V spikes at the 2-D array element with a fall time of 200 nsec and a rise time of 2 μsec with a peak current through the transducer element of 34 mA. An optically produced burst of eight pulses at a frequency of 2.5 MHz produced 11 V spikes at the transducer with a fall time under 100 nsec and a rise time of approximately 300 nsec. The peak current per pulse was 25 mA through the transducer element. These results show the feasibility of applying optoelectronic technology to replace conventional electronic transmitter technology     

High frequency ultrasound imaging with optical arrays

Dynamically focused and steered high frequency ultrasound imaging systems require arrays with fine element spacing, wide bandwidths, and large apertures. However, these characteristics are difficult to achieve at frequencies greater than 30 MHz using conventional array construction methods. Optical schemes offer a solution. Focused laser beams incident on a suitable surface can generate and detect acoustic radiation. Precisely controlling the position and size of the beams defines points of transmission and detection, making it possible for pulse-echo image formation by synthetic aperture methods. An optical detection array was built, relying on a conventional piezoelectric transducer as an ultrasound source. The detection system, with near optimal resolution over a wide depth of field, demonstrates the potential for high frequency array implementation using optical techniques. A possible application is in pathology, where 2-D or 3-D fine resolution pulse-echo imaging can be performed in situ without the need for biopsies.     

Determination of lamb wave dispersion data in lossy anisotropic plates using time domain finite element analysis. Part II: application to 2-2 and 1-3 piezoelectric composite transducer arrays

The use of finite element modeling, combined with optical generation and detection of Lamb waves in plate structures, was extended to encompass periodic ceramic-polymer materials typical of those encountered in 1-3 and 2-2 piezoelectric composite array transducers. The resultant dispersion data was employed to predict the occurrence of Lamb wave-induced cross talk in composite monolithic arrays. The finite element modeling method was then used to simulate the dispersion behavior of two array structures that were subsequently manufactured: a 1-D 45% volume fraction linear array coupon and a 2-D 35% volume fraction array coupon. Excellent agreement between theory and experiment was obtained using impedance measurements and laser scans of the surface displacement profile at selected frequencies. Regions of strong inter-element cross-coupling were identified and these are shown to correlate very well with the dispersion data obtained for the dual-phase plate material. This work is considered to provide a useful basis for the design of wideband monolithic composite arrays and minimization of guided wave propagation along the array substrate.