Electrical characterization of coupled and uncoupled MEMS ultrasonic transducers

We report electrical characterization of micromachined polysilicon capacitive diaphragms for use as ultrasonic transducers. Admittance measurements yield insight into the resonant behavior and also the damping resulting from ultrasonic radiation and frictional forces caused by the etch release holes. Unbonded transducers exhibit sharp resonances with Q values that increase with decreasing air pressure. We also report for the first time direct bonding of these transducers to solid surfaces. Transducers survive the bonding process and show distinctly different displacement in response to applied dc bias. Finally, a single-degree-of-freedom model is used to obtain insight into the various contributions to damping.     

Polyurea thin film ultrasonic transducers for nondestructive testing and medical imaging

Ultrasonic transducers using polyurea piezoelectric thin film are studied in this paper. Aromatic polyurea thin films, prepared by vapor deposition polymerization, have useful characteristics for use as an ultrasonic transducer. This paper presents the fabrication and experimental evaluation of ultrasonic transducers formed using polyurea films. First, the vapor deposition polymerization process using two monomers is briefly reviewed, and the temperature conditions for higher piezoelectric constants are explored. Second, in order to test the fundamental characteristics of this material as a high-frequency, ultrasonic transducer, a polyurea film of 2.5 microm thickness was deposited on a silicon substrate. In the pulse/echo experiment results, a resonant frequency of about 100 MHz was observed. Third, we fabricated a concave point focus transducer and a cylindrical line focus transducer. To examine the performances of the focus transducers, two-dimensional images of a coin and V(z) curve measurements for an aluminum surface were demonstrated.     

Flexible ultrasonic transducers

Flexible ultrasonic transducers (UTs) consisting of a metal foil, a piezoelectric ceramic film, and a top electrode have been developed. The flexibility is realized owing to the porosity of piezoelectric film and the thinness of metal foil. In this paper, the stainless steel (SS), lead-zirconate-titanate (PZT)/PZT composite and silver paste were chosen as metal foil, piezoelectric film, and top electrode materials, respectively. The SS foil serves as both substrate and bottom electrode. The PZT/PZT piezoelectric composite film is made by the sol-gel spray technique. PZT/PZT films of thicknesses from 40 to 70 microm were fabricated onto SS foils. The capability of these flexible sensors operated in the pulse-echo mode for nondestructive testing on flat and curved surfaces of different materials at room temperature and 160 degrees C has been demonstrated. Numerical simulations of the effects of the metal foil thickness on the ultrasonic performance of flexible UTs also were carried out, and the results are in reasonable agreement with experimental data. In addition, a PZT/PZT flexible transducer showed a signal strength comparable with that obtained by a commercial room temperature broad bandwidth transducer.     

Materials and transducers for ultrasonic flowmeters

The construction and operation of a lead zirconate-titanate (TsTS-19) piezoelectric transducer as a component of the model UZR-V ultrasonic flowmeter with an Akustron counter is analyzed. Techniques are proposed for enhancing the operating efficiency of ultrasonic flowmeters. The study has resulted in the development of the UZD-1 and UZD-3 transducers, which utilize the new materials and have parameters superior to those of a standard transducer using TsTS-19 ceramic. The new transducers are recommended for systems designed to monitor cold and hot water flow in conduits from 30 mm to 1000 mm in diameter.Translated from Izmeritel'naya Tekhnika, No. 7, pp. 57–58, July, 1993.     

Self-focused ZnO transducers for ultrasonic biomicroscopy

A simple fabrication technique was developed to produce high frequency (100 MHz) self-focused single element transducers with sputtered zinc oxide (ZnO) crystal films. This technique requires the sputtering of a ZnO film directly onto a curved backing substrate. Transducers were fabricated by sputtering an 18 μm thick ZnO layer on 2 mm diameter aluminum rods with ends shaped and polished to produce a 2 mm focus or f-number equal to one. The aluminum rod served a dual purpose as the backing layer and positive electrode for the resultant transducers. A 4 μm Parylene matching layer was deposited on the transducers after housing and interconnect. This matching layer was used to protect the substrate and condition the transfer of acoustic energy between the ZnO film and the load medium. The pulse-echo response for a representative transducer was centered at 101 MHz with a -6 dB bandwidth of 49%. The measured two way insertion loss was 44 dB. A tungsten wire phantom and an adult zebrafish eye were imaged to show the capability of these transducers.     

Choosing ultrasonic flow transducers

We consider flowmeters using piezoelectric transducers attached to pipes; these devices are characterized by high error and low sensitivity. Translated from Izmeritel'naya Tekhnika, No. 10, pp. 18–20, October, 1997.     

High frequency piezoelectric MEMS ultrasound transducers

High-frequency ultrasound array transducers using piezoelectric thin films on larger structures are being developed for high-resolution imaging systems. The increase in resolution is achieved by a simultaneous increase in operating frequency (30 MHz to about 1 GHz) and close coupling of the electronic circuitry. Two different processing methods were explored to fabricate array transducers. In one implementation, a xylophone bar transducer was prototyped, using thin film PbZr(0.52)Ti(0.48)O(3) (PZT) as the active piezoelectric layer. In the other, the piezoelectric transducer was prepared by mist deposition of PZT films over electroplated Ni posts. Because the PZT films are excited through the film thickness, the drive voltages of these transducers are low, and close coupling of the electronic circuitry is possible. A complementary metal-oxidesemiconductor (CMOS) transceiver chip for a 16-element array was fabricated in 0.35-microm process technology. The ultrasound front-end chip contains beam-forming electronics, receiver circuitry, and analog-to-digital converters with 3-Kbyte on-chip buffer memory.     

Disposable PVDF ultrasonic transducers for nondestructive testingapplications

Disposable ultrasonic contact transducers have been constructed with inexpensive PVDF films for nondestructive testing (NDT) applications. This paper reports the temperature-dependent ultrasonic performance of commercial polyvinylidene fluoride (PVDF) films and PVDF sensors. PVDF film was evaluated for its material properties of interest for ultrasonic transducer performance including the relative dielectric constant ε_r, dielectric loss tangent tan δ_e , electromechanical coupling constant k_t, mechanical quality factor Q_m, and acoustic impedance Z. Disposable PVDF transducers were then coupled to both low and high acoustic impedance test panels and their ultrasonic insertion loss/sensitivity and frequency bandwidth measured as a function of temperature in both the pulse-echo and pitch-catch modes. The results yielded center frequencies in the 3.5-16 MHz range, with -6-dB fractional bandwidths for some of the transducers exceeding 100%. The temperature dependence of the transducers' performance is reported for the -40 to 80°C range and shows an approximate linear decrease in center frequency and increase in fractional bandwidth with increasing temperature. These measured results are compared with predictions from computer simulations based on Mason's model. These tests showed that the same disposable transducers can be used for both ultrasonic and acoustic emission sensing NDT applications. This paper summarizes the quantitative ultrasonic and vibration sensing performance for all of the disposable PVDF film transducers which were tested     

Broadband EMFi-based transducers for ultrasonic air applications

In this work, we explore the possibilities of electromechanical film (EMFi) as a new material for developing broadband transducers for ultrasonic air applications. The advantages of the EMFi film are its wide usable frequency range and easiness to use, making it highly suitable for self made, customizable ultrasonic sensors. This paper presents theoretical and experimental information focused on the needs of the sensor's end user, namely, frequency response, actual dynamic mass and Young's modulus, bandwidth, sensitivity, electromechanical dynamical model, acoustic response, and directivity. It is found empirically that the behavior of the film as an almost ideal piston-like acoustic source permits accurate prediction of the characteristics of transducers built on a developable surface. The results obtained represent the first step to more complex geometries, and, ultimately, to completely customizable field ultrasonic transducers.     

Micromachined ultrasonic capacitance transducers for immersion applications

Investigations into the characteristics of water-coupled ultrasonic capacitance transducers have been undertaken for a range of transducer configurations. The radiated fields have been scanned in water using a miniature hydrophone detector, and the results compared to theory based on a plane piston approach. Micromachined backplates in conjunction with thin Mylar and mica membranes have been investigated, together with aperture modifications such as an annulus and Fresnel zone plate. The measured results agree well with theory, thus demonstrating that wideband predictable performance (>8 MHz) is obtainable with such transducers. Additionally, pulse-echo C-scans of a Plexiglas plate containing an artificial defect have been undertaken with the capacitance transducer, in order to demonstrate that the capacitance transducer has sufficient sensitivity to allow routine nondestructive testing within immersion applications.     

Lithium niobate transducers for MRI-guided ultrasonic microsurgery

Focused ultrasound surgery (FUS) is usually based on frequencies below 5 MHz-typically around 1 MHz. Although this allows good penetration into tissue, it limits the minimum lesion dimensions that can be achieved. In this study, we investigate devices to allow FUS at much higher frequencies, in principle, reducing the minimum lesion dimensions. Furthermore, FUS can produce deep-sub-millimeter demarcation between viable and necrosed tissue; high-frequency devices may allow this to be exploited in superficial applications which may include dermatology, ophthalmology, treatment of the vascular system, and treatment of early dysplasia in epithelial tissue. In this paper, we explain the methodology we have used to build high-frequency high-intensity transducers using Y-36°-cut lithium niobate. This material was chosen because its low losses give it the potential to allow very-high-frequency operation at harmonics of the fundamental operating frequency. A range of single-element transducers with center frequencies between 6.6 and 20.0 MHz were built and the transducers' efficiency and acoustic power output were measured. A focused 6.6-MHz transducer was built with multiple elements operating together and tested using an ultrasound phantom and MRI scans. It was shown to increase phantom temperature by 32°C in a localized area of 2.5 x 3.4 mm in the plane of the MRI scan. Ex vivo tests on poultry tissue were also performed and shown to create lesions of similar dimensions. This study, therefore, demonstrates that it is feasible to produce high-frequency transducers capable of high-resolution FUS using lithium niobate.     

Piezo-polymer transducers for ultrasonic imaging in air

Airborne polyvinylidenefluoride transducers have been designed for robotic applications in air. Characteristics of transducer prototypes are: working frequencies from 61 kHz to 86 kHz, quality factor Q from 4 to 6, and two-way insertion loss of about 90 dB. The small dimension, the lightness, and the low-cost fabrication technology allow the development of arrays or matrices for ultrasonic imaging systems in air. In this work two different image reconstruction algorithms are proposed: the first carries out a combined spectral and aperture synthesis for detecting isolated scatterers with a spatial resolution of about 2 mm; the second is based on an accurate ranging algorithm with sub-millimeter resolution at distances up to 50 cm. Finally, this work's application to the reconstruction of three-dimensional object profiles is discussed.     

Design of advanced ultrasonic transducers for welding devices

A new high frequency ultrasonic transducer has been conceived, designed, prototyped, and tested. In the design phase, an advanced approach was used and established. The method is based on an initial design estimate obtained with finite element method (FEM) simulations. The simulated ultrasonic transducers and resonators are then built and characterized experimentally through laser interferometry and electrical resonance spectra. The comparison of simulation results with experimental data allows the parameters of the FEM models to be adjusted and optimized. The achieved FEM simulations exhibit a remarkably high predictive potential and allow full control of the vibration behavior of the transducer. The new transducer is mounted on a wire bonder with a flange whose special geometry was calculated by means of FEM simulations. This flange allows the transducer to be attached on the wire bonder, not only in longitudinal nodes, but also in radial nodes of the ultrasonic field excited in the horn. This leads to a total decoupling of the transducer to the wire bonder, which has not been achieved so far. The new approach to mount ultrasonic transducers on a welding device is of major importance, not only for wire bonding, but also for all high power ultrasound applications and has been patented