共查询到18条相似文献,搜索用时 234 毫秒
1.
InAs/GaSb II类超晶格探测器是近年来国际上发展迅速的红外探测器,其优越性表现在高量子效率和高工作温度,以及良好的均匀性和较低的暗电流密度,因而受到广泛关注。报道了InAs/GaSb超晶格中波材料的分子束外延生长和器件性能。通过优化分子束外延生长工艺,包括生长温度和快门顺序等,获得了具原子级表面平整的中波InAs/GaSb超晶格材料,X射线衍射零级峰的双晶半峰宽为28.8,晶格失配a/a=1.510-4。研制的p?鄄i?鄄n单元探测器在77 K温度下电流响应率达到0.48 A/W,黑体探测率为4.541010 cmHz1/2W,峰值探测率达到1.751011 cmHz1/2W。 相似文献
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基于N-on-P结构的背照射延伸波长640×1线列InGaAs探测器 总被引:1,自引:0,他引:1
在N-on-P型In0.78Al0.22As/In0.78Ga0.22As外延材料上,采用感应耦合等离子体(ICP)刻蚀技术制备了背照射640×1线列InGaAs探测器芯片,研究了探测器光电性能.结果表明,室温下单元器件响应截止波长和峰值波长分别为2.36μm和1.92μm,平均优值因子(R0A)为16.0Ω.cm2,峰值量子效率达到了37.5%;在1 ms积分时间下焦平面探测器平均峰值探测率达到了2.01×1011 cmHz1/2/W,响应非均匀性为8.77%,盲元率约为0.6%. 相似文献
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ZHU Yao-Ming LI Yong-Fu LI Xue TANG Heng-Jing SHAO Xiu-Mei CHEN Yu DENG Hong-Hai WEI Peng ZHANG Yong-Gang GONG Hai-Mei 《红外与毫米波学报》2012,31(1)
在N-on-P型In0.78Al0.22As/In0.78Ga0.22As外延材料上,采用感应耦合等离子体(ICP)刻蚀技术制备了背照射640×1线列InGaAs探测器芯片,研究了探测器光电性能.结果表明,室温下单元器件响应截止波长和峰值波长分别为2.36 μm和1.92 μm,平均优值因子(R0A)为16.0Ω·cm2,峰值量子效率达到了37.5%;在1 ms积分时间下焦平面探测器平均峰值探测率达到了2.01×1011 cmHz1/2/W,响应非均匀性为8.77%,盲元率约为0.6%. 相似文献
4.
报道了50%截止波长为12.5μm的InAs/GaSb Ⅱ类超晶格长波红外探测器材料及单元器件.实验采用分子束外延技术在GaSb衬底上生长超晶格材料.吸收区结构为15ML(InAs)/7ML(GaSb),器件采用PBIN的多层异质结构以抑制长波器件暗电流.在77K温度下测试了单元器件的电流-电压(I-v)特性,响应光谱和黑体响应.在该温度下,光敏元大小为100μm×100μm的单元探测器RmaxA为2.5Ωcm2,器件的电流响应率为1.29A/W,黑体响应率为2.1×109cmHz12/W,11μm处量子效率为14.3%.采用四种暗电流机制对器件反向偏压下的暗电流密度曲线进行了拟合分析,结果表明起主导作用的暗电流机制为产生复合电流. 相似文献
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InAs/GaSb超晶格材料已经成为了第三代红外焦平面探测器的优选材料。开展了InAs/GaSb二类超晶格中/短波双色焦平面探测器器件结构设计、材料外延、芯片制备,对钝化方法进行了研究,制备出性能优良的320256双色焦平面探测器。首先以双色叠层背靠背二极管电压选择结构作为基本结构,设计了中/短波双色芯片结构,然后采用分子束外延技术生长出结构完整、表面平整、低缺陷密度的PNP结构超晶格材料。采用硫化与SiO2复合钝化方法,最终制备的器件在77 K下中波二极管的RA值达到13.6 kcm2,短波达到538 kcm2。光谱响应特性表明短波响应波段为1.7~3 m,中波为3~5 m。双色峰值探测率达到中波3.71011 cmHz1/2W-1以上,短波2.21011 cmHz1/2W-1以上。响应非均匀性中波为9.9%,短波为9.7%。中波有效像元率为98.46%,短波为98.06%。 相似文献
6.
采用闭管扩散的方法成功研制了截止波长2.2 μm的平面型延伸波长InGaAs探测器芯片。在分子束外延法(MBE)生长的In0.75Al0.25As/ In0.75Ga0.25As/ In0.75Al0.25As外延材料上,采用砷化锌作为扩散掺杂源、SiNx作为扩散掩膜层,实现了扩散成结。分析了扩散结深和载流子侧向收集宽度、I-V特性、光谱响应特性和探测率,结果表明:150 K温度下,器件暗电流密度0.69 nA/cm2@-10 mV,响应截止波长和峰值波长分别为2.12 μm和1.97 μm,峰值响应率为1.29 A/W,峰值量子效率达82%,峰值探测率为1.01×1012 cmHz1/2/W。这些结果对后续进一步优化平面型延伸波长InGaAs焦平面探测器有重要的指导意义。 相似文献
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《红外技术》2016,(1):1-5
In P/In0.53Ga0.47As短波红外探测器是一种高性能的近室温工作器件,从200 K到室温下都能获得较好的器件性能,从而大大降低了对制冷的要求。为了充分利用目标在可见光和短波波段的光谱信息,通过特殊的材料结构设计和器件背减工艺,成功实现了320×256In P/In Ga As宽光谱红外探测器,能够同时对可见光和短波红外响应,并从77 K到263 K工作温度下实现了对人脸、计算机及室外2.3 km处的景物成像。测试样管平均峰值探测率为2×1012 cm Hz1/2/W,光谱响应为0.6~1.7μm,光谱响应测试和成像结果同时验证了In P/In Ga As宽光谱探测器对可见光信号的探测。相比标准的In P/In0.53Ga0.47As短波探测器,In P/In Ga As宽光谱探测器显示了可见/短波双波段探测的效果,大大丰富了探测目标的信息量,可显著提升对目标的识别率。 相似文献
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报道了128×128元InAs/GaSb Ⅱ类超晶格红外焦平面阵列探测器的研究成果.实验采用分子束外延技术在GaSb衬底上生长超晶格材料.红外吸收区结构为13 ML(InAs)/9 ML(GaSb),器件采用PIN结构,焦平面阵列光敏元大小为40 μm×40μm.通过台面形成、侧边钝化和金属电极生长,以及与读出电路互连等工艺,得到了128×128面阵长波焦平面探测器.在77 K时测试,器件的100%截止波长为8μm,峰值探测率6.0×109 cmHz1/2 W-1.经红外焦平面成像测试,探测器可得到较为清晰的成像. 相似文献
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报道了128×128元InAs/GaSb Ⅱ类超晶格红外焦平面阵列探测器的研究成果.实验采用分子束外延技术在GaSb衬底上生长超晶格材料.红外吸收区结构为13 ML(InAs)/9 ML(GaSb),器件采用PIN结构,焦平面阵列光敏元大小为40μm×40μm.通过台面形成、侧边钝化和金属电极生长,以及与读出电路互连等工艺,得到了128×128面阵长波焦平面探测器.在77 K时测试,器件的100%截止波长为8μm,峰值探测率6.0×109cmHz1/2W-1.经红外焦平面成像测试,探测器可得到较为清晰的成像. 相似文献
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《Photonics Technology Letters, IEEE》2009,21(11):721-723
12.
《Quantum Electronics, IEEE Journal of》2005,41(6):872-878
We report the growth and fabrication of bound-to-bound In/sub 0.53/Ga/sub 0.47/As-InP quantum-well infrared photodetectors using metal-organic vapor phase epitaxy. These detectors have a peak detection wavelength of 8.5 /spl mu/m. The peak responsivities are extremely large with R/sub pk/=6.9 A/W at bias voltage V/sub b/=3.4 V and temperature T=10 K. These large responsivities arise from large detector gain that was found to be g/sub n/=82 at V/sub b/=3.8 V from dark current noise measurements at T=77 K and g/sub p/=18.4 at V/sub b/=3.4 V from photoresponse data at T=10 K. The background-limited temperature with F/1.2 optics is T/sub BLIP/=65 K for 0相似文献
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对一种响应近红外的新型量子光电探测器特性进行测试和分析,给出了2×8探测器阵列和读出电路的对接测试结果,设计初步的成像系统采集显示焦平面输出。探测器有一个-0.8V的阈值电压,偏压大于阈值电压后器件响应率远大于1A/W,且响应率随光照功率增大减小。2×8探测器阵列与设计的读出电路通过Si基板对接后在77K条件测试,读出电路的线性度好于99.5%,信噪比达到67dB,探测器偏压为-1.5V,积分时间为200μs时探测器率达到1.38×1010cmHz1/2/W,达到实际应用的要求。设计了数据采集卡和成像系统验证了对接样品的实用性。 相似文献
15.
We report the growth by low-pressure metal-organic chemical vapor deposition, fabrication, and characterization of ten-layer In/sub 0.5/Ga/sub 0.5/As/GaAs quantum dot infrared photodetectors. Normal incidence photoresponse of the detector was obtained at 5.9 /spl mu/m. The 77-K peak responsivity was 5.6 mA/W with the detectivity D/sup */ of 1.2/spl times/10/sup 9/ cm/spl middot/Hz/sup 1/2//W at the bias of 0.4 V. 相似文献
16.
Mao-Chieh Hsu Yao-Fong Hsu Shih-Yan Lin Chieh-Hsiung Kuan 《Electron Devices, IEEE Transactions on》2000,47(5):944-948
In this paper, we investigate the performance and characterization of a 15-period superlattice embedded between two thick AlGaAs barriers. The structure can operate at low bias voltage with less power consumption for 8-10 μm long-wavelength infrared detection. In our design, one barrier is used to reduce the dark current and the other one is designed to enhance the collection efficiency of photoelectrons at the collector contact. The fabricated detector can be operated at a bias voltage lower than 0.1 V and exhibits a pronounced photovoltaic response. The spectral response shows voltage dependence around 0 V. At high bias voltage (>25 mV) the spectral lineshape is independent of bias and is around 8-10 μm with peak wavelength at 9.3 μm. At lower bias voltage the response is shifted toward shorter wavelength range. The peak responsivity was found to be 12 mA/W at λp =8.7 μm and zero bias and 85 mA/W at λp=9.3 μm and 0.1 V. Background limitation can be achieved up to 65 K with bias voltage less than 0.1 V. The measured noise power spectral density of the dark current at 77 K shows the characteristics of full shot noise rather than generation-recombination noise. The peak detectivity is determined to be D*=3.5×109 cm√(Hz)/W at 77 K and 0.1 V. In comparison with a conventional 30-period QWIP, our detector has the advantages of better performance at low bias voltages with lower power consumption and a tunable feature of spectral range 相似文献
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Bhattacharya P. Xiaohua Su Ariyawansa G. Perera A.G.U. 《Proceedings of the IEEE. Institute of Electrical and Electronics Engineers》2007,95(9):1828-1837
Quantum-dot infrared photodetectors have emerged as attractive devices for sensing long wavelength radiation. Their principle of operation is based on absorption of radiation via intersublevel transitions in quantum dots. Multiple layers of self-organized ln(Ga)As/Ga(Al)As quantum dots are generally incorporated in the active region of these devices. Three-dimensional quantum confinement allows normal incidence operation. This paper describes a novel variation in the design of these devices which allows a significant reduction of the dark current, high temperature operation and extension of operation to terahertz frequencies. The principle of operation and operating characteristics of this device - the tunnel quantum-dot intersublevel detector - are described. Operation is demonstrated from 6-80 mum at temperatures up to 300 K with acceptable values of peak responsivity (0.1-0.75 A/W) and specific detectivity (107-1011cm ldr Hz1/2/W-1 , depending on temperature and wavelength). 相似文献
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Shiang-Feng Tang Shih-Yen Lin Si-Chen Lee 《Electron Devices, IEEE Transactions on》2002,49(8):1341-1347
The ten stacked self-assembled InAs/GaAs quantum dot infrared photodetectors (QDIP) with different Al/sub 0.3/Ga/sub 0.7/As barrier widths and growth temperatures were prepared. Asymmetric current-voltage (I-V) characteristics and 2/spl sim/7.5 /spl mu/m detection window were observed. Peak responsivity of 84 mA/W at -0.4 V and peak specific detectivity of 2.5/spl times/10/sup 9/ cm-Hz/sup 1/2//W at zero bias were observed at 50 K. The characteristics of polarization insensitivity over the incident light and the high background photocurrent suggest that the self-assembled QDIP can be operated at higher temperature (/spl sim/250 K) under normal incidence condition in contrast to quantum well infrared photodetector (QWIP). 相似文献