基于纳米压印技术的GaAs纳米柱阵列ICP刻蚀工艺及其光学特性研究

近年来,半导体纳米阵列结构材料因能激发光学共振及其优良的光电性能在光电子器件领域被广泛的应用。本文采用纳米压印技术制备具有一定直径和周期的SiO₂纳米柱作为掩膜层,采用ICP刻蚀制备了GaAs纳米柱阵列,重点研究了不同刻蚀条件处理工艺对纳米柱阵列形貌的影响,与表面无纳米结构的薄膜材料相比,其反射率得到明显的降低且最低约为3%,因此纳米阵列结构能有效的增强光吸收,具有极其优良的光电性能。     

基于非对称纳米棒二聚体阵列的多重表面晶格共振

贵金属纳米颗粒阵列结构中的多重表面晶格共振能够在多个波段同时抑制体系辐射损耗,增大共振品质因子和局域场强,这对多波长相关微纳光子器件的设计具有重要意义,如何实现对多重表面晶格共振的有效操控是实现这些应用的关键。提出采用非对称纳米棒二聚体阵列结构产生和调控多重表面晶格共振。由于纳米棒结构的各向异性,其构成的二聚体结构具有丰富的局域共振响应,并且依赖于二聚体的排列方式,可以进一步调整局域共振,故由非对称纳米棒二聚体阵列可以产生并实现对多重表面晶格共振的有效操控。研究结果表明,由端对端和边对边排列的非对称纳米棒二聚体阵列结构能够激发起不同的表面晶格共振,其共振峰位、品质因子等可以通过改变两个正交方向上的周期实现有效调控,这对基于多重表面晶格共振的微纳光子器件的设计具有重要的应用价值。     

利用球型微纳米颗粒结构表面减小硅基太阳能电池的光反射

为了在理想的光频范围内扩展硅太阳能电池的低反射特性,设计了一种由球型微纳米颗粒周期排列构成的光学微结构。利用球型微纳米颗粒结构表面良好的抗反射特性,扩展硅基太阳能电池的超低反射特性。首先采用Mie散射理论研究了单个球型硅颗粒的散射特性;进而使用MEEP仿真软件通过控制变量法分析了多个颗粒构成的周期性二维光学微结构的光反射特性,分析了球型微纳米颗粒的周期数、半径、间距对反射率的影响。结果表明:合理选择球形颗粒的半径、间距以及周期数构成合适的周期性二维光学微结构,可以在理想的光频范围内获得超低反射特性。     

超快激光制备金属表面可控微纳二级结构及其功能化

自然界中存在大量具有特殊微纳结构的多尺度表面,如荷叶、水稻叶、玫瑰花瓣、壁虎脚趾、鲨鱼皮、蝴蝶翅膀、昆虫复眼等,这些表面具有超疏水、超亲水、结构色、高敏感性、生物相容性等多种神奇功能。如何人工制备出仿生微纳米结构,从而实现师法自然和超越自然的目标,是材料与制造领域的重大课题之一。超快激光加工是灵活制备微纳米结构的可靠手段,但衍射极限制约了其纳米结构制备能力,且制备效率低下。本团队在过去的10多年中,在拓展超快激光微米与纳米结构制备能力以及仿生微纳结构的功能化方面开展了系统研究,发展了一系列超快激光微纳结构制备与双级精确调控新方法,探索了超快激光制备的微纳结构表面在超疏水、高抗反射、高敏感性和生物医学检测等领域的创新应用。超快激光制备形态多样的微纳米结构并实现仿生功能化是一个富有吸引力的研究方向,但仍然面临着诸如突破衍射极限以实现1～100 nm典型纳米结构的制备、功能化微纳结构的设计与制备以及大面积微纳结构的高效制备等挑战。本文为《清华大学建校110周年之光耀清华》专辑而撰写,旨在总结过去、面向未来,与本领域同仁一起交流探讨,共同推进本研究领域的发展。     

声子极化激元干涉条纹周期的精密测量研究EI北大核心CSCD

二维材料由于其独特的物理化学性质,对纳米光子学及光电子学的应用与发展具有重要研究价值。特别是二维材料中声子与光子耦合激发产生的声子极化激元高度局域在纳米尺度,在片上光子学的光学操控和能量传输等前沿研究领域具有极大的应用潜力。同时,光电器件制造进入纳米节点,器件应用对材料表征精度具有纳米级的要求。然而目前对声子极化激元特性分析的关键之一在于测量其干涉条纹周期,测量结果准确性依赖于仪器设备校准。因此,为实现对声子极化激元干涉条纹的精确测量,文中提出构建铬原子自溯源型光栅与二维材料的复合结构,分析金属光栅结构周期性变化对二维材料的声子极化激元耦合增强与调制作用,以及基于该原理实现对声子极化激元干涉条纹周期的精密测量。研究实现了测量干涉条纹周期为(261.01±0.34)nm的亚纳米级高精度测量,相比具有不确定度为4 nm的传统拟合测量方式具有可溯源的计量精度,同时实现了对测量仪器的亚纳米级精密校准。自溯源光栅天然溯源至基本自然常数的特性使得测量结果具备极好的准确性和可靠性,为二维材料在微纳光子学器件领域的应用提供了保障。     

表面等离子体近场光刻制作二维纳米阵列

重点介绍了采用表面等离子体增强效应的近场光刻制作亚微米结构的二维点阵图形的技术。在研究亚波长纳米孔阵列超透射现象基本原理的基础上,应用有限差分时域(FDTD)算法数值模拟了周期性孔阵列的电场强度分布,讨论了纳米孔阵列所激发的表面等离子体激元提高近场光刻分辨率的微观机制。以金膜上的亚波长纳米孔阵列作为掩模版进行了接触式曝光实验,实际制作出了光刻胶的亚波长二维点阵图形,点阵图形的直径约为300nm,周期约为700nm。这种新型的微纳加工技术具有应用简单、成本低等特点,在大规模二维纳米点阵的制作方面有一定的应用潜力。     

二维MoS_2纳米材料的制备及在光催化中的应用进展

二硫化钼(MoS2)是一种类石墨烯过渡金属二硫化物。单层MoS2凭借其超薄的层状结构和适宜的禁带宽度(1.9eV),在纳米电子学,光电子学和微纳器件等领域备受关注。此外,凭借丰富的边缘结构、巨大的比表面积、良好的化学稳定性和可调控禁带宽度,二维MoS2逐渐成为新型光催化材料的研究热点。综合近年来国内外关于二维MoS2在光催化领域的研究成果,详细归纳并梳理了二维MoS2的结构、性能及制备方法。特别关注了二维MoS2与其他半导体材料结合形成二元或三元光催化复合体系在光催化水解制氢和光催化降解有机污染物两方面的最新研究进展。最后,对二维MoS2在光催化领域的研究前景进行了展望。     

Au纳米颗粒的形状和尺寸对表面等离子体的影响

通过调控Au纳米颗粒的形状和尺寸,研究了Au纳米颗粒的形状和尺寸与表面等离子体之间的关系。通过直流磁控溅射的方法在外延片上溅射Au薄膜,并采用快速热退火和常规热退火两种方式对其进行热退火,制备出Au纳米颗粒。使用不同热退火方式、不同热退火温度及不同Au薄膜厚度来改变Au纳米颗粒的形状和尺寸,并对Au纳米颗粒的表面形貌及它的消光谱进行了分析,对比了不同形貌的Au纳米颗粒对表面等离子体共振特性的影响。实验结果表明,使用普通热退火制备的Au纳米颗粒形状接近球体,而使用快速热退火得到的Au纳米颗粒的形状更接近棒体;随着热退火温度的升高,表面等离子体的共振波长发生红移;随着Au薄膜厚度的增加,表面等离子体的共振波长也发生红移。     

微纳结构非线性光学及其全光调控研究进展

随着微纳光子学的提出与发展,在纳米尺度上操纵和控制光子,发展体积更小、速度更快的光子器件,实现全光集成,已成为国际研究前沿和新技术领域竞争的热点。其中以光子晶体、表面等离激元微纳结构为代表的微纳光子学研究及应用在国际上得到了广泛的重视和蓬勃发展,特别是其微纳结构的非线性光学、全光调控与器件的应用研究。本文主要综述了微纳结构增强的光学非线性及其非线性全光调控研究进展。     

微纳4D打印研究进展

微纳4D打印是微纳3D打印和智能响应材料的结合,在三维静态结构的基础上增加了材料在刺激响应下变化的新维度,为复杂微纳结构的动态调控开辟了新的路径。具有刺激响应能力的动态微纳器件在微创医学、柔性电子、光场调控等领域都有广阔的应用前景,是微纳领域的研究热点。综述了近年来微纳4D打印领域重要的研究进展和代表性的研究成果,介绍了用于微纳4D打印的典型加工技术和材料体系,系统总结了近年来磁场响应、溶剂响应、pH响应、温度响应、光响应等方面的工作,介绍了微纳4D打印技术在生物医学、微机器人等领域的应用现状和发展趋势。最后讨论分析了微纳4D打印技术当前所面临的挑战和下一步研究的重点方向。     

介孔氧化铝组装金纳米颗粒阵列及其光学性质

采用真空蒸镀的方法在多孔氧化铝模板表面得到薄金膜,随后在真空管式炉中进行热处理,热处理中发生的热去湿过程使得金膜在多孔氧化铝表面形成有序的金纳米颗粒阵列。同时还研究了多孔氧化铝模板制备过程中二次氧化的作用,发现一次氧化对二次氧化进行具有一定指导作用;另外,研究了扩孔时间对模板孔径的影响,一定条件下,扩孔时间与孔径成正比例关系;最后研究了镀膜厚度对金纳米颗粒的影响,结果中可以看到,金膜的厚度直接影响金纳米颗粒阵列的形成。最后在分光光度计上的光学测量吸收光谱的结果中,出现了表面等离子体作用引起的很强的吸收峰。     

Recent Progress on Metal-Based Nanomaterials: Fabrications,Optical Properties,and Applications in Ultrafast Photonics

Nanomaterials have demonstrated excellent mechanical, thermal, optical, and electrical properties in various fields, including 1D carbon nanotubes, as well as 2D materials starting from graphene. Metal-based nanomaterials, mainly divided into metal and metal oxide nanoparticles, also gradually come into the sight of ultrafast photonics applications due to the outstanding optical properties. The optical properties of metal nanoparticles can be enhanced by the interaction between conduction electrons with electric fields that is called surface plasmon resonance. As for metal oxide nanoparticles, optical properties are closely related to bandgap structures. When it comes to transition metal oxides, other phenomena also play important roles in optical absorption such as spin inversion and excitons of iron. Moreover, preparation methods of materials are also crucial for their properties and further applications. Therefore, in this review, commonly used physical and chemical fabrication methods for metal-based nanomaterials are first introduced. Then the optical properties of typical metal and metal oxide nanoparticles are discussed specifically. In addition, the applications of metal-based nanomaterials in ultrafast lasers based on mode-locked and Q-switched techniques are also summarized. Finally, a summary and outlook toward the synthesis, optical properties, and applications in ultrafast photonics of metal-based nanomaterials are presented.     

Localization of Au Nanoclusters on Layered Double Hydroxides Nanosheets: Confinement‐Induced Emission Enhancement and Temperature‐Responsive Luminescence

Gold nanoclusters (Au NCs) stand for a new type of fluorescent nanomaterials with outstanding optical properties due to their discrete electronic energy and direct electron transition. However, relative low quantum yield (QY) of Au NCs in aqueous or solid state has limited their photofunctional applications. To improve the fluorescent performances of Au NCs and find an effective approach for the fabrication of Au NCs‐based films, in this work, Au NCs are localized onto 2D layered double hydroxides (LDHs) nanosheets via a layer‐by‐layer assembly process; the as‐fabricated (Au NCs/LDH)_n ultrathin films (UTFs) show an ordered and dense immobilization of Au NCs. The localization and confinement effects imposed by LDH nanosheets induce significantly increased emissive Au(I) units as confirmed by X‐ray photoelectron spectroscopy and periodic density functional theoretical simulation, which further results in promoted QY (from 2.69% to 14.11%) and prolonged fluorescence lifetime (from 1.84 µs to 14.67 µs). Moreover, the ordered (Au NCs/LDH)_n UTFs exhibit well‐defined temperature‐dependent photoluminescence (PL) and electrochemiluminescence (ECL) responses. Therefore, this work supplies a facile strategy to achieve the immobilization of Au NCs and obtain Au NCs‐based thin films with high luminescent properties, which have potential applications in PL and ECL temperature sensors.     

Fabrication of metamaterials in the optical spectral range

Recently, the fabrication and optimization of nano-hole arrays in multi-layers has attracted much attention for their interesting applications in nano-optics and biosensing. In particular nano-hole arrays in metal-dielectric-metal stacks, also known as “fish-net” type structures, actually are the best candidates to accomplish some suggestive physical phenomena like negative refractive index, super-lensing and invisibility cloaks in the optical spectral range. Here, we report our preliminary results on the nanofabrication of “fish-net” type Au/dielectric/Au metamaterial stacks. Nano-hole arrays have been realized on Au (30 nm)-dielectric (50 nm)-Au (30 nm)/ITO stacks by means of direct ion milling with FIB using a FEI Nova 600i instrument. Finite element method (FEM) simulations were used to design the structures and to foresee their optical behavior.     

石墨烯-Au纳米复合体系的构筑及其光限幅效应

首先对Au纳米颗粒进行巯基修饰,再对其采用表面活性剂十六烷基三甲基溴化铵(CTAB)进行二级修饰,并将其自组装负载于石墨烯纳米毯(GNSs)上。通过紫外-可见吸收光谱证明Au纳米颗粒在石墨烯纳米毯(GNSs)上的成功负载。通过透射电子显微镜探明其微观结构,表明Au纳米颗粒在石墨烯纳米毯上呈现局部规整排列,其原因与石墨烯纳米毯自身的平整结构有关。采用开孔Z-扫描技术研究了负载Au纳米颗粒的石墨烯纳米毯的非线性光限幅性能,结果表明:其光限幅起始阈值明显下降,在低入射能量时即产生光限幅特性。并发现入射光强增大时非线性散射增强,说明非线性散射是产生复合体系的非线性光限幅效应的重要机理。     

Light Management with Patterned Micro‐ and Nanostructure Arrays for Photocatalysis,Photovoltaics, and Optoelectronic and Optical Devices

The design and fabrication of patterned micro‐ and nanostructure arrays have been demonstrated to be a powerful strategy toward efficient light management, which is of vital importance to a variety of photon‐related applications such as photocatalysis, photovoltaics, optoelectronic devices, and optical devices. Tunable optical reflectance, scattering, transmittance, and absorption can be readily achieved by adjusting the characteristics of the primary units in the micro‐/nanoarrays and the spatial patterns of the aligned units, thus realizing controllable light–matter interactions. This review describes various light management strategies based on patterned micro‐/nanoarrays, such as scattering enhancement, antireflection, resonances, photonic crystals, and plasmonic structures. Furthermore, recent advances in the applications of patterned micro‐/nanoarrays in photoelectrochemical water splitting, solar cells, photodetectors, light emitting diodes, lasers, color display, microlens arrays, and photonic crystal sensors are summarized, with particular attention paid to the light management mechanisms and the relationship between the structure and device performance. Lastly, the prospects and existing challenges facing the development of the photon‐related applications based on patterned micro‐/nanoarrays are discussed.     

Optical sensor for temperature measurement using bimetallic concept

In this paper, we report an optical fiber sensor for measuring temperature based on bimetallic concept. The sensor is designed by following the basic principle of Fabry–Perot interferometer and theoretical detail of the sensor has been outlined here with a numerical study. An important feature of the proposed sensor is that the fabrication will be done on a commercial multimode optical fiber. The Micro-Electro-Mechanical Systems (MEMS) based fabrication process could be performed directly on a multimode optical fiber end face which will eliminate the need for adhesive in packaging. The sensor could be fabricated as sensor arrays for micro level applications. The potential application of the proposed optical sensor includes biomedical applications, nano research, microfluidics, and other MEMS devices.     

Gold nanohole arrays for biochemical sensing fabricated by soft UV nanoimprint lithography

We report on results of fabrication and optical characterisation of sub-250 nm periodic gold nanohole arrays on glass by using UV nanoimprint lithography (UV-NIL) combined with both reactive ion etching (RIE) and Cr/Au lift-off processes. The transmission spectra of the fabricated nanohole gratings were measured for different hole diameters and periods. We also show preliminary results of chemical sensing after surface modification of the gold hole arrays. In agreement with the theoretical prediction, we found that any change in the dielectric index of the surrounding environment of the metallic array produces a transmission peak red shift.     

2D Nanomaterial Arrays for Electronics and Optoelectronics

Two‐dimensional (2D) materials, benefitting from their unique planar structure and various appealing electronic properties, have attracted much attention for novel electronic and optoelectronic applications. As a basis for practical devices, the study of micro/nano‐2D material arrays based on coupling effects and synergistic effects is critical to the functionalization and integration of 2D materials. Moreover, micro/nano‐2D material arrays are compatible with traditional complementary metal oxide semiconductor (CMOS) electronics, catering well to high‐integration, high‐sensitivity, and low‐cost sensing and imaging systems. This review presents some recent studies on 2D material arrays in sequence from their novel preparations to high‐integration applications as well as explorations on dimension tuning. A first focus is on various typical fabrication methods for 2D material arrays, including photolithography, 2D printing, seeded growth, van der Waals epitaxial growth, and self‐assembly. Then, the applications of 2D material arrays, such as field effect transistors, photodetectors, pressure sensors, as well as flexible electronic devices of photodetectors and strain sensors, are elaborately introduced. Furthermore, the recent burgeoning exploration of mixed‐dimensional heterostructure arrays including 0D/2D, 1D/2D, and 3D/2D is discussed. Ultimately, conclusions and an outlook based on the current developments in this promising field are presented.     

高填充因子微透镜阵列的快速制备及特性分析

微透镜阵列是一种被广泛应用于光信息处理、光传感、光计算、光通信和高灵敏度成像等领域的精密光学元器件之一。通过一些先进的制造技术已经可以制造出不同几何形状、轮廓和光学特性的微透镜阵列。然而,由于三维微制造工艺的难度,使得高填充因子微透镜阵列中的微透镜很难实现紧密排列。提出了一种快速、低成本的微流体操纵技术,用于制备高填充因子微透镜阵列,且对其制备工艺进行了初步的演示。这种易于操作的制造技术适用于微透镜阵列的大批量生产,极大地提高了生产效率。通过预先制备出的三种不同尺寸(微柱直径分别为300、500、700 μm)的微柱,实现了与其对应不同形状和尺寸的微透镜阵列的制备,并搭建了一套光学成像系统以对这些微透镜阵列进行成像性能的评估。主要对微透镜阵列的焦距、成像精度和每个微透镜阵列中各个微透镜子单元成像的均一性进行测试,利用所提出的微流体操控技术制备的微透镜阵列具有良好的成像性能,有望能够被应用到三维成像、光均匀化等诸多应用中。